Patents
Sitemap › H01 - Basic electric elements › H01L - Semiconductor devices; Electric solid state devices not otherwise provided for › H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
Patents for H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof (658,974)
07/2003
07/03/2003US20030124815 Cleaving process to fabricate multilayered substrates using low implantation doses
07/03/2003US20030124814 Wiring substrate used for resin molding and process of manufacturing semiconductor device using the wiring substrate
07/03/2003US20030124813 Method of fabricating shallow trench isolation
07/03/2003US20030124812 Method for fabricating capacitor in semiconductor device and capacitor fabricated thereby
07/03/2003US20030124811 Semiconductor device and manufacturing method thereof
07/03/2003US20030124809 Method of forming an oxide film with resistance to erosion caused by stripper
07/03/2003US20030124808 System for reducing silicon-consumption through selective deposition
07/03/2003US20030124807 Versatile system for forming uniform wafer surfaces
07/03/2003US20030124806 Method of fabricating semiconductor device
07/03/2003US20030124805 High aspect ratio PBL SiN barrier formation
07/03/2003US20030124804 Method for fabricating a semiconductor device
07/03/2003US20030124803 Non-volatile semiconductor memory and process of fabricating the same
07/03/2003US20030124801 Method for fabricating flash memory cell
07/03/2003US20030124800 Method of forming a floating gate in a flash memory device
07/03/2003US20030124799 Formation of conductive rugged silicon
07/03/2003US20030124798 Method of manufacturing a semiconductor device using a two-step deposition process
07/03/2003US20030124797 Method for fabricating a semiconductor device
07/03/2003US20030124796 Methods of fabricating cylinder-type capacitors for semiconductor devices using a hard mask and a mold layer
07/03/2003US20030124795 Method of forming a polysilicon to polysilicon capacitor
07/03/2003US20030124794 Electronic component incorporating an integrated circuit and planar microcapacitor
07/03/2003US20030124793 Method of manufacturing semiconductor device
07/03/2003US20030124792 Methods for fabricating semiconductor devices having capacitors
07/03/2003US20030124791 Detection of AIOx ears for process control in FeRAM processing
07/03/2003US20030124790 Versatile system for PMOS I/O transistor integration
07/03/2003US20030124788 DRAM devices, and methods of forming DRAM devices
07/03/2003US20030124787 Method for forming a plug metal layer
07/03/2003US20030124785 Supercritical fluid-assisted deposition of materials on semiconductor substrates
07/03/2003US20030124783 System for creating ultra-shallow dopant profiles
07/03/2003US20030124782 Insulated gate semiconductor device and process for fabricating the same
07/03/2003US20030124781 Method for manufacturing thin film transistors
07/03/2003US20030124780 Thermally stable nickel germanosilicide formed on SiGe
07/03/2003US20030124779 Fabricating method of polycrystalline silicon thin film transistor
07/03/2003US20030124778 Thin film transistor device and method of manufacturing the same, and liquid crystal display device
07/03/2003US20030124777 Method of fabricating mask ROM
07/03/2003US20030124776 Method for manufacturing semiconductor device
07/03/2003US20030124775 Semiconductor device, semiconductor device manufacturing method, circuit board, and electronic device
07/03/2003US20030124772 Apparatus for and method of packaging semiconductor devices
07/03/2003US20030124771 Semiconductor wafer singulation method
07/03/2003US20030124770 Plastic molded type semiconductor device and fabrication process thereof
07/03/2003US20030124769 Insulative particles having a diameter smaller than a gap between adjacent conductors providing interconnection between the elements
07/03/2003US20030124766 Method for manufacturing stacked chip package
07/03/2003US20030124765 System and method for achieving planar alignment of a substrate during solder ball mounting for use in semiconductor fabrication
07/03/2003US20030124764 Film formation apparatus and film formation method and cleaning method
07/03/2003US20030124763 Colors only process to reduce package yield loss
07/03/2003US20030124762 Optical device and method of manufacturing the same, optical module, circuit board, and electronic instrument
07/03/2003US20030124760 Method for forming thin films of semiconductor devices
07/03/2003US20030124759 Photo mask and semiconductor device manufacturing method
07/03/2003US20030124758 Insulating micro-structure and method of manufacturing same
07/03/2003US20030124755 Method of producing electrooptical device and method of producing driving substrate for driving electrooptical device
07/03/2003US20030124751 Semiconductor memory and manufacturing method of the same
07/03/2003US20030124750 Semiconductor fuse covering
07/03/2003US20030124749 Method for inspecting a pattern defect process
07/03/2003US20030124748 Method of forming an FeRAM having a multi-layer hard mask and patterning thereof
07/03/2003US20030124747 Method for forming ruthenium storage node of semiconductor device
07/03/2003US20030124470 A film, such as a layer of photoresist, is disposed on a first surface of a substrate while a second surface is exposed to a liquid bath. The liquid bath is maintained at a pre-selected temperature. Exposure of the substrate to the liquid bath
07/03/2003US20030124469 Method and apparatus for uniformly baking substrates such as photomasks
07/03/2003US20030124465 Method for fabricating semiconductor device capable of covering facet on plug
07/03/2003US20030124464 Method for forming via and contact holes with deep UV photoresist
07/03/2003US20030124463 An optical exposure method and a device are used for forming patterns on a printed board wiring or semiconductor board. A single exposing region of a surface to be exposed is irradiated with a plurality of optical beams having different
07/03/2003US20030124457 Organic metal precursor for use in forming metal containing patterned films
07/03/2003US20030124456 Negative resist composition
07/03/2003US20030124442 Electron beam exposure method using variable backward scattering coefficient and computer-readable recording medium having thereof
07/03/2003US20030124440 Use on photomasks having increased durability and improved transmission uniformity and birefringence properties. The pellicle may be secured to the photomask using an adhesive or a slide rail system, or may be held in place using static
07/03/2003US20030124437 Exposure method and apparatus for producing a hologram mask and recording method using the hologram mask
07/03/2003US20030124394 Multilayer structure used especially as a material of high relative permittivity
07/03/2003US20030124393 Method for fabricating a III nitride film, substrate for epitaxial growth, III nitride film, epitaxial growth substrate for III nitride element and III nitride element
07/03/2003US20030124378 Fluxing underfill compositions
07/03/2003US20030124327 Hybrid substrate and method for fabricating the same
07/03/2003US20030124267 CVD method without using reaction gas at low deposition temperature; metal (particularly iridium, cobalt or rhodium) compound having a neutral ligand in addition to an anion; may be performed in the absence of oxygen or hydrogen
07/03/2003US20030124263 ULSI wiring and method of manufacturing the same
07/03/2003US20030124262 Depositing a refractory metal containing crystalline barrier layer that inhibits atomic migration on a metal layer by alternately introducing pulses of a metal-containing compound and pulses of a nitrogen- containing compound; seed layer
07/03/2003US20030124260 Printing a conductive organic material, such as polyethylenedioxythiophene, on the substrate; and curing to form the metal pattern on the substrate
07/03/2003US20030124259 Precursor compositions for the deposition of electrically conductive features
07/03/2003US20030124255 Layers are separately formed via a diffusion prevention layer with an insulating interlayer portion made of SiO2.
07/03/2003US20030124252 Method of forming thin ruthenium-containing layer
07/03/2003US20030124251 Process of forming thin film and precursor for chemical vapor deposition
07/03/2003US20030124249 Spin coating of a flat plate, such as an optical disc, using an inner guide member, which is placed in the hole, while the flat plate is placed on a stage such that the inner guide member is adjacent to an inner peripheral side
07/03/2003US20030124049 Catalytic reactor apparatus and method for generating high purity water vapor
07/03/2003US20030123992 Linear inductive plasma pump for process reactors
07/03/2003US20030123971 Substrate processing apparatus and substrate processing method
07/03/2003US20030123963 Bi-directional wafer transfer mechanism and method
07/03/2003US20030123958 Wafer handling apparatus and method
07/03/2003US20030123866 Bonding apparatus
07/03/2003US20030123779 Optical device, method of manufacturing the same, optical module, circuit board and electronic instrument
07/03/2003US20030123504 Optoelectronic devices and methods of production
07/03/2003US20030123316 Multi-port semiconductor memory device having reduced bitline voltage offset and method for arranging memory cells thereof
07/03/2003US20030123315 Semiconductor memory device, memory system and electronic instrument
07/03/2003US20030123308 Fast program to program verify method
07/03/2003US20030123307 Non-volatile memory device and a method of fabricating the same
07/03/2003US20030123305 Bit line landing pad and borderless contact on bit line stud with localized etch stop layer and manufacturing method thereof
07/03/2003US20030123296 Nonvolatile semiconductor memory device and data erase method therefor
07/03/2003US20030123294 Sensing circuit in a multi-level flash memory cell
07/03/2003US20030123293 Fast program to program verify method
07/03/2003US20030123292 Fast program to program verify method
07/03/2003US20030123291 Fast program to program verify method
07/03/2003US20030123290 Fast program to program verify method
07/03/2003US20030123285 Flash memory cell and method of manufacturing the same, and programming/erasing/reading method in the flash memory cell
07/03/2003US20030123283 Magnetic memory
07/03/2003US20030123282 Thermally-assisted switching of magnetic memory elements
07/03/2003US20030123273 Semiconductor device realized by using partial SOI technology
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