Patents
Sitemap › H01 - Basic electric elements › H01L - Semiconductor devices; Electric solid state devices not otherwise provided for › H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
Patents for H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof (658,974)
08/2003
08/14/2003WO2003067633A2 Programmable resistance memory element and method for making same
08/14/2003WO2003067631A2 Improved semiconductor stress buffer coating edge bead removal compositions and method for their use
08/14/2003WO2003067629A2 Band gap compensated hbt
08/14/2003WO2003067601A1 Magnetic storage unit using ferromagnetic tunnel junction element
08/14/2003WO2003067600A2 Antiferromagnetically stabilized pseudo spin valve for memory applications
08/14/2003WO2003067596A2 Semiconductor memory cell having a trench and a planar selection transistor and method for producing the same
08/14/2003WO2003067353A1 Processing device and method of maintaining the device
08/14/2003WO2003067333A1 Photo-sensitive composition
08/14/2003WO2003067332A2 Sulfonate derivatives and the use therof as latent acids
08/14/2003WO2003067308A1 Method for correction of oscillation-induced image defects in a lens
08/14/2003WO2003067304A1 Multi-faceted mirror
08/14/2003WO2003067271A2 Apparatus and method for dynamic diagnostic testing of integrated circuits
08/14/2003WO2003067183A2 Wireless substrate-like sensor
08/14/2003WO2003067182A1 Shearing interference measuring method and shearing interferometer, production method of projection optical system, projection optical system, and projection exposure system
08/14/2003WO2003066486A1 Substrate processing apparatus of transfer type
08/14/2003WO2003066284A1 Method and apparatus for chemical mechanical polishing with an eddy current monitoring system
08/14/2003WO2003066246A1 Capillary drying of substrates
08/14/2003WO2003066238A1 Coating device and coating method
08/14/2003WO2003065926A2 Wearable biomonitor with flexible thinned integrated circuit
08/14/2003WO2003052799A3 A method of forming differential spacers for individual optimization of n-channel and p-channel transistors
08/14/2003WO2003052792A3 Water carrier for semiconductor process tool
08/14/2003WO2003046922A3 Semiconductor arrangement comprising transistors based on organic semiconductors and non-volatile read-write memory cells
08/14/2003WO2003046920A3 Method for producing a memory cell of a memory cell field in a semiconductor memory
08/14/2003WO2003044834A3 Sonic transducers bonded with polymers and methods of making same for efficient sonic energy transfer
08/14/2003WO2003035541A3 Probe needle for testing semiconductor chips and method for producing said probe needle
08/14/2003WO2003032431A9 Switch circuit and method of switching radio frequency signals
08/14/2003WO2003032397A3 INSULTING GATE AlGaN/GaN HEMT
08/14/2003WO2003028104A3 Semiconductor memory with memory cells comprising a vertical selection transistor and method for production thereof
08/14/2003WO2003028093A3 Method for the generation of a soi substrate, vertical transistor and memory cell with vertical transistor
08/14/2003WO2003025978A3 Method for separating two joined layers of material
08/14/2003WO2003025977A3 Method for wrapped-gate mosfet
08/14/2003WO2003019652A3 Method for fixing an electrical element and a module with an electrical element fixed thus
08/14/2003WO2003017338A3 Wafer chuck with plunger
08/14/2003WO2003015130A3 Integrated system for oxide etching and metal liner deposition
08/14/2003WO2003007397A3 Solution influenced alignment
08/14/2003WO2003007347A3 Smif load port interface including smart port door
08/14/2003WO2002103785A3 Cmos process
08/14/2003WO2002064496A3 Method for forming microelectronic spring structures on a substrate
08/14/2003WO2002063677A8 Formation of a tantalum-nitride layer
08/14/2003WO2002058162A3 Metamorphic long wavelength high-speed photodiode
08/14/2003WO2002052637A3 Method and apparatus for monitoring a semiconductor wafer during a spin drying operation
08/14/2003WO2002044815A3 Multilayer elements containing photoresist compositions and their use in microlithography
08/14/2003WO2002043155A9 Bipolar transistor with lattice matched base layer
08/14/2003WO2002033753A3 Integrated circuit provided with overvoltage protection and method for manufacture thereof
08/14/2003WO2002033751A3 Microelectronic substrate with integrated devices
08/14/2003WO2002021695A3 Depopulated programmable logic array
08/14/2003WO2002019337A3 Mtj mram series-parallel architecture
08/14/2003WO2002018107A9 Edge grip aligner with buffering capabilities
08/14/2003WO2002015266A3 Direct build-up layer on an encapsulated die package
08/14/2003WO2002009155A3 Wafer chuck having with interleaved heating and cooling elements
08/14/2003US20030154461 High yield reticle with proximity effect
08/14/2003US20030154460 Apparatus for evaluating lithography process margin simulating layout pattern of semiconductor device
08/14/2003US20030154456 Resistor circuit
08/14/2003US20030154455 Method for designing semiconductor integrated circuit and method for testing the same
08/14/2003US20030154324 Hub/router for communication between cores using cartesian coordinates
08/14/2003US20030154052 Method for diagnosing life of manufacturing equipment using rotary machine
08/14/2003US20030154002 Method and apparatus for aligning a cassette handler
08/14/2003US20030153999 Program for controlling laser apparatus and recording medium for recording program for controlling laser apparatus and capable of being read out by computer
08/14/2003US20030153997 Method for predicting life span of rotary machine used in manufacturing apparatus and life predicting system
08/14/2003US20030153995 Semiconductor manufacturing system and control method thereof
08/14/2003US20030153719 Novel polymer compound, precursor for the same and thin film-forming method using the same polymer precursor
08/14/2003US20030153665 Heat conductive mold and manufacturing method thereof
08/14/2003US20030153452 Aluminum nitride ceramics, members for use in a system for producing semiconductors, corrosion resistant members and conductive members
08/14/2003US20030153253 Polishing cloth
08/14/2003US20030153251 Mirror chamfered wafer, mirror chamfering polishing cloth, and mirror chamfering polishing machine and method
08/14/2003US20030153223 Connecting method for metal material and electric conductive plastic material and product thereby
08/14/2003US20030153204 Terminal structure having large peel strength of land portion and ball
08/14/2003US20030153198 Carbon-graded layer for improved adhesion of low-k dielectrics to silicon substrates
08/14/2003US20030153196 Method for reducing fluorine induced defects on a bonding pad surface
08/14/2003US20030153195 Method and apparatus for providing modulated bias power to a plasma etch reactor
08/14/2003US20030153194 Plasma etching uniformity control
08/14/2003US20030153193 Etching method
08/14/2003US20030153192 Focused ion beam visual endpointing
08/14/2003US20030153190 Semiconductor processing method using photoresist and an antireflective coating
08/14/2003US20030153189 Low cost and low dishing slurry for polysilicon CMP
08/14/2003US20030153188 LSI device polishing composition and method for producing LSI device
08/14/2003US20030153187 Process for manufacturing semiconductor integrated circuit device
08/14/2003US20030153186 Apparatus and method using a remote RF energized plasma for processing semiconductor wafers
08/14/2003US20030153184 Method of polishing a multi-layer substrate
08/14/2003US20030153183 Process for chemical mechanical polishing of semiconductor substrate and aqueous dispersion for chemical mechanical polishing
08/14/2003US20030153182 Laser irradiation apparatus
08/14/2003US20030153181 Improving imaging resolution; coating with hydrophobic material that overcomes water condensation interference
08/14/2003US20030153180 Method and system of forming semiconductor wiring, method and system of fabrication semiconductor device, and wafer
08/14/2003US20030153179 Apparatus and method for scribing semiconductor wafers using vision recognition
08/14/2003US20030153178 Method of fabricating a vertically profiled electrode and semiconductor device comprising such an electrode
08/14/2003US20030153177 Variable flow deposition apparatus and method in semiconductor substrate processing
08/14/2003US20030153176 Interconnection structure and interconnection structure formation method
08/14/2003US20030153175 Method of preventing aluminum sputtering during oxide via etching
08/14/2003US20030153174 Methods for making a paste of materials to form bumps for screen print processes
08/14/2003US20030153173 Method of forming a novel top-metal fuse structure
08/14/2003US20030153172 Method of manufacturing a semiconductor integrated circuit device
08/14/2003US20030153171 Wafer level package with air pads and manufacturing method thereof
08/14/2003US20030153170 Method for cleaning semiconductor device and method for fabricating the same
08/14/2003US20030153168 3-5 Group compound semiconductor, process for producing the same, and compound semiconductor element using the same
08/14/2003US20030153167 Laser processing apparatus and laser processing process
08/14/2003US20030153166 Transistor and method of making the same
08/14/2003US20030153165 Method of forming silicon-based thin film, method of forming silicon-based semiconductor layer, and photovoltaic element
08/14/2003US20030153164 Method of regenerating semiconductor wafer
08/14/2003US20030153163 Support-integrated donor wafers for repeated thin donor layer separation
08/14/2003US20030153162 Method for producing bonded wafer and bonded wafer
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