Patents
Sitemap › H01 - Basic electric elements › H01L - Semiconductor devices; Electric solid state devices not otherwise provided for › H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
Patents for H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof (658,974)
08/2003
08/28/2003US20030160208 Methods and compositions for removal of anti-reflective layers using fluorine containing compounds, oxidants, and water
08/28/2003US20030160198 Semiconductor device having different metal silicide portions and method for fabricating the semiconductor device
08/28/2003US20030160195 Surface position detection apparatus and method, and exposure apparatus and device manufacturing method using said exposure apparatus
08/28/2003US20030160192 Charged particle beam exposure method and method for producing charged particle beam exposure data
08/28/2003US20030160191 Beam direct-writing apparatus, imaging apparatus and method of obtaining preferable path passing through points
08/28/2003US20030160190 Ion implantation apparatus equipped with plasma shower and ion implantation method
08/28/2003US20030160085 Plasma-resistant, welded aluminum structures for use in semiconductor apparatus
08/28/2003US20030160084 Ultrasonic horn, and ultrasonic bonding apparatus using the ultrasonic horn
08/28/2003US20030160042 Ceramic board
08/28/2003US20030160041 Ceramic heater
08/28/2003US20030160035 Method of forming an opening or cavity in a substrate for receicing an electronic component
08/28/2003US20030160022 Apparatus and process for bulk wet etch with leakage protection
08/28/2003US20030159971 Wafer container cushion system
08/28/2003US20030159938 Electroplating solution containing organic acid complexing agent
08/28/2003US20030159935 Immersion a cathode in tank containing electrolytes ; metal plating semiconductor as anode; connecting to power soirce; deplating
08/28/2003US20030159921 Apparatus with processing stations for manually and automatically processing microelectronic workpieces
08/28/2003US20030159919 Multilayer stacks of magnetic disks; adjusting disk carrier
08/28/2003US20030159817 Heat sink and its manufacturing method
08/28/2003US20030159782 Modified transfer function deposition baffles and high density plasma ignition therewith in semiconductor processing
08/28/2003US20030159780 Interfacial structure for semiconductor substrate processing chambers and substrate transfer chambers and for semiconductor substrate processing chambers and accessory attachments, and semiconductor substrate processor
08/28/2003US20030159779 Insulation-film etching system
08/28/2003US20030159773 Adhesive composition, method for preparing the same, adhesive film using the same, substrate for carrying semiconductor and semiconductor device
08/28/2003US20030159770 Composite laminate and method for manufacturing the same
08/28/2003US20030159718 Cleaning bath; drying enclosure; sliding door closure
08/28/2003US20030159716 Supplying fluid at high temperature
08/28/2003US20030159713 Method and apparatus for cleaning and drying semiconductor wafer
08/28/2003US20030159712 Supplying fluid flow; then gas flow; ionization; extraction
08/28/2003US20030159711 Detecting the endpoint of a chamber cleaning
08/28/2003US20030159656 Hydrogen assisted undoped silicon oxide deposition process for HDP-CVD
08/28/2003US20030159655 Apparatus for depositing an insulation layer in a trench
08/28/2003US20030159654 Apparatus for plasma treatment of dielectric bodies
08/28/2003US20030159650 Method for the preparation of an epitaxial silicon wafer with intrinsic gettering
08/28/2003US20030159649 In-situ post epitaxial treatment process
08/28/2003US20030159644 Method of manufacturing semiconductor wafer method of using and utilizing the same
08/28/2003US20030159608 Device and method in connection with the production of structures
08/28/2003US20030159535 Drive system for multiple axis robot arm
08/28/2003US20030159528 Apparatus and method for wafer backside inspection
08/28/2003US20030159520 Test fixture and method
08/28/2003US20030159517 Vibration control apparatus, vibration control method, exposure apparatus, and device manufacturing method
08/28/2003US20030159362 Applying slurry to soft surface layer
08/28/2003US20030159307 Substrate processing apparatus
08/28/2003US20030159282 Wiring board and method of fabricating the same, semiconductor device, and electronic instrument
08/28/2003US20030159278 Methods and apparatus for fabricating Chip-on-Board modules
08/28/2003US20030159277 Method and apparatus for manually and automatically processing microelectronic workpieces
08/28/2003US20030159276 Process for forming electrical/mechanical connections
08/28/2003US20030159274 Bump forming system employing attracting and compressing device
08/27/2003EP1339258A1 Ceramic heater, and ceramic heater resistor paste
08/27/2003EP1339106A1 Semiconductor device and its manufacturing method
08/27/2003EP1339105A2 Diode element
08/27/2003EP1339101A2 Systems and methods for integration of heterogeneous circuit devices
08/27/2003EP1339098A2 Component mounting apparatus and component mounting method, and, recognition apparatus for component mount panel, component mounting apparatus for liquid crystal panel, and component mounting method for liquid crystal panel
08/27/2003EP1339097A2 Wafer container box
08/27/2003EP1339096A2 Ultrasonic horn, and ultrasonic bonding apparatus using the ultrasonic horn
08/27/2003EP1339095A2 Method of cutting a protective tape and protective tape applying apparatus
08/27/2003EP1339068A1 Electrically programmable non-volatile memory cell
08/27/2003EP1339067A1 MRAM architecture
08/27/2003EP1339066A1 Voltage biasing method of a resistive cross point memory cell arrray during sensing
08/27/2003EP1339064A2 Semiconductor memory device
08/27/2003EP1339009A2 Fingerprint sensor apparatus and manufacturing method thereof
08/27/2003EP1338923A1 Method for forming pattern and treating agent for use therein
08/27/2003EP1338922A2 Positive resist composition
08/27/2003EP1338914A2 Method for manufacturing liquid crystal display
08/27/2003EP1338683A2 Process for making an epitaxial layer of gallium nitride
08/27/2003EP1338580A1 Sintered cordierite body and process for producing the same
08/27/2003EP1338555A1 Oxide material, method for preparing oxide thin film and element using said material
08/27/2003EP1338397A2 Method for manufacturing encapsulated electronic components
08/27/2003EP1338384A2 Polishing apparatus
08/27/2003EP1338038A2 Substrate with semiconductor layer, electronic component, electronic circuit, printable composition and method for production thereof
08/27/2003EP1338037A1 Planar structure and methods of fabricating non-volatile memory devices
08/27/2003EP1338036A2 Self-aligned magnetic clad write line and method thereof
08/27/2003EP1338034A1 Simultaneous formation of charge storage and bitline to worldline isolation
08/27/2003EP1338033A2 Method for forming and filling isolation trenches
08/27/2003EP1338032A2 Lowered channel doping with source side boron implant for deep sub 0.18 micron flash memory cell
08/27/2003EP1338031A2 Copper alloy interconnections for integrated circuits and methods of making same
08/27/2003EP1338030A2 Method for making a substrate in particular for optics, electronics or optoelectronics and resulting substrate
08/27/2003EP1338029A1 Semiconductor structure having high dielectric constant material
08/27/2003EP1338028A1 Wafer processing system including a robot
08/27/2003EP1338012A2 Circuit for non-destructive, self-normalizing reading-out of mram memory cells
08/27/2003EP1337894A2 Method of increasing the conductivity of a transparent conductive layer
08/27/2003EP1337893A2 Pixellated devices such as active matrix liquid crystal displays
08/27/2003EP1337838A2 Method and device for determining the properties of an integrated circuit
08/27/2003EP1337700A1 Cvd reactor comprising a substrate holder rotatably mounted and driven by a gas flow
08/27/2003EP1337696A1 Method and device for producing optical fluoride crystals
08/27/2003EP1337693A2 Method and apparatus to overcome anomalies in copper seed layers and to tune for feature size and aspect ratio
08/27/2003EP1337682A2 Physical vapor deposition targets, and methods of fabricating metallic materials
08/27/2003EP1337601A1 Slurry for chemical-mechanical polishing copper damascene structures
08/27/2003EP1337380A1 Abrasive article having a window system for polishing wafers, and methods
08/27/2003EP1230711B1 Arrangement for electrically connecting chips in a circuit that is embodied in a three-dimensional manner
08/27/2003EP1192659B1 Multichip module and method for producing a multichip module
08/27/2003EP1192590B1 Method for producing a contactless card
08/27/2003EP1163552B1 Method of forming a masking pattern on a surface
08/27/2003EP0948879A4 Ceramic composite wiring structures for semiconductor devices and method of manufacture
08/27/2003EP0906590B1 Lithographic projection apparatus with off-axis alignment unit
08/27/2003EP0708985B1 Apparatus for encapsulating with plastic a lead frame with chips
08/27/2003EP0700580B1 Method for fabricating suspension members for micromachined sensors
08/27/2003CN2569339Y Induction coupling plasma deep layer etching machine
08/27/2003CN1439173A Methods and apparatus for determining an etch endpoint in a plasma processing system
08/27/2003CN1439172A Hydrogenimplant for buffer of punch-through non EPI IGBT
08/27/2003CN1439171A High frequency transistor device with antimony implantation and fabrication method thereof
08/27/2003CN1439170A Amorphous metal oxide gate dielectric structure and method thereof
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