Patents
Sitemap › H01 - Basic electric elements › H01L - Semiconductor devices; Electric solid state devices not otherwise provided for › H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
Patents for H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof (658,974)
09/2003
09/04/2003US20030166338 CMP slurry for metal and method for manufacturing metal line contact plug of semiconductor device using the same
09/04/2003US20030166337 Chemical mechanical polishing systems and methods for their use
09/04/2003US20030166335 Method of forming wiring in semiconductor devices
09/04/2003US20030166334 Bond pad and process for fabricating the same
09/04/2003US20030166333 Method for forming bump, semiconductor element having bumps and method of manufacturing the same, semiconductor device and method of manufacturing the same, circuit board, and electronic equipment
09/04/2003US20030166332 Bump fabrication method
09/04/2003US20030166331 Bump fabrication process
09/04/2003US20030166330 Bump fabrication process
09/04/2003US20030166329 Method of manufacturing a portion of a memory
09/04/2003US20030166328 Method of manufacturing semiconductor devices by sputter-doping
09/04/2003US20030166327 Method for filling depressions on a semiconductor wafer
09/04/2003US20030166326 Semiconductor device manufacturing method
09/04/2003US20030166324 Tilt-angle ion implant to improve junction breakdown in flash memory application
09/04/2003US20030166323 Raised extension structure for high performance cmos
09/04/2003US20030166322 Method of manufacturing semiconductor device
09/04/2003US20030166321 Method of manufacturing semiconductor device
09/04/2003US20030166320 Method of manufacturing semiconductor device
09/04/2003US20030166319 Method of fabricating poly spacer gate structure
09/04/2003US20030166318 Atomic layer deposition of capacitor dielectric
09/04/2003US20030166317 Method and device for thermally treating objects
09/04/2003US20030166316 Method of manufacturing field effect transistors
09/04/2003US20030166315 Method of manufacturing a thin film transistor
09/04/2003US20030166314 Resin encapsulated BGA-type semiconductor device
09/04/2003US20030166313 Semiconductor element mounting method
09/04/2003US20030166312 Methods for assembly and packaging of flip chip configured dice with interposer
09/04/2003US20030166309 Pulse width method for controlling lateral growth in crystallized silicon films
09/04/2003US20030166305 Substrate heating method, substrate heating system, and applying developing system
09/04/2003US20030166304 Method of forming a ferroelectric film and fabrication process of a semiconductor device having a ferroelectric film
09/04/2003US20030165787 Method and apparatus for heat processing of substrate
09/04/2003US20030165780 Mesa-oxide isolation and mesa-oxide guard ring isolation methods on compound semiconductor devices and circuits
09/04/2003US20030165776 Photoresists comprising mixtures of alkali soluble copolymers, curing agents and acid generators, having high sensitivity and resolution, for use in microstructure lithography
09/04/2003US20030165773 Polymers, resist compositions and patterning process
09/04/2003US20030165772 Photoresist mixtures comprising acid generators, amino resins, phenolic alcohols, curing agents and solvents, having high sensitivity and resolution
09/04/2003US20030165769 Block polymers such as polymethyl methacrylate/poly(t-butyl methacrylate), having end groups and acid generators, used to form films on silicon substrates; microelectronics having high resolution and contrast
09/04/2003US20030165755 Controlling critical dimensions (CDs) of features formed on the semiconductor substrate through feedback and fee-forward of information gathering during in-process inspection of the feature
09/04/2003US20030165750 Method of manufacturing electronic device
09/04/2003US20030165718 Indium-tin oxide formed on first or second metal layer directly for reflective LCD to thereby obtain bonding pad directly after etching contact window for scan bonding pad or data bonding pad; simplification
09/04/2003US20030165697 SiGeC semiconductor crystals and the method producing the same
09/04/2003US20030165641 Mask for photolithography, method of forming thin film, liquid crystal display device, and method of producing the liquid crystal display device
09/04/2003US20030165633 Plating method of metal film on the surface of polymer
09/04/2003US20030165632 Method of reducing stress induced defects in an HDP-CVD process
09/04/2003US20030165629 Drop ejection; controllers; electronics
09/04/2003US20030165625 Heating, crosslinking
09/04/2003US20030165620 Precoat film forming method, idling method of film forming device, loading table structure, film forming device and film forming method
09/04/2003US20030165615 Vapor deposition with electroconductive metal, or alloy thereof; oxidation
09/04/2003US20030165412 Slurry for CMP, method of forming thereof and method of manufacturing semiconductor device including a CMP process
09/04/2003US20030165265 Alignment apparatus, control method thereof, exposure apparatus and method of manufacturing semiconductor device by exposure apparatus controlled by the same control method
09/04/2003US20030165167 Semiconductor laser device and wire bonding method capable of easily performing reliable wire bonding
09/04/2003US20030165077 Semiconductor memory device permitting early detection of defective test data
09/04/2003US20030165074 Hybrid circuit having nanotube electromechanical memory
09/04/2003US20030165044 Electrostatic chuck and method of treating substrate using electrostatic chuck
09/04/2003US20030164948 Multiple degree of freedom interferometer
09/04/2003US20030164946 Apparatus and method for measuring a property of a layer in a multilayered structure
09/04/2003US20030164942 Semiconductor wafer examination system
09/04/2003US20030164934 Stage apparatus, exposure apparatus and method for exposing substrate plate
09/04/2003US20030164932 Method and system for compensating exposure value for exposure process as well as exposure system and semiconductor manufacturing system
09/04/2003US20030164931 Lithographic tool with dual isolation system and method for configuring the same
09/04/2003US20030164930 Stage alignment apparatus and its control method, exposure apparatus, and semiconductor device manufacturing method
09/04/2003US20030164929 Environmental-control method and apparatus for an exposure system
09/04/2003US20030164911 Liquid crystal display device
09/04/2003US20030164910 Liquid crystal display device
09/04/2003US20030164908 Thin film transistor panel
09/04/2003US20030164717 Tooling plate adapted to facilitate rapid and precise attachment into a probing station
09/04/2003US20030164596 Valve seal assembly
09/04/2003US20030164555 B-stageable underfill encapsulant and method for its application
09/04/2003US20030164554 Quad flat no lead (QFN) grid array package, method of making and memory module and computer system including same
09/04/2003US20030164551 Method and apparatus for flip-chip packaging providing testing capability
09/04/2003US20030164549 Semiconductor device and manufacturing method for the same, circuit board, and electronic device
09/04/2003US20030164548 Flip chip packaging using recessed interposer terminals
09/04/2003US20030164547 Semiconductor device and manufacturing method thereof
09/04/2003US20030164545 H-bridge with single lead frame
09/04/2003US20030164541 Method and apparatus for dielectric filling of flip chip on interposer assembly
09/04/2003US20030164539 Method for stacking semiconductor package units and stacked package
09/04/2003US20030164538 Semiconductor device
09/04/2003US20030164536 Semiconductor device
09/04/2003US20030164535 Lead frame manufacturing method
09/04/2003US20030164534 Method for manufacturing semiconductor device using two orientation flats
09/04/2003US20030164528 Semiconductor device having hetero grain stack gate
09/04/2003US20030164527 Semiconductor device and its manufacturing method
09/04/2003US20030164525 Gate structure and method
09/04/2003US20030164524 Semiconductor device having different metal-semiconductor portions formed in a semiconductor region and a method for fabricating the semiconductor device
09/04/2003US20030164523 Semiconductor circuit arrangement and a method for producing same
09/04/2003US20030164522 Semiconductor device
09/04/2003US20030164521 Semiconductor device having ESD protective transistor
09/04/2003US20030164520 Thin-film transistor and method of making same
09/04/2003US20030164519 Semiconductor device and method of manufacturing the same
09/04/2003US20030164518 Flash memory device and method for fabricating the same
09/04/2003US20030164517 Nonvolatile semiconductor memory device
09/04/2003US20030164516 Semiconductor device and method of manufacturing the same
09/04/2003US20030164514 Damascene capacitor having a recessed plate
09/04/2003US20030164513 Method for forming raised structures by controlled selective epitaxial growth of facet using spacer
09/04/2003US20030164512 Silicon carbide lateral metal-oxide semiconductor field-effect transistor having a self-aligned drift region and method for forming the same
09/04/2003US20030164510 Redundancy architecture for repairing semiconductor memories
09/04/2003US20030164509 Spin transistor
09/04/2003US20030164508 Electrostatic discharge protection apparatus
09/04/2003US20030164502 Optoelectronic component and a method for producing the same
09/04/2003US20030164501 Semiconductor device including a TFT having large-grain polycrystalline active layer, LCD employing the same and method of fabricating them
09/04/2003US20030164500 Semiconductor device and method for manufacturing the same
09/04/2003US20030164498 Thin-film transistor substrate and liquid crystal display
09/04/2003US20030164497 Flexible organic electronic device with improved resistance to oxygen and moisture degradation
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