Patents
Patents for H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof (658,974)
09/2003
09/04/2003US20030164489 Image display device using transistors each having a polycrystalline semiconductor layer, as well as manufacturing method of such image display device
09/04/2003US20030164460 Patterned wafer inspection method and apparatus therefor
09/04/2003US20030164396 Mounting method and device
09/04/2003US20030164395 Solder ball attaching process
09/04/2003US20030164394 Installation device
09/04/2003US20030164371 Induction heating of thin films
09/04/2003US20030164365 Ceramic heater
09/04/2003US20030164362 Pre-heating and loadlock pedestal material for high temperature CVD liquid crystal and flat panel display applications
09/04/2003US20030164356 Slurry collection device and method
09/04/2003US20030164354 System level in-situ integrated dielectric etch process particularly useful for copper dual damascene
09/04/2003US20030164353 Method for manufacturing semiconductor device
09/04/2003US20030164351 Method for applying a textured insulation layer to a metal layer
09/04/2003US20030164338 Ozonated water flow and concentration control apparatus and method
09/04/2003US20030164302 Depositing barrier layer; depositing seed layer of metal on barrier layer; removing seed layer from barrier layer, electroplating metal using portion of seed layer and exposed portions of barrier layer; removing excess plated metal
09/04/2003US20030164287 For uniformly implanting a large amount of particles having low energy into a substrate by sputtering
09/04/2003US20030164226 Wafer processing apparatus and a wafer stage and a wafer processing method
09/04/2003US20030164225 Processing apparatus, exhaust processing process and plasma processing
09/04/2003US20030164224 Method and apparatus for cleaning a semiconductor wafer processing system
09/04/2003US20030164181 Substrate processing apparatus
09/04/2003US20030164179 Liquid processing apparatus and liquid processing method
09/04/2003US20030164143 Batch-type remote plasma processing apparatus
09/04/2003US20030164142 Plasma processing apparatus
09/04/2003US20030164139 Method for manufacturing single-crystal-silicon wafers
09/04/2003CA2477766A1 Improved patching methods and apparatus for fabricating memory modules
09/04/2003CA2477763A1 Methods and apparatus for fabricating chip-on-board modules
09/04/2003CA2477754A1 Memory module assembly using partially defective chips
09/03/2003EP1341233A2 Semiconductor device and liquid jet apparatus using the same
09/03/2003EP1341231A2 System and method for providing mechanical planarization of a sequential build up substrate for an integrated circuit package
09/03/2003EP1341229A1 Method for hermetic sealing of electronic parts
09/03/2003EP1341228A2 Electronic product with heat radiating plate
09/03/2003EP1341227A2 Interconnection structure in semiconductor devices and method for making the same
09/03/2003EP1341226A1 Seal member, and substrate storage container using the seal member
09/03/2003EP1341225A2 Generation and use of integrated circuit profile-based simulation information
09/03/2003EP1341224A1 Method for producing semiconductor device
09/03/2003EP1341223A1 Polishing progress monitoring method and device thereof, polishing device, semiconductor device production method, and semiconductor device
09/03/2003EP1341222A1 A method for producing a device having a semiconductor layer on a lattice mismatched substrate
09/03/2003EP1341220A2 Semiconductor device manufacturing method
09/03/2003EP1341219A2 Method of fabricating semiconductor device
09/03/2003EP1341218A2 Semiconductor device manufacturing method
09/03/2003EP1341217A2 Capacitor for semiconductor device, manufacturing method thereof, and electronic device employing the same
09/03/2003EP1341216A1 Ceramic substrate for semiconductor manufacturing and inspecting devices, and method of manufacturing the ceramic substrate
09/03/2003EP1341215A1 Ceramic heater for semiconductor manufacturing and inspecting devices
09/03/2003EP1341214A1 Method for identifying semiconductor integrated circuit device, method for manufacturing semiconductor integrated circuit device, semiconductor integrated circuit device and semiconductor chip
09/03/2003EP1341213A2 Apparatus for treating wafers, provided with a sensor box
09/03/2003EP1341212A2 Apparatus for washing substrate
09/03/2003EP1341211A2 Process and apparatus for light inducing chemical treatment of a workpiece
09/03/2003EP1341185A1 Operating techniques for reducing the program and read disturbs of a non-volatile memory
09/03/2003EP1341184A1 Memory device utilizing carbon nanotubes and method of fabricating the memory device
09/03/2003EP1341182A2 Semiconductor memory
09/03/2003EP1341043A2 Evaluation and correction of optical aberrations of an imaging system
09/03/2003EP1341042A2 System and method for using a two part cover for protecting a reticle
09/03/2003EP1341041A2 Photoresist compositions
09/03/2003EP1340732A1 Aluminum nitride sintered body, method for producing aluminum nitride sintered body, ceramic substrate and method for producing ceramic substrate
09/03/2003EP1340414A2 A method of forming an opening or cavity in a substrate for receiving an electronic component
09/03/2003EP1340296A1 Electrically pumped polycrystalline zno laser and method for making same
09/03/2003EP1340270A1 Field effect transistors and materials and methods for their manufacture
09/03/2003EP1340269A2 Thin films for magnetic devices
09/03/2003EP1340264A1 Self-aligned non-volatile memory cell
09/03/2003EP1340263A2 Trench-gate field-effect transistors and their manufacture
09/03/2003EP1340262A2 Poly fuse rom with mos device based cell structure and the method for read and write therefore
09/03/2003EP1340260A2 Compact semiconductor structure and a method for producing the same
09/03/2003EP1340254A2 Dram with vertical transistor and trench capacitor memory cells and method of fabrication
09/03/2003EP1340253A2 Cmos fabrication process utilizing special transistor orientation
09/03/2003EP1340252A2 Optimized liners for dual damascene metal wiring
09/03/2003EP1340251A2 Method of inspecting an anisotropic etch in a microstructure
09/03/2003EP1340250A2 Bump formation method and bump forming apparatus to semiconductor wafer
09/03/2003EP1340249A2 Patterned buried insulator
09/03/2003EP1340248A2 Method for determining an endpoint and semiconductor wafer
09/03/2003EP1340247A1 Method of forming dielectric films
09/03/2003EP1340246A2 Reduced edge contact wafer handling system and method of retrofitting and using same
09/03/2003EP1340245A2 Method for incorporating silicon into cvd metal films
09/03/2003EP1340244A2 Method for thermally treating substrates
09/03/2003EP1340229A2 Integrated memory with an arrangement of non-volatile memory cells and method for the production and operation of an integrated memory
09/03/2003EP1340126A1 Method of aligning a photolithographic mask to a crystal plane
09/03/2003EP1340125A2 Protecting groups in polymers, photoresists and processes for microlithography
09/03/2003EP1340123A1 Systems and methods for exposing substrate periphery
09/03/2003EP1339625A1 Throughput enhancement for single wafer reactor
09/03/2003EP1339622A2 Wafer carrier with stacking adaptor plate
09/03/2003EP1339550A1 A process and an apparatus for the formation of patterns in films using temperature gradients
09/03/2003EP1339529A1 Methods, apparatus and slurries for chemical mechanical planarization
09/03/2003EP1339524A1 Fluxing underfill compositions
09/03/2003EP1256116B1 Flash memory architecture employing three layer metal interconnect
09/03/2003EP1246730B1 Thermal transfer of microstructured layers
09/03/2003EP1198295B1 Analysing device with biochip
09/03/2003EP1166275B1 Device for weighting the cell resistances in a magnetoresistive memory
09/03/2003EP1144718A4 Indium source reagent compositions
09/03/2003EP1123556A4 Fuse circuit having zero power draw for partially blown condition
09/03/2003EP1097458B1 Storage assembly consisting of resistive ferroelectric storage cells
09/03/2003EP1088310B1 Radiation hardened six transistor random access memory and memory device
09/03/2003EP1027474A4 Process tube with in situ gas preheating
09/03/2003EP0992068B1 Sram-cell assembly and method for realising the same
09/03/2003EP0930978B1 Composition and method for polishing a composite
09/03/2003EP0927380B1 Supporting device with gas bearing
09/03/2003EP0714140B1 Method of manufacturing a semiconductor thin film transistor
09/03/2003CN2570984Y High integration density single electron memory designed with nanometer carbon tube transistor
09/03/2003CN2570977Y Modified chip abrasion locating ring arrangement
09/03/2003CN2570976Y Chip test instrument
09/03/2003CN2570975Y Film crystal coating packaging arrangement
09/03/2003CN1440578A Ôàó group nitride compound semiconductor light emitting element
09/03/2003CN1440571A Power semiconductor component and method for producing same