Patents
Sitemap › H01 - Basic electric elements › H01L - Semiconductor devices; Electric solid state devices not otherwise provided for › H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
Patents for H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof (658,974)
09/2003
09/02/2003US6612797 Cassette buffering within a minienvironment
09/02/2003US6612590 Apparatus and methods for manipulating semiconductor wafers
09/02/2003US6612558 Apparatus for fixing substrates
09/02/2003US6612505 Spraying method of a dispense system
09/02/2003US6612475 Tape shifting means
09/02/2003US6612442 Tray for storing semiconductor chips
09/02/2003US6612319 Low defect EBR nozzle
09/02/2003US6612317 Supercritical fluid delivery and recovery system for semiconductor wafer processing
09/02/2003US6612316 Wet processing device with sensor-controlled conveyor
09/02/2003US6612315 Bowl configured to control airflow around the wafer to minimize recontamination caused by particles and deionized water droplets circulating in eddies above the wafer
09/02/2003US6612159 Overlay registration error measurement made simultaneously for more than two semiconductor wafer layers
09/02/2003US6612027 Method for forming metal contacts on a substrate
09/02/2003US6612024 Method of mounting a device to a mounting substrate
09/02/2003US6612014 Securely fasening; reducing wedging force
08/2003
08/28/2003WO2003071848A1 Process and apparatus for disengaging semiconductor die from an adhesive film
08/28/2003WO2003071842A1 Method of mounting a semiconductor die on a substrate without using a solder mask
08/28/2003WO2003071614A2 Silver-selenide/chalcogenide glass stack for resistance variable memory
08/28/2003WO2003071607A1 GaN FIELD-EFFECT TRANSISTOR
08/28/2003WO2003071606A1 Semiconductor storage device and its manufacturing method
08/28/2003WO2003071605A2 Semiconductor devices formed of iii-nitride compounds, lithium-niobate-tantalate, and silicon carbide
08/28/2003WO2003071604A1 Semiconductor bonding method and multilayer semiconductor produced by the method
08/28/2003WO2003071603A1 Module part
08/28/2003WO2003071600A1 Substrate support mechanism in semiconductor processing system
08/28/2003WO2003071599A1 Substrate sucking device
08/28/2003WO2003071598A1 Port structure in semiconductor processing system
08/28/2003WO2003071597A1 Method of forming electrical connection means of ultimate dimensions and device comprising such connection means
08/28/2003WO2003071596A2 Electronic component with an adhesive layer and method for the production thereof
08/28/2003WO2003071595A1 LnCuO(S, Se, Te) MONOCRYSTALLINE THIN FILM, ITS MANUFACTURING METHOD, AND OPTICAL DEVICE OR ELECTRONIC DEVICE USING THE MONOCRYSTALLINE THIN FILM
08/28/2003WO2003071594A1 Carrier type substrate processing device
08/28/2003WO2003071593A1 Polishing method and polishing fluid
08/28/2003WO2003071592A1 Method and device for polishing
08/28/2003WO2003071591A1 Method for dividing semiconductor wafer
08/28/2003WO2003071590A1 Production method for exposure mask, exposure mask, and production method of semiconductor device
08/28/2003WO2003071589A1 Device and method for heat treatment
08/28/2003WO2003071588A1 Production method of sic monitor wafer
08/28/2003WO2003071586A2 Method of processing a semiconductor wafer and preprocessed semiconductor wafer
08/28/2003WO2003071585A2 High voltage power mosfet having low on-resistance
08/28/2003WO2003071579A1 Sputtering cathode and device and method for coating a substrate with several layers
08/28/2003WO2003071511A2 Active matrix type organic electroluminescent display device and method of manufacturing the same
08/28/2003WO2003071471A1 Overlay metrology and control method
08/28/2003WO2003071369A1 System and method for point of use delivery, control and mixing chemical and slurry for cmp/cleaning system
08/28/2003WO2003071358A1 Method and system for repairing defected photomasks
08/28/2003WO2003071356A1 Resist material and microfabrication method
08/28/2003WO2003071353A2 An image forming method and apparatus
08/28/2003WO2003071344A1 Method for manufacturing flat panel display substrates
08/28/2003WO2003071317A1 Monochromator mirror for the euv-spectral range
08/28/2003WO2003071289A1 Contact structure having silicon finger contactor
08/28/2003WO2003071011A1 Method and device for depositing semi-conductor layers
08/28/2003WO2003071008A2 Methods of and apparatus for making high aspect ratio microelectromechanical structures
08/28/2003WO2003071007A1 Methods of and apparatus for making high aspect ratio microelectromechanical structures
08/28/2003WO2003071001A1 Electroplating solution containing organic acid complexing agent
08/28/2003WO2003070994A2 Lead-free tin-silver-copper alloy solder composition
08/28/2003WO2003070850A1 Two-pack type adhesive
08/28/2003WO2003070813A1 Method of making a nanoporous film
08/28/2003WO2003070809A2 Organosiloxanes and their use in dielectric films of semiconductors
08/28/2003WO2003070610A2 Local store for a wafer processing station
08/28/2003WO2003070603A1 Glass substrate package
08/28/2003WO2003070390A2 Cleaning apparatus using atmospheric pressure plasma
08/28/2003WO2003058681A3 Differential detector coupled with defocus for improved phase defect sensitivity
08/28/2003WO2003046954A3 Storage device
08/28/2003WO2003044851A3 Method and apparatus for utilizing integrated metrology data as feed-forward data
08/28/2003WO2003044843A3 Forming low k dielectric layers
08/28/2003WO2003043780A3 Method for polishing a substrate surface
08/28/2003WO2003030253A3 Salicided gate for virtual ground arrays
08/28/2003WO2003028092A3 Dual-damascene interconnects without an etch stop layer by alternating ilds
08/28/2003WO2003024171A3 Method of treating photoresists using electrodeless uv lamps
08/28/2003WO2003023830A3 Spray member and method for using the same
08/28/2003WO2003021613A3 Electromechanical memory array using nanotube ribbons and method for making same
08/28/2003WO2003017356A3 Improved strap resistance using selective oxidation to cap dt poly before sti etch
08/28/2003WO2003012835A3 Substrate support and method of fabricating the same
08/28/2003WO2003010795A3 Optical communication device within a semiconductor structure
08/28/2003WO2003009377A3 Semiconductor structures with coplaner surfaces
08/28/2003WO2003009357A3 Epitaxial semiconductor on insulator (soi) structures and devices
08/28/2003WO2003007365A3 Semiconductor processing module with integrated feedback/feed forward metrology
08/28/2003WO2003005782A3 Stackable microcircuit and method of making the same
08/28/2003WO2003005447A3 Structure and method of fabricating embedded vertical dram arrays with silicided bitline and polysilicon interconnect
08/28/2003WO2003005421A3 Fabricating structures using chemo-mechanical polishing and chemically-selective endpoint detection
08/28/2003WO2002103090A3 A method of growing a semiconductor layer
08/28/2003WO2002101824A3 Dram memory cell with a trench capacitor and method for production thereof
08/28/2003WO2002099866A3 Oxidation of silicon nitride films in semiconductor devices
08/28/2003WO2002097881A3 Folded-fin heat sink assembly and method of manufacturing same
08/28/2003WO2002091441A3 Semiconductor device and method of making same
08/28/2003WO2002080236A3 An apparatus and method for creating an ultra-clean mini-environment through lozalized air flow augmentation
08/28/2003WO2002071482A8 Hollow structure in an integrated circuit and method for producing such a hollow structure in an integrated circuit
08/28/2003WO2002065543A3 Bonded structure using reacted borosilicate mixture
08/28/2003WO2002058159A3 Mos-gated power device with doped polysilicon body and process for forming same
08/28/2003WO2002058117A3 Metal-insulator-metal capacitor in copper
08/28/2003WO2002021593A9 Method of forming titanium nitride (tin) films using metal-organic chemical vapor deposition (mocvd)
08/28/2003WO2002019363A3 Pre-polycoating of glass substrates
08/28/2003WO2002017354A9 Ring chuck to hold 200 and 300 mm wafer
08/28/2003WO2002005328A3 Pod load interface equipment adapted for implementation in a fims system
08/28/2003US20030163793 Material estimation apparatus, material estimation program and method of estimating materials
08/28/2003US20030163295 Generation and use of integrated circuit profile-based simulation information
08/28/2003US20030163218 Patching methods and apparatus for fabricating memory modules
08/28/2003US20030163217 Semiconductor manufacturing apparatus and its diagnosis apparatus and operating system
08/28/2003US20030163213 Association of process context with configuration document for manufacturing process
08/28/2003US20030163008 Process for producing perfluorocarbons and use thereof
08/28/2003US20030162911 No flow underfill composition
08/28/2003US20030162481 Chemical mechanical polishing of dual orientation polycrystalline materials
08/28/2003US20030162463 Element transfer method, element arrangmenet method using the same, and image display
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