Patents
Sitemap › H01 - Basic electric elements › H01L - Semiconductor devices; Electric solid state devices not otherwise provided for › H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
Patents for H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof (658,974)
12/2003
12/04/2003US20030222278 Heterojunction bipolar transistor with zero conduction band discontinuity
12/04/2003US20030222277 Semiconductor device
12/04/2003US20030222276 Semiconductor device and method for fabricating the same
12/04/2003US20030222273 Device and method of low voltage SCR protection for high voltage failsafe ESD applications
12/04/2003US20030222266 Gallium-nitride-based compound semiconductor device
12/04/2003US20030222260 Monitor pattern of semiconductor device and method of manufacturing semiconductor device
12/04/2003US20030222241 Removing organometallic and organosilicate residues remaining after a dry etch process from semiconductor substrates. The substrate is exposed to a conditioning solution of phosphoric acid, hydrofluoric acid, and a carboxylic acid, such as acetic
12/04/2003US20030222231 Inspection apparatus for inspecting resist removal width
12/04/2003US20030222227 Beam stop for use in an ion implantation system
12/04/2003US20030222225 High reflectivity to incident X-radiation independently of the angle of incidence and without significantly compromising optical performance. Also disclosed are X-ray optical systems and microlithography apparatus comprising such mirrors.
12/04/2003US20030222221 Apparatus for tilting a beam system
12/04/2003US20030222126 Method of manufacturing semiconductor device
12/04/2003US20030222124 Radio wave soldering method for semiconductor device
12/04/2003US20030222072 Wafer heating devices for use in ion implantation systems
12/04/2003US20030222049 Methods and apparatuses for trench depth detection and control
12/04/2003US20030222048 Method for manufacturing porous structure and method for forming pattern
12/04/2003US20030221985 Precision substrate storage container and retaining member therefor
12/04/2003US20030221969 Copper sulfate plating bath is used which contains a polyether containing at least five ether oxygen atoms in molecule, and a compound represented by formula of R1-S-(CH2O)n-R2-SO3M (wherein, R1 is a hydrogen atom, -(S)n-(CH2O)n-R2-SO3M, or
12/04/2003US20030221960 Semiconductor manufacturing device, semiconductor manufacturing system and substrate treating method
12/04/2003US20030221953 Microelectronic workpiece processing tool including a processing reactor having a paddle assembly for agitation of a processing fluid proximate to the workpiece
12/04/2003US20030221853 Apparatus for manufacturing electronic device, method of manufacturing electronic device, and program for manufacturing electronic device
12/04/2003US20030221781 Milling apparatus
12/04/2003US20030221780 Clamshell and small volume chamber with fixed substrate support
12/04/2003US20030221779 Substrate processing apparatus
12/04/2003US20030221777 Forming strong, resilient, high temperature stable mass; depositing resin coated particles and polyamide in dipropyl-ene glycol methyl ether solvent tackifying material into subterranean well bore and curing
12/04/2003US20030221744 Container flush and gas charge system and method
12/04/2003US20030221713 Substrate processing apparatus
12/04/2003US20030221711 Method for preventing corrosion in the fabrication of integrated circuits
12/04/2003US20030221705 Method of cleaning semiconductor substrate
12/04/2003US20030221703 Method of removing germanium contamination on semiconductor substrate
12/04/2003US20030221626 Shaft cooling mechanisms
12/04/2003US20030221625 Vaporizer for MOCVD and method of vaporizing raw material solutions for MOCVD
12/04/2003US20030221624 CVD coating device
12/04/2003US20030221623 Fabricating a semiconductor device
12/04/2003US20030221621 Method and apparatus for processing semiconductor substrates with hydroxyl radicals
12/04/2003US20030221617 Gas heating apparatus for chemical vapor deposition process and semiconductor device fabrication method using same
12/04/2003US20030221612 Substrate processing apparatus
12/04/2003US20030221611 Fabrication method of semiconductor device and semiconductor device
12/04/2003US20030221609 Process for the preparation of an ideal oxygen precipitating silicon wafer capable of forming an enhanced denuded zone
12/04/2003US20030221496 Inspection device and inspection method of dielectric film, and method of manufacturing semiconductor device
12/04/2003DE4345303C2 Zuführungsdraht-Rahmen zur Verwendung bei der Herstellung einer Halbleitervorrichtung mit LOC-Struktur und Verfahren zur Herstellung einer Halbleitervorrichtung mit LOC-Struktur A lead wire frame for use in the manufacture of a semiconductor device having the LOC structure and method of manufacturing a semiconductor device having the LOC structure
12/04/2003DE10215083C1 Semiconductor chip separation and handling method uses push rod for transfer of separated semiconductor chip from saw frame to transport band
12/04/2003CA2486219A1 Control of contact resistance in quantum well intermixed devices
12/04/2003CA2485185A1 Method for producing a component comprising a conductor structure that is suitable for use at high frequencies
12/04/2003CA2484794A1 Glass material for use at high frequencies
12/04/2003CA2483297A1 Compliant component for supporting electrical interface component
12/03/2003EP1367867A1 Target steering system for a droplet generator in a EUV plasma source
12/03/2003EP1367866A1 Droplet target delivery method for high pulse-rate laser-plasma extreme ultraviolet light source
12/03/2003EP1367717A1 Semiconductor switch including isolated MOS-transistors
12/03/2003EP1367657A2 Light emitting element and method of making same
12/03/2003EP1367654A1 Display apparatus and its manufacturing method
12/03/2003EP1367649A2 Power device having electrodes on a top surface thereof
12/03/2003EP1367648A2 Semiconductor device with floating ring structure
12/03/2003EP1367645A2 Semiconductor device and manufacturing method thereof
12/03/2003EP1367644A1 Semiconductor electronic device and method of manufacturing thereof
12/03/2003EP1367639A1 Plasma apparatus and production method thereof
12/03/2003EP1367638A1 Method for etching organic insulating film and dual damasene process
12/03/2003EP1367637A1 Sheet-type treating device
12/03/2003EP1367636A2 Supporting apparatus having a plurality of magnets and method therefor
12/03/2003EP1367629A2 Apparatus for tilting a beam system
12/03/2003EP1367605A1 Multilayer-film reflective mirrors and optical systems comprising same
12/03/2003EP1367592A2 Thermally stable ferroelectric memory
12/03/2003EP1367470A2 System and method for on-line diagnostics
12/03/2003EP1367447A2 Projection exposure device and position alignment device and position alignment method
12/03/2003EP1367445A1 Linear filament array sheet for EUV production
12/03/2003EP1367444A2 Catadioptric lithography system with stages for reticle and wafer in mutually orthogonal planes
12/03/2003EP1367442A2 Illumination device
12/03/2003EP1367439A1 Radiation-sensitive composition
12/03/2003EP1367404A2 Scan-path flip-flop circuit for integrated circuit memory
12/03/2003EP1367150A1 Production method for semiconductor crystal and semiconductor luminous element
12/03/2003EP1366927A1 Thermal transfer of microstructured layers
12/03/2003EP1366860A1 Non-destructive method for measuring the thickness of a bonded wafer
12/03/2003EP1366827A1 Substrate adapted for the fabrication of organised molecular monolayers and structures thus obtained
12/03/2003EP1366570A1 In service programmable logic arrays with ultra thin vertical body transistors
12/03/2003EP1366552A2 Semiconductor device with protective functions
12/03/2003EP1366529A1 Pattering method
12/03/2003EP1366528A2 Current-responsive resistive component
12/03/2003EP1366525A2 A 2f?2 memory device system and method
12/03/2003EP1366524A1 Open bit line dram with vertical ultra-thin body transistors
12/03/2003EP1366522A2 Conductor track arrangement and method for producing a conductor track arrangement
12/03/2003EP1366521A2 Method of manufacturing a semiconductor device and a support plate, and a semiconductor device obtained by means of said method
12/03/2003EP1366518A1 In-situ cap and method of fabricating same for an integrated circuit device
12/03/2003EP1366517A2 Semiconductor memory location and method for the production thereof
12/03/2003EP1366516A2 Memory cell comprising a trench and method for production thereof
12/03/2003EP1366515A2 Semiconductor wafer with process control modules
12/03/2003EP1366514A1 Method of bonding a semiconductor device to an electrically conductive plate
12/03/2003EP1366513A1 Method for multilevel copper interconnects for ultra large scale integration
12/03/2003EP1366512A1 A common ball-limiting metallurgy for i/o sites
12/03/2003EP1366510A2 Ruthenium silicide wet etch
12/03/2003EP1366509A1 Method of making a flexible substrate containing self-assembling microstructures
12/03/2003EP1366508A2 Apparatus and method for atmospheric pressure reactive atom plasma processing for surface modification
12/03/2003EP1366505A2 Direct detection of low-energy charged particles using metal oxide semiconductor circuitry
12/03/2003EP1366497A2 Higher program vt and faster programming rates based on improved erase methods
12/03/2003EP1366495A1 High speed signal path and method
12/03/2003EP1366390A2 Method and device for vibration control
12/03/2003EP1366209A1 Processing materials inside an atmospheric-pressure radiofrequency nonthermal plasma discharge
12/03/2003EP1366208A1 Method for producing parts and a vacuum processing system
12/03/2003EP1366207A1 Plating method of metal film on the surface of polymer
12/03/2003EP1365888A2 Projected gimbal point drive
12/03/2003EP1365880A1 Ultraviolet laser ablative patterning of microstructures in semiconductors
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