Patents
Sitemap › H01 - Basic electric elements › H01L - Semiconductor devices; Electric solid state devices not otherwise provided for › H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
Patents for H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof (658,974)
12/2003
12/04/2003US20030223544 High-luminosity EUV-source devices for use in extreme ultraviolet (soft X-ray) lithography systems and other EUV optical systems
12/04/2003US20030223543 Linear filament array sheet for EUV production
12/04/2003US20030223542 Droplet target delivery method for high pulse-rate laser-plasma extreme ultraviolet light source
12/04/2003US20030223541 Target steering system for EUV droplet generators
12/04/2003US20030223535 Lithography device for semiconductor circuit pattern generator
12/04/2003US20030223531 CMD and CMD-carrying CCD device
12/04/2003US20030223302 Semiconductor device having semiconductor memory
12/04/2003US20030223299 Method of forming twin-spacer gate FLASH device and the structure of the same
12/04/2003US20030223296 Self-aligned method of forming a semiconductor memory array of floating gate memory cells with buried source line and floating gate, and a memory array made thereby
12/04/2003US20030223292 Stacked 1T-nmemory cell structure
12/04/2003US20030223284 Semiconductor memory device capable of improving quality of voltage waveform given in a signal interconnection layer
12/04/2003US20030223283 Magnetic memory device
12/04/2003US20030223273 Method of erasing information in non-volatile semiconductor memory device
12/04/2003US20030223272 Method and apparatus for erasing flash memory
12/04/2003US20030223268 Thin film magnetic memory device having dummy cell
12/04/2003US20030223263 Variable capacitances for memory cells within a cell group
12/04/2003US20030223261 Semiconductor memory device
12/04/2003US20030223258 Method of making an soi semiconductor device having enhanced, self-aligned dielectric regions in the bulk silicon substrate
12/04/2003US20030223214 Mount device and method
12/04/2003US20030223181 Electronic device package
12/04/2003US20030223177 Substrate-embedded capacitor, production method thereof, and circuit board
12/04/2003US20030223165 Electrostatic-breakdown-preventive and protective circuit for semiconductor-device
12/04/2003US20030223164 Semiconductor apparatus and protection circuit
12/04/2003US20030223138 Thin film apparatus, a manufacturing method of the thin film apparatus, an active matrix substrate, a manufacturing method of the active matrix substrate, and an electro-optical apparatus having the active matrix substrate
12/04/2003US20030223126 Optical reduction system with elimination of reticle diffraction induced bias
12/04/2003US20030223125 Catadioptric lithography system and method with reticle stage orthogonal to wafer stage
12/04/2003US20030223087 Method and its apparatus for measuring size and shape of fine patterns
12/04/2003US20030223079 Interferometry system error compensation in twin stage lithography tools
12/04/2003US20030223077 Compensation for geometric effects of beam misalignments in plane mirror interferometers
12/04/2003US20030223076 Interferometer, exposure apparatus, exposure method and interference length measurement method
12/04/2003US20030223066 Overlay metrology using scatterometry profiling
12/04/2003US20030223058 Method and system using exposure control to inspect a surface
12/04/2003US20030223057 Wireless substrate-like sensor
12/04/2003US20030222966 Pattern writing apparatus and pattern writing method
12/04/2003US20030222750 On-chip differential multi-layer inductor
12/04/2003US20030222742 Magnetic field generator for magnetron plasma
12/04/2003US20030222704 Semiconductor switch apparatus including isolated MOS transistors
12/04/2003US20030222686 Semiconductor integrated circuit device
12/04/2003US20030222677 Scan flip-flop circuit, scan flip-flop circuit array, and integrated circuit device
12/04/2003US20030222673 Electrostatic-breakdown-preventive and protective circuit for semiconductor-device
12/04/2003US20030222670 Semiconductor testing apparatus
12/04/2003US20030222667 Probe card assembly
12/04/2003US20030222635 Movement actuator/sensor systems
12/04/2003US20030222602 Lamp lighting controlling apparatus and light emitting apparatus
12/04/2003US20030222575 Light emitting apparatus and method of fabricating the same
12/04/2003US20030222571 Display device using bidirectional two-terminal element and manufacturing method thereof
12/04/2003US20030222416 Electrostatic chucking stage and substrate processing apparatus
12/04/2003US20030222355 Flip-chip semiconductor device having I/O modules in an internal circuit area
12/04/2003US20030222354 Construction through insulated interconnection is performed by forming, in a body of semiconductor material, a trench extending from the front (of the body for a thickness portion thereof; filling the trench with dielectric material;
12/04/2003US20030222353 Semiconductor device
12/04/2003US20030222352 Under-bump metallugical structure
12/04/2003US20030222351 Semiconductor device with thick interconnections free of dishing and erosion, and method of manufacturing such semiconductor device
12/04/2003US20030222350 Semiconductor device and method of fabricating the same
12/04/2003US20030222349 Semiconductor device with multilayer interconnection structure
12/04/2003US20030222348 Semiconductor device
12/04/2003US20030222347 High aspect ratio fill method and resulting structure
12/04/2003US20030222346 Methods of forming metal interconnections of semiconductor devices by treating a barrier metal layer, and semiconductor devices including an oxide of a barrier layer
12/04/2003US20030222345 Stabilization of resist material through ion implantation
12/04/2003US20030222343 Substrate having a plurality of bumps, method of forming the same, and method of bonding substrate to another
12/04/2003US20030222338 Reverse wire bonding techniques
12/04/2003US20030222337 Die connected with integrated circuit component for electrical signal passing therebetween
12/04/2003US20030222333 Sealed electronic device packages with transparent coverings
12/04/2003US20030222329 Bipolar junction transistor structure with improved current gain characteristics
12/04/2003US20030222328 Monolithic bridge capacitor
12/04/2003US20030222327 Semiconductor device and method of manufacturing semiconductor device
12/04/2003US20030222326 Terminal, semiconductor device, terminal forming method and flip chip semiconductor device manufactrring method
12/04/2003US20030222324 Laser systems for passivation or link processing with a set of laser pulses
12/04/2003US20030222322 Magneto-resistive random access memory and method for manufacturing the same
12/04/2003US20030222320 Prevention of defects in forming a metal silicide layer
12/04/2003US20030222319 Semiconductor device having a low dielectric constant film and manufacturing method thereof
12/04/2003US20030222318 Semiconductor device and method of manufacturing the same
12/04/2003US20030222317 Semiconductor memory device with improved soft-error resistance
12/04/2003US20030222316 Semiconductor device and method for fabricating the same
12/04/2003US20030222315 Backplanes for display applications, and components for use therein
12/04/2003US20030222314 High capacitance package substrate
12/04/2003US20030222313 Self-aligned body tie for a partially depleted SOI device structure
12/04/2003US20030222312 Planar polymer transistor
12/04/2003US20030222310 Reflective liquid crystal display includes providing a substrate, forming a gate electrode on the substrate, and then forming a gate-insulating layer covering over the substrate. The method further includes forming a channel layer above the
12/04/2003US20030222309 Programmable logic device circuit and method of fabricating same
12/04/2003US20030222306 Method of forming a semiconductor device in a semiconductor layer and structure thereof
12/04/2003US20030222305 Low-temperature polysilicon thin film transistor having buried LDD structure and process for producing same
12/04/2003US20030222304 Vertical field effect transistor
12/04/2003US20030222303 Non-volatile semiconductor memory device and method for fabricating the same
12/04/2003US20030222302 Nonvolatile semiconductor memory device
12/04/2003US20030222301 Semiconductor device and manufacturing method thereof
12/04/2003US20030222300 Capacitor constructions, semiconductor constructions, and methods of forming electrical contacts and semiconductor constructions
12/04/2003US20030222299 Semiconductor device and method of manufacturing the same
12/04/2003US20030222298 Aqueous ammonium hydroxise amorphous silicon etch method for forming microelectronic capacitor structure
12/04/2003US20030222296 Method of forming a capacitor using a high K dielectric material
12/04/2003US20030222295 High performance system-on-chip inductor using post passivation process
12/04/2003US20030222294 Nonvolatile semiconductor storage device
12/04/2003US20030222293 Semiconductor memory and method for fabricating the same
12/04/2003US20030222291 Ferroelectric memory transistor
12/04/2003US20030222290 Power device having reduced reverse bias leakage current
12/04/2003US20030222289 Semiconductor device and method of fabricating the same
12/04/2003US20030222287 Hard mask etch for gate polyetch
12/04/2003US20030222286 Semiconductor device
12/04/2003US20030222285 Semiconductor device and system
12/04/2003US20030222284 Wiring structure on a semiconducting substrate
12/04/2003US20030222279 Ferroelectric memory integrated circuit with improved reliability
1 ... 4482 4483 4484 4485 4486 4487 4488 4489 4490 4491 4492 4493 4494 4495 4496 4497 4498 4499 4500 4501 4502 ... 6590