Patents
Sitemap › H01 - Basic electric elements › H01L - Semiconductor devices; Electric solid state devices not otherwise provided for › H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
Patents for H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof (658,974)
11/2013
11/12/2013US8581366 Method and system for forming conductive bumping with copper interconnection
11/12/2013US8581363 Phase-change memory device including a vertically-stacked capacitor and a method of the same
11/12/2013US8581360 Trench schottky diode and manufacturing method thereof
11/12/2013US8581353 Multi-layer gate dielectric
11/12/2013US8581350 Field effect transistor and semiconductor device, and method for manufacturing same
11/12/2013US8581348 Semiconductor device with transistor local interconnects
11/12/2013US8581346 Semiconductor memory device
11/12/2013US8581334 Via structures and semiconductor devices having the via structures
11/12/2013US8581329 Semiconductor device and method for manufacturing same
11/12/2013US8581326 Nonvolatile semiconductor memory device and manufacturing method thereof
11/12/2013US8581315 Semiconductor device having cylindrical lower electrode of capacitor and manufacturing method thereof
11/12/2013US8581311 Semiconductor device
11/12/2013US8581308 High temperature embedded charge devices and methods thereof
11/12/2013US8581272 Method of producing nanopatterned articles, and articles produced thereby
11/12/2013US8581262 Electronic devices comprising multi cyclic hydrocarbons
11/12/2013US8581258 Semiconductor device structures and methods of forming semiconductor structures
11/12/2013US8581249 Film thickness monitoring structure for semiconductor substrate
11/12/2013US8581247 Flexible semiconductor device having gate electrode disposed within an opening of a resin film
11/12/2013US8581244 Oxide thin film transistors and methods of manufacturing the same
11/12/2013US8581236 Electrically pumped optoelectronic semiconductor chip
11/12/2013US8581216 Manufacturing method of semiconductor device, method for controlling ion beam, and ion implantation apparatus
11/12/2013US8581192 Pyroelectric detector and method for manufacturing same, pyroelectric detection device, and electronic instrument
11/12/2013US8581109 Method for manufacturing a circuit board structure
11/12/2013US8581092 Tandem solar cell and method of manufacturing same
11/12/2013US8581090 Fuel fired ThermoPhotoVoltaic (TPV) cylindrical power supply and battery replacement with catalytic matched emitter or post IR emitter array
11/12/2013US8580700 Method for manufacturing semiconductor device
11/12/2013US8580699 Embedded catalyst for atomic layer deposition of silicon oxide
11/12/2013US8580698 Method for fabricating a gate dielectric layer
11/12/2013US8580697 CVD flowable gap fill
11/12/2013US8580696 Systems and methods for detecting watermark formations on semiconductor wafers
11/12/2013US8580695 Method of fabricating a semiconductor device
11/12/2013US8580694 Method of patterning hard mask layer for defining deep trench
11/12/2013US8580693 Temperature enhanced electrostatic chucking in plasma processing apparatus
11/12/2013US8580692 Film stack including metal hardmask layer for sidewall image transfer fin field effect transistor formation
11/12/2013US8580691 Method of forming non-planar membranes using CMP
11/12/2013US8580690 Process of planarizing a wafer with a large step height and/or surface area features
11/12/2013US8580689 Plasma processing method
11/12/2013US8580688 Copper interconnection structure and method for forming copper interconnections
11/12/2013US8580687 Semiconductor structure and method for making same
11/12/2013US8580686 Silicidation and/or germanidation on SiGe or Ge by cosputtering Ni and Ge and using an intralayer for thermal stability
11/12/2013US8580685 Integrated circuit having interleaved gridded features, mask set, and method for printing
11/12/2013US8580684 Contact elements of semiconductor devices comprising a continuous transition to metal lines of a metallization layer
11/12/2013US8580682 Cost-effective TSV formation
11/12/2013US8580681 Manufacturing method of device
11/12/2013US8580680 Metal silicide formation
11/12/2013US8580679 Designs and methods for conductive bumps
11/12/2013US8580678 Method for fabricating semiconductor device with buried gates
11/12/2013US8580677 Method of manufacturing substrate including thin film transistor
11/12/2013US8580676 Multiple layer barrier metal for device component formed in contact trench
11/12/2013US8580675 Two-track cross-connect in double-patterned structure using rectangular via
11/12/2013US8580674 Fabrication of atomic scale devices
11/12/2013US8580673 Underfill flow guide structures and method of using same
11/12/2013US8580672 Methods of forming bump structures that include a protection layer
11/12/2013US8580671 Method of manufacturing semiconductor device and substrate processing apparatus
11/12/2013US8580670 Migration and plasma enhanced chemical vapor deposition
11/12/2013US8580669 Method for fabricating semiconductor device
11/12/2013US8580668 Method of forming ohmic contact layer and method of fabricating light emitting device having ohmic contact layer
11/12/2013US8580667 Self aligned trench MOSFET with integrated diode
11/12/2013US8580666 Methods of forming conductive contacts
11/12/2013US8580665 MOSFET integrated circuit having doped conductive interconnects and methods for its manufacture
11/12/2013US8580664 Method for forming ultra-shallow boron doping regions by solid phase diffusion
11/12/2013US8580663 Formation of shallow junctions by diffusion from a dielectronic doped by cluster or molecular ion beams
11/12/2013US8580662 Manufacture method of a split gate nonvolatile memory cell
11/12/2013US8580661 Method for the hydrogenation of poly-si
11/12/2013US8580660 Double and triple gate MOSFET devices and methods for making same
11/12/2013US8580659 Method of fabricating high-mobility dual channel material based on SOI substrate
11/12/2013US8580658 Methods for fabricating graphene device topography and devices formed therefrom
11/12/2013US8580657 Protecting sidewalls of semiconductor chips using insulation films
11/12/2013US8580656 Process for inhibiting corrosion and removing contaminant from a surface during wafer dicing and composition useful therefor
11/12/2013US8580655 Processing method for bump-included device wafer
11/12/2013US8580654 Method for molecular bonding of silicon and glass substrates
11/12/2013US8580653 Method for fabricating an isolation structure
11/12/2013US8580651 Methods for manufacturing a trench type semiconductor device having a thermally sensitive refill material
11/12/2013US8580650 Lateral superjunction extended drain MOS transistor
11/12/2013US8580649 Method for manufacturing semiconductor device
11/12/2013US8580647 Inductors with through VIAS
11/12/2013US8580646 Method of fabricating field effect transistors with low k sidewall spacers
11/12/2013US8580645 Memory devices and methods of forming memory devices
11/12/2013US8580644 Multi-level lateral floating coupled capacitor transistor structures
11/12/2013US8580643 Threshold voltage adjustment in a Fin transistor by corner implantation
11/12/2013US8580642 Methods of forming FinFET devices with alternative channel materials
11/12/2013US8580641 Techniques providing high-k dielectric metal gate CMOS
11/12/2013US8580640 Manufacturing process of a power electronic device integrated in a semiconductor substrate with wide band gap and electronic device thus obtained
11/12/2013US8580639 Method of making ultrahigh density vertical NAND memory device
11/12/2013US8580637 Method of patterning a semiconductor device having improved spacing and shape control and a semiconductor device
11/12/2013US8580636 Highly integrated phase change memory device having micro-sized diodes and method for manufacturing the same
11/12/2013US8580635 Method of replacing silicon with metal in integrated circuit chip fabrication
11/12/2013US8580634 Methods of forming 3-D semiconductor devices with a nanowire gate structure wherein the nanowire gate structure is formed prior to source/drain formation
11/12/2013US8580633 Method for manufacturing a semiconductor device with gate spacer
11/12/2013US8580632 Semiconductor device and method of manufacturing same
11/12/2013US8580631 High sheet resistor in CMOS flow
11/12/2013US8580630 Methods for forming a metal gate structure on a substrate
11/12/2013US8580629 Method of fabricating semiconductor device using a work function control film
11/12/2013US8580628 Integrated circuit contact structure and method
11/12/2013US8580627 Compound semiconductor device and method for fabricating the same
11/12/2013US8580626 Semiconductor device and method of manufacturing thereof
11/12/2013US8580625 Metal oxide semiconductor transistor and method of manufacturing the same
11/12/2013US8580624 Nanowire FET and finFET hybrid technology
11/12/2013US8580623 Thin film transistor substrate and display device including the same, and method for manufacturing thin film transistor substrate
11/12/2013US8580622 Method of making integrated circuit embedded with non-volatile programmable memory having variable coupling
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