| Patents for H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof (658,974) |
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| 03/23/2004 | US6710393 Failure-analyzing semiconductor device and semiconductor device manufacturing method using the same |
| 03/23/2004 | US6710392 Semiconductor memory device with increased capacitance and reduced performance fluctuation |
| 03/23/2004 | US6710391 Integrated DRAM process/structure using contact pillars |
| 03/23/2004 | US6710390 Capacitors and DRAM arrays |
| 03/23/2004 | US6710389 Semiconductor memory device with trench-type stacked cell capacitors and method for manufacturing the same |
| 03/23/2004 | US6710388 Ferroelectric transistor, use thereof in a memory cell configuration and method of producing the ferroelectric transistor |
| 03/23/2004 | US6710387 Semiconductor device and method for fabricating the same |
| 03/23/2004 | US6710386 Semiconductor memory device using ferroelectric film |
| 03/23/2004 | US6710385 Semiconductor memory device using ferroelectric film |
| 03/23/2004 | US6710384 Capacitive element and wiring structure comprising tungsten, molybdenum, tantalum, copper and/or silicide or nitride layers; oxygen barriers |
| 03/23/2004 | US6710383 MISFET semiconductor device having a high dielectric constant insulating film with tapered end portions |
| 03/23/2004 | US6710382 Semiconductor device and method for fabricating the same |
| 03/23/2004 | US6710381 Memory device structure with composite buried and raised bit line |
| 03/23/2004 | US6710379 Fully relaxed channel HEMT device |
| 03/23/2004 | US6710375 Semiconductor laser device, manufacturing method thereof |
| 03/23/2004 | US6710372 Thin film transistor array panel for liquid crystal display |
| 03/23/2004 | US6710371 Semiconductor integrated circuit device with enhanced layout |
| 03/23/2004 | US6710366 Nanocomposite materials with engineered properties |
| 03/23/2004 | US6710364 Semiconductor wafer edge marking |
| 03/23/2004 | US6710360 Adjustable implantation angle workpiece support structure for an ion beam implanter |
| 03/23/2004 | US6710359 Methods and apparatus for scanned beam uniformity adjustment in ion implanters |
| 03/23/2004 | US6710353 Actuator and transducer |
| 03/23/2004 | US6710307 Ceramic heater |
| 03/23/2004 | US6710290 Method for processing ceramic green sheet and laser beam machine used therefor |
| 03/23/2004 | US6710286 Chip scale marker and making method |
| 03/23/2004 | US6710265 Multi-strand substrate for ball-grid array assemblies and method |
| 03/23/2004 | US6710257 Circuit encapsulation |
| 03/23/2004 | US6710246 Apparatus and method of manufacturing a stackable package for a semiconductor device |
| 03/23/2004 | US6710225 Layered absorbent structure with a zoned basis weight |
| 03/23/2004 | US6710188 Chemically amplified resist, polymer for the chemically amplified resist, monomer for the polymer and method for transferring pattern to chemically amplified resist layer |
| 03/23/2004 | US6710148 Polymers, resist compositions and patterning process |
| 03/23/2004 | US6709991 Method of fabricating semiconductor device with capacitor |
| 03/23/2004 | US6709990 Method for fabrication of a high capacitance interpoly dielectric |
| 03/23/2004 | US6709989 Method for fabricating a semiconductor structure including a metal oxide interface with silicon |
| 03/23/2004 | US6709987 Method and apparatus for forming improved metal interconnects |
| 03/23/2004 | US6709986 Method for manufacturing semiconductor memory device by using photoresist pattern exposed with ArF laser beam |
| 03/23/2004 | US6709985 Arrangement and method for providing an imaging path using a silicon-crystal damaging laser |
| 03/23/2004 | US6709984 Method for manufacturing semiconductor device |
| 03/23/2004 | US6709983 Semiconductor processing methods utilizing low concentrations of reactive etching components |
| 03/23/2004 | US6709982 Double spacer FinFET formation |
| 03/23/2004 | US6709981 Method and apparatus for processing a semiconductor wafer using novel final polishing method |
| 03/23/2004 | US6709980 Using stabilizers in electroless solutions to inhibit plating of fuses |
| 03/23/2004 | US6709979 Method of manufacturing a semiconductor device |
| 03/23/2004 | US6709976 Method for improving reliability in trench structures |
| 03/23/2004 | US6709975 Method of forming inter-metal dielectric |
| 03/23/2004 | US6709974 Method of preventing seam defects in isolated lines |
| 03/23/2004 | US6709973 Method of fabricating semiconductor device |
| 03/23/2004 | US6709972 Methods for fabricating semiconductor devices by forming grooves across alternating elongated regions |
| 03/23/2004 | US6709971 Interconnect structures in a semiconductor device and processes of formation |
| 03/23/2004 | US6709970 Method for creating a damascene interconnect using a two-step electroplating process |
| 03/23/2004 | US6709969 Method for fabricating a gas insulated gate field effect transistor |
| 03/23/2004 | US6709968 Microelectronic device with package with conductive elements and associated method of manufacture |
| 03/23/2004 | US6709967 Laser wire bonding for wire embedded dielectrics to integrated circuits |
| 03/23/2004 | US6709966 Semiconductor device, its manufacturing process, position matching mark, pattern forming method and pattern forming device |
| 03/23/2004 | US6709965 Aluminum-copper bond pad design and method of fabrication |
| 03/23/2004 | US6709963 Method and apparatus for jet printing a flux pattern selectively on flip-chip bumps |
| 03/23/2004 | US6709961 Method for fabricating semiconductor device |
| 03/23/2004 | US6709960 Laser anneal process for reduction of polysilicon depletion |
| 03/23/2004 | US6709959 Semiconductor device having a shallow junction and a fabrication process thereof |
| 03/23/2004 | US6709956 Transistor and method of making the same |
| 03/23/2004 | US6709955 Method of fabricating electronic devices integrated in semiconductor substrates provided with gettering sites, and a device fabricated by the method |
| 03/23/2004 | US6709954 Scribe seal structure and method of manufacture |
| 03/23/2004 | US6709953 Method of applying a bottom surface protective coating to a wafer, and wafer dicing method |
| 03/23/2004 | US6709952 Method of forming a bottom oxide layer in a trench |
| 03/23/2004 | US6709951 Oxynitride shallow trench isolation and method of formation |
| 03/23/2004 | US6709950 Semiconductor device and method of manufacturing the same |
| 03/23/2004 | US6709949 Method for aligning structures on a semiconductor substrate |
| 03/23/2004 | US6709947 Method of area enhancement in capacitor plates |
| 03/23/2004 | US6709945 Reduced aspect ratio digit line contact process flow used during the formation of a semiconductor device |
| 03/23/2004 | US6709942 Method of fabricating magnetic yoke structures in MRAM devices |
| 03/23/2004 | US6709941 Method for manufacturing semiconductor device employing solid phase diffusion |
| 03/23/2004 | US6709940 Method for manufacturing semiconductor device of sub-micron or high voltage CMOS structure |
| 03/23/2004 | US6709939 Method for fabricating semiconductor device |
| 03/23/2004 | US6709938 Source/drain extension fabrication process with direct implantation |
| 03/23/2004 | US6709937 Transistor structures |
| 03/23/2004 | US6709935 Method of locally forming a silicon/geranium channel layer |
| 03/23/2004 | US6709934 Method for forming variable-K gate dielectric |
| 03/23/2004 | US6709933 Method of fabricating mask ROM |
| 03/23/2004 | US6709932 Method for improving gate oxide integrity and interface quality in a multi-gate oxidation process |
| 03/23/2004 | US6709931 Fabrication of semiconductor devices having high-voltage MOS transistors and low-voltage MOS transistors |
| 03/23/2004 | US6709930 Thicker oxide formation at the trench bottom by selective oxide deposition |
| 03/23/2004 | US6709929 Methods of forming nano-scale electronic and optoelectronic devices using non-photolithographically defined nano-channel templates |
| 03/23/2004 | US6709928 Semiconductor device having silicon-rich layer and method of manufacturing such a device |
| 03/23/2004 | US6709927 Process for treating ONO dielectric film of a floating gate memory cell |
| 03/23/2004 | US6709926 High performance logic and high density embedded dram with borderless contact and antispacer |
| 03/23/2004 | US6709925 Split-gate flash memory cell and manufacturing method thereof |
| 03/23/2004 | US6709924 Fabrication of shallow trench isolation structures with rounded corner and self-aligned gate |
| 03/23/2004 | US6709922 Method of manufacturing semiconductor integrated circuit device including nonvolatile semiconductor memory devices |
| 03/23/2004 | US6709921 Fabrication method for a flash memory device with a split floating gate and a structure thereof |
| 03/23/2004 | US6709920 Method of fabricating a non-volatile memory device having a tunnel-insulating layer including more than two portions of different thickness |
| 03/23/2004 | US6709919 Method for making auto-self-aligned top electrodes for DRAM capacitors with improved capacitor-to-bit-line-contact overlay margin |
| 03/23/2004 | US6709918 Method for making a metal-insulator-metal (MIM) capacitor and metal resistor for a copper back-end-of-line (BEOL) technology |
| 03/23/2004 | US6709917 Method to increase the etch rate and depth in high aspect ratio structure |
| 03/23/2004 | US6709916 Method for forming capacitor of semiconductor device |
| 03/23/2004 | US6709915 Methods of fabricating integrated circuit memory devices |
| 03/23/2004 | US6709914 Manufacturing process of pn junction diode device and pn junction diode device |
| 03/23/2004 | US6709913 Method for adjusting ultra-thin SOI MOS transistor threshold voltages |
| 03/23/2004 | US6709912 Dual Si-Ge polysilicon gate with different Ge concentrations for CMOS device optimization |
| 03/23/2004 | US6709911 Method for making a semiconductor device having a high-k gate dielectric |
| 03/23/2004 | US6709910 Method for reducing surface protrusions in the fabrication of lilac films |