Patents
Patents for H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof (658,974)
03/2004
03/18/2004WO2004023541A1 Pattern formation substrate and method of pattern formation
03/18/2004WO2004023540A1 Basic material for patterning and patterning method
03/18/2004WO2004023539A1 Polishing agent composition for insulating film for semiconductor integrated circuit and method for manufacturing semiconductor integrated circuit
03/18/2004WO2004023538A1 Crystal growing method, crystal growing apparatus, beam splitter, and display
03/18/2004WO2004023537A1 Method of laser beam machining and laser beam machining apparatus
03/18/2004WO2004023536A1 Formation of lattice-tuning semiconductor substrates
03/18/2004WO2004023535A1 Method for producing a semiconductor laser diode
03/18/2004WO2004023534A1 Alignment method, alignment substrate, production method for alignment substrate, exposure method, exposure system and mask producing method
03/18/2004WO2004023533A2 Semiconductor component and method of manufacture
03/18/2004WO2004023532A2 Charge control members
03/18/2004WO2004023531A1 A wafer monitoring system
03/18/2004WO2004023530A2 System of transporting and storing containers of semiconductor wafers and transfer mechanism
03/18/2004WO2004023529A2 Device and method for thermally treating semiconductor wafers
03/18/2004WO2004023528A2 A thinned semiconductor wafer and die and corresponding method
03/18/2004WO2004023519A2 High-density nrom-finfet
03/18/2004WO2004023392A1 Rfid tag
03/18/2004WO2004023350A2 Method for checking an integrated circuit for electrostatic discharge robustness
03/18/2004WO2004023211A2 Exposure method, exposure mask, and exposure apparatus
03/18/2004WO2004023184A1 Objective with birefringent lenses
03/18/2004WO2004023069A1 Measurement and compensation of errors in interferometrs
03/18/2004WO2004023046A1 Gas cleaning device for semiconductor processing system
03/18/2004WO2004022819A1 Nitrogen sources for molecular beam epitaxy
03/18/2004WO2004022815A1 Plated polyester resin article and method for production thereof
03/18/2004WO2004022803A1 Metallic material for electronic part, electronic part, electronic equipment, method of working metallic material, process for producing electronic part and electronic optical part
03/18/2004WO2004022754A1 CONSTRUCTION OF ANTIBODY USING MRL/lpr MOUSE
03/18/2004WO2004022612A1 Photoresists, fluoropolymers and processes for 157 nm microlithography
03/18/2004WO2004022595A1 CONSTRUCTION OF ANTIBODY USING MRL/lpr MOUSE
03/18/2004WO2004022477A1 Microchip with thermal stress relief means
03/18/2004WO2004014964A3 PHOTORESISTS, FLUORINATED POLYMERS AND PROCESSES FOR 157 nm MICROLITHOGRAPHY
03/18/2004WO2004012240A3 Method for enhancing critical dimension uniformity after etch
03/18/2004WO2004010512A9 Heteroatom-containing diamondoid transistors
03/18/2004WO2004009862A3 Substrate loading and unloading station with buffer
03/18/2004WO2004008489A3 Process for ultra-thin body soi devices that incorporate epi silicon tips and article made thereby
03/18/2004WO2004006264A3 Erasable and programmable non-volatile cell
03/18/2004WO2004003979A3 Method for the production of a nrom memory cell field
03/18/2004WO2003105192A3 Apparatus and method for cassette-less transfer of wafers
03/18/2004WO2003104901A3 Cleaning compositions for microelectronic substrates
03/18/2004WO2003103040A3 Method of making an soi semiconductor device having enhanced, self-aligned dielectric regions in the bulk silicon substrate
03/18/2004WO2003103019A3 Fin fet devices from bulk semiconductor and method for forming
03/18/2004WO2003100846A3 Glass material for use at high frequencies
03/18/2004WO2003095997A3 Method and apparatus for separating primary and secondary charged particle beams
03/18/2004WO2003093524A3 Apparatus and method for regulating the electrical power applied to a substrate during immersion
03/18/2004WO2003092062A3 Surface protection sheet and electronic device package
03/18/2004WO2003090256A3 Method and apparatus for connecting vertically stacked integrated circuit chips
03/18/2004WO2003088324A3 Method and apparatus for wafer cleaning
03/18/2004WO2003081646A3 System and method for heating and cooling wafer at accelerated rates
03/18/2004WO2003077038A3 Reduced striae extreme ultraviolegt lithographic elements, a method of manufacturing the same and a method of measuring striae
03/18/2004WO2003075340A3 Method for obtaining metal to metal contact between a metal surface and a bonding pad.
03/18/2004WO2003075099A3 Method and system for overlay measurement
03/18/2004WO2003072846A9 A method of depositing a barrier layer
03/18/2004WO2003061029A3 Organic compositions
03/18/2004WO2003046986A3 Semiconductor device, and means for checking the authenticity
03/18/2004WO2003034495A3 Method for packing electronic modules and multiple chip packaging
03/18/2004WO2003030252B1 Process for producing interconnects
03/18/2004WO2003012831A3 Structure including a monocrystalline perovskite oxide layer
03/18/2004WO2003009346A3 Processing system
03/18/2004WO2003007363A8 Method and apparatus for removing a carrier part from a carrier with a single operation, and a product removed from a carrier
03/18/2004WO2003001583A3 Process for producing silicon on insulator structure having intrinsic gettering by ion implantation
03/18/2004WO2002080244A3 Improved process for deposition of semiconductor films
03/18/2004US20040054982 Network-based photomask data entry interface and instruction generator for manufacturing photomasks
03/18/2004US20040054981 Method of manufacturing electronic device
03/18/2004US20040054980 Embossed mask lithography
03/18/2004US20040054978 Nanometer scale devices
03/18/2004US20040054432 Yield based, in-line defect sampling method
03/18/2004US20040054114 Stabilizers to inhibit the polymerization of substituted cyclotetrasiloxane
03/18/2004US20040054061 Waterproof, heat resistance, shockproof; undercoating for semiconductor, flip chips
03/18/2004US20040053946 Cancer treatment method
03/18/2004US20040053800 Process solutions containing surfactants
03/18/2004US20040053570 Novel finishing pad design for multidirectional use
03/18/2004US20040053559 Polishing apparatus and method of bonding and removing expendable replacement components thereof
03/18/2004US20040053558 Working shape prediction method, working requirement determination method, working method, working system, method of manufacturing semiconductor device, computer program, and computer program storage medium
03/18/2004US20040053516 Method for producing silicon wafer and silicon wafer
03/18/2004US20040053515 Apparatus and method for surface finishing a silicon film
03/18/2004US20040053514 Apparatus for cooling a substrate through thermal conduction in the viscous regime
03/18/2004US20040053513 Method for production of semiconductor components
03/18/2004US20040053511 Line edge roughness reduction
03/18/2004US20040053510 System for and method of unlimited voltage multi ported sram cells
03/18/2004US20040053508 Etching and cleaning methods and etching and cleaning apparatuses used therefor
03/18/2004US20040053506 High temperature anisotropic etching of multi-layer structures
03/18/2004US20040053505 Method of etching variable depth features in a crystalline substrate
03/18/2004US20040053504 In-situ plasma etch for TERA hard mask materials
03/18/2004US20040053503 Selective etching using sonication
03/18/2004US20040053502 Semiconductor device and manufacturing method thereof
03/18/2004US20040053501 Self aligned vias in dual damascene interconnect, buried mask approach
03/18/2004US20040053500 Polishing progress monitoring method and device thereof, polishing device, semiconductor device production method, and semiconductor device
03/18/2004US20040053499 Method and composition for polishing a substrate
03/18/2004US20040053498 Method and apparatus for forming damascene structure, and damascene structure
03/18/2004US20040053497 Large line conductive pads for interconnection of stackable circuitry
03/18/2004US20040053496 Method for forming metal films
03/18/2004US20040053495 Method of forming barrier layers
03/18/2004US20040053494 Low-resistance contact to silicon having a titanium silicide interface and an amorphous titanium carbonitride barrier layer
03/18/2004US20040053493 Low-resistance contact to silicon having a titanium silicide interface and an amorphous titanium carbonitride barrier layer
03/18/2004US20040053492 Low-resistance contact to silicon having a titanium silicide interface and an amorphous titanium carbonitride barrier layer
03/18/2004US20040053491 Method of forming a contact in a semiconductor device
03/18/2004US20040053490 Semiconductor device manufacturing method
03/18/2004US20040053489 Multilayer wiring substrate, and method of producing same
03/18/2004US20040053488 Ball electrode forming method
03/18/2004US20040053486 Low-resistance contact to silicon having a titanium silicide interface and an amorphous titanium carbonitride barrier layer
03/18/2004US20040053485 Method for forming metal silicide regions in an integrated circuit
03/18/2004US20040053484 Method of fabricating a gate structure of a field effect transistor using a hard mask