| Patents for H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof (658,974) |
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| 03/16/2004 | US6706644 Thermal nitrogen distribution method to improve uniformity of highly doped ultra-thin gate capacitors |
| 03/16/2004 | US6706643 UV-enhanced oxy-nitridation of semiconductor substrates |
| 03/16/2004 | US6706642 Method for fabricating semiconductor capacitors |
| 03/16/2004 | US6706641 Spray member and method for using the same |
| 03/16/2004 | US6706640 Metal silicide etch resistant plasma etch method |
| 03/16/2004 | US6706639 Method for interconnecting magnetoresistive memory bits |
| 03/16/2004 | US6706638 Method of forming opening in dielectric layer |
| 03/16/2004 | US6706637 Dual damascene aperture formation method absent intermediate etch stop layer |
| 03/16/2004 | US6706636 Method of regenerating semiconductor wafer |
| 03/16/2004 | US6706635 Innovative method to build a high precision analog capacitor with low voltage coefficient and hysteresis |
| 03/16/2004 | US6706634 Control of separation between transfer gate and storage node in vertical DRAM |
| 03/16/2004 | US6706633 Method of forming a self-aligned contact pad for use in a semiconductor device |
| 03/16/2004 | US6706632 Methods for forming capacitor structures; and methods for removal of organic materials |
| 03/16/2004 | US6706631 Method of controlling sheet resistance of metal silicide regions by controlling the salicide strip time |
| 03/16/2004 | US6706630 Method for forming an alloyed metal conductive element of an integrated circuit |
| 03/16/2004 | US6706629 Barrier-free copper interconnect |
| 03/16/2004 | US6706628 Method for forming thin film and method for fabricating liquid crystal display using the same |
| 03/16/2004 | US6706627 Method of manufacturing capacitor with a diffusion barrier containing ruthenium, titanium and nitrogen |
| 03/16/2004 | US6706626 Method of fabricating contact plug |
| 03/16/2004 | US6706625 Copper recess formation using chemical process for fabricating barrier cap for lines and vias |
| 03/16/2004 | US6706624 Method for making multichip module substrates by encapsulating electrical conductors |
| 03/16/2004 | US6706623 Method and system for avoiding plasma etch damage |
| 03/16/2004 | US6706622 Bonding pad interface |
| 03/16/2004 | US6706621 Wafer integrated rigid support ring |
| 03/16/2004 | US6706620 Method for fabricating a nitride film |
| 03/16/2004 | US6706619 Method for tiling unit cells |
| 03/16/2004 | US6706618 Substrate processing apparatus, substrate support apparatus, substrate processing method, and substrate fabrication method |
| 03/16/2004 | US6706617 Method for forming isolation pattern in semiconductor device |
| 03/16/2004 | US6706616 Method for improving thermal process steps |
| 03/16/2004 | US6706615 Method of manufacturing a transistor |
| 03/16/2004 | US6706614 Silicon-on-insulator (SOI) transistor having partial hetero source/drain junctions fabricated with high energy germanium implantation. |
| 03/16/2004 | US6706613 Methods for manufacturing stacked gates including oxide/nitride/oxide (ONO) interlayer dielectrics using pre-annealing and/or post-annealing in nitrogen |
| 03/16/2004 | US6706612 Fabrication method for shallow trench isolation |
| 03/16/2004 | US6706611 Method for patterning a dual damascene with retrograde implantation |
| 03/16/2004 | US6706610 Semiconductor device and fabrication process thereof |
| 03/16/2004 | US6706609 Method of forming an alignment feature in or on a multi-layered semiconductor structure |
| 03/16/2004 | US6706608 Memory cell capacitors having an over/under configuration |
| 03/16/2004 | US6706607 Method for fabricating capacitor in semiconductor device |
| 03/16/2004 | US6706606 Buried zener diode structure and method of manufacture |
| 03/16/2004 | US6706605 Transistor formed from stacked disposable sidewall spacer |
| 03/16/2004 | US6706604 Method of manufacturing a trench MOS gate device |
| 03/16/2004 | US6706603 Method of forming a semiconductor device |
| 03/16/2004 | US6706602 Manufacturing method of flash memory |
| 03/16/2004 | US6706601 Method of forming tiny silicon nitride spacer for flash EPROM by using dry+wet etching technology |
| 03/16/2004 | US6706600 Method of fabricating a split-gate semiconductor device |
| 03/16/2004 | US6706599 Multi-bit non-volatile memory device and method therefor |
| 03/16/2004 | US6706598 Method of fabricating discrete NROM cell by self aligned process |
| 03/16/2004 | US6706597 Method for textured surfaces in floating gate tunneling oxide devices |
| 03/16/2004 | US6706596 Method for forming flash memory cell |
| 03/16/2004 | US6706595 Hard mask process for memory device without bitline shorts |
| 03/16/2004 | US6706594 Optimized flash memory cell |
| 03/16/2004 | US6706593 Method for manufacturing a nonvolatile semiconductor storage device |
| 03/16/2004 | US6706592 Self aligned method of forming a semiconductor array of non-volatile memory cells |
| 03/16/2004 | US6706591 Method of forming a stacked capacitor structure with increased surface area for a DRAM device |
| 03/16/2004 | US6706590 Method of manufacturing semiconductor device having etch stopper for contact hole |
| 03/16/2004 | US6706589 Manufacturing of capacitors with metal armatures |
| 03/16/2004 | US6706588 Method of fabricating an integrated circuit having embedded vertical capacitor |
| 03/16/2004 | US6706587 Method for forming buried plates |
| 03/16/2004 | US6706586 Method of trench sidewall enhancement |
| 03/16/2004 | US6706585 Chemical vapor deposition process for fabricating layered superlattice materials |
| 03/16/2004 | US6706584 On-die de-coupling capacitor using bumps or bars and method of making same |
| 03/16/2004 | US6706583 High speed low noise transistor |
| 03/16/2004 | US6706582 Semiconductor integrated circuit device and method of manufacturing the same |
| 03/16/2004 | US6706581 Dual gate dielectric scheme: SiON for high performance devices and high k for low power devices |
| 03/16/2004 | US6706580 Semiconductor memory of good retention and its manufacture |
| 03/16/2004 | US6706579 Method of manufacturing semiconductor device |
| 03/16/2004 | US6706578 Floating gate for memory and manufacturing method thereof |
| 03/16/2004 | US6706577 Formation of dual gate oxide by two-step wet oxidation |
| 03/16/2004 | US6706576 Laser thermal annealing of silicon nitride for increased density and etch selectivity |
| 03/16/2004 | US6706575 Method for fabricating a non-volatile memory |
| 03/16/2004 | US6706574 Field effect transistor and method for making the same |
| 03/16/2004 | US6706573 Thin film transistor and method of manufacturing the same |
| 03/16/2004 | US6706572 Method for manufacturing a thin film transistor using a high pressure oxidation step |
| 03/16/2004 | US6706571 Method for forming multiple structures in a semiconductor device |
| 03/16/2004 | US6706568 Method for manufacturing a semiconductor device with a crystallized semiconductor film leveled by radiating with laser beams |
| 03/16/2004 | US6706567 High voltage device having polysilicon region in trench and fabricating method thereof |
| 03/16/2004 | US6706566 Methodology for electrically induced selective breakdown of nanotubes |
| 03/16/2004 | US6706565 Methods of forming an integrated circuit device |
| 03/16/2004 | US6706564 Method for fabricating semiconductor package and semiconductor package |
| 03/16/2004 | US6706561 Method for fabricating preplated nickel/palladium and tin leadframes |
| 03/16/2004 | US6706559 Method of attaching a leadframe to singulated semiconductor dice |
| 03/16/2004 | US6706558 Manufacturing method of semiconductor device |
| 03/16/2004 | US6706555 Method for filling a gap between spaced layers of a semiconductor |
| 03/16/2004 | US6706554 Conductor posts, construction for and method of fabricating semiconductor integrated circuit chips using the conductor post, and method of probing semiconductor integrated circuit chips |
| 03/16/2004 | US6706553 Dispensing process for fabrication of microelectronic packages |
| 03/16/2004 | US6706552 Method for making interactive information devices with spacer elements |
| 03/16/2004 | US6706547 Method of manufacturing a circuit device with trenches in a conductive foil |
| 03/16/2004 | US6706546 Optical reflective structures and method for making |
| 03/16/2004 | US6706545 Method of fabricating a liquid crystal display |
| 03/16/2004 | US6706544 Light emitting device and fabricating method thereof |
| 03/16/2004 | US6706543 Method of monitoring and/or controlling a semiconductor manufacturing apparatus and a therefor |
| 03/16/2004 | US6706542 Application of InAIAs double-layer to block dopant out-diffusion in III-V device Fabrication |
| 03/16/2004 | US6706541 Method and apparatus for controlling wafer uniformity using spatially resolved sensors |
| 03/16/2004 | US6706540 Method of manufacturing a semiconductor device with a hydrogen barrier layer |
| 03/16/2004 | US6706473 Systems and devices for photoelectrophoretic transport and hybridization of oligonucleotides |
| 03/16/2004 | US6706461 Dyed photoresists and methods and articles of manufacture comprising same |
| 03/16/2004 | US6706453 Photolithographic formation of microscopic patterns in semiconductor; integrated circuits; resolution |
| 03/16/2004 | US6706452 Method of manufacturing photomask and method of manufacturing semiconductor integrated circuit device |
| 03/16/2004 | US6706422 Electroless Ni—B plating liquid, electronic device and method for manufacturing the same |
| 03/16/2004 | US6706417 Fluxing underfill compositions |