| Patents for H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof (658,974) |
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| 03/30/2004 | US6713379 Method for forming a damascene structure |
| 03/30/2004 | US6713378 Interconnect line selectively isolated from an underlying contact plug |
| 03/30/2004 | US6713377 Method of electroless plating copper on nitride barrier |
| 03/30/2004 | US6713376 Method of manufacturing a contract element and a multi-layered wiring substrate, and wafer batch contact board |
| 03/30/2004 | US6713374 Interconnect assemblies and methods |
| 03/30/2004 | US6713373 Method for obtaining adhesion for device manufacture |
| 03/30/2004 | US6713372 Method for manufacturing synchronous DRAM device |
| 03/30/2004 | US6713371 Large grain size polysilicon films formed by nuclei-induced solid phase crystallization |
| 03/30/2004 | US6713370 Process for the preparation of an ideal oxygen precipitating silicon wafer capable of forming an enhanced denuded zone |
| 03/30/2004 | US6713368 Etching mask and magnetic head device |
| 03/30/2004 | US6713366 Method of thinning a wafer utilizing a laminated reinforcing layer over the device side |
| 03/30/2004 | US6713365 Methods for filling shallow trench isolations having high aspect ratios |
| 03/30/2004 | US6713364 Method for forming an insulator having a low dielectric constant on a semiconductor substrate |
| 03/30/2004 | US6713363 Method for fabricating capacitor of semiconductor device |
| 03/30/2004 | US6713362 Method for forming a resistor to replace a N-well resistor |
| 03/30/2004 | US6713361 Method of manufacturing a bipolar junction transistor including undercutting regions adjacent to the emitter region to enlarge the emitter region |
| 03/30/2004 | US6713360 System for reducing segregation and diffusion of halo implants into highly doped regions |
| 03/30/2004 | US6713359 Semiconductor device and method of manufacturing the same including raised source/drain comprising SiGe or SiC |
| 03/30/2004 | US6713358 Method for making a semiconductor device having a high-k gate dielectric |
| 03/30/2004 | US6713357 Method to reduce parasitic capacitance of MOS transistors |
| 03/30/2004 | US6713356 Method for making a semiconductor device comprising a stack alternately consisting of silicon layers and dielectric material layers |
| 03/30/2004 | US6713355 Semiconductor processing method |
| 03/30/2004 | US6713354 Coding method for mask ROM |
| 03/30/2004 | US6713353 Method of manufacturing a semiconductor integrated circuit device |
| 03/30/2004 | US6713352 Method of forming a trench MOSFET with structure having increased cell density and low gate charge |
| 03/30/2004 | US6713351 Double diffused field effect transistor having reduced on-resistance |
| 03/30/2004 | US6713350 Method to remove an oxide seam along gate stack edge, when nitride space formation begins with an oxide liner surrounding gate stack |
| 03/30/2004 | US6713349 Method for fabricating a split gate flash memory cell |
| 03/30/2004 | US6713348 Method for forming an etch mask during the manufacture of a semiconductor device |
| 03/30/2004 | US6713347 Process for integrating in a same chip a non-volatile memory and a high-performance logic circuitry |
| 03/30/2004 | US6713346 Methods of forming a line of flash memory cells |
| 03/30/2004 | US6713345 Semiconductor memory device having a trench and a gate electrode vertically formed on a wall of the trench |
| 03/30/2004 | US6713344 Semiconductor device and method for manufacturing the same |
| 03/30/2004 | US6713343 Method of forming a semiconductor device with a capacitor including a polycrystalline tantalum oxide film dielectric |
| 03/30/2004 | US6713342 FeRAM sidewall diffusion barrier etch |
| 03/30/2004 | US6713341 Method of forming a bottle-shaped trench in a semiconductor substrate |
| 03/30/2004 | US6713340 Method for fabricating a memory device |
| 03/30/2004 | US6713339 Methods of forming switchable circuit devices |
| 03/30/2004 | US6713338 Method for fabricating source/drain devices |
| 03/30/2004 | US6713337 Method for manufacturing a semiconductor device having self-aligned contacts |
| 03/30/2004 | US6713336 Flash memory device and method for fabricating the same |
| 03/30/2004 | US6713335 Method of self-aligning a damascene gate structure to isolation regions |
| 03/30/2004 | US6713334 Fabricating dual voltage CMOSFETs using additional implant into core at high voltage mask |
| 03/30/2004 | US6713333 Method for fabricating a MOSFET |
| 03/30/2004 | US6713332 Non-volatile memory device with enlarged trapping layer |
| 03/30/2004 | US6713331 Semiconductor device manufacturing using one element separation film |
| 03/30/2004 | US6713330 Method of fabricating a thin film transistor |
| 03/30/2004 | US6713329 Inverter made of complementary p and n channel transistors using a single directly-deposited microcrystalline silicon film |
| 03/30/2004 | US6713328 Manufacturing method of thin film transistor panel |
| 03/30/2004 | US6713327 Stress controlled dielectric integrated circuit fabrication |
| 03/30/2004 | US6713326 Process for producing semiconductor article using graded epitaxial growth |
| 03/30/2004 | US6713325 Method of manufacturing a semiconductor integrated circuit and semiconductor integrated circuit |
| 03/30/2004 | US6713324 Display device and a method for manufacturing the same |
| 03/30/2004 | US6713323 Semiconductor device and method of manufacturing the same |
| 03/30/2004 | US6713321 Super low profile package with high efficiency of heat dissipation |
| 03/30/2004 | US6713320 Bumping process |
| 03/30/2004 | US6713319 Method for fabricating a semiconductor apparatus including a sealing member with reduced thermal stress |
| 03/30/2004 | US6713318 Flip chip interconnection using no-clean flux |
| 03/30/2004 | US6713316 Method for removing foreign matter, method for forming film, semiconductor device and film forming apparatus |
| 03/30/2004 | US6713315 Mask read-only memory and fabrication thereof |
| 03/30/2004 | US6713314 Hermetically packaging a microelectromechanical switch and a film bulk acoustic resonator |
| 03/30/2004 | US6713310 Ferroelectric memory device using via etch-stop layer and method for manufacturing the same |
| 03/30/2004 | US6713298 Device for detecting particles in fluid |
| 03/30/2004 | US6713235 On top of supports on a base spaced away |
| 03/30/2004 | US6713234 Fabrication of semiconductor devices using anti-reflective coatings |
| 03/30/2004 | US6713232 Using acidic aqueous solution |
| 03/30/2004 | US6713231 Method of manufacturing semiconductor integrated circuit devices |
| 03/30/2004 | US6713229 May be exposed to light using arf lasers, may have strong resistances to dry etching processes, may possess excellent adhesion to film materials, and may be developed using conventional developers |
| 03/30/2004 | US6713228 Unsaturated ether containing polymer |
| 03/30/2004 | US6713199 Plurality of separate layers, each having a thickness of less than 500 angstrom , and based on hafnium dioxide (hfo2), zirconium dioxide (zro2) and alumina (al2o3). in practice, the hafnium dioxide, zirconium dioxide and alumina layers form |
| 03/30/2004 | US6713134 Apparatus for spin-coating semiconductor substrate and method of doing the same |
| 03/30/2004 | US6713127 Methods for silicon oxide and oxynitride deposition using single wafer low pressure CVD |
| 03/30/2004 | US6713122 Methods and apparatus for airflow and heat management in electroless plating |
| 03/30/2004 | US6713120 Substrate processing system and substrate processing method |
| 03/30/2004 | US6712983 Method of etching a deep trench in a substrate and method of fabricating on-chip devices and micro-machined structures using the same |
| 03/30/2004 | US6712956 Apparatus for monitoring discharge of photoresist |
| 03/30/2004 | US6712929 Deformation reduction at the main chamber |
| 03/30/2004 | US6712928 Method and its apparatus for detecting floating particles in a plasma processing chamber and an apparatus for processing a semiconductor device |
| 03/30/2004 | US6712927 Chamber having process monitoring window |
| 03/30/2004 | US6712926 Recycling apparatus |
| 03/30/2004 | US6712909 Substrate processing apparatus and method for manufacturing semiconductor device |
| 03/30/2004 | US6712908 Purified silicon production system |
| 03/30/2004 | US6712907 Magnetically coupled linear servo-drive mechanism |
| 03/30/2004 | US6712903 Mask for evaluating selective epitaxial growth process |
| 03/30/2004 | US6712676 Methods and apparatuses for mechanical and chemical-mechanical planarization of microelectronic-device substrate assemblies on planarizing pads |
| 03/30/2004 | US6712674 Polishing apparatus and polishing method |
| 03/30/2004 | US6712670 Method and apparatus for applying downward force on wafer during CMP |
| 03/30/2004 | US6712579 Substrate transfer apparatus and substrate transfer method |
| 03/30/2004 | US6712577 Automated semiconductor processing system |
| 03/30/2004 | US6712320 Single-handed cord/cable management device |
| 03/30/2004 | US6712288 Method and apparatus for separating sample |
| 03/30/2004 | US6712284 High frequency semiconductor device |
| 03/30/2004 | US6712265 System and method for interlocking management in semiconductor material supply equipment |
| 03/30/2004 | US6712261 Solid conductive element insertion apparatus |
| 03/30/2004 | US6712260 Bump reflow method by inert gas plasma |
| 03/30/2004 | US6712258 Integrated quantum cold point coolers |
| 03/30/2004 | US6712213 Wafer carrier door and latching mechanism withhourglass shaped key slot |
| 03/30/2004 | US6712132 Piezoelectric wafer clamping system |
| 03/30/2004 | US6712111 Bonding method and apparatus |
| 03/30/2004 | US6712110 Apparatus for attaching resists and wafers to substrates |