| Patents for H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof (658,974) |
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| 03/18/2004 | US20040053483 Methods of forming electronic structures including conductive shunt layers and related structures |
| 03/18/2004 | US20040053482 Manufacturing method of semiconductor device |
| 03/18/2004 | US20040053481 Methods and apparatus for improved mosfet drain extension activation |
| 03/18/2004 | US20040053480 Method for processing thin film and apparatus for processing thin film |
| 03/18/2004 | US20040053479 Method and device for plasma cvd |
| 03/18/2004 | US20040053478 Method of making a semiconductor device with exposure of sapphire substrate to activated nitrogen |
| 03/18/2004 | US20040053477 Process for transferring a layer of strained semiconductor material |
| 03/18/2004 | US20040053476 Method of fabricating semiconductor device and system of fabricating semiconductor device |
| 03/18/2004 | US20040053475 Method for forming a sublithographic opening in a semiconductor process |
| 03/18/2004 | US20040053474 Capacitor and method for fabricating the same |
| 03/18/2004 | US20040053473 Method for fabricating semiconductor device |
| 03/18/2004 | US20040053472 Method for film formation of gate insulator, apparatus for film formation of gate insulator, and cluster tool |
| 03/18/2004 | US20040053469 Method for forming quantum dot |
| 03/18/2004 | US20040053468 Method for forming a protective buffer layer for high temperature oxide processing |
| 03/18/2004 | US20040053467 Single-poly eprom and method for forming the same |
| 03/18/2004 | US20040053466 Semiconductor device and method for manufacturing the same |
| 03/18/2004 | US20040053465 Semiconductor device having diffusion barrier layer containing chrome and method for fabricating the same |
| 03/18/2004 | US20040053464 Process of forming a bottle-shaped trench |
| 03/18/2004 | US20040053463 Method of manufacturing semiconductor device |
| 03/18/2004 | US20040053462 Method for fabricating capacitor of semiconductor device |
| 03/18/2004 | US20040053461 Graded GexSe100-x concentration in PCRAM |
| 03/18/2004 | US20040053460 Substrate for electronic devices, manufacturing method therefor, and electronic device |
| 03/18/2004 | US20040053459 Dielectric layer for a semiconductor device and method of producing the same |
| 03/18/2004 | US20040053458 Semiconductor device with element isolation using impurity-doped insulator and oxynitride film |
| 03/18/2004 | US20040053457 Method for fabricating semiconductor device with ultra-shallow super-steep-retrograde epi-channel by boron-fluoride compound doping |
| 03/18/2004 | US20040053456 Mosfet with short channel structure and formation method thereof |
| 03/18/2004 | US20040053455 System and method for forming a semiconductor with an analog capacitor using fewer structure steps |
| 03/18/2004 | US20040053454 Method of forming lightly doped drains |
| 03/18/2004 | US20040053453 Dopant interface formation |
| 03/18/2004 | US20040053452 Method of fabricating semiconductor device |
| 03/18/2004 | US20040053451 Semiconductor device and manufacturing method thereof |
| 03/18/2004 | US20040053450 Method and system for providing a single-scan, continous motion sequential lateral solidification |
| 03/18/2004 | US20040053449 Method for producing plastic active panel displays |
| 03/18/2004 | US20040053448 Power MOSFET with ultra-deep base and reduced on resistance |
| 03/18/2004 | US20040053447 Leadframe having fine pitch bond fingers formed using laser cutting method |
| 03/18/2004 | US20040053446 Semiconductor device and manufacturing method of the same |
| 03/18/2004 | US20040053444 Manufacturing method of a semiconductor device incorporating a passive element and a redistribution board |
| 03/18/2004 | US20040053443 Molded flip chip package |
| 03/18/2004 | US20040053442 Semiconductor package with stacked substrates and multiple semiconductor dice |
| 03/18/2004 | US20040053441 Dopant interface formation |
| 03/18/2004 | US20040053439 Method for producing low-resistance ohmic contacts between substrates and wells in CMOS integrated circuits |
| 03/18/2004 | US20040053438 Semiconductor wafer and its manufacturing method |
| 03/18/2004 | US20040053437 MOS image pick-up device and camera incorporating the same |
| 03/18/2004 | US20040053436 Buried channel CMOS imager and method of forming same |
| 03/18/2004 | US20040053434 Microelectronic mechanical system and methods |
| 03/18/2004 | US20040053433 Method for producing crystal thin plate and solar cell comprising crystal thin plate |
| 03/18/2004 | US20040053431 Method of forming a flexible thin film transistor display device with a metal foil substrate |
| 03/18/2004 | US20040053429 Method for identifying semiconductor integrated circuit device, method for manufacturing semiconductor integrated circuit device, semiconductor integrated circuit device and semiconductor chip |
| 03/18/2004 | US20040053428 Method and apparatus for the compensation of edge ring wear in a plasma processing chamber |
| 03/18/2004 | US20040053427 Method of fabricating a ferromagnetic memory device |
| 03/18/2004 | US20040053322 System and method for the analysis of bodily fluids |
| 03/18/2004 | US20040053184 Large area substrate processing system |
| 03/18/2004 | US20040053172 Increasing the wetting between the developer and photoresist, by applying a solutions comprising 2,5,8,11-tetramethyl-6-dodecyne-5,8-diol surfactant |
| 03/18/2004 | US20040053170 Method for forming pattern and treating agent for use therein |
| 03/18/2004 | US20040053162 Intermediate layer material composition for multilayer resist process and pattern formation process using the same |
| 03/18/2004 | US20040053158 Onium salts and the use therof as latent acids |
| 03/18/2004 | US20040053148 Exposure method and apparatus |
| 03/18/2004 | US20040053147 Controlling to set an exhaust amount from the first peripheral region outside the cup, an exhaust amount from second peripheral region inside the cup in performing rinsing with the substrate held in vacuum adsorption |
| 03/18/2004 | US20040053146 Method of varying template dimensions to achieve alignment during imprint lithography |
| 03/18/2004 | US20040053144 Phase shift mask, and exposure method and device manufacturing method using the same |
| 03/18/2004 | US20040053141 First feature of phase shifter is large so the effectiveness of phase shifting is degraded in defining space, degradation of phase shifting and tightness of space cause the space not to print reliabily when exposed alone by phase-shifting mask |
| 03/18/2004 | US20040053007 Used for transporting square or rectangular substrates, such as a glass substrate for a display or the like; substrate is used for producing a display panel of, for example, a liquid crystal display device; nonwarping, dustless |
| 03/18/2004 | US20040052990 Novel pad structure to prompt excellent bondability for low-k intermetal dielectric layers |
| 03/18/2004 | US20040052975 Silicon oxide or oxynitride layers on substrates formed by sputtering, for use as weatherproof, heat and chemical resistant protective sheets used for packaging foods, drugs or electronics |
| 03/18/2004 | US20040052973 Positioning wafers in combustion chambers and heating; combustion |
| 03/18/2004 | US20040052971 Obtaining adamantine amorphous carbon films by using plasma consisting of a mixture of acetylene and argon maintained by power of a microwave source |
| 03/18/2004 | US20040052963 Decrease in the temperature of the working solution prevents thermal decomposition and reduces formation of bubbles; semiconductors/integrated circuits; dielectrics |
| 03/18/2004 | US20040052948 Electronic device manufacture |
| 03/18/2004 | US20040052944 Suspending an emissive small organic molecule or an emissive conjugated polymer in a compressed carbon diioxide solvent phase, depositing the suspension onto the desired layer of light emitting diode, evaporating the solvent |
| 03/18/2004 | US20040052933 Semiconductor device and process for producing the same, and tablet comprising epoxy resin composition |
| 03/18/2004 | US20040052930 Using copper metal or alloy conductive layer |
| 03/18/2004 | US20040052886 Molds for wafer scale molding of protective caps |
| 03/18/2004 | US20040052696 Scrubbing modules; removal heat from air draw from confined environment |
| 03/18/2004 | US20040052632 Wafer transport apparatus |
| 03/18/2004 | US20040052631 Mechanical arm device for carrying and detecting wafer |
| 03/18/2004 | US20040052626 Board-conveying robot |
| 03/18/2004 | US20040052624 Automated guided vehicle |
| 03/18/2004 | US20040052618 Semiconductor device producing apparatus and producing method of semiconductor device |
| 03/18/2004 | US20040052512 Semiconductor thermal process control |
| 03/18/2004 | US20040052511 Device for fast and uniform heating substrate with infrared radiation |
| 03/18/2004 | US20040052279 Laser apparatus, laser irradiation method, and manufacturing method of semiconductor device |
| 03/18/2004 | US20040052154 Chemical solution feeding apparatus and method for preparing slurry |
| 03/18/2004 | US20040052150 Magnetoresistive memory or sensor devices having improved switching properties and method of fabrication |
| 03/18/2004 | US20040052142 Semiconductor memory device and method of controlling the same |
| 03/18/2004 | US20040052139 Memory cell and method for forming the same |
| 03/18/2004 | US20040052131 Information storage device and manufacturing method thereof |
| 03/18/2004 | US20040052127 Magnetic random access memory and method for manufacturing the same |
| 03/18/2004 | US20040052108 Thin film magnetic memory device suppressing resistance of transistors present in current path |
| 03/18/2004 | US20040052107 Thin film magnetic memory device capable of stably writing/reading data and method of fabricating the same |
| 03/18/2004 | US20040052106 Semiconductor memory device with latch circuit and two magneto-resistance elements |
| 03/18/2004 | US20040052102 Semiconductor memory device capable of holding write data for long time |
| 03/18/2004 | US20040052060 Low profile chip scale stacking system and method |
| 03/18/2004 | US20040052031 Substrate holder and device manufacturing method |
| 03/18/2004 | US20040052006 Magnetoresistance element and magnetoresistance storage element and magnetic memory |
| 03/18/2004 | US20040051977 Exposing apparatus and exposing method for microlens array |
| 03/18/2004 | US20040051953 Illumination apparatus with light shielding near an exit plane of an optical pipe and projection exposure apparatus using same |
| 03/18/2004 | US20040051949 Optical material, and, optical element, optical system and laminated diffractive optical element using it |
| 03/18/2004 | US20040051882 Methods and apparatus for predicting oxygen-induced stacking fault density in wafers |
| 03/18/2004 | US20040051858 Lithography apparatus |
| 03/18/2004 | US20040051857 Projection system for EUV lithography |