Patents
Patents for H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof (658,974)
03/2004
03/23/2004US6709909 Semiconductor device and method of manufacturing the same
03/23/2004US6709908 Methods for making semiconductor devices
03/23/2004US6709907 Method of fabricating a thin film transistor
03/23/2004US6709906 Method for producing semiconductor device
03/23/2004US6709905 Method for producing insulated gate thin film semiconductor device
03/23/2004US6709904 Vertical replacement-gate silicon-on-insulator transistor
03/23/2004US6709903 Relaxed SiGe layers on Si or silicon-on-insulator substrates by ion implantation and thermal annealing
03/23/2004US6709902 Semiconductor device and manufacturing method thereof
03/23/2004US6709901 Semiconductor device having stick drivers and a method of manufacturing the same
03/23/2004US6709900 Method of fabricating integrated system on a chip protection circuit
03/23/2004US6709899 Methods of making microelectronic assemblies having conductive elastomeric posts
03/23/2004US6709896 Methods for use in packaging applications using an adhesive composition
03/23/2004US6709892 Electronic device fabrication method comprising twofold cutting of conductor member
03/23/2004US6709890 Method of manufacturing semiconductor integrated circuit device
03/23/2004US6709887 Method of forming a chalcogenide comprising device
03/23/2004US6709885 Method of fabricating image sensors using a thin film photodiode above active CMOS circuitry
03/23/2004US6709881 Method for manufacturing semiconductor and method for manufacturing semiconductor device
03/23/2004US6709880 Semiconductor device and a manufacturing method of the same
03/23/2004US6709879 Method for inspecting a pattern defect process
03/23/2004US6709878 Electronic device workpieces, methods of semiconductor processing and methods of sensing temperature of an electronic device workpiece
03/23/2004US6709876 Method for detecting removal of organic material from a semiconductor device in a manufacturing process
03/23/2004US6709875 Contamination control for embedded ferroelectric device fabrication processes
03/23/2004US6709874 Method of manufacturing a metal cap layer for preventing damascene conductive lines from oxidation
03/23/2004US6709807 Process for reducing edge roughness in patterned photoresist
03/23/2004US6709799 Resist compositions
03/23/2004US6709794 Exposure method based on multiple exposure process
03/23/2004US6709792 Method for formation of semiconductor device pattern, method for designing photo mask pattern, photo mask and process for photo mask
03/23/2004US6709791 Reducing optical characteristic changes upon irradiation with excimer laser; having protective film containing at least chromium and fluorine
03/23/2004US6709749 Method for the reduction of lateral shrinkage in multilayer circuit boards on a substrate
03/23/2004US6709721 Purge heater design and process development for the improvement of low k film properties
03/23/2004US6709715 Plasma enhanced chemical vapor deposition of copolymer of parylene N and comonomers with various double bonds
03/23/2004US6709714 Raw material supplying means, a vacuum cavity, an energy supplier, a clad laminator, and a baked solidified polymer
03/23/2004US6709705 Method of producing a track on a substrate
03/23/2004US6709703 Method for fabricating a III-V nitride film and an apparatus for fabricating the same
03/23/2004US6709699 Dispensing coating solution onto substrate while moving nozzle to form liquid film; arranging a sucking nozzle above and apart from target substrate such that the sucking nozzle is not in contact with liquid surface, sucking solvent vapor
03/23/2004US6709610 Isotropic dry cleaning process for noble metal integrated circuit structures
03/23/2004US6709609 Plasma heating of a substrate with subsequent high temperature etching
03/23/2004US6709608 Semiconductor processing component
03/23/2004US6709605 Etching method
03/23/2004US6709565 For planarizing metal surfaces having low aspect ratio recesses or trenches as well as raised regions; fluid exchange rate changes with elevation
03/23/2004US6709564 Electrodepositing copper; organic additive increases throwing power, leveling, suppresses deposition rate; copper salts increase overvoltage; copper pyrophosphate; cyanide, halide, thiocyanate, sulfamate; 2,5-dimercapto-1,3,4-thiadiazole
03/23/2004US6709562 Void-free and seamless; copper is superior to the electromigration resistance of alcu
03/23/2004US6709555 Plating method, interconnection forming method, and apparatus for carrying out those methods
03/23/2004US6709554 Method and apparatus for repairing lithography masks using a charged particle beam system
03/23/2004US6709553 Multiple-step sputter deposition
03/23/2004US6709547 Moveable barrier for multiple etch processes
03/23/2004US6709546 Device and method for etching a substrate by using an inductively coupled plasma
03/23/2004US6709545 Substrate processing apparatus and substrate processing method
03/23/2004US6709544 Chemical mechanical polishing equipment
03/23/2004US6709543 Semiconductor chip pickup device and pickup method
03/23/2004US6709532 Apparatus and method for photoresist stripping
03/23/2004US6709525 Low pressure chemical vapor deposition apparatus of vertical type for fabricating semiconductor devices
03/23/2004US6709523 Silylation treatment unit and method
03/23/2004US6709522 Material handling system and methods for a multichamber plasma treatment system
03/23/2004US6709521 Transfer apparatus and accommodating apparatus for semiconductor process, and semiconductor processing system
03/23/2004US6709520 Reactor and method for chemical vapor deposition
03/23/2004US6709513 Substrate including wide low-defect region for use in semiconductor element
03/23/2004US6709512 Method of growing a polycrystalline silicon layer, method of growing a single crystal silicon layer and catalytic CVD apparatus
03/23/2004US6709511 Process for suppressing oxygen precipitation in vacancy dominated silicon
03/23/2004US6709475 Installation for processing wafers
03/23/2004US6709470 Benchtop processing
03/23/2004US6709469 Spacer plate solder ball placement fixture and methods therefor
03/23/2004US6709322 Apparatus for aligning a surface of an active retainer ring with a wafer surface for chemical mechanical polishing
03/23/2004US6709317 Method and apparatus for uniformly planarizing a microelectronic substrate
03/23/2004US6709316 Chemical mechanical polishing, copper
03/23/2004US6709279 Contact pin module and testing device provided with the same
03/23/2004US6709267 Semiconductors
03/23/2004US6709225 System for installation, maintenance and removal of minienvironment components
03/23/2004US6709218 Robot blade for semiconductor processing equipment
03/23/2004US6709174 Apparatus and method for development
03/23/2004US6708903 Two-fluid cleaning jet nozzle, cleaning equipment and method of fabricating semiconductor device employing the same
03/23/2004US6708873 Apparatus and method for filling high aspect ratio via holes in electronic substrates
03/23/2004US6708868 Method for producing weld points on a substrate and guide for implementing said method
03/23/2004US6708862 Die bonding apparatus
03/23/2004US6708816 Device for handling components
03/23/2004US6708702 Liquid processing apparatus with storage tank having an internal and external tank
03/23/2004US6708701 Capillary ring
03/23/2004US6708574 Abnormal photoresist line/space profile detection through signal processing of metrology waveform
03/23/2004US6708565 Ultrasonic wafer blade vibration detecting
03/23/2004US6708405 Masking insulating layer on semiconductor substrate, forming contact hole by isotropic, then anisotropic etching, removing mask, filling hole with conductor, etching back, forming adhesion promoting layer, filling with second conductor
03/23/2004US6708403 Angled flying lead wire bonding process
03/23/2004US6708398 Substrate for use in package of semiconductor device, semiconductor package using the substrate, and methods for manufacturing the substrate and the semiconductor package
03/23/2004CA2308484C Polymer optical waveguide and method for fabricating the same
03/23/2004CA2221906C Optical pellicle mounting system
03/18/2004WO2004023567A2 Method of manufacturing a solar cell
03/18/2004WO2004023562A1 Semiconductor memory with vertical memory transistors and method for production thereof
03/18/2004WO2004023561A1 Thin film transistor, liquid crystal display apparatus, manufacturing method of thin film transistor, and manufacturing method of liquid crystal display apparatus
03/18/2004WO2004023559A1 Semiconductor storage device and its manufacturing method
03/18/2004WO2004023558A2 Flash memory cell and the method of making separate sidewall oxidation
03/18/2004WO2004023557A2 Semiconductor memory with vertical memory transistors in a cell field arrangement with 1-2f2 cells
03/18/2004WO2004023556A1 Word and bit line arrangement for a finfet semiconductor memory
03/18/2004WO2004023553A2 Bitline structure and method for production thereof
03/18/2004WO2004023550A1 Method for fabrication of in-laid metal interconnects
03/18/2004WO2004023549A1 Semiconductor device and its manufacturing method
03/18/2004WO2004023548A1 Probing method and probe
03/18/2004WO2004023547A1 Probing method, probe, and mechanism for reducing/plasma etching electrode
03/18/2004WO2004023545A1 Apparatus for manufacturing semiconductor device and method for manufacturing semiconductor device by using the same
03/18/2004WO2004023544A1 Semiconductor device and method for manufacturing semiconductor device
03/18/2004WO2004023543A1 Method of fabricating a self-aligned non-volatile memory cell
03/18/2004WO2004023542A1 Semiconductor device and its manufacturing method