| Patents for H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof (658,974) |
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| 03/16/2004 | US6706402 Nanotube films and articles |
| 03/16/2004 | US6706383 Polishing pad support that improves polishing performance and longevity |
| 03/16/2004 | US6706336 Silicon-based film, formation method therefor and photovoltaic element |
| 03/16/2004 | US6706335 Effecting high frequency plasma chemical vapor deposition using a source gas comprising a silicon halide (silicon chloride or fluoride) and hydrogen forming a silicon thin film |
| 03/16/2004 | US6706334 Degenerating with plasma gas containing nitrogen, hydrogen and nitrogen trifluoride and sublimating |
| 03/16/2004 | US6706322 Film forming apparatus and film forming method |
| 03/16/2004 | US6706204 Method of fabricating and a device that includes nanosize pores having well controlled geometries |
| 03/16/2004 | US6706200 Method for fabricating ESI device using smile and delayed LOCOS techniques |
| 03/16/2004 | US6706158 Electrochemical mechanical planarization |
| 03/16/2004 | US6706155 Sputtering apparatus and film manufacturing method |
| 03/16/2004 | US6706142 Systems and methods for enhancing plasma processing of a semiconductor substrate |
| 03/16/2004 | US6706141 Device to generate excited/ionized particles in a plasma |
| 03/16/2004 | US6706140 Control system for in-situ feeding back a polish profile |
| 03/16/2004 | US6706139 Method and apparatus for cleaning a web-based chemical mechanical planarization system |
| 03/16/2004 | US6706138 Adjustable dual frequency voltage dividing plasma reactor |
| 03/16/2004 | US6706130 Method and device for frictional connection and holding tool used for the frictional connection device |
| 03/16/2004 | US6706121 A treatment fluid is fed into a collection vessel after a treatment, a portion of the treatment fluid is withdrawn from collection vessel and returned into the respective container, rinsing the collection vessel after fluid withdrawal |
| 03/16/2004 | US6706119 Apparatus for epitaxially growing semiconductor device structures with submicron group III nitride layer utilizing HVPE |
| 03/16/2004 | US6706116 Method of forming a crystalline phase material |
| 03/16/2004 | US6706115 Atomic Layer Deposition; alternate surface reactions of metal and nitrogen source materials, the nitrogen compound having a hydrocarbon, amino or silyl group bound to nitrogen, which group dissociates to form a reducing agentas a reducing agent |
| 03/16/2004 | US6705935 Abrasive molding and abrasive disc provided with same |
| 03/16/2004 | US6705930 System and method for polishing and planarizing semiconductor wafers using reduced surface area polishing pads and variable partial pad-wafer overlapping techniques |
| 03/16/2004 | US6705929 Cloth cleaning device and polishing machine |
| 03/16/2004 | US6705926 A trialkylborate, a borinic acid, boronic acid, borinate ester, or boronate ester, benzodioxaborole compound; abrasive water slurry; chemical mechanical polishing |
| 03/16/2004 | US6705925 Apparatus and method to dice integrated circuits from a wafer using a pressurized jet |
| 03/16/2004 | US6705924 Carrier head with a substrate detection mechanism for a chemical mechanical polishing system |
| 03/16/2004 | US6705922 Method and apparatus for polishing a semiconductor substrate wafer |
| 03/16/2004 | US6705876 Electrical interconnect assemblies and methods |
| 03/16/2004 | US6705830 Vacuum pump |
| 03/16/2004 | US6705828 Vacuum processing apparatus and semiconductor manufacturing line using the same |
| 03/16/2004 | US6705816 Wafer transport mechanism |
| 03/16/2004 | US6705526 Automated method of and system for dimensioning objects transported through a work environment using contour tracing, vertice detection, corner point detection, and corner point reduction methods on two-dimensional range data maps captured by an amplitude modulated laser scanning beam |
| 03/16/2004 | US6705513 Methods of bonding solder balls to bond pads on a substrate, and bonding frames |
| 03/16/2004 | US6705507 Die attach system and process using cornercube offset tool |
| 03/16/2004 | US6705457 Transport device and method of transporting to-be-processed elements through a high-temperature zone |
| 03/16/2004 | US6705450 Clean room having an escalator, and method of transporting a semiconductor device therein |
| 03/16/2004 | US6705394 Rapid cycle chuck for low-pressure processing |
| 03/16/2004 | US6705331 Substrate cleaning apparatus |
| 03/16/2004 | US6705302 Ignition device for an internal combustion engine |
| 03/16/2004 | US6705246 RF powered plasma enhanced chemical vapor deposition reactor and methods of effecting plasma enhanced chemical vapor deposition |
| 03/16/2004 | US6705177 Robot arm mechanism |
| 03/16/2004 | US6705144 Manufacturing process for a radial fin heat sink |
| 03/16/2004 | US6705095 Semiconductor process tool incorporating heat exchanger |
| 03/16/2004 | US6705020 Method of and apparatus for use in orienting an object at a reference angle |
| 03/16/2004 | US6705001 Apparatus for assembling integrated circuit packages |
| 03/16/2004 | US6704998 Port door removal and wafer handling robotic system |
| 03/12/2004 | CA2512478A1 Compound film, and method for fabrication the same |
| 03/11/2004 | WO2004021757A1 Device for selectively displacing holding devices and fitting head for transporting components |
| 03/11/2004 | WO2004021553A1 Voltage doubler circuit |
| 03/11/2004 | WO2004021489A2 Fixtures and methods for facilitating the fabrication of devices having thin film materials |
| 03/11/2004 | WO2004021463A2 Buffer layers for organic electroluminescent devices and methods of manufacture and use |
| 03/11/2004 | WO2004021458A1 Light emitting element and process for producing the same |
| 03/11/2004 | WO2004021457A2 Method for producing an electromagnetic radiation-emitting semiconductor chip and a corresponding electromagnetic radiation-emitting semiconductor chip |
| 03/11/2004 | WO2004021450A1 Gate electrode and its fabricating method |
| 03/11/2004 | WO2004021449A1 Semiconductor memory and method for manufacturing same |
| 03/11/2004 | WO2004021448A1 Non-volatile semiconductor memory element and corresponding production and operation method |
| 03/11/2004 | WO2004021447A1 Tft array substrate, liquid crystal display device, manufacturing methods of tft array substrate and liquid crystal display device, and electronic device |
| 03/11/2004 | WO2004021446A1 Organic semiconductor device and its manufacturing method |
| 03/11/2004 | WO2004021445A1 Double-gate type mos field effect transistor and production method therefor |
| 03/11/2004 | WO2004021443A1 Configurable molecular switch array |
| 03/11/2004 | WO2004021442A1 Semiconductor memory |
| 03/11/2004 | WO2004021441A1 Semiconductor storage device and its manufacturing method |
| 03/11/2004 | WO2004021440A1 Semiconductor device including a field effect transistor and a passive capacitor having reduced leakage current and an improved capacitance per unit area |
| 03/11/2004 | WO2004021439A1 Mim capacitor |
| 03/11/2004 | WO2004021437A1 Coating of an integrated semiconductor circuit, and method for producing said coating |
| 03/11/2004 | WO2004021434A1 Method for forming conductive material in opening and structure regarding same |
| 03/11/2004 | WO2004021433A1 Method for manufacturing soi wafer |
| 03/11/2004 | WO2004021432A1 Protective structure of semiconductor wafer, method for protecting semiconductor wafer, multilayer protective sheet used therein, and method for processing semiconductor wafer |
| 03/11/2004 | WO2004021431A1 Production of a rewiring layer on a supporting material |
| 03/11/2004 | WO2004021430A1 Method for endpoint detection during etch |
| 03/11/2004 | WO2004021429A1 Transistor structure including a metal silicide gate and channel implants and method of manufacturing the same |
| 03/11/2004 | WO2004021428A1 Method of eliminating boron contamination of annealed wafer |
| 03/11/2004 | WO2004021427A1 Plasma processing method and plasma processing device |
| 03/11/2004 | WO2004021425A1 Method of etching and etching apparatus |
| 03/11/2004 | WO2004021424A1 Transistor element having an anisotropic high-k gate dielectric |
| 03/11/2004 | WO2004021423A1 Method of forming nanocrystals |
| 03/11/2004 | WO2004021422A1 Processing device, mounting table, processing method |
| 03/11/2004 | WO2004021421A1 Method for manufacturing silicon epitaxial wafer |
| 03/11/2004 | WO2004021420A2 Fabrication method for a monocrystalline semiconductor layer on a substrate |
| 03/11/2004 | WO2004021417A1 Maintenance system, substrate processing device, remote operation device, and communication method |
| 03/11/2004 | WO2004021416A1 Inspection condition data management method, system, program, and inspection device |
| 03/11/2004 | WO2004021415A1 Treating apparatus and method of treating |
| 03/11/2004 | WO2004021414A2 Integrated circuit arrangements, in particular capacitor arrangements and corresponding production method |
| 03/11/2004 | WO2004021413A1 Substrate carrier having door latching and substrate clamping mechanisms |
| 03/11/2004 | WO2004021412A2 Modular substrate gas panel having manifold connections in a common plane |
| 03/11/2004 | WO2004021411A2 Method and apparatus for supplying substrates to a processing tool |
| 03/11/2004 | WO2004021410A2 Deterministically doped field-effect devices and methods of making same |
| 03/11/2004 | WO2004021409A2 A method and system to enhance the removal of high-k-dielectric materials |
| 03/11/2004 | WO2004021408A1 Device and method for treating substrates |
| 03/11/2004 | WO2004021407A2 Electrical connector having a cored contact assembly |
| 03/11/2004 | WO2004021405A2 Method and system for dynamic modeling and recipe optimization of semiconductor etch processes |
| 03/11/2004 | WO2004021399A2 Dielectric storage memory cell (monos) having high permittivity top dielectric and method therefor |
| 03/11/2004 | WO2004021392A1 Gas tube end cap for a microwave plasma generator |
| 03/11/2004 | WO2004021372A1 Amorphous alloys for magnetic devices |
| 03/11/2004 | WO2004021362A1 Contactless uniform-tunneling separate p-well (cusp) non-volatile memory array architecture, fabrication and operation |
| 03/11/2004 | WO2004021361A2 Eeprom comprising a non-volatile register which is integrated into the memory area thereof |
| 03/11/2004 | WO2004021357A1 Magnetic random access memory having a vertical write line |
| 03/11/2004 | WO2004021227A2 Extracting wiring parasitics for filtered interconnections in an integrated circuit |
| 03/11/2004 | WO2004021088A2 Lithographic method for small line printing |
| 03/11/2004 | WO2004021086A1 Grating based spectral filter for eliminating out of band radiation in an extreme ultra-violet lithography system |