| Patents for H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof (658,974) |
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| 03/11/2004 | WO2004021085A1 Optical subsystem, particularly for a projection exposure system comprising at least one optical element that can be brought into at least two positions |
| 03/11/2004 | WO2004021083A1 Device for transferring a pattern to an object |
| 03/11/2004 | WO2004021082A2 Improved photomask having an intermediate inspection film layer |
| 03/11/2004 | WO2004021023A1 Method and apparatus for endpoint detection in electron beam assisted etching |
| 03/11/2004 | WO2004021022A2 Integrated circuit with embedded identification code |
| 03/11/2004 | WO2004020969A2 Production of nanoparticles having a defined number of ligands |
| 03/11/2004 | WO2004020961A1 Hermetic packaging |
| 03/11/2004 | WO2004020706A1 Lightly doped silicon carbide wafer and use thereof in high power devices |
| 03/11/2004 | WO2004020705A1 Epitaxial wafer and its manufacturing method |
| 03/11/2004 | WO2004020695A1 Substrate processing unit, method of detecting end point of cleaning of substrate processing unit, and method of detecting end point of substrate processing |
| 03/11/2004 | WO2004020693A1 Cleaning method for substrate-processing device and the device |
| 03/11/2004 | WO2004020692A1 Substrate treating apparatus |
| 03/11/2004 | WO2004020691A2 Systems and methods for forming zirconium and/or hafnium-containing layers |
| 03/11/2004 | WO2004020690A1 Systems and methods for forming metal oxides using alcohols |
| 03/11/2004 | WO2004020689A2 Systems and methods for forming metal oxides using metal organo-amines and metal organo-oxides |
| 03/11/2004 | WO2004020686A2 A hybrid beam deposition system and methods for fabricating zno films, p-type zno films, and zno-based ii-vi compound semiconductor devices |
| 03/11/2004 | WO2004020682A2 Improvements to oxide films |
| 03/11/2004 | WO2004020551A1 Etching pastes for titanium oxide surfaces |
| 03/11/2004 | WO2004020545A1 Method and apparatus for chemically, mechanically, and/or electrolytically removing material from microelectronic substrates |
| 03/11/2004 | WO2004020148A1 Method and apparatus for electromechanically and/or electrochemically-mechanically removing conductive material from a microelectronic substrate |
| 03/11/2004 | WO2004020137A1 Wedge-bonding of wires in electronic device manufacture with a reversible wedge bonding tool |
| 03/11/2004 | WO2004012257A9 Method and apparatus for manufacturing net shape semiconductor wafers |
| 03/11/2004 | WO2004001842A3 Layer assembly and method for producing a layer assembly |
| 03/11/2004 | WO2003103050A3 Variable capacitances for memory cells within a cell group |
| 03/11/2004 | WO2003096412A3 Method for the production of an integrated circuit and integrated circuit with a bipolar transistor and a hetero bipolar transistor |
| 03/11/2004 | WO2003094170A3 Layout for thermally selected cross-point mram cell |
| 03/11/2004 | WO2003093902A3 Lighting system, particularly for use in extreme ultraviolet (euv) lithography |
| 03/11/2004 | WO2003091173A3 Capping layer for crystallizing germanium, and substrate having thin crystallized germanium layer |
| 03/11/2004 | WO2003089680A3 Process modules for transport polymerization of low dieletric constant thin films |
| 03/11/2004 | WO2003081640A3 Strained fin fets structure and method |
| 03/11/2004 | WO2003079434A3 Semiconductor device having a wire bond pad and method therefor |
| 03/11/2004 | WO2003072673A3 Adhesive compositions containing organic spacers and methods for use thereof |
| 03/11/2004 | WO2003069655A3 Electronic micro component including a capacitive structure |
| 03/11/2004 | WO2003065416A3 Enhanced photodetector |
| 03/11/2004 | WO2003062922A3 Photomask and method for manufacturing the same |
| 03/11/2004 | WO2003060982A3 Ideal oxygen precipitating silicon wafers with nitrogen/carbon stabilized oxygen precipitate nucleation centers and process for making the same |
| 03/11/2004 | WO2003054911A8 Plasma process apparatus |
| 03/11/2004 | WO2003050850A3 Contacting of a semiconductor chip on a substrate using flip-chip-like technology |
| 03/11/2004 | WO2003041160A3 Two-step ion implantation method with active wafer cooling for buried oxide formation |
| 03/11/2004 | WO2003040734A3 Method and system for compensating thermally induced motion of probe cards |
| 03/11/2004 | WO2003038862A3 Pads for cmp and polishing substrates |
| 03/11/2004 | WO2003030245A3 Method for assembly of complementary-shaped receptacle site and device microstructures |
| 03/11/2004 | WO2003030226A3 End effector assembly |
| 03/11/2004 | WO2003021360A3 Phase-shift-moire focus monitor |
| 03/11/2004 | WO2003017014A3 Tool services layer for providing tool service functions in conjunction with tool functions |
| 03/11/2004 | WO2003015153A3 Process to allow electrical and mechanical connection of an electrical device with a face equipped with contact pads |
| 03/11/2004 | WO2003015137A3 Pedestal with integral shield |
| 03/11/2004 | WO2003010833A3 Flip chip bonding of light emitting devices and light emitting devices suitable for flip-chip bonding |
| 03/11/2004 | WO2003010806A3 Semiconductor substrate bonding by mass transport growth fusion |
| 03/11/2004 | WO2003007338A3 Method for attaching an electronic component to a substrate |
| 03/11/2004 | WO2002097869A8 Method and apparatus to correct wafer drift |
| 03/11/2004 | WO2002091483A3 Improved photovoltaic device |
| 03/11/2004 | WO2002089176A3 Method for separating electronic components from a composite |
| 03/11/2004 | US20040049762 Method for monitoring matched machine overlay |
| 03/11/2004 | US20040049755 Semiconductor integrated circuit, method of manufacturing semiconductor integrated circuit, charge pump circuit, layout designing apparatus, and layout designing program |
| 03/11/2004 | US20040049753 System for estimating performance of integrated circuit in register transfer level |
| 03/11/2004 | US20040049752 Method for designing semiconductor integrated circuit |
| 03/11/2004 | US20040049747 Verification apparatus |
| 03/11/2004 | US20040049723 Semiconductor integrated circuit with a test circuit |
| 03/11/2004 | US20040049722 Failure analysis system, failure analysis method, a computer program product and a manufacturing method for a semiconductor device |
| 03/11/2004 | US20040049318 Article holders with sensors detecting a type of article held by the holder |
| 03/11/2004 | US20040049308 Assembly for processing substrates |
| 03/11/2004 | US20040049301 Apparatus and method for preparing and supplying slurry for CMP machine |
| 03/11/2004 | US20040048960 Compositions for preparing low dielectric materials |
| 03/11/2004 | US20040048761 Cleaning composition |
| 03/11/2004 | US20040048559 Chemical mechanical polishing pad with micro-holes |
| 03/11/2004 | US20040048557 Abrasive cloth dresser and method for dressing an abrasive cloth with the same |
| 03/11/2004 | US20040048554 Method for polishing surface of semiconductor device substrate |
| 03/11/2004 | US20040048553 Polishing head of chemical mechanical polishing apparatus |
| 03/11/2004 | US20040048550 Modular method for chemical mechanical planarization |
| 03/11/2004 | US20040048493 Method and device for heat treatment |
| 03/11/2004 | US20040048492 Apparatus for reducing plasma charge damage for plasma processes |
| 03/11/2004 | US20040048491 Post thermal treatment methods of forming high dielectric layers in integrated circuit devices |
| 03/11/2004 | US20040048490 Interlayer insulation film used for multilayer interconnect of semiconductor integrated circuit and method of manufacturing the same |
| 03/11/2004 | US20040048489 Semiconductor device having opening and method of fabricating the same |
| 03/11/2004 | US20040048488 Methods of forming vertical power devices having deep and shallow trenches therein |
| 03/11/2004 | US20040048487 geotextile multilayer fabrics or yarns joined using spacers, having compressive strength |
| 03/11/2004 | US20040048485 In-situ sequential high density plasma deposition and etch processing for gap fill |
| 03/11/2004 | US20040048483 Method to etch poly Si gate stacks with raised STI structure |
| 03/11/2004 | US20040048482 Method of forming flash memories with high coupling ratio and the structure of the same |
| 03/11/2004 | US20040048481 Method for fabricating non-volatile memory device having sidewall gate structure and SONOS cell structure |
| 03/11/2004 | US20040048480 Method of planarization of semiconductor devices |
| 03/11/2004 | US20040048479 Process for producing and removing a mask layer |
| 03/11/2004 | US20040048478 Novel chemical-mechanical polishing (CMP) process for shallow trench isolation |
| 03/11/2004 | US20040048477 Method for manufacturing semiconductor device |
| 03/11/2004 | US20040048476 Method of manufacturing semiconductor device having metal interconnections of different thickness |
| 03/11/2004 | US20040048475 Method for forming a storage node of a capacitor |
| 03/11/2004 | US20040048474 Wafer holding |
| 03/11/2004 | US20040048473 Method for producing an integrated circuit, at least partially transforming an oxide layer into a conductive layer |
| 03/11/2004 | US20040048472 Semiconductor device having T-shaped gate structure comprising in situ sidewall spacers and method of forming the semiconductor device |
| 03/11/2004 | US20040048471 Semiconductor base material and method of manufacturing the material |
| 03/11/2004 | US20040048470 Interconnection devices for ultrasonic matrix array transducers |
| 03/11/2004 | US20040048469 Hole forming by cross-shape image exposure |
| 03/11/2004 | US20040048468 Barrier metal cap structure on copper lines and vias |
| 03/11/2004 | US20040048467 Devices containing platinum-iridium films and methods of preparing such films and devices |
| 03/11/2004 | US20040048465 Method of forming conductor wiring pattern |
| 03/11/2004 | US20040048464 Semiconductor device having a planarized structure and the method for producing the same |
| 03/11/2004 | US20040048463 Semiconductor device and manufacturing method thereof |
| 03/11/2004 | US20040048462 Method for fabricating semiconductor device |
| 03/11/2004 | US20040048461 Methods and apparatus for forming barrier layers in high aspect ratio vias |