| Patents for H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof (658,974) |
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| 04/01/2004 | US20040063306 Fabrication method of semiconductor device |
| 04/01/2004 | US20040063305 Creating air gap in multi-level metal interconnects using electron beam to remove sacrificial material |
| 04/01/2004 | US20040063303 Method for producing a semiconductor component comprising a t-shaped contact electrode |
| 04/01/2004 | US20040063302 Semiconductor substrate with defects reduced or removed and method of manufacturing the same, and semiconductor device capable of bidirectionally retaining breakdown voltage and method of manufacturing the same |
| 04/01/2004 | US20040063301 Method of forming a controlled and uniform lightly phosphorous doped silicon film |
| 04/01/2004 | US20040063300 Shallow trench filled with two or more dielectrics for isolation and coupling or for stress control |
| 04/01/2004 | US20040063299 Semiconductor device and method for fabricating the same |
| 04/01/2004 | US20040063298 Method for producing SOI wafer and SOI wafer |
| 04/01/2004 | US20040063297 Self-aligned selective hemispherical grain deposition process and structure for enhanced capacitance trench capacitor |
| 04/01/2004 | US20040063296 Methods of forming circuitry |
| 04/01/2004 | US20040063293 Method to fabricate SiGe HBTs with controlled current gain and improved breakdown voltage characteristics |
| 04/01/2004 | US20040063292 Method for manufacturing semiconductor device |
| 04/01/2004 | US20040063291 Modular bipolar-CMOS-DMOS analog integrated circuit & power transistor technology |
| 04/01/2004 | US20040063290 Thermal flux annealing influence of buried species |
| 04/01/2004 | US20040063289 Reduction in source-drain resistance of semiconductor device |
| 04/01/2004 | US20040063287 Semiconductor device and method of manufacturing the same |
| 04/01/2004 | US20040063286 Field effect transistors having multiple stacked channels |
| 04/01/2004 | US20040063285 Method for forming a semiconductor device structure a semiconductor layer |
| 04/01/2004 | US20040063284 Scalable dielectric |
| 04/01/2004 | US20040063283 Eeprom with split gate source side injection |
| 04/01/2004 | US20040063282 Nanometer-scale semiconductor devices and method of making |
| 04/01/2004 | US20040063281 Method of forming an isolation film in a semiconductor device |
| 04/01/2004 | US20040063280 Semiconductor storage device |
| 04/01/2004 | US20040063279 Method for forming buried plates |
| 04/01/2004 | US20040063278 Method of patterning capacitors and capacitors made thereby |
| 04/01/2004 | US20040063277 Semiconductor method and structure for simultaneously forming a trench capacitor dielectric and trench sidewall device dielectric |
| 04/01/2004 | US20040063276 Process for producing semiconductor integated circuit device |
| 04/01/2004 | US20040063275 Capacitor of a semiconductor memory device and method of forming the seme |
| 04/01/2004 | US20040063273 Sti pull-down to control SiGe facet growth |
| 04/01/2004 | US20040063272 Semiconductor devices and methods of making the devices |
| 04/01/2004 | US20040063271 Synchronous semiconductor device and method of preventing coupling between data buses |
| 04/01/2004 | US20040063270 Semiconductor device and manufacturing method thereof |
| 04/01/2004 | US20040063269 Method for forming a semiconductor structure with improved smaller forward voltage loss and higher blocking capability |
| 04/01/2004 | US20040063268 Manufacturing method of semiconductor device |
| 04/01/2004 | US20040063266 Semiconductor device and method of manufacturing the same |
| 04/01/2004 | US20040063265 Method for forming gate segments for an integrated circuit |
| 04/01/2004 | US20040063264 Method of forming a high performance and low cost CMOS device |
| 04/01/2004 | US20040063263 Manufacturing method of semiconductor devices |
| 04/01/2004 | US20040063262 Semiconductor device having improved halo structures and a method of forming the halo structures of a semiconductor device |
| 04/01/2004 | US20040063261 Etching method, gate etching method, and method of manufacturing semiconductor devices |
| 04/01/2004 | US20040063260 Sidewall processes using alkylsilane precursors for MOS transistor fabrication |
| 04/01/2004 | US20040063259 Method for manufacturing semiconductor device |
| 04/01/2004 | US20040063258 Semiconductor device and method of fabricating thereof |
| 04/01/2004 | US20040063257 CMOS-type semiconductor device and method of fabricating the same |
| 04/01/2004 | US20040063256 Manufacturing method of semiconductor device |
| 04/01/2004 | US20040063255 Thin film transistor structure and method of manufacturing the same |
| 04/01/2004 | US20040063254 Thin film transistor substrate and method of manufacturing the same |
| 04/01/2004 | US20040063253 Thin-film semiconductor device and liquid crystal display |
| 04/01/2004 | US20040063252 Method of making semiconductor device |
| 04/01/2004 | US20040063251 Bonding method, bonding stage and electronic component packaging apparatus |
| 04/01/2004 | US20040063250 Process and an apparatus for the formation of patterns in films using temperature gradients |
| 04/01/2004 | US20040063249 Thin film semiconductor package and method of fabrication |
| 04/01/2004 | US20040063247 Semiconductor device and method for manufacturing the same |
| 04/01/2004 | US20040063245 Method of fabricating an electronic component |
| 04/01/2004 | US20040063244 Leadframe-to-plastic lock for IC package |
| 04/01/2004 | US20040063243 Method of manufacturing an electronic device |
| 04/01/2004 | US20040063238 Apparatus for detecting an amount of strain and method for manufacturing same |
| 04/01/2004 | US20040063234 Method of introducing resin for electronic component and apparatus used therefor |
| 04/01/2004 | US20040063233 Method for fabricating semiconductor device |
| 04/01/2004 | US20040063232 Surface inspection method, surface inspection apparatus, and recording medium and data signal for providing surface inspection program |
| 04/01/2004 | US20040063230 Method for quantifying uniformity patterns and including expert knowledge for tool development and control |
| 04/01/2004 | US20040063227 Specifying method for Cu contamination processes and detecting method for Cu contamination during reclamation of silicon wafers, and reclamation method of silicon wafers |
| 04/01/2004 | US20040063224 Feedback control of a chemical mechanical polishing process for multi-layered films |
| 04/01/2004 | US20040063223 Spacer integration scheme in MRAM technology |
| 04/01/2004 | US20040063042 For selectively removing photoresist residues from a microstructure |
| 04/01/2004 | US20040063009 Comprehensive integrated lithographic process control system based on product design and yield feedback system |
| 04/01/2004 | US20040063008 Post etch overlay metrology to avoid absorbing layers preventing measurements |
| 04/01/2004 | US20040063004 Substrates for in particular microlithography |
| 04/01/2004 | US20040062938 Multilayer; reflection layer with fixed magnetism, then storage layer |
| 04/01/2004 | US20040062876 Liquid phase; reducing precipitation in development process by adjustment pH; process control |
| 04/01/2004 | US20040062874 Nozzle assembly, system and method for wet processing a semiconductor wafer |
| 04/01/2004 | US20040062867 Method to reduce photoresist poisoning |
| 04/01/2004 | US20040062862 Substrate holder; controlling temperature; uniform distribution of vapors |
| 04/01/2004 | US20040062861 Method of electroless plating and apparatus for electroless plating |
| 04/01/2004 | US20040062633 System for transporting substrate carriers |
| 04/01/2004 | US20040062632 Transfer apparatus |
| 04/01/2004 | US20040062627 System for the improved handling of wafers within a process tool |
| 04/01/2004 | US20040062477 Optical waveguide device |
| 04/01/2004 | US20040062432 Image defect inspection method, image defect inspection apparatus and appearance inspection apparatus |
| 04/01/2004 | US20040062352 Laser plasma X-ray generating apparatus |
| 04/01/2004 | US20040062283 System and method for fabricating efficient semiconductor lasers via use of precursors having a direct bond between a group III atom and a nitrogen atom |
| 04/01/2004 | US20040062131 Semiconductor integrated circuit device having ROM decoder for converting digital signal to analog signal |
| 04/01/2004 | US20040062125 Magnetic memory element having controlled nucleation site in data layer |
| 04/01/2004 | US20040062124 Memory cell configuration for a DRAM memory with a contact bit terminal for two trench capacitors of different rows |
| 04/01/2004 | US20040062108 Non-volatile programable and electrically erasable memory with a single layer of gate material |
| 04/01/2004 | US20040062101 Semiconductor memory device and method for arranging memory cells |
| 04/01/2004 | US20040062097 Magnetic recording medium and magnetic memory apparatus |
| 04/01/2004 | US20040062081 Multilayer dielectric tunnel barrier used in magnetic tunnel junction devices, and its method of fabrication |
| 04/01/2004 | US20040062076 Flash memory structure and method of fabrication |
| 04/01/2004 | US20040062075 Memory array employing single three-terminal non-volatile storage elements |
| 04/01/2004 | US20040062074 Nonvolatile memory device with configuration switching the number of memory cells used for one-bit data storage |
| 04/01/2004 | US20040062072 Nonvolatile semiconductor memory capable of generating read-mode reference current and verify-mode reference current from the same reference cell |
| 04/01/2004 | US20040062071 Ferroelectric memory with wide operating voltage and multi-bit storage per cell |
| 04/01/2004 | US20040062011 Semiconductor integrated circuit |
| 04/01/2004 | US20040061990 Temperature-compensated ferroelectric capacitor device, and its fabrication |
| 04/01/2004 | US20040061930 Narrow-band spectral filter and the use thereof |
| 04/01/2004 | US20040061857 Periodic patterns and technique to control misalignment between two layers |
| 04/01/2004 | US20040061851 Surface inspecting apparatus and method |
| 04/01/2004 | US20040061850 Illumination and image acquisition system |
| 04/01/2004 | US20040061844 Lithographic apparatus and device manufacturing method |