| Patents for H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof (658,974) |
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| 04/08/2004 | US20040067647 Method for producing a polycrystalline silicon, polycrystalline silicon and solar cell |
| 04/08/2004 | US20040067646 Apparatus and method for fabricating arrays of atomic-scale contacts and gaps between electrodes and applications thereof |
| 04/08/2004 | US20040067645 Method for recovering a plasma process |
| 04/08/2004 | US20040067644 Non-contact etch annealing of strained layers |
| 04/08/2004 | US20040067643 Method of forming a protective layer over Cu filled semiconductor features |
| 04/08/2004 | US20040067642 Devices containing zirconium-platinum-containing materials and methods for preparing such materials and devices |
| 04/08/2004 | US20040067641 Gas distribution system for cyclical layer deposition |
| 04/08/2004 | US20040067640 Multiple layer copper deposition to improve CMP performance |
| 04/08/2004 | US20040067639 Method for forming low thermal budget sacrificial oxides |
| 04/08/2004 | US20040067637 Fabrication method of semiconductor device |
| 04/08/2004 | US20040067636 Method of manufacturing multilayer structured semiconductor device |
| 04/08/2004 | US20040067635 Method of forming contact plug on silicide structure |
| 04/08/2004 | US20040067634 Method of forming dual damascene interconnection using low-k dielectric material |
| 04/08/2004 | US20040067633 Method for metal etchback with self aligned etching mask |
| 04/08/2004 | US20040067632 Semiconductor device and method of manufacturing the same |
| 04/08/2004 | US20040067631 Reduction of seed layer roughness for use in forming SiGe gate electrode |
| 04/08/2004 | US20040067630 Contact hole formation method |
| 04/08/2004 | US20040067629 Sputtered insulating layer for wordline stacks |
| 04/08/2004 | US20040067628 Semiconductor device including an insulated gate field effect transistor and method of manufacting the same |
| 04/08/2004 | US20040067627 Dry lithograpy method and method of forming gate pattern using the same |
| 04/08/2004 | US20040067626 Method of manufacturing semiconductor device |
| 04/08/2004 | US20040067624 System and method for regulating lateral growth in laser irradiated silicon films |
| 04/08/2004 | US20040067623 Method of forming a novel top-metal fuse structure |
| 04/08/2004 | US20040067622 Wafer with a relaxed useful layer and method of forming the wafer |
| 04/08/2004 | US20040067621 Method and apparatus for processing composite member |
| 04/08/2004 | US20040067620 Method for moat nitride pull back for shallow trench isolation |
| 04/08/2004 | US20040067619 Method for non-thermally nitrided gate formation for high voltage devices |
| 04/08/2004 | US20040067618 Trench flash memory device and method of fabricating thereof |
| 04/08/2004 | US20040067616 Method of manufacturing semiconductor device |
| 04/08/2004 | US20040067615 Method for the preparation of a semiconductor device |
| 04/08/2004 | US20040067614 Semiconductor device using an SOI substrate |
| 04/08/2004 | US20040067612 Miniaturised ldd-type mos transistors |
| 04/08/2004 | US20040067611 Semiconductor processing methods of forming a contact opening to a conductive line and methods of forming substrate active area source/drain regions |
| 04/08/2004 | US20040067610 RF semiconductor devices and methods for fabricating the same |
| 04/08/2004 | US20040067607 Metal interconnection with low resistance in a semiconductor device and a method of forming the same |
| 04/08/2004 | US20040067605 Semiconductor device having additional functional element and method of manufacturing thereof |
| 04/08/2004 | US20040067603 Method for producing channels and cavities in semiconductor housings, and an electronic component having such channels and cavities |
| 04/08/2004 | US20040067602 Article comprising gated field emission structures with centralized nanowires and method for making the same |
| 04/08/2004 | US20040067601 Quick turn around time system and method of use |
| 04/08/2004 | US20040067452 Reducing the spacing between adjacent photoresist patterns, by heating to shrink the overcoatings, control pattern dimensions; semiconductors, photolithographic |
| 04/08/2004 | US20040067445 Forming a thin film transistor array panel for a liquid crystal display, simplify the manufacturing method, reducing the cost, one step process of etching to a different uniform depths depending on the position, materials handling |
| 04/08/2004 | US20040067436 Polymerizable silicon-containing compound, manufacturing method, polymer, resist composition and patterning process |
| 04/08/2004 | US20040067423 Non-critical feature on a mask utilizing a low-transmission phase-shift mask pattern and a non-phase shifting mask pattern and a critical feature on a mask utilizing a high transmission phase shift mask pattern |
| 04/08/2004 | US20040067422 Photomask having a transparency-adjusting layer, method of manufacturing the photomask, and exposure method using the photomask |
| 04/08/2004 | US20040067420 Reduced-stress, electrostatically chuckable reticles for use in extreme ultraviolet and soft X-ray microlithography apparatus and methods |
| 04/08/2004 | US20040067392 Film of yttria-alumina complex oxide, a method of producing the same, a sprayed film, a corrosion resistant member, and a member effective for reducing particle generation |
| 04/08/2004 | US20040067370 Average surface roughness of SiC wafer set to be equivalent to film thickness of film deposited on silcon wafer to be measured |
| 04/08/2004 | US20040067354 Tray for vapor phase step |
| 04/08/2004 | US20040067347 Method and structure for small pitch z-axis electrical interconnections |
| 04/08/2004 | US20040067324 Organic photosensitive optoelectronic device |
| 04/08/2004 | US20040067323 Photopolymerisable system including silicone monomer, prepolymer, macromonomer or co-monomer, one of which is unsaturated |
| 04/08/2004 | US20040067321 Method of forming laminate and method of manufacturing photovoltaic device |
| 04/08/2004 | US20040067308 Two-layer film for next generation damascene barrier application with good oxidation resistance |
| 04/08/2004 | US20040067307 Automatic to minimize manpower required; precise amount of photoresist can be purged when exchanging photoresist bottles prior to coating a new lot of wafers, preventing an unnecessary consumption of photoresist |
| 04/08/2004 | US20040067303 Over-coating agent for forming fine patterns and a method of forming fine patterns using such agent |
| 04/08/2004 | US20040067128 Apparatus for alignment and orientation of a wafer for processing |
| 04/08/2004 | US20040067127 Substrate alignment system |
| 04/08/2004 | US20040067052 Localized heating of substrates using optics |
| 04/08/2004 | US20040066962 Defect inspection apparatus, defect inspection method and program |
| 04/08/2004 | US20040066808 Integrated arrays of modulators and lasers on electronics |
| 04/08/2004 | US20040066698 Semiconductor memory device |
| 04/08/2004 | US20040066681 Split gate flash memory and formation method thereof |
| 04/08/2004 | US20040066680 Non-volatile semiconductor memory device adapted to store a multi-valued data in a single memory cell |
| 04/08/2004 | US20040066679 Etch stop in damascene interconnect structure and method of making |
| 04/08/2004 | US20040066672 Vertical NROM having a storage density of 1 bit per IF2 |
| 04/08/2004 | US20040066666 Structure and method of vertical transistor DRAM cell having a low leakage buried strap |
| 04/08/2004 | US20040066637 Wiring substrate and method for manufacturing the same |
| 04/08/2004 | US20040066635 Film carrier tape for mounting electronic part and screen mask for solder resist coating |
| 04/08/2004 | US20040066627 Heat sink assembly with retaining device |
| 04/08/2004 | US20040066624 Heat dissipation device |
| 04/08/2004 | US20040066617 Circuit board device and its manufacturing method |
| 04/08/2004 | US20040066610 Pressure-welded semiconductor device |
| 04/08/2004 | US20040066601 Electrode configuration for retaining cooling gas on electrostatic wafer clamp |
| 04/08/2004 | US20040066569 Crystallization apparatus, crystallization method, and phase shift mask and filter for use in these apparatus and method |
| 04/08/2004 | US20040066518 Self referencing mark independent alignment sensor |
| 04/08/2004 | US20040066498 Exposure apparatus, maintenance method therefor, semiconductor device manufacturing method, and semiconductor manufacturing factory |
| 04/08/2004 | US20040066497 Moving apparatus, exposure apparatus, and device manufacturing method |
| 04/08/2004 | US20040066496 DUV scanner linewidth control by mask error factor compensation |
| 04/08/2004 | US20040066485 Transmission liquid crystal display and method of forming the same |
| 04/08/2004 | US20040066402 Circuit device provision system and server computer |
| 04/08/2004 | US20040066250 Electronic and optical devices and methods of forming these devices |
| 04/08/2004 | US20040066147 Flat panel display |
| 04/08/2004 | US20040066134 Active matrix substrate |
| 04/08/2004 | US20040066128 Ion source, ion implanting device, and manufacturing method of semiconductor devices |
| 04/08/2004 | US20040066116 Actuator and liquid discharge head, and method for manufacturing liquid discharge head |
| 04/08/2004 | US20040065964 Semiconductor package with thermal enhance film and manufacturing method thereof |
| 04/08/2004 | US20040065961 Semiconductor integrated circuit device |
| 04/08/2004 | US20040065960 Electronic package with filled blinds vias |
| 04/08/2004 | US20040065959 Lower electrode contact structure and method of forming the same |
| 04/08/2004 | US20040065958 Semiconductor device and method of manufacturing same |
| 04/08/2004 | US20040065957 Semiconductor device having a low dielectric film and fabrication process thereof |
| 04/08/2004 | US20040065956 Novel copper metal structure for the reduction of intra-metal capacitance |
| 04/08/2004 | US20040065955 Semiconductor silicon substrate; overcoating with transistor; copper connector for coupling transistors; undercoating barrier of titanium aluminum oxynitride |
| 04/08/2004 | US20040065953 Semiconductor device and process of manufacture |
| 04/08/2004 | US20040065946 [bridge connection type of chip packageand fabricating method thereof] |
| 04/08/2004 | US20040065945 Semiconductor package having polymer members configured to provide selected package characteristics |
| 04/08/2004 | US20040065944 Semiconductor device |
| 04/08/2004 | US20040065942 Reduce 1/f noise in NPN transistors without degrading the properties of PNP transistors in integrated circuit technologies |
| 04/08/2004 | US20040065938 Integrated circuit capacitors having a dielectric layer between a U-shaped lower electrode and a support layer |
| 04/08/2004 | US20040065937 Floating gate memory structures and fabrication methods |