| Patents for H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof (658,974) |
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| 04/15/2004 | WO2004031857A1 Method for correcting mask pattern |
| 04/15/2004 | WO2004031457A1 Method and apparatus for forming epitaxial layers |
| 04/15/2004 | WO2004031455A2 Method, composition and apparatus for tunable selectivity during chemical mechanical polishing of metallic structures |
| 04/15/2004 | WO2004031447A1 Method of electroless plating |
| 04/15/2004 | WO2004031442A1 Plasma processing system and its substrate processing process, plasma enhanced chemical vapor deposition system and its film deposition process |
| 04/15/2004 | WO2004031072A2 Electrostatically driven lithography |
| 04/15/2004 | WO2004031071A1 Method for preparing silver nano-structure by means of scanning tunneling microscopy |
| 04/15/2004 | WO2004030838A1 Ultrsonic washing equipment and ultrasonic washing method |
| 04/15/2004 | WO2004030830A1 Nanostructured and nanoporous film compositions, structures, and methods for making the same |
| 04/15/2004 | WO2004021411A3 Method and apparatus for supplying substrates to a processing tool |
| 04/15/2004 | WO2004019390A3 Mbe growth of an algan layer or algan multilayer structure |
| 04/15/2004 | WO2004017365A3 Deposition of amorphous silicon-containing films |
| 04/15/2004 | WO2004016309A3 Catheter securement device |
| 04/15/2004 | WO2004012254A8 Semiconductor device manufacturing device |
| 04/15/2004 | WO2004012230A3 Dynamic targeting for a process control system |
| 04/15/2004 | WO2004006303A3 Method for fabricating an ultra shallow junction of a field effect transistor |
| 04/15/2004 | WO2004006290A3 Device for maintaining an object under vacuum and methods for making same, use in non-cooled infrared sensors |
| 04/15/2004 | WO2004004003A8 Multilayer substrate metallization for ic interconnection |
| 04/15/2004 | WO2004001814A3 Method of forming a raised contact for a substrate |
| 04/15/2004 | WO2003107410A3 Process for etching dielectric films with improved resist and/or etch profile characteristics |
| 04/15/2004 | WO2003107400A3 Acid etching mixture having reduced water content |
| 04/15/2004 | WO2003106916A3 Optical metrology of single features |
| 04/15/2004 | WO2003105204A3 Semiconductor devices having strained dual channel layers |
| 04/15/2004 | WO2003100825A3 Multiple thickness semiconductor interconnect and method therefor |
| 04/15/2004 | WO2003096394A3 A multi-layer inductor formed in a semiconductor substrate and having a core of ferromagnetic material |
| 04/15/2004 | WO2003095702A3 Method for curing low dielectric constant film by electron beam |
| 04/15/2004 | WO2003092013A3 Self-aligned magnetic tunneling junction and via contact |
| 04/15/2004 | WO2003081974A3 Electronic component mounting apparatus and electronic component mounting method |
| 04/15/2004 | WO2003081645A3 An integrated in-situ etch process performed in a multichamber substrate processing system |
| 04/15/2004 | WO2003081644A3 Electronic component mounting method and apparatus and ultrasondic bonding head |
| 04/15/2004 | WO2003077321A3 Schottky power diode comprising a sicoi substrate and the method of producing one such diode |
| 04/15/2004 | WO2003071614A3 Silver-selenide/chalcogenide glass stack for resistance variable memory |
| 04/15/2004 | WO2003071317A8 Monochromator mirror for the euv-spectral range |
| 04/15/2004 | WO2003070809A3 Organosiloxanes and their use in dielectric films of semiconductors |
| 04/15/2004 | WO2003063227A3 A method of fabrication for iii-v semiconductor surface passivation |
| 04/15/2004 | WO2003060960A3 High density area array solder microjoining interconnect structure and fabrication method |
| 04/15/2004 | WO2003052808A3 Self-aligned contact etch with high sensitivity to nitride shoulder |
| 04/15/2004 | WO2003043074A3 Semiconductor component and method for contacting said semiconductor component |
| 04/15/2004 | WO2003037497A3 Method of etching high aspect ratio features |
| 04/15/2004 | WO2003023840A3 Methods and apparatus for cleaning and/or treating a substrate using co¿2? |
| 04/15/2004 | WO2003017341B1 Methods of forming metal-comprising materials and capacitor electrodes; and capacitor constructions |
| 04/15/2004 | WO2003009057A9 Thin film transistors suitable for use in flat panel displays |
| 04/15/2004 | WO2003005412A9 Method and apparatus for production line screening |
| 04/15/2004 | WO2003003377A3 Low-voltage and interface damage-free polymer memory device |
| 04/15/2004 | WO2002099161A3 Method for the deposition of materials from mesomorphous films |
| 04/15/2004 | WO2002092878A3 Electroless plating method and device, and substrate processing method and apparatus |
| 04/15/2004 | WO2002045871A9 System and method for modulated ion-induced atomic layer deposition (mii-ald) |
| 04/15/2004 | WO2001082362A8 Process for forming electrical/mechanical connections |
| 04/15/2004 | US20040073880 Method and system for designing circuit layout |
| 04/15/2004 | US20040073878 Layout device |
| 04/15/2004 | US20040073732 Parameter generating circuit for deciding priority of master blocks and method of generating parameter |
| 04/15/2004 | US20040073398 Methods and systems for determining a critical dimension and a thin film characteristic of a specimen |
| 04/15/2004 | US20040073331 Automated material handling system and method of use |
| 04/15/2004 | US20040073328 Devices and methods for detecting orientation and shape of an object |
| 04/15/2004 | US20040073327 Semiconductor manufacturing line monitoring system |
| 04/15/2004 | US20040072707 Washing a substrate and coating a high molecular straight chain organic compound on the surface |
| 04/15/2004 | US20040072706 Placing an object onto a support within a pressure chamber, pressurizing the chamber, cleaning, decompressing and venting |
| 04/15/2004 | US20040072520 Support substrate for thin-sheet work |
| 04/15/2004 | US20040072517 Apparatus for polishing a semiconductor wafer and method therefor |
| 04/15/2004 | US20040072516 Polishing pad having a grooved pattern for use in chemical mechanical polishing apparatus |
| 04/15/2004 | US20040072512 Polishing apparatus |
| 04/15/2004 | US20040072507 Polishing pads useful in chemical mechanical polishing of substrates in the presence of a slurry containing abrasive particles |
| 04/15/2004 | US20040072506 Fixed abrasive article for use in modifying a semiconductor wafer |
| 04/15/2004 | US20040072505 Polishing member and method of manufacturing semiconductor device |
| 04/15/2004 | US20040072501 Polishing method and polishing apparatus used for the same |
| 04/15/2004 | US20040072500 Chemical mechanical polishing with friction-based control |
| 04/15/2004 | US20040072499 Polishing apparatus |
| 04/15/2004 | US20040072456 Methods of removably mounting electronic components to a circuit board, and sockets formed by the methods |
| 04/15/2004 | US20040072451 Method of manufacturing a semiconductor device |
| 04/15/2004 | US20040072450 Spin-coating methods and apparatuses for spin-coating, including pressure sensor |
| 04/15/2004 | US20040072449 Method of manufacturing semiconductor device using flexible tube |
| 04/15/2004 | US20040072448 Protecting delicate semiconductor features during wet etching |
| 04/15/2004 | US20040072446 Method for fabricating an ultra shallow junction of a field effect transistor |
| 04/15/2004 | US20040072444 Etchant for wire, method of manufacturing wire using etchant, thin film transistor array panel including wire and manufacturing method thereof |
| 04/15/2004 | US20040072443 Method for plasma etching performance enhancement |
| 04/15/2004 | US20040072442 Low-bias bottom electrode etch for patterning ferroelectric memory elements |
| 04/15/2004 | US20040072441 Clean for high density capacitors |
| 04/15/2004 | US20040072440 Process for removal of photoresist mask used for making vias in low K carbon-doped silicon oxide dielectric material, and for removal of etch residues from formation of vias and removal of photoresist mask |
| 04/15/2004 | US20040072439 Chemical mechanical polishing composition and process |
| 04/15/2004 | US20040072437 Production method for silicon wafer and silicon wafer and soi wafer |
| 04/15/2004 | US20040072436 metalloamides; chemical vapor depostion (CVD); low carbon/halide impurity in comparison with silica gate dielectrics; semiconductors |
| 04/15/2004 | US20040072435 Method of integrating L - shaped spacers in a high performance CMOS process via use of an oxide - nitride - doped oxide spacer |
| 04/15/2004 | US20040072434 Device manufacturing apparatus |
| 04/15/2004 | US20040072433 Method of forming a capacitor |
| 04/15/2004 | US20040072431 Method for fabricating semiconductor device |
| 04/15/2004 | US20040072430 Method for forming a dual damascene structure |
| 04/15/2004 | US20040072429 Method for manufacturing a semiconductor device |
| 04/15/2004 | US20040072426 Process chamber for manufacturing a smiconductor device |
| 04/15/2004 | US20040072425 Mbe-method for production of a gallium manganese nitride ferromagnetic film |
| 04/15/2004 | US20040072424 Method of controlling metal formation processes using ion implantation, and system for performing same |
| 04/15/2004 | US20040072423 Methods and systems for electro-or electroless-plating of metal in high-aspect ratio features |
| 04/15/2004 | US20040072422 Methods of forming conductive through-wafer vias |
| 04/15/2004 | US20040072421 Laterally interconnecting structures |
| 04/15/2004 | US20040072420 Anti-reflective compositions comprising triazine compounds |
| 04/15/2004 | US20040072419 Method for applying metal features onto barrier layers using electrochemical deposition |
| 04/15/2004 | US20040072418 Semiconductor device and manufacturing method thereof |
| 04/15/2004 | US20040072417 Method of manufacturing a semiconductor element |
| 04/15/2004 | US20040072416 Method for eliminating voiding in plated solder |
| 04/15/2004 | US20040072415 Semiconductor device and method of manufacturing the same |
| 04/15/2004 | US20040072413 Semiconductor device and method of manufacturing the same, circuit board and electronic instrument |