| Patents for H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof (658,974) |
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| 04/15/2004 | US20040070077 Semiconductor device and method of manufacturing the same |
| 04/15/2004 | US20040070075 Integrated circuit and method for producing a composite comprising a tested integrated circuit and an electrical device |
| 04/15/2004 | US20040070074 Hybrid integrated circuit device |
| 04/15/2004 | US20040070068 Semiconductor package insulation film and manufacturing method thereof |
| 04/15/2004 | US20040070063 Three dimensional structure integrated circuit |
| 04/15/2004 | US20040070059 Semiconductor device having sealing structure for wide gap type semiconductor chip |
| 04/15/2004 | US20040070057 COF tape carrier, semiconductor element, COF semiconductor device, and method for manufacturing of COF semiconductor device |
| 04/15/2004 | US20040070056 Having a shape adapted to reduce the number of leads connected to power and ground terminals |
| 04/15/2004 | US20040070054 IC chip and semiconductor device |
| 04/15/2004 | US20040070053 Semiconductor device, semiconductor device module, manufacturing method of semiconductor device, and manufacturing method of semiconductor device module |
| 04/15/2004 | US20040070052 Integrated circuit configuration comprising a sheet-like substrate |
| 04/15/2004 | US20040070051 Semiconductor device and method of manufacturing substrate |
| 04/15/2004 | US20040070048 Etch-back or undercutting of the thin film resistor associated with wet etching reduced or eliminated completely, resulting in decreased width reduction and decreased variation in the overall width |
| 04/15/2004 | US20040070047 Power semiconductor device |
| 04/15/2004 | US20040070046 Reliable dual gate dielectrics for MOS transistors |
| 04/15/2004 | US20040070045 Semiconductor device and method for manufacturing the same |
| 04/15/2004 | US20040070044 High voltage power MOSFET having low on-resistance |
| 04/15/2004 | US20040070039 Reduce the in-plane photoelectric conversion portion characteristic distribution that is created in forming color filters by a common photolithography; good uniformity between exposure regions in image |
| 04/15/2004 | US20040070037 Semiconductor device and method of manufacturing the same |
| 04/15/2004 | US20040070036 ULSI MOS with high dielectric constant gate insulator |
| 04/15/2004 | US20040070035 Semiconductor transistor having a stressed channel |
| 04/15/2004 | US20040070034 Semiconductor device and method of forming the same |
| 04/15/2004 | US20040070033 Semiconductor device with resistor pattern and method of fabricating the same |
| 04/15/2004 | US20040070032 LSI device and manufacturing method of the above |
| 04/15/2004 | US20040070030 Non-volatile memory device and method for forming |
| 04/15/2004 | US20040070028 Method of forming a low resistance semiconductor device and structure therefor |
| 04/15/2004 | US20040070026 Semiconductor integrated circuit |
| 04/15/2004 | US20040070025 NROM memory cell |
| 04/15/2004 | US20040070024 MOSFET with a thin gate insulating film |
| 04/15/2004 | US20040070023 Semiconductor device and method of manufacturing the same |
| 04/15/2004 | US20040070022 EEPROM and EEPROM manufacturing method |
| 04/15/2004 | US20040070021 Flash memory array with increased coupling between floating and control gates |
| 04/15/2004 | US20040070020 Nonvolatile semiconductor memory device and method for operating the same |
| 04/15/2004 | US20040070019 Integrated circuit metal-insulator-metal capacitors including hemispherical grain lumps |
| 04/15/2004 | US20040070018 Semiconductor memory circuitry |
| 04/15/2004 | US20040070017 Metal oxynitride capacitor barrier layer |
| 04/15/2004 | US20040070016 Methods of forming semiconductor constructions |
| 04/15/2004 | US20040070015 Ferroelectric device and method for making |
| 04/15/2004 | US20040070012 Low defect density silicon |
| 04/15/2004 | US20040070010 Contactor, a method of manufacturing the contactor and a device and method of testing electronic component using the contactor |
| 04/15/2004 | US20040070008 High speed dual-port memory cell having capacitive coupling isolation and layout design |
| 04/15/2004 | US20040070007 Vertical field effect transistors including conformal monocrystalline silicon layer on trench sidewall |
| 04/15/2004 | US20040070002 Semiconductor device |
| 04/15/2004 | US20040069991 Perovskite cuprate electronic device structure and process |
| 04/15/2004 | US20040069990 Charge storage region comprises a tunneling dielectric located adjacent to the active layer, a blocking dielectric located adjacent to the gate electrode and a charge storage dielectric located between the tunneling and blocking dielectrics |
| 04/15/2004 | US20040069989 With vertical transistors; also detecting word lines in a wafer with a scribe line region and a memory region |
| 04/15/2004 | US20040069878 Method and apparatus for reuse of abrasive fluid used in the manufacture of semiconductors |
| 04/15/2004 | US20040069840 Method and apparatus for filling a mask with solder paste |
| 04/15/2004 | US20040069757 Mask for light exposure and method for manufacturing liquid crystal display apparatus employing same |
| 04/15/2004 | US20040069751 Irradiating second harmonic of CW laser and a fundamental wave of CW laser at the same time to the same portion to improve annealing efficiency |
| 04/15/2004 | US20040069745 Method for preventing the etch transfer of sidelobes in contact hole patterns |
| 04/15/2004 | US20040069744 Method for homogenizing the thickness of a coating on a patterned layer |
| 04/15/2004 | US20040069732 Supporting column and cassette using the same |
| 04/15/2004 | US20040069728 Cassette |
| 04/15/2004 | US20040069727 Stopper rod and cassette using the same |
| 04/15/2004 | US20040069680 Cassette device for accepting substrates |
| 04/15/2004 | US20040069647 Plating apparatus, cartridge and copper dissolution tank for use in the plating apparatus, and plating method |
| 04/15/2004 | US20040069646 Electrolytic treatment, such as plating or etching; providing a high resistance structure having an electrical conductivity lower than that of the electrolytic solution in the solution filled between a substrate in contact with an electrode |
| 04/15/2004 | US20040069644 Spin, rinse and dry process performed on the wafer prior to electroplating either in a standalone tool or in a preclean module integrated into an electroplating tool; for semiconductors |
| 04/15/2004 | US20040069624 Continuous coating system |
| 04/15/2004 | US20040069612 Substrate processing apparatus and substrate processing method |
| 04/15/2004 | US20040069608 Switch and method for manufacturing the same |
| 04/15/2004 | US20040069452 Thermal interface wafer and method of making and using the same |
| 04/15/2004 | US20040069448 Exhaust heat utilization system, exhaust heat utilization method, and semiconductor production facility |
| 04/15/2004 | US20040069412 Dry etching apparatus, dry etching method, and cleaning method adopted in dry etching apparatus |
| 04/15/2004 | US20040069410 Cluster tool for E-beam treated films |
| 04/15/2004 | US20040069409 Front opening unified pod door opener with dust-proof device |
| 04/15/2004 | US20040069408 Dual-port end point window for plasma etcher |
| 04/15/2004 | US20040069407 Method and apparatus for detecting backside contamination during fabrication of a semiconductor wafer |
| 04/15/2004 | US20040069400 ACF tape feeder machine, and method for feeding ACF tape |
| 04/15/2004 | US20040069397 Method and apparatus for determining processing size of bonding material |
| 04/15/2004 | US20040069330 Pumping a processing liquid through a degasifier, exposing the semiconductor wafer to the degasified processing liquid; and optionally recirculating the processing liquid through the degasifier and back into the vessel. |
| 04/15/2004 | US20040069329 Method and apparatus for drying semiconductor wafer surfaces using a plurality of inlets and outlets held in close proximity to the wafer surfaces |
| 04/15/2004 | US20040069326 Edge roller having mounted on it a proximity head capable of forming a meniscus and including a concave portion with ports opening into it including a process liquid injection port, a vacuum port and a surface tension control port |
| 04/15/2004 | US20040069321 Wet chemical etching to remove an oxide layer and to provide a hydrophobic surface; and exposing the etched surface to a gaseous ozone atmosphere to provide a dry hydrophilic surface. |
| 04/15/2004 | US20040069320 Rotating articles within a chamber; applying a heated aqueous liquid; introducing ozone gas and carbon dioxide gas; introducing ozone gas and carbon dioxide gas into the chamber to effect cleaning |
| 04/15/2004 | US20040069319 Method and apparatus for cleaning a substrate using megasonic power |
| 04/15/2004 | US20040069318 Prior to cleaning with XeF2, contacting XeF2 gas with an article to be cleaned, such as a semiconductor, in a reduced-pressure or vacuum atmosphere containing a required amount of water to form HFto be |
| 04/15/2004 | US20040069234 Sheet-type treating device |
| 04/15/2004 | US20040069231 Chemical vapor deposition process and apparatus thereof |
| 04/15/2004 | US20040069226 Substrate processing method and substrate processing system |
| 04/15/2004 | US20040069225 Tandem process chamber |
| 04/15/2004 | US20040069223 Wall liner and slot liner for process chamber |
| 04/15/2004 | US20040069215 Gas spray arm for spin coating apparatus |
| 04/15/2004 | US20040069212 Lateral movement of screw dislocations during homoepitaxial growth and devices yielded therefrom free of the detrimental effects of screw dislocations |
| 04/15/2004 | US20040069112 Machine for punching out electronic circuitry parts, method for replacing tape supply reels, and method for producing electronic circuitry parts from tape |
| 04/15/2004 | US20040069111 High-pressure processing apparatus |
| 04/15/2004 | US20040068997 Electrode cooler of processing device |
| 04/15/2004 | US20040068869 Mounting spring elements on semiconductor devices, and wafer-level testing methodology |
| 04/15/2004 | US20040068866 Heat sink hand placement tool |
| 04/15/2004 | US20040068864 Web fabrication of devices |
| 04/15/2004 | US20040068818 Cleaning apparatus and roller |
| 04/15/2004 | DE4407250B4 Verfahren zur Herstellung eines PMOS-Feleffekttransistors, in einem Halbleiterbauelement, PMOS-Feldeffekttransistor, Polysiliziumschicht in einem Halbleiterbauelement und Verfahren zu deren Herstellung A method for producing a PMOS Feleffekttransistors, in a semiconductor device, PMOS field effect transistor, polysilicon layer in a semiconductor device and process for their preparation |
| 04/15/2004 | DE4344285B4 Verfahren zur Herstellung eines Transistors A method of manufacturing a transistor |
| 04/15/2004 | DE3736379B4 Gepulster Komparator hoher Verstärkung Pulsed high-gain comparator |
| 04/15/2004 | DE19734837B4 Verfahren zur Herstellung eines selbstausrichtenden Silicids A method for producing a self-aligned silicide |
| 04/15/2004 | DE19702531B4 IPG-Transistor mit vertikalem Gate-Komplex und Verfahren zu dessen Herstellung IPG transistor with vertical gate complex and process for its preparation |
| 04/15/2004 | DE10346002A1 Etching resist layer, e.g. to make capacitor, forms intermediate layer and opening, coats resist over them and patterns resist in shape of opening for etching |
| 04/15/2004 | DE10344862A1 Verfahren zur Herstellung eines dicken Isolationskragens mit reduzierter Länge A method for producing a thick insulating collar with reduced length |
| 04/15/2004 | DE10342548A1 Schnelle Abscheidung von Borsilicatglasfilmen Rapid separation of Borsilicatglasfilmen |