| Patents for H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof (658,974) |
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| 04/15/2004 | US20040072412 Recessed gate electrode MOS transistors having a substantially uniform channel length across a width of the recessed gate electrode and methods of forming same |
| 04/15/2004 | US20040072411 Method for manufacturing semiconductor device |
| 04/15/2004 | US20040072410 GaN single crystal substrate and method of making the same |
| 04/15/2004 | US20040072409 Coplanar integration of lattice-mismatched semiconductor with silicon via wafer bonding virtual substrates |
| 04/15/2004 | US20040072408 Methods of forming trench isolated integrated circuit devices including grooves, and trench isolated integrated circuit devices so formed |
| 04/15/2004 | US20040072407 Ferroelectric capacitor memory device fabrication method |
| 04/15/2004 | US20040072406 Structure and process for a capacitor and other devices |
| 04/15/2004 | US20040072405 Method of avoiding dielectric arcing |
| 04/15/2004 | US20040072404 High speed trench DMOS |
| 04/15/2004 | US20040072403 Method of manufacturing semiconductor device |
| 04/15/2004 | US20040072402 Semiconductor device and method of fabricating the same |
| 04/15/2004 | US20040072401 Method for forming capacitor |
| 04/15/2004 | US20040072400 Method of forming a shallow trench isolation structure |
| 04/15/2004 | US20040072399 Method for fabricating BiCMOS transistor |
| 04/15/2004 | US20040072397 Non-oxidizing spacer densification method for manufacturing semiconductor devices |
| 04/15/2004 | US20040072396 Semiconductor electronic device and method of manufacturing thereof |
| 04/15/2004 | US20040072395 Method to produce localized halo for MOS transistor |
| 04/15/2004 | US20040072394 Semiconductor device and method for fabricating the same |
| 04/15/2004 | US20040072393 Crystalline semiconductor thin film, method of fabricating the same, semiconductor device, and method of fabricating the same |
| 04/15/2004 | US20040072392 Method of forming a low temperature polysilicon thin film transistor |
| 04/15/2004 | US20040072391 Contactless uniform-tunneling separate p-well (cusp) non-volatile memory array architecture, fabrication and operation |
| 04/15/2004 | US20040072390 Method for providing and utilizing rerouting resources |
| 04/15/2004 | US20040072389 Chip carrier, semiconductor package and fabricating method thereof |
| 04/15/2004 | US20040072388 Method of manufacturing semiconductor chip |
| 04/15/2004 | US20040072387 Method of fabricating and mounting flip chips |
| 04/15/2004 | US20040072385 Chip alignment and placement apparatus for integrated circuit, mems, photonic or other devices |
| 04/15/2004 | US20040072383 Nitride semiconductor device comprising bonded substrate and fabrication method of the same |
| 04/15/2004 | US20040072382 Method of producing a light-emitting diode |
| 04/15/2004 | US20040072381 Domain epitaxy for thin film growth |
| 04/15/2004 | US20040072380 Light emitting device and method for manufacturing the same |
| 04/15/2004 | US20040072377 Multi chip module assembly |
| 04/15/2004 | US20040072376 Load port of a semiconductor manufacturing apparatus having integrated kinematic coupling pins and sensors, and method of loading wafers using the same |
| 04/15/2004 | US20040072108 Prevents collapse; photolithography |
| 04/15/2004 | US20040072104 Comprises kryton fluoride photoresist pattern |
| 04/15/2004 | US20040072103 Positive-working photoresist composition |
| 04/15/2004 | US20040072099 High resolution; improved development and etch resistance; microelectronics |
| 04/15/2004 | US20040072098 Resist pattern thickening material, process for forming resist pattern, and process for manufacturing semiconductor device |
| 04/15/2004 | US20040072097 Photosensitive composition and acid generator |
| 04/15/2004 | US20040072096 Photoresists; thin films; irradiation polymerization/ photopolymerization; surface/heat treatment |
| 04/15/2004 | US20040072095 Comprises 4-(1-butoxyphenyl)diphenylsulfonium mesylate; photosensitivity; high resolution, photospeed and depth of focus; semiconductors; relief imaging |
| 04/15/2004 | US20040072083 For use in photolithography |
| 04/15/2004 | US20040072082 Photomask, method of manufacturing a photomask, and method of manufacturing an electronic product |
| 04/15/2004 | US20040072081 Methods for etching photolithographic reticles |
| 04/15/2004 | US20040072009 Copper sputtering targets and methods of forming copper sputtering targets |
| 04/15/2004 | US20040071991 Forming a row of aligned windows in a planar surface; depositing an electromigration-inhibiting/electrically conductive material over the planar surface and through the windows to fill; removing portions |
| 04/15/2004 | US20040071945 Ceramic joint body |
| 04/15/2004 | US20040071899 For photolithographic patterning |
| 04/15/2004 | US20040071879 Method of film deposition, and fabrication of structures |
| 04/15/2004 | US20040071878 Surface preparation using plasma for ALD Films |
| 04/15/2004 | US20040071875 Ferroelectric property, and therefore, it can be advantageously used in an electric or electronic device |
| 04/15/2004 | US20040071874 Apparatus and method for single-wafer-processing type CVD |
| 04/15/2004 | US20040071873 Compositions of transition metal species in dense phase carbon dioxide and methods of use thereof |
| 04/15/2004 | US20040071872 Dividing a coating region of substrate into at least two regions; and setting a jet amount of the liquid to any one of at least two regions to a greater value than the jet amount to another of at least two regions |
| 04/15/2004 | US20040071805 Transfer holding of integrated circuit packages |
| 04/15/2004 | US20040071613 Plasma processing apparatus |
| 04/15/2004 | US20040071534 Adjustable wafer alignment arm |
| 04/15/2004 | US20040071531 Substrate treating apparatus |
| 04/15/2004 | US20040071336 Exposure method and device manufacturing method using this exposure method |
| 04/15/2004 | US20040071266 Low vapor pressure, low debris solid target for EUV production |
| 04/15/2004 | US20040071262 Method of alignment |
| 04/15/2004 | US20040071260 X-ray projection exposure apparatus and a device manufacturing method |
| 04/15/2004 | US20040071189 Temperature measuring sensor incorporated in semiconductor substrate, and semiconductor device containing such temperature measuring sensor |
| 04/15/2004 | US20040071030 Semiconductor integrated circuits, fabrication method for the same and semiconductor integrated circuit systems |
| 04/15/2004 | US20040071026 Semiconductor integrated circuit device operating with low power consumption |
| 04/15/2004 | US20040071025 Flash memory device and fabricating method therefor |
| 04/15/2004 | US20040071024 Nonvolatile semiconductor memory device and method for fabricating the same |
| 04/15/2004 | US20040071022 ROM embedded DRAM with dielectric removal/short |
| 04/15/2004 | US20040071020 Multi-level flash EEPROM cell and method of manufacture thereof |
| 04/15/2004 | US20040071011 Semiconductor memory device and control method and manufacturing method thereof |
| 04/15/2004 | US20040071008 Contactless uniform-tunneling separate p-well (CUSP) non-volatile memory array architecture, fabrication and operation |
| 04/15/2004 | US20040070961 Contactor apparatus for semiconductor devices and a test method of semiconductor devices |
| 04/15/2004 | US20040070945 Heat dissipation structures and method of making |
| 04/15/2004 | US20040070916 Electrostatic chucks and electrostatically attracting structures |
| 04/15/2004 | US20040070914 Electrostatic device for holding an electronic component wafer |
| 04/15/2004 | US20040070901 Electrostatic discharge protection circuit |
| 04/15/2004 | US20040070753 Pattern inspection apparatus |
| 04/15/2004 | US20040070742 Relay image optical system, and illuminating optical device and exposure system provided with the optical system |
| 04/15/2004 | US20040070741 Alignment system and projection exposure apparatus |
| 04/15/2004 | US20040070721 Image display device |
| 04/15/2004 | US20040070707 Liquid crystal display device and method for manufacturing the same |
| 04/15/2004 | US20040070697 Method of forming an active matrix display |
| 04/15/2004 | US20040070623 User interface for quantifying wafer non-uniformities and graphically explore significance |
| 04/15/2004 | US20040070427 Semiconductor integrated circuit device having a leakage current cutoff circuit, constructed using MT-CMOS, for reducing standby leakage current |
| 04/15/2004 | US20040070417 Cantilever type probe card and method for production thereof |
| 04/15/2004 | US20040070413 Probe sheet, probe card, semiconductor test equipment and semiconductor device fabrication method |
| 04/15/2004 | US20040070412 Device testing contactor, method of producing the same, and device testing carrier |
| 04/15/2004 | US20040070407 Fingerprint detector with improved sensing surface layer |
| 04/15/2004 | US20040070393 Differential measurement method using eddy-current sensing to resolve a stack of conducting films on substrates |
| 04/15/2004 | US20040070387 Water staging platform |
| 04/15/2004 | US20040070383 Integrated circuit driver having stable bootstrap power supply |
| 04/15/2004 | US20040070348 Neutral particle beam processing apparatus |
| 04/15/2004 | US20040070312 Integrated circuit and process for fabricating the same |
| 04/15/2004 | US20040070285 Electric motors with reduced stray magnetic fields |
| 04/15/2004 | US20040070221 Device for gripping and holding and object in a contactless manner |
| 04/15/2004 | US20040070087 Semiconductor package with enhanced chip groundability and method of fabricating the same |
| 04/15/2004 | US20040070086 Fabrication of wire bond pads over underlying active devices, passive devices and /or dielectric layers in integrated circuits |
| 04/15/2004 | US20040070085 Method for producing a semiconductor device and corresponding semiconductor device |
| 04/15/2004 | US20040070084 Solder ball assembly, a method for its manufacture, and a method of forming solder bumps |
| 04/15/2004 | US20040070081 Lower the on-resistance in protection circuit of rechargeable battery by using flip-chip technology |
| 04/15/2004 | US20040070080 Low cost, high performance flip chip package structure |