| Patents for H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof (658,974) |
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| 05/13/2004 | WO2002082510A8 Single transistor rare earth manganite ferroelectric nonvolatile memory cell |
| 05/13/2004 | WO2002031232A9 Method and device for producing optical fluoride crystals |
| 05/13/2004 | WO2002001638A3 Microelectronic packages including reactive components, and methods of fabricating the same |
| 05/13/2004 | US20040093577 Single metal programmability in a customizable integrated circuit device |
| 05/13/2004 | US20040093576 Semiconductor device, design method for semiconductor device, design apparatus and design program for semiconductor device |
| 05/13/2004 | US20040093575 Chemically synthesized and assembled electronic devices |
| 05/13/2004 | US20040093478 Integrated circuit device and method for applying different types of signals to internal circuit via one pin |
| 05/13/2004 | US20040093456 Memory macro and semiconductor integrated circuit |
| 05/13/2004 | US20040093110 Method and apparatus for controlling a fabrication process based on a measured electrical characteristic |
| 05/13/2004 | US20040093108 Automatic material handling system, production system for semiconductor device, and production management method for semiconductor device |
| 05/13/2004 | US20040093107 Probability constrained optimization for electrical fabrication control |
| 05/13/2004 | US20040092218 Guide ring removal device |
| 05/13/2004 | US20040092210 Method to reduce defect/slurry residue for copper CMP |
| 05/13/2004 | US20040092168 Rear interconnect blade for rack mounted systems |
| 05/13/2004 | US20040092133 Methods of fabricating oxide layers by plasma nitridation and oxidation |
| 05/13/2004 | US20040092132 Atomic layer deposition methods |
| 05/13/2004 | US20040092130 Method of manufacturing semiconductor device having metal alloy interconnection that has excellent EM lifetime |
| 05/13/2004 | US20040092129 Method for manufacturing circuit devices |
| 05/13/2004 | US20040092128 Method and apparatus for etch rate uniformity control |
| 05/13/2004 | US20040092127 Method of forming cavity between multilayered wirings |
| 05/13/2004 | US20040092126 Method for preventing reworked photoresist from collapsing |
| 05/13/2004 | US20040092125 Method for forming quantum dots using metal thin film or metal powder |
| 05/13/2004 | US20040092124 Method of manufacturing a semiconductor integrated circuit device having a plurality of wiring layers and mask-pattern generation method |
| 05/13/2004 | US20040092123 Method of manufacturing semiconductor device having silicide layer |
| 05/13/2004 | US20040092122 Method of improving etch uniformity in deep silicon etching |
| 05/13/2004 | US20040092121 Fabrication of a printhead chip incorporating a plurality of nozzle arrangements |
| 05/13/2004 | US20040092119 Method and apparatus for generating gas plasma, gas composition for generating plasma and method for manufacturing semiconductor device using the same |
| 05/13/2004 | US20040092118 Sidewall smoothing in high aspect ratio/deep etching using a discrete gas switching method |
| 05/13/2004 | US20040092117 Method for fabricating a through-hole interconnection substrate and a through-hole interconnection substrate |
| 05/13/2004 | US20040092116 Method for fabricating a floating gate of flash rom |
| 05/13/2004 | US20040092115 Memory device having isolation trenches with different depths and the method for making the same |
| 05/13/2004 | US20040092114 Method of forming an isolation film in a semiconductor device |
| 05/13/2004 | US20040092113 Process for forming a dual damascene structure |
| 05/13/2004 | US20040092112 Chemical mechanical polishing system and method for planarizing substrates in fabricating semiconductor devices |
| 05/13/2004 | US20040092111 Method of dry etching organic SOG film |
| 05/13/2004 | US20040092110 Polishing method and polishing apparatus |
| 05/13/2004 | US20040092109 Semiconductor device and method for making the device having an electrically modulated conduction channel |
| 05/13/2004 | US20040092108 Method of processing a semiconductor wafer |
| 05/13/2004 | US20040092107 Perovskite-type material forming methods, capacitor dielectric forming methods, and capacitor constructions |
| 05/13/2004 | US20040092106 Copper chemical mechanical polishing solutions using sulfonated amphiprotic agents |
| 05/13/2004 | US20040092105 Method of forming a via hole through a glass wafer |
| 05/13/2004 | US20040092104 Methods of incorporating germanium within CMOS process |
| 05/13/2004 | US20040092102 Chemical mechanical polishing composition and method |
| 05/13/2004 | US20040092101 Cu film deposition equipment of semiconductor device |
| 05/13/2004 | US20040092100 Method to eliminate copper hillocks and to reduce copper stress |
| 05/13/2004 | US20040092099 Semiconductor device and manufacturing method therefor, circuit board, and electronic equipment |
| 05/13/2004 | US20040092098 Use of amorphous carbon as a removable ARC material for dual damascene fabrication |
| 05/13/2004 | US20040092097 Multilayer wiring structure of semiconductor device, method of producing said multilayer wiring structure and semiconductor device to be used for reliability evaluation |
| 05/13/2004 | US20040092096 Oxygen bridge structures and methods to form oxygen bridge structures |
| 05/13/2004 | US20040092095 Side wall passivation films for damascene cu/low k electronic devices |
| 05/13/2004 | US20040092094 Integrated device technology using a buried power buss for major device and circuit advantages |
| 05/13/2004 | US20040092093 Method for producing an integrated circuit having at least one metalicized surface |
| 05/13/2004 | US20040092092 Semiconductor device with under bump metallurgy and method for fabricating the same |
| 05/13/2004 | US20040092090 Method of forming a gate electrode, method of manufacturing a semiconductor device having the gate electrode, and method of oxidizing a substrate |
| 05/13/2004 | US20040092089 Polysilicon processing using an anti-reflective dual layer hardmask for 193 nm lithography |
| 05/13/2004 | US20040092088 Heat reflecting material and heating device using the material |
| 05/13/2004 | US20040092087 Method for producing a thin film comprising introduction of gaseous species |
| 05/13/2004 | US20040092086 Film forming method and film forming device |
| 05/13/2004 | US20040092085 Semiconductor crystal film and method for preparation thereof |
| 05/13/2004 | US20040092084 Method for treating a semiconductor material for subsequent bonding |
| 05/13/2004 | US20040092083 Image sensor structure |
| 05/13/2004 | US20040092082 Semiconductor device fabrication method |
| 05/13/2004 | US20040092081 Method of manufacturing alignment mark and aligning method using the same |
| 05/13/2004 | US20040092079 Method for fabricating a microelectronic circuit and microelectronic circuit |
| 05/13/2004 | US20040092078 Method of fabricating semiconductor device |
| 05/13/2004 | US20040092077 Method to improve flash forward tunneling voltage (FTV) performance |
| 05/13/2004 | US20040092076 Semiconductor device and fabrication method thereof |
| 05/13/2004 | US20040092075 Method for fabricating a semiconductor device |
| 05/13/2004 | US20040092074 Method of forming source/drain regions in semiconductor devices |
| 05/13/2004 | US20040092073 Deposition of hafnium oxide and/or zirconium oxide and fabrication of passivated electronic structures |
| 05/13/2004 | US20040092072 Arrangements having increased on-die capacitance |
| 05/13/2004 | US20040092071 Semiconductor processing methods of forming dynamic random access memory (DRAM) circuitry |
| 05/13/2004 | US20040092070 Method to improve etching of resist protective oxide (RPO) to prevent photo-resist peeling |
| 05/13/2004 | US20040092069 Semiconductor production system, cluster tool, control method of semiconductor production system and maintenance method of cluster tool |
| 05/13/2004 | US20040092068 CMOS process for double vertical channel thin film transistor |
| 05/13/2004 | US20040092067 Damascene double-gate MOSFET with vertical channel regions |
| 05/13/2004 | US20040092066 Twin NAND device structure, array operations and fabrication method |
| 05/13/2004 | US20040092065 Apparatus and method for electrolytically depositing copper on a semiconductor workpiece |
| 05/13/2004 | US20040092063 Semiconductor device and manufacturing method thereof |
| 05/13/2004 | US20040092062 Planarizing gate material to improve gate critical dimension in semiconductor devices |
| 05/13/2004 | US20040092061 Method for manufacturing a semiconductor device |
| 05/13/2004 | US20040092060 FIN field effect transistor with self-aligned gate |
| 05/13/2004 | US20040092059 Semiconductor device and fabricating method thereof |
| 05/13/2004 | US20040092057 Semiconductor device and manufacturing method thereof |
| 05/13/2004 | US20040092054 Grounded gate for reducing dark current in CMOS image sensors |
| 05/13/2004 | US20040092053 Transparent layer of a LED device and the method for growing the same |
| 05/13/2004 | US20040092051 Methods for preserving strained semiconductor substrate layers during CMOS processing |
| 05/13/2004 | US20040092050 Method of implanting metallic nanowires or nanotubes on a field emission device by flocking |
| 05/13/2004 | US20040092049 Fabrication method of semiconductor integrated circuit device and testing method |
| 05/13/2004 | US20040092048 Angle control system including a display device configured with two imaging windows that simultaneously display the same image captured by a single camera |
| 05/13/2004 | US20040092047 Method and apparatus employing integrated metrology for improved dielectric etch efficiency |
| 05/13/2004 | US20040092046 Method of measuring a concentration of a material and method of measuring a concentration of a dopant of a semiconductor device |
| 05/13/2004 | US20040092045 Methods and systems for determining a presence of macro and micro defects on a specimen |
| 05/13/2004 | US20040092043 Semiconductor manufacturing method and semiconductor manufacturing apparatus |
| 05/13/2004 | US20040092042 Detection and classification of micro-defects in semi-conductors |
| 05/13/2004 | US20040092041 Device for detecting three-dimensional electromagnetic radiation and method for making same |
| 05/13/2004 | US20040092040 Interlock apparatus and method for supplying gas to a semiconductor manufacturing device |
| 05/13/2004 | US20040092039 Magnetic memory cell having a soft reference layer |
| 05/13/2004 | US20040092038 Method for forming a capacitor having a high-dielectric-constant insulation film |
| 05/13/2004 | US20040091997 Using immobilized chemoselective biopolymers contained in nutrient and osmotic protective medium to analyze surface of an object |