Patents
Patents for H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof (658,974)
05/2004
05/18/2004US6736307 Method for mounting leadframes
05/18/2004US6736306 Semiconductor chip package comprising enhanced pads
05/18/2004US6736268 Transport module
05/18/2004US6736206 Thermal processor
05/18/2004US6736154 Pressure vessel systems and methods for dispensing liquid chemical compositions
05/18/2004US6736150 Fluid heating system for processing semiconductor materials
05/18/2004US6736149 Method and apparatus for supercritical processing of multiple workpieces
05/18/2004US6736148 Utilizing robot which carries semiconductor wafers to processing bays; clean rooms; compact
05/18/2004US6736147 Semiconductor-processing device provided with a remote plasma source for self-cleaning
05/18/2004US6735927 Position sensing system for inspection handling system
05/18/2004US6735859 Method of manufacturing chip scale package
05/18/2004US6735855 Methods for electrical connector
05/18/2004CA2233707C Integrated magnetic levitation and rotation system
05/13/2004WO2004040950A1 Method for constraining the spread of solder during reflow for preplated high wettability lead frame flip chip assembly
05/13/2004WO2004040667A1 Non-volatile memory cell, memory cell arrangement and method for production of a non-volatile memory cell
05/13/2004WO2004040666A1 Vertical integrated component, component arrangement and method for production of a vertical integrated component
05/13/2004WO2004040665A2 Etch-stop material for improved manufacture of magnetic devices
05/13/2004WO2004040662A1 Zn SEMICONDUCTOR LIGHT-EMITTING DEVICE AND METHOD FOR MANUFACTURING SAME
05/13/2004WO2004040660A1 Optical sensor package
05/13/2004WO2004040658A1 Floating gate transistors
05/13/2004WO2004040657A1 Organic semiconductor device
05/13/2004WO2004040655A2 Semiconductor component and method of manufacture
05/13/2004WO2004040653A1 Thin film transistors and methods of manufacture thereof
05/13/2004WO2004040652A1 Bipolar transistor having a base region with a constant bandgap layer and a graded bandgap layer
05/13/2004WO2004040651A1 Magnetic random access memory, and production method therefor
05/13/2004WO2004040650A1 Soi wafer and method for manufacturing soi wafer
05/13/2004WO2004040649A1 Semiconductor device and method for manufacturing semiconductor device
05/13/2004WO2004040648A1 Semiconductor device and method for manufacturing semiconductor device
05/13/2004WO2004040647A1 Ferroelectric memory cell
05/13/2004WO2004040644A2 Memory cell, memory cell arrangement, structuring arrangement and method for production of a memory cell
05/13/2004WO2004040643A1 Method for producing a transistor structure
05/13/2004WO2004040642A1 Oxygen bridge structures and methods
05/13/2004WO2004040641A1 Clean tunnel for carrier
05/13/2004WO2004040640A1 Electronic component with cavity fillers made from thermoplast and method for production thereof
05/13/2004WO2004040638A1 Gallium indium nitride arsenide hetero-field-effect transistor, its manufacturing method, and transmitter/receiver using same
05/13/2004WO2004040637A1 Semiconductor component and method of manufacture
05/13/2004WO2004040636A1 Heater module of rapid thermal processing apparatus
05/13/2004WO2004040635A1 Method of forming low-dielectric-constant amorphous silica coating and low-dielectric-constant amorphous silica coating obtained by the method
05/13/2004WO2004040634A1 Process monitor and system for producing semiconductor
05/13/2004WO2004040633A1 Method for using additives in the caustic etching of silicon for obtaining improved surface characteristics
05/13/2004WO2004040632A1 Heat treating system and heat treating method
05/13/2004WO2004040631A1 Plasma chemical vapor deposition method and plasma chemical vapor deposition device
05/13/2004WO2004040628A1 Process for producing polycrystalline film using laser and polycrystalline film
05/13/2004WO2004040627A2 Electronic components
05/13/2004WO2004040625A1 Exposure apparatus control method and device
05/13/2004WO2004040624A2 Method and apparatus for controlling a manufacturing process
05/13/2004WO2004040623A2 An improved barrier layer for a copper metallization layer including a low k dielectric
05/13/2004WO2004040622A2 Nickel silicide with reduced interface roughness
05/13/2004WO2004040621A2 Method and apparatus for planarizing a semiconductor wafer
05/13/2004WO2004040620A2 Method and apparatus for implementing measurement or instrumentation on production equipment
05/13/2004WO2004040619A2 Semiconductor device with tensile strain silicon introduced by compressive material in a buried oxide layer
05/13/2004WO2004040618A2 Feedthrough design and method for a hermetically sealed microdevice
05/13/2004WO2004040616A2 Field effect transistor and method for production thereof
05/13/2004WO2004040596A1 Solid state inducting device
05/13/2004WO2004040583A1 Flash memory cell arrays having dual control gates per memory cell charge storage element
05/13/2004WO2004040580A1 Magnetic tunnel junction memory cell architecture
05/13/2004WO2004040476A1 Manufacturing process of detachable substrates
05/13/2004WO2004040377A1 Chemical-amplification positive-working photoresist composition
05/13/2004WO2004040373A1 Multi-image reticles
05/13/2004WO2004040372A1 Multi-image reticles
05/13/2004WO2004040369A2 Anti-reflective coatings and dual damascene fill compositions comprising styrene-allyl alcohol copolymers
05/13/2004WO2004040326A1 Defect analyzing device for semiconductor integrated circuits, system therefor, and detection method
05/13/2004WO2004040321A1 Probe card
05/13/2004WO2004040045A1 Method for producing silicon wafer
05/13/2004WO2004040034A2 Method of preparing a solution and application of this solution to prepare functional oxide layers
05/13/2004WO2004039905A1 Composition for polishing metal, polishing method for metal layer, and production method for wafer
05/13/2004WO2004039903A1 Coating liquid for forming amorphous silica coating film of low dielectric constant and process for producing the coating liquid
05/13/2004WO2004039886A2 Flip-chip system and method of making same
05/13/2004WO2004039546A1 Coating liquid for forming semiconductor film
05/13/2004WO2004034475A8 Plasma oscillation switching device
05/13/2004WO2004028999A3 Thin films of oxidic materials having a high dielectric constant
05/13/2004WO2004025714A3 Method for production of a semiconductor structure
05/13/2004WO2004023529A3 Device and method for thermally treating semiconductor wafers
05/13/2004WO2004019609A3 A cmos aps with stacked avalanche multiplication layer and low voltage readout electronics
05/13/2004WO2004019387A9 Substrate processing system
05/13/2004WO2004019368A3 Reduced volume plasma reactor
05/13/2004WO2004017381A3 Process and system for laser crystallization processing of film regions on a substrate to minimize edge areas, and structure of such film regions
05/13/2004WO2004016672A3 Surface modification of cvd polymer films
05/13/2004WO2004012246A3 Method for reducing pattern deformation and photoresist poisoning in semiconductor device fabrication
05/13/2004WO2004012243A3 Selective placement of dislocation arrays
05/13/2004WO2004010471A3 In-situ formation of metal insulator metal capacitors
05/13/2004WO2004010464A3 Methods of electrochemically treating semiconductor substrates, and methods of forming capacitor constructions
05/13/2004WO2004008052A3 System and method for cooling a thermal processing apparatus
05/13/2004WO2004006298A3 Method and apparatus for non-invasive measurement and analysis of semiconductor process parameters
05/13/2004WO2004003969A3 Method and system for predicting process performance using material processing tool and sensor data
05/13/2004WO2004001809A8 Method for energy-assisted atomic layer deposition and removal
05/13/2004WO2004001480A3 Catadioptric reduction objective
05/13/2004WO2003103004A3 A cathode pedestal for a plasma etch reactor
05/13/2004WO2003102962A3 Method and apparatus for erasing flash memory
05/13/2004WO2003100844B1 Method for forming silicon dioxide film on silicon substrate, method for forming oxide film on semiconductor substrate, and method for producing semiconductor device
05/13/2004WO2003079754A3 Method for stacking chips within a multichip module package
05/13/2004WO2003079437A3 Semiconductor device having a bond pad and method therefor
05/13/2004WO2003067183A3 Wireless substrate-like sensor
05/13/2004WO2003058701A3 Uv-enhanced oxy-nitridation of semiconductor substrates
05/13/2004WO2003041127B1 Process for forming metallized contacts to periphery transistors
05/13/2004WO2003031679B1 Method for depositing metal layers employing sequential deposition techniques
05/13/2004WO2002093253A9 Backside alignment system and method
05/13/2004WO2002091471A3 Integrated circuit
05/13/2004WO2002091468A9 Method for thin film lift-off processes using lateral extended etching masks and device
05/13/2004WO2002091422A3 Raster shaped beam, electron beam exposure strategy using a two dimensional multiplexel flash field