| Patents for H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof (658,974) |
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| 05/18/2004 | US6738129 Illumination apparatus, exposure apparatus, and device fabricating method using the same |
| 05/18/2004 | US6738128 Exposure apparatus |
| 05/18/2004 | US6738123 Drive circuit connection structure including a substrate, circuit board, and semiconductor device, and display apparatus including the connection structure |
| 05/18/2004 | US6738110 Array substrate for IPS mode liquid crystal display device |
| 05/18/2004 | US6738109 Thin film transistor substrate for liquid crystal display panel and manufacturing method thereof |
| 05/18/2004 | US6738005 D/A conversion circuit and semiconductor device |
| 05/18/2004 | US6737980 Automatically measures and indicates speed of wafer lift, indicates period of time to use wafer lift, accurately checks use time of wafer lift after overhaul |
| 05/18/2004 | US6737912 Resistance division circuit and semiconductor device |
| 05/18/2004 | US6737910 Semiconductor integrated circuit with constant internal power supply voltage |
| 05/18/2004 | US6737905 Clamp circuit |
| 05/18/2004 | US6737903 Semiconductor integrated circuit device with clock distribution configuration therein |
| 05/18/2004 | US6737890 Switching circuit device |
| 05/18/2004 | US6737882 Method for universal wafer carrier for wafer level die burn-in |
| 05/18/2004 | US6737839 Semiconductor integrated circuit with selectable power supply units for different operation modes |
| 05/18/2004 | US6737826 Substrate transport apparatus with multiple independent end effectors |
| 05/18/2004 | US6737812 Having exhaust opening for exhausting residual gas generated at time of processing positioned close to periphery of gas spray opening, air jet opening generating airflow surrounding exhaust opening to prevent residual gas from flowing out |
| 05/18/2004 | US6737752 Flip-chip package containing a chip and a substrate having differing pitches for electrical connections |
| 05/18/2004 | US6737747 Advanced BEOL interconnect structures with low-k PE CVD cap layer and method thereof |
| 05/18/2004 | US6737746 Semiconductor device containing copper diffusion preventive film of silicon carbide |
| 05/18/2004 | US6737744 Semiconductor device including porous insulating material and manufacturing method therefor |
| 05/18/2004 | US6737743 Memory chip cut out of wafer including basic chips functioning as memory chip independently from each other, dicing line interposed between and connecting basic chips, and configuring part of memory chip; each basic chip is operated independently |
| 05/18/2004 | US6737741 Process for mounting electronic device and semiconductor device |
| 05/18/2004 | US6737740 High performance silicon contact for flip chip |
| 05/18/2004 | US6737735 Semiconductor device wiring lead frame having resin flow control plates |
| 05/18/2004 | US6737731 Soft recovery power diode |
| 05/18/2004 | US6737730 Semiconductor device including silicon substrate, silicon dioxide layer containing hydrogen, silicon nitride structure preventing diffusion of hydrogen at standard conditions, metal conductive layer heated to temperature below melting point |
| 05/18/2004 | US6737729 Anisotropic etching of a semiconductor device using tilted etching holes |
| 05/18/2004 | US6737728 On-chip decoupling capacitor and method of making same |
| 05/18/2004 | US6737725 Multilevel interconnect structure containing air gaps and method for making |
| 05/18/2004 | US6737724 Impurity concentration in channel region near interface with gate insulating film is lower than that in substrate, suppressing short channel effect; source-drain region does not overlap edge of isolation region, reducing current leakage |
| 05/18/2004 | US6737723 Low dielectric constant shallow trench isolation |
| 05/18/2004 | US6737722 Lateral transistor having graded base region, semiconductor integrated circuit and fabrication method thereof |
| 05/18/2004 | US6737721 Shallow trench isolation structure for a bipolar transistor |
| 05/18/2004 | US6737717 Thin-film transistor having lightly-doped drain structure |
| 05/18/2004 | US6737716 Semiconductor device and method of manufacturing the same |
| 05/18/2004 | US6737715 Field-effect transistor and corresponding manufacturing method |
| 05/18/2004 | US6737714 FET having a gate electrode of a honeycomb structure |
| 05/18/2004 | US6737713 Substrate connection in an integrated power circuit |
| 05/18/2004 | US6737712 Method of manufacturing semiconductor integrated circuit device having capacitor element |
| 05/18/2004 | US6737711 Semiconductor device with bit lines formed via diffusion over word lines |
| 05/18/2004 | US6737710 Transistor structure having silicide source/drain extensions |
| 05/18/2004 | US6737709 Semiconductor device |
| 05/18/2004 | US6737708 Thin-film transistor, liquid-crystal display device, and method of producing the same |
| 05/18/2004 | US6737707 Semiconductor device and manufacturing method thereof |
| 05/18/2004 | US6737706 Silicon on insulator device having trench isolation layer and method for manufacturing the same |
| 05/18/2004 | US6737704 Transistor and method of manufacturing the same |
| 05/18/2004 | US6737703 Memory array with buried bit lines |
| 05/18/2004 | US6737702 Zero power memory cell with reduced threshold voltage |
| 05/18/2004 | US6737701 Structure and method for reducing charge loss in a memory cell |
| 05/18/2004 | US6737700 Non-volatile memory cell structure and method for manufacturing thereof |
| 05/18/2004 | US6737699 Enhanced on-chip decoupling capacitors and method of making same |
| 05/18/2004 | US6737698 Shielded capacitor structure |
| 05/18/2004 | US6737697 Having first and second tetraethyl orthosilicate-ozone films formed on protection film through chemical vapor deposition; second film has higher ozone concentration and lower water content as compared to first film |
| 05/18/2004 | US6737696 DRAM capacitor formulation using a double-sided electrode |
| 05/18/2004 | US6737695 Charge of capacitor of memory cell is used for switching transistor that connects bit line to voltage potential; small charge capacitance of memory cell suffices to switch transistor into on state |
| 05/18/2004 | US6737694 Ferroelectric memory device and method of forming the same |
| 05/18/2004 | US6737693 Ferroelastic integrated circuit device |
| 05/18/2004 | US6737692 Method for fabricating a component, and component having a metal layer and an insulation layer |
| 05/18/2004 | US6737691 Magnetic random access memory |
| 05/18/2004 | US6737690 Ferroelectronic memory and electronic apparatus |
| 05/18/2004 | US6737689 Thin diffusion barrier layer between the ferroelectric layer and the substrate |
| 05/18/2004 | US6737688 Minimizing a size of the device isolation region, maximizing a size of the active regions; high integration |
| 05/18/2004 | US6737687 Field-effect transistor device having a uniquely arranged gate electrode |
| 05/18/2004 | US6737683 Semiconductor device composed of a group III-V nitride semiconductor |
| 05/18/2004 | US6737680 Method and apparatus for fabricating a photocoupler with reduced mount area |
| 05/18/2004 | US6737678 Nitride semiconductor device and fabrication method thereof |
| 05/18/2004 | US6737677 Wide bandgap semiconductor device and method for manufacturing the same |
| 05/18/2004 | US6737676 Gate insulated field effect transistor and method of manufacturing the same |
| 05/18/2004 | US6737675 High density 3D rail stack arrays |
| 05/18/2004 | US6737674 Semiconductor device and fabrication method thereof |
| 05/18/2004 | US6737673 Transistor having source/drain with graded germanium concentration |
| 05/18/2004 | US6737672 Semiconductor device, manufacturing method thereof, and semiconductor manufacturing apparatus |
| 05/18/2004 | US6737670 Semiconductor substrate structure |
| 05/18/2004 | US6737668 Method of manufacturing structure with pores and structure with pores |
| 05/18/2004 | US6737666 Apparatus and method for detecting an end point of a cleaning process |
| 05/18/2004 | US6737663 Apparatus and method for detecting tilt angle of a wafer platform |
| 05/18/2004 | US6737662 Lithographic apparatus, device manufacturing method, device manufactured thereby, control system, computer program, and computer program product |
| 05/18/2004 | US6737659 Devices and methods for monitoring respective operating temperatures of components in a microlithography apparatus |
| 05/18/2004 | US6737658 Pattern observation apparatus and pattern observation method |
| 05/18/2004 | US6737657 Ion implanting apparatus for manufacturing semiconductor devices |
| 05/18/2004 | US6737653 X-ray detector and method of fabricating therefore |
| 05/18/2004 | US6737613 Heat treatment apparatus and method for processing substrates |
| 05/18/2004 | US6737606 Wafer dicing device and method |
| 05/18/2004 | US6737524 Activated polyethylene glycol compounds |
| 05/18/2004 | US6737408 Dipeptide and tripeptide derivatives |
| 05/18/2004 | US6737367 UV-supported thermal treatment of compound semiconductors in RTP systems |
| 05/18/2004 | US6737366 Method of forming low dielectric constant insulation film for semiconductor device |
| 05/18/2004 | US6737365 Forming a porous dielectric layer |
| 05/18/2004 | US6737364 Method for fabricating crystalline-dielectric thin films and devices formed using same |
| 05/18/2004 | US6737363 Forming a low dielectric constant insulating film including a siloxane bond as main skeleton on a semiconductor structure including a substrate; impregnating insulating film with a surfactant; exposure to water |
| 05/18/2004 | US6737362 Method for manufacturing a thin gate dielectric layer for integrated circuit fabrication |
| 05/18/2004 | US6737360 Controlled potential anodic etching process for the selective removal of conductive thin films |
| 05/18/2004 | US6737359 Method of forming a shallow trench isolation using a sion anti-reflective coating which eliminates water spot defects |
| 05/18/2004 | US6737358 Plasma etching uniformity control |
| 05/18/2004 | US6737357 Method for manufacturing a semiconductor device |
| 05/18/2004 | US6737356 Method of fabricating a semiconductor work object |
| 05/18/2004 | US6737355 Thick thermal oxide layers and isolation regions in a silicon-containing substrate for high voltage applications |
| 05/18/2004 | US6737354 Method of CMOS source/drain extension with the PMOS implant spaced by poly oxide and cap oxide from the gates |
| 05/18/2004 | US6737353 Semiconductor device having bump electrodes |
| 05/18/2004 | US6737352 Method of preventing particle generation in plasma cleaning |