Patents
Sitemap › H01 - Basic electric elements › H01L - Semiconductor devices; Electric solid state devices not otherwise provided for › H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
Patents for H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof (658,974)
05/2014
05/15/2014WO2014073554A1 Susceptor
05/15/2014WO2014073546A1 Electric heater and semiconductor production device comprising same
05/15/2014WO2014073545A1 Electric heater, and heating device and semiconductor production device comprising same
05/15/2014WO2014073532A1 Method and device for detecting defects and method and device for observing defects
05/15/2014WO2014073460A1 Substrate cooling member, substrate processing device, and substrate processing method
05/15/2014WO2014073457A1 Processing method and processing device
05/15/2014WO2014073388A1 Ceramic material and sputtering-target member
05/15/2014WO2014073387A1 Ceramic material and sputtering-target member
05/15/2014WO2014073361A1 Semiconductor device
05/15/2014WO2014073344A1 Multilayer polishing pad
05/15/2014WO2014073295A1 Field-effect transistor
05/15/2014WO2014073232A1 Wiring structure and method for manufacturing same
05/15/2014WO2014073213A1 Sputtering target
05/15/2014WO2014073210A1 Sputtering target, oxide semiconductor thin film, and methods for producing these products
05/15/2014WO2014073191A1 Electronic device manufacturing method and laminated body used in electronic device manufacturing method
05/15/2014WO2014073168A1 Semiconductor device
05/15/2014WO2014073127A1 Semiconductor device and production method for same
05/15/2014WO2014073126A1 Wiring board
05/15/2014WO2014073104A1 Semiconductor device manufacturing method, and semiconductor device
05/15/2014WO2014073103A1 Semiconductor device manufacturing method, and semiconductor device
05/15/2014WO2014073057A1 Chip supply apparatus
05/15/2014WO2014072918A1 Ink
05/15/2014WO2014072114A1 Semiconductor sensor device and method of producing a semiconductor sensor device
05/15/2014WO2014072077A1 Substrate holder and a device and a method for treating substrates
05/15/2014WO2014071815A1 Semiconductor device and manufacturing method thereof
05/15/2014WO2014071813A1 Semiconductor device package and packaging method
05/15/2014WO2014071783A1 Automatic material handling system
05/15/2014WO2014071769A1 Vacuum equipment system for surface cleaning and oxidative modification by ultraviolet light/ozone
05/15/2014WO2014071754A1 Semiconductor structure and manufacturing method therefor
05/15/2014WO2014071745A1 Semiconductor light emitting element and method for manufacturing the same
05/15/2014WO2014071693A1 Single-walled carbon nanotube positioning and growing method
05/15/2014WO2014071673A1 Transverse ultra-thin insulated gate bipolar transistor having high current density
05/15/2014WO2014071669A1 Transparent conductor and manufacturing method thereof
05/15/2014WO2014071666A1 Semiconductor device and manufacturing method therefor
05/15/2014WO2014071665A1 Semiconductor device and manufacturing method therefor
05/15/2014WO2014071664A1 Finfet and manufacturing method therefor
05/15/2014WO2014071663A1 Semiconductor device and manufacturing method therefor
05/15/2014WO2014071660A1 Semiconductor device and manufacturing method therefor
05/15/2014WO2014071653A1 Semiconductor device and manufacturing method therefor
05/15/2014WO2014071652A1 Semiconductor device and manufacturing method therefor
05/15/2014WO2014071651A1 Semiconductor device and manufacturing method therefor
05/15/2014WO2014071650A1 Semiconductor device and manufacturing method therefor
05/15/2014WO2014071649A1 Fin structure and manufacturing method therefor
05/15/2014WO2014071634A1 Self-aligned metal oxide thin film transistor device and manufacturing method
05/15/2014WO2014071518A1 Method for depositing a conductive coating on a surface
05/15/2014WO2014071458A1 Formation of metal contacts
05/15/2014WO2014021972A3 Zno-based system on glass (sog) for advanced displays
05/15/2014WO2013169208A8 Non-acidic isotropic etch-back for silicon wafer solar cells
05/15/2014WO2012173769A3 Powered grid for plasma chamber
05/15/2014US20140137059 Method and apparatus for plasma processing
05/15/2014US20140135246 Cleaning composition, cleaning process, and process for producing semiconductor device
05/15/2014US20140134950 Vertical System Integration
05/15/2014US20140134852 Method and apparatus for forming dielectric film of low-dielectric constant and method for detaching porogen
05/15/2014US20140134851 Ozone gas generation processing apparatus, method of forming silicon oxide film, and method for evaluating silicon single crystal wafer
05/15/2014US20140134850 Method for manufacturing oxide layer
05/15/2014US20140134849 Combinatorial Site Isolated Plasma Assisted Deposition
05/15/2014US20140134848 Plasma etching method and plasma etching apparatus
05/15/2014US20140134847 Plasma etching method and plasma etching apparatus
05/15/2014US20140134846 Plasma etching method
05/15/2014US20140134845 Method of forming contact hole
05/15/2014US20140134844 Method for processing a die
05/15/2014US20140134842 Dry etch process
05/15/2014US20140134841 Methods of Forming Patterns, and Methods of Forming Integrated Circuitry
05/15/2014US20140134840 Method for manufacturing stretchable thin film transistor
05/15/2014US20140134839 Methods of fabricating semiconductor devices with electrode support patterns
05/15/2014US20140134838 Methods of annealing a conductive transparent oxide film layer for use in a thin film photovoltaic device
05/15/2014US20140134836 Dielectric cap layer for replacement gate with self-aligned contact
05/15/2014US20140134835 Method of manufacturing semiconductor device
05/15/2014US20140134834 Method of Fabricating Power Transistor with Protected Channel
05/15/2014US20140134833 Ion implantation apparatus and ion implantation method
05/15/2014US20140134832 Polycrystalline silicon manufacturing apparatus and polycrystalline silicon manufacturing method
05/15/2014US20140134831 Finfet and method of fabricating the same
05/15/2014US20140134830 Selective gallium nitride regrowth on (100) silicon
05/15/2014US20140134829 Process Tools and Methods of Forming Devices Using Process Tools
05/15/2014US20140134828 Semiconductor die singulation method
05/15/2014US20140134827 Conformal film deposition for gapfill
05/15/2014US20140134826 Field effect transistor devices with dopant free channels and back gates
05/15/2014US20140134825 Low capacitance transient voltage suppressor (tvs) with reduced clamping voltage
05/15/2014US20140134824 Method of fabricating dielectric layer and shallow trench isolation
05/15/2014US20140134817 Semiconductor device and method for manufacturing the same
05/15/2014US20140134816 Methods of Forming Metal Silicide-Comprising Material and Methods of Forming Metal Silicide-Comprising Contacts
05/15/2014US20140134812 Method of fabricating semiconductor device
05/15/2014US20140134811 Co-integration of elemental semiconductor devices and compound semiconductor devices
05/15/2014US20140134808 Recessed gate field effect transistor
05/15/2014US20140134806 Manufacturing methods of semiconductor substrate, package and device
05/15/2014US20140134805 Method of fabricating a semiconductor package
05/15/2014US20140134804 Method And System For A Semiconductor For Device Package With A Die-To-Packaging Substrate First Bond
05/15/2014US20140134803 Method And System For A Semiconductor Device Package With A Die-To-Die First Bond
05/15/2014US20140134802 Chip-on-Wafer Structures and Methods for Forming the Same
05/15/2014US20140134800 Methods For Temporary Wafer Molding For Chip-On-Wafer Assembly
05/15/2014US20140134799 Wettable lead ends on a flat-pack no-lead microelectronic package
05/15/2014US20140134797 Method for fabricating semiconductor package
05/15/2014US20140134796 Method And System For A Semiconductor Device Package With A Die To Interposer Wafer First Bond
05/15/2014US20140134795 Semiconductor element manufacturing method
05/15/2014US20140134793 Methods for making large-area, free-standing metal oxide films
05/15/2014US20140134792 Solution-Processed Metal Selenide Semiconductor using Deposited Selenium Film
05/15/2014US20140134791 Solution-Processed Metal-Selenide Semiconductor Using Selenium Nanoparticles
05/15/2014US20140134780 Method of producing epitaxial silicon wafer, epitaxial silicon wafer, and method of producing solid-state image sensing device
05/15/2014US20140134779 Method of producing epitaxial silicon wafer, epitaxial silicon wafer, and method of producing solid-state image sensing device
05/15/2014US20140134761 Method of attaching wafer to sheet
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