Patents
Sitemap › H01 - Basic electric elements › H01L - Semiconductor devices; Electric solid state devices not otherwise provided for › H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
Patents for H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof (658,974)
08/2008
08/12/2008US7410892 Methods of fabricating integrated circuit devices having self-aligned contact structures
08/12/2008US7410891 Method of manufacturing a superjunction device
08/12/2008US7410890 Formation of doped regions and/or ultra-shallow junctions in semiconductor materials by gas-cluster ion irradiation
08/12/2008US7410889 Method of fabricating a poly-silicon thin film
08/12/2008US7410888 Method for manufacturing strained silicon
08/12/2008US7410887 Controlled process and resulting device
08/12/2008US7410886 Method for fabricating protective caps for protecting elements on a wafer surface
08/12/2008US7410885 Method of reducing contamination by removing an interlayer dielectric from the substrate edge
08/12/2008US7410884 3D integrated circuits using thick metal for backside connections and offset bumps
08/12/2008US7410883 Glass-based semiconductor on insulator structures and methods of making same
08/12/2008US7410882 Method of manufacturing and structure of polycrystalline semiconductor thin-film heterostructures on dissimilar substrates
08/12/2008US7410881 Method of manufacturing flash memory device
08/12/2008US7410880 Method for measuring bonding quality of bonded substrates, metrology apparatus, and method of producing a device from a bonded substrate
08/12/2008US7410879 System and method for providing a dual via architecture for thin film resistors
08/12/2008US7410878 Polysilicon film having smooth surface and method of forming the same
08/12/2008US7410877 Method for manufacturing SIMOX wafer and SIMOX wafer
08/12/2008US7410876 Methodology to reduce SOI floating-body effect
08/12/2008US7410875 Semiconductor structure and fabrication thereof
08/12/2008US7410874 Method of integrating triple gate oxide thickness
08/12/2008US7410873 Method of manufacturing a semiconductor device
08/12/2008US7410872 Sealing method for electronic devices formed on a common semiconductor substrate and corresponding circuit structure
08/12/2008US7410871 Split gate type flash memory device and method for manufacturing same
08/12/2008US7410870 Methods of forming non-volatile memory devices and devices formed thereby
08/12/2008US7410869 Method of manufacturing a semiconductor device
08/12/2008US7410868 Method for fabricating a nonvolatile memory element and a nonvolatile memory element
08/12/2008US7410867 Vertical transistor with horizontal gate layers
08/12/2008US7410866 Method for forming storage node of capacitor in semiconductor device
08/12/2008US7410865 Method for fabricating capacitor of semiconductor device
08/12/2008US7410864 Trench and a trench capacitor and method for forming the same
08/12/2008US7410863 Methods of forming and using memory cell structures
08/12/2008US7410862 Trench capacitor and method for fabricating the same
08/12/2008US7410861 Methods of forming dynamic random access memory trench capacitors
08/12/2008US7410860 Method of manufacturing lateral MOSFET structure of an integrated circuit having separated device regions
08/12/2008US7410859 Stressed MOS device and method for its fabrication
08/12/2008US7410858 Isolation structure configurations for modifying stresses in semiconductor devices
08/12/2008US7410857 Semiconductor memory device and manufacturing method thereof
08/12/2008US7410856 Methods of forming vertical transistors
08/12/2008US7410855 Semiconductor device
08/12/2008US7410854 Method of making FUSI gate and resulting structure
08/12/2008US7410853 Method of forming a nanowire and method of manufacturing a semiconductor device using the same
08/12/2008US7410852 Opto-thermal annealing methods for forming metal gate and fully silicided gate field effect transistors
08/12/2008US7410851 Low voltage superjunction MOSFET
08/12/2008US7410850 Heating treatment device, heating treatment method and fabrication method of semiconductor device
08/12/2008US7410849 Semiconductor device and method for manufacturing the same
08/12/2008US7410848 Crystallization method, crystallization apparatus, processed substrate, thin film transistor and display apparatus
08/12/2008US7410847 Semiconductor device having semiconductor circuit formed by semiconductor elements and method for manufacturing the same
08/12/2008US7410846 Method for reduced N+ diffusion in strained Si on SiGe substrate
08/12/2008US7410845 Dual-gate device and method
08/12/2008US7410844 Device fabrication by anisotropic wet etch
08/12/2008US7410843 Methods for fabricating reduced floating body effect static random access memory cells
08/12/2008US7410842 Method for fabricating thin film transistor of liquid crystal display device
08/12/2008US7410841 Building fully-depleted and partially-depleted transistors on same chip
08/12/2008US7410840 Building fully-depleted and bulk transistors on same chip
08/12/2008US7410839 Thin film transistor and manufacturing method thereof
08/12/2008US7410838 Fabrication methods for memory cells
08/12/2008US7410837 Method of manufacturing mounting substrate
08/12/2008US7410836 Method for fabricating a photosensitive semiconductor package
08/12/2008US7410835 Method for fabricating semiconductor package with short-prevented lead frame
08/12/2008US7410834 Method of manufacturing a semiconductor device
08/12/2008US7410833 Interconnections for flip-chip using lead-free solders and having reaction barrier layers
08/12/2008US7410832 Semiconductor chip package having an adhesive tape attached on bonding wires
08/12/2008US7410831 Method and device for dividing plate-like member
08/12/2008US7410830 Leadless plastic chip carrier and method of fabricating same
08/12/2008US7410829 Method of fabricating a semiconductor chip package
08/12/2008US7410828 Method of creating a predefined internal pressure within a cavity of a semiconductor device
08/12/2008US7410827 Semiconductor device and method of fabricating the same, circuit board, and electronic instrument
08/12/2008US7410826 Apparatus for manufacturing an electronic device, method of manufacturing an electronic device, and program for manufacturing an electronic device
08/12/2008US7410825 Metal and electronically conductive polymer transfer
08/12/2008US7410824 Method for solder bumping, and solder-bumping structures produced thereby
08/12/2008US7410823 Image sensors for reducing dark current and methods of manufacturing the same
08/12/2008US7410822 Method for forming color filter
08/12/2008US7410821 Method of fabricating suspended structure
08/12/2008US7410820 MEMS passivation with phosphonate surfactants
08/12/2008US7410819 Nitride semiconductor light-emitting device and method for producing same
08/12/2008US7410818 Thin film transistor, liquid crystal display using thin film transistor, and method of manufacturing thin film transistor
08/12/2008US7410817 Liquid crystal display device including driving circuit and method of fabricating the same
08/12/2008US7410816 Method for forming a chamber in an electronic device and device formed thereby
08/12/2008US7410815 Apparatus and method for non-contact assessment of a constituent in semiconductor substrates
08/12/2008US7410814 Process and apparatus for cleaning silicon wafers
08/12/2008US7410813 Method of parallel lapping a semiconductor die
08/12/2008US7410812 Manufacture of semiconductor device having insulation film of high dielectric constant
08/12/2008US7410748 Controlling wavelength for etching photomask; antireflectivity layer; stabilization of photoresist pattern over layer to be etched ; photolithography
08/12/2008US7410737 System and method for process variation monitor
08/12/2008US7410736 Methods and systems to compensate for a stitching disturbance of a printed pattern in a maskless lithography system not utilizing overlap of the exposure zones
08/12/2008US7410735 Method of characterization, method of characterizing a process operation, and device manufacturing method
08/12/2008US7410676 Chemical vapor deposition method
08/12/2008US7410671 Sequential chemical vapor deposition
08/12/2008US7410666 Metal nitride carbide deposition by ALD
08/12/2008US7410593 Plasma etching methods using nitrogen memory species for sustaining glow discharge
08/12/2008US7410592 Stamp for use in a lithographic process, method of manufacturing a stamp, and method of manufacturing a patterned layer on a substrate
08/12/2008US7410590 Transferable micro spring structure
08/12/2008US7410552 Electron cyclotron resonance equipment with variable flare angle of horn antenna
08/12/2008US7410545 Substrate processing method of and substrate processing apparatus for freezing and cleaning substrate
08/12/2008US7410543 Substrate processing method
08/12/2008US7410539 Template type substrate and a method of preparing the same
08/12/2008US7410508 Apparatus for crystallizing semiconductor with laser beams
08/12/2008US7410409 Abrasive compound for CMP, method for polishing substrate and method for manufacturing semiconductor device using the same, and additive for CMP abrasive compound
08/12/2008US7410355 Method for the heat treatment of substrates
08/12/2008US7410265 Focusing-device for the radiation from a light source
08/12/2008US7410091 Method of integrated circuit assembly
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