| Patents for H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof (658,974) |
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| 08/07/2008 | US20080185284 Internal balanced coil for inductively coupled high density plasma processing chamber |
| 08/07/2008 | US20080185174 Passivation Layer for a Circuit Device and Method of Manufacture |
| 08/07/2008 | US20080185101 Hard Mask Structure for Patterning of Materials |
| 08/07/2008 | US20080185096 Method of producing solar modules by the roller laminate process |
| 08/07/2008 | US20080184935 Clamping device for holding a substrate |
| 08/07/2008 | US20080184934 Plasma reactor for the treatment of large size substrates |
| 08/07/2008 | US20080184556 Connection structure of circuit substrate |
| 08/07/2008 | US20080184543 Method and apparatus for manufacturing semiconductor device, and storage medium for executing the method |
| 08/07/2008 | US20080184542 System and method for separating and packaging integrated circuits |
| 08/07/2008 | DE19911916B4 Verfahren zur Herstellung einer Halbleitervorrichtung mit Schutzlage A process for producing a semiconductor device with protective layer |
| 08/07/2008 | DE19848298B4 Hochtemperaturstabile Halbleitersubstratscheibe großen Durchmessers und Verfahren zu ihrer Herstellung High temperature stable semiconductor substrate disc of large diameter and methods for their preparation |
| 08/07/2008 | DE10320658B4 Polarisationszustandserfassungssystem, Lichtquelle und Belichtungsgerät Polarization state detecting system, light source and exposure apparatus |
| 08/07/2008 | DE10252577B4 Verfahren zum Erzeugen einer Lotverbindung durch kapillaren Lotfluß A method for producing a solder joint by capillary flow of solder |
| 08/07/2008 | DE102008016360A1 Contact element producing method for use in projection illumination system, involves applying contact structure in retaining structure, where insulating areas of contact structure are arranged in free intermediate area of structure |
| 08/07/2008 | DE102008007222A1 Halbleitervorrichtung mit Störstellen dotiertem Widerstandselement A semiconductor device having impurity doped resistive element |
| 08/07/2008 | DE102008006919A1 Verdrahtungsstruktur eines Halbleiterbauelements und Verfahren zur Herstellung desselben Of the same wiring structure of a semiconductor device and methods for making |
| 08/07/2008 | DE102008006524A1 Finnenverbindung für Multi-Gate-Feldeffekt-Transistoren Finn connection for multi-gate field-effect transistors |
| 08/07/2008 | DE102008000141A1 Rauscharmer Transistor und Verfahren zur Herstellung desselben Low-noise transistor and method of manufacturing the same |
| 08/07/2008 | DE102007053104A1 Metal-insulator-semiconductor semiconductor device, has gate insulator formed on upper half of trench, where lower half of trench is filled with dielectric fluid having high dielectric constant |
| 08/07/2008 | DE102007045285A1 Semiconductor device e.g. diode, has anode electrode formed on surface of semiconductor body, where semiconductor body has protrusion that is formed at front end such that protrusion projects from inclined surface |
| 08/07/2008 | DE102007032387A1 Semiconductor device for power semiconductor engineering area has intermetal dielectric between conducting path layers by insulated filling layer such that silicon oxygen nitride layer is formed on dielectric |
| 08/07/2008 | DE102007007696A1 Halbleiterbauelement, Verfahren zum Herstellen eines Halbleiterbauelements und Maske zum Herstellen eines Halbleiterbauelements A semiconductor device, method for manufacturing a semiconductor device and mask for forming a semiconductor device |
| 08/07/2008 | DE102007006640A1 Verfahren zum Aufbringen einer Struktur auf ein Halbleiterbauelement A method of applying a pattern on a semiconductor device |
| 08/07/2008 | DE102007006455A1 Wärmereservoir und Verfahren zur Bearbeitung eines mit einem Wärmereservoir gekoppelten Substrates Heat reservoir and method for processing a substrate coupled with a heat reservoir |
| 08/07/2008 | DE102007005291A1 Aqueous dispersion useful for chemical-mechanical polishing of conductive metal films contains an abrasive in the form of fumed alumina |
| 08/07/2008 | DE102007005161A1 Process to manufacture semiconductors or solar cells by roughening treatment zones prior to electrolytic coating |
| 08/07/2008 | DE102007005140A1 Semiconductor body's component structure producing method, involves etching ditch, which has width smaller than dimensions of holes, and inserting dielectric material into ditch for production of dielectric layer |
| 08/07/2008 | DE102007005103A1 Separating a dielectric material comprises forming a first layer using a first and second precursor, on the conductive section of the substrate and forming a second layer using the first and third precursor on the first layer |
| 08/07/2008 | DE102007004824A1 Verbesserte Verspannungsübertragung in einem Zwischenschichtdielektrikum durch Verwendung einer zusätzlichen Verspannungsschicht über einer Schicht mit dualer Verspannung in einem Halbleiterbauelement Improved stress transmission in an interlayer by using an additional strain layer over a layer dual strain in a semiconductor device |
| 08/07/2008 | DE102007004331A1 Component for use in semiconductor body, has dielectric layer, which is arranged in semiconductor body and extends in semiconductor body in certain direction |
| 08/07/2008 | DE102007003812A1 Halbleiterbauelement mit Trench-Gate und Verfahren zur Herstellung A semiconductor device having trench gate and processes for preparing |
| 08/07/2008 | DE102004009083B4 MOS-Leistungstransistoranordnung und Verfahren zu deren Herstellung MOS power transistor structure and process for their preparation |
| 08/07/2008 | DE102004004597B4 Verfahren zur Vermessung einer Struktur auf einem Halbleiterwafer mit einem Rasterelektronenmikroskop A method for measurement of a structure on a semiconductor wafer with a scanning electron microscope |
| 08/07/2008 | DE10065350B4 Verfahren zur Herstellung eines Halbleiterbauelements mit Kondensator unter Verwendung eines Elektroplattierungsverfahrens A method for producing a semiconductor device having capacitor using an electroplating |
| 08/06/2008 | EP1954111A1 Process for producing multilayer ceramic substrate |
| 08/06/2008 | EP1954110A1 Soldering apparatus and soldering method |
| 08/06/2008 | EP1953916A1 Logic block control system and logic block control method |
| 08/06/2008 | EP1953828A1 Inverted metamorphic solar cell with via for backside contacts |
| 08/06/2008 | EP1953827A2 High voltage transistor and method of manufacturing the same |
| 08/06/2008 | EP1953814A1 Wafer level package structure and method for manufacturing same |
| 08/06/2008 | EP1953813A2 Semiconductor device and method of manufacturing the same |
| 08/06/2008 | EP1953812A1 Substrate support |
| 08/06/2008 | EP1953811A1 Au-Sn ALLOY BUMP HAVING NO TRAPPED-IN LARGE VOID AND PROCESS FOR PRODUCING THE SAME |
| 08/06/2008 | EP1953810A2 Transistor, fabricating method thereof and flat panel display |
| 08/06/2008 | EP1953809A2 Method for depositing metal films by CVD on diffusion barrier layers |
| 08/06/2008 | EP1953808A1 Method for producing epitaxial wafer and epitaxial wafer |
| 08/06/2008 | EP1953807A1 Exposure method and device manufacturing method using the same, exposure apparatus, and substrate treatment method and apparatus |
| 08/06/2008 | EP1953806A1 Substrate processing method, photomask manufacturing method, photomask and device manufacturing method |
| 08/06/2008 | EP1953805A1 Lighting optical system, exposure system, and exposure method |
| 08/06/2008 | EP1953804A2 Process for wafer backside polymer removal and wafer front side scavenger plasma |
| 08/06/2008 | EP1953803A2 Process for Wafer Backside Polymer Removal with Wafer Front Side Gas Purge |
| 08/06/2008 | EP1953802A2 Semiconductor process chamber |
| 08/06/2008 | EP1953801A1 Radiation detector |
| 08/06/2008 | EP1953596A1 Positive type resist composition and resist pattern formation method using same |
| 08/06/2008 | EP1953595A1 Radiation-sensitive resin composition |
| 08/06/2008 | EP1953593A1 Radiation-sensitive resin composition |
| 08/06/2008 | EP1953588A1 Liquid crystal display panel manufacturing method and liquid crystal display panel |
| 08/06/2008 | EP1953250A1 Metallic material, electronic component, electronic device and electronic optical component manufactured by using the metallic material and working method of the metallic material |
| 08/06/2008 | EP1953183A2 Silphenylene-bearing polymer, photo-curable resin composition, patterning process, and substrate circuit protective film |
| 08/06/2008 | EP1953181A1 Resin composition, varnish, resin film and semiconductor device |
| 08/06/2008 | EP1952935A1 Solder paste composition and solder precoating method |
| 08/06/2008 | EP1952899A1 Substrate cleaning apparatus, substrate cleaning method, and storage medium |
| 08/06/2008 | EP1952449A2 Optical devices featuring textured semiconductor layers |
| 08/06/2008 | EP1952441A1 Process for fabricating a flexible electronic device of the screen type, including a plurality of thin-film components |
| 08/06/2008 | EP1952440A2 Metal cuboid semiconductor device and method |
| 08/06/2008 | EP1952438A1 Method of manufacturing a semiconductor device and semiconductor device obtained with such a method |
| 08/06/2008 | EP1952437A1 Transporting apparatus for disc-shaped workpieces |
| 08/06/2008 | EP1952436A1 Bipolar carrier wafer and mobile bipolar electrostatic wafer arrangement |
| 08/06/2008 | EP1952435A1 Semiconductor wafer including semiconductor chips divided by scribe line and process-monitor electrode pads formed on scribe line |
| 08/06/2008 | EP1952434A1 Electronic component soldering structure and electronic component soldering method |
| 08/06/2008 | EP1952433A1 Semiconductor transistors with contact holes close to gates |
| 08/06/2008 | EP1952432A1 Method for bonding electronic components |
| 08/06/2008 | EP1952431A2 Photovoltaic contact and wiring formation |
| 08/06/2008 | EP1952430A1 Method of manufacturing a semiconductor device and semiconductor device obtained with such a method |
| 08/06/2008 | EP1952429A1 Dielectric media including surface-treated metal oxide particles |
| 08/06/2008 | EP1952428A2 Ball grid attachment |
| 08/06/2008 | EP1952427A1 Apparatus and method for wet-chemical processing of flat, thin substrates in a continuous method |
| 08/06/2008 | EP1952315A2 Manufacturing method and device for making an in-mold circuit comprising a chip |
| 08/06/2008 | EP1952165A2 A tri-axis accelerometer |
| 08/06/2008 | EP1952122A2 Method of photo-reflectance characterization of strain and active dopant in semiconductor structures |
| 08/06/2008 | EP1952109A1 Infrared detection unit using a semiconductor optical lens |
| 08/06/2008 | EP1952105A2 Systems and methods to shape laser light as a homogeneous line beam for interaction with a film deposited on a substrate |
| 08/06/2008 | EP1951935A2 Furnace and method for the manufacture of photo-voltaic solar cells using a diffusion process. |
| 08/06/2008 | EP1951929A1 Composition for chemical vapor deposition film-formation and method for production of low dielectric constant film |
| 08/06/2008 | EP1951617A2 Novel silicon-germanium hydrides and methods for making and using same |
| 08/06/2008 | EP1700333A4 Method and apparatus for seasoning semiconductor apparatus of sensing plasma equipment |
| 08/06/2008 | EP1697970A4 Selectivity control in a plasma processing system |
| 08/06/2008 | EP1661163A4 Method for fabricating a nitrided silicon-oxide gate dielectric |
| 08/06/2008 | EP1620891B1 Method of forming multi-height finfets |
| 08/06/2008 | EP1620880A4 Semiconductor substrate and manufacturing method therefor |
| 08/06/2008 | EP1601813B1 Method for depositing silicon |
| 08/06/2008 | EP1505639B1 Polishing fluid and polishing method |
| 08/06/2008 | EP1475823B1 Heat treatment device and heat treatment method |
| 08/06/2008 | EP1397863B1 Reconfigurable logic device |
| 08/06/2008 | EP1286579B1 Multilayer printed wiring board |
| 08/06/2008 | EP1258060B1 Fast wavelength correction technique for a laser |
| 08/06/2008 | EP1121622B1 Structure for reflection lithography mask and method for making same |
| 08/06/2008 | EP1085560B1 Method for forming a silicon film |
| 08/06/2008 | EP1080491B1 Method for producing a wire bonding connection |
| 08/06/2008 | EP1075018B1 Surface treating agent for micromachining and method for surface treatment |