Patents
Sitemap › H01 - Basic electric elements › H01L - Semiconductor devices; Electric solid state devices not otherwise provided for › H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
Patents for H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof (658,974)
08/2008
08/13/2008EP1956638A2 Removal of process residues on the backside of a substrate
08/13/2008EP1956527A1 Electronic device manufacturing system and electronic device manufacturing method
08/13/2008EP1956434A2 Lithographic apparatus and methods for use thereof
08/13/2008EP1956433A1 Method for forming photoresist pattern, method for manufacturing display panel, and method for manufacturing display device
08/13/2008EP1956431A1 Exposure apparatus, exposure method and device manufacturing method
08/13/2008EP1956112A2 System and method for reducing particles in epitaxial reactors
08/13/2008EP1956104A1 Working method of a metallic material and a manufacturing method of an electronic component
08/13/2008EP1955813A1 Method for manufacturing (110) silicon wafer
08/13/2008EP1955769A2 Method for positioning and fastening a second object in a first object
08/13/2008EP1955372A2 Nitrogen based implants for defect reduction in strained silicon
08/13/2008EP1955371A1 Large area semiconductor on glass insulator
08/13/2008EP1955370A1 Process for temporary fixing of a polymeric layer material on rough surfaces
08/13/2008EP1955369A2 Device and method for holding a substrate
08/13/2008EP1955368A1 Method for forming a semiconductor device having a salicide layer
08/13/2008EP1955367A1 Method of manufacturing a semiconductor device and semiconductor device obtained with such a method
08/13/2008EP1955366A1 Dielectric interface for group iii-v semiconductor device
08/13/2008EP1955365A1 Method of fabricating polycrystalline silicon thin film
08/13/2008EP1955364A1 Method for producing a plurality of regularly arranged nanoconnections on a substrate
08/13/2008EP1875516A4 A hybrid bulk-soi 6t-sram cell for improved cell stability and performance
08/13/2008EP1733001A4 Composition useful for removal of bottom anti-reflection coatings from patterned ion-implanted photoresist wafers
08/13/2008EP1730561B1 Implementation of one or more optical waveguides in reduced optical material
08/13/2008EP1671365A4 Non-volatile memory device
08/13/2008EP1661169A4 Method for depositing thin film on wafer
08/13/2008EP1642335B1 Integrated coolant circuit arrangement, operating method and production method
08/13/2008EP1639648B1 Method of fabricating pairs of parallel finfets
08/13/2008EP1631728B1 Profiled rail and method for producing a profiled rail
08/13/2008EP1616344B1 Creation of a permanent structure with high three-dimensional resolution
08/13/2008EP1606431B1 Solution for etching copper surfaces and method of depositing metal on copper surfaces
08/13/2008EP1567913A4 A chucking system and method for modulating shapes of substrates
08/13/2008EP1534788B1 Electrodepositable dielectric coating compositions to coat a substrate and methods to form dielectric coating
08/13/2008EP1518261B1 Angled sensors for detecting substrates
08/13/2008EP1507625A4 Thermal flux processing by scanning electromagnetic radiation
08/13/2008EP1474264A4 A plasma processing apparatus and method
08/13/2008EP1444726A4 Method and apparatus for the etching of photomask substrates using pulsed plasma
08/13/2008EP1387898A4 Substituted cycloalkene new copper precursors for chemical vapor deposition of copper metal thin films
08/13/2008EP1336200B1 Integrated circuit wafer with crack-stop features
08/13/2008EP1284021A4 Fabrication of low leakage-current backside illuminated photodiodes
08/13/2008EP1192646B1 Cyclic thermal anneal for dislocation reduction
08/13/2008EP1190436B1 Plasma processor with coil responsive to variable amplitude rf envelope
08/13/2008EP1175697B1 Method of producing a contact bump
08/13/2008EP1169729B1 Method and apparatus for processing a wafer
08/13/2008EP1125317B1 Chamber liner for semiconductor process chambers
08/13/2008EP1092229B1 Multiple coil antenna for inductively-coupled plasma generation systems
08/13/2008EP1090413B1 Method of forming high aspect ratio apertures
08/13/2008EP1070352B1 Semiconductor memory and method for producing same
08/13/2008EP0951054B1 Aligner and method for exposure
08/13/2008CN101243556A High performance MOSFET comprising a stressed gate metal silicide layer and method of fabricating the same
08/13/2008CN101243555A Method for making a heterojunction bipolar transistor
08/13/2008CN101243554A Memory using hole trapping in high-K dielectrics
08/13/2008CN101243549A Wafer-level burn-in method and wafer-level burn-in system
08/13/2008CN101243548A Circuit connection structure, method for manufacturing same, and semiconductor substrate for circuit connection structure
08/13/2008CN101243547A Semiconductor chip and method of manufacturing semiconductor chip and semiconductor device
08/13/2008CN101243546A Semiconductor device, method for manufacturing such semiconductor device and substrate for such semiconductor device
08/13/2008CN101243545A Method for reducing roughness of a thick insulating layer
08/13/2008CN101243544A Semiconductor substrate process using a low temperature-deposited carbon-containing hard mask
08/13/2008CN101243543A Fluid deposition cluster tool
08/13/2008CN101243542A Substrate support having brazed plates and resistance heater
08/13/2008CN101243518A SRAM cell with separate read-write circuitry
08/13/2008CN101243481A Active matrix substrate, display, television set, method for producing active matrix substrate, and method for manufacturing display
08/13/2008CN101243369A Ozone system for multi-chamber tools
08/13/2008CN101243323A Probe card
08/13/2008CN101243202A Aluminum sputtering while biasing wafer
08/13/2008CN101243201A Mn-contained copper alloy sputtering target with less occurrence of particle
08/13/2008CN101243149A Method for producing coating liquid for film formation
08/13/2008CN101243028A Fluorine-containing adamantane derivative, fluorine-containing adamantane derivative having polymerizable group, and resin composition containing same
08/13/2008CN101242927A Laser processing method
08/13/2008CN101242714A Method of manufacturing multilayer wiring board
08/13/2008CN101242705A Plasma generation device
08/13/2008CN101242704A A method of processing workpiece in a plasma reactor with variable height ground return path
08/13/2008CN101242703A Improving plasma process uniformity across a wafer by apportioning power among plural VHF sources
08/13/2008CN101242702A Plasma reactor with ion distribution uniformity controller employing plural VHF sources
08/13/2008CN101242179A Electronic system, semiconductor integrated circuit and terminal device
08/13/2008CN101242175A Monopole single throw microwave switch circuit based on PIN diode and its making method
08/13/2008CN101242078A 光半导体装置 The optical semiconductor device
08/13/2008CN101241973A Method for manufacturing organic electroluminescent element and method for manufacturing display
08/13/2008CN101241957A Making method for four-element LED
08/13/2008CN101241953A Method for improving quality of reflection reduction film of single crystal silicon solar battery
08/13/2008CN101241936A Semiconductor structure including doped silicon carbon liner layer and method for fabrication thereof
08/13/2008CN101241934A Semiconductor devices and fabrication methods thereof
08/13/2008CN101241929A Semiconductor structure and method of forming the structure
08/13/2008CN101241928A Electric module, methods of manufacturing the same, and electronic instrument
08/13/2008CN101241927A A resistance memory based on diode selection and its making method
08/13/2008CN101241926A Programmable phase change material structure and its forming method
08/13/2008CN101241922A Photoelectric transducer and display panel having the same
08/13/2008CN101241921A Optical device and method for manufacturing optical device, and camera module and endoscope module
08/13/2008CN101241920A Optical device and method of manufacturing the same
08/13/2008CN101241918A Display substrate and method of manufacturing the same
08/13/2008CN101241917A Semiconductor device, method of manufacturing semiconductor device, and electronic apparatus
08/13/2008CN101241916A Method for preparing semiconductor device
08/13/2008CN101241915A Display substrate, display device and method of manufacturing the same
08/13/2008CN101241913A CMOS device, semiconductor device and a method of fabricating the device
08/13/2008CN101241912A Semiconductor structure and its forming method
08/13/2008CN101241911A Grid driving circuit integrated on display panel and its making method
08/13/2008CN101241906A Semiconductor device and manufacturing method thereof, semiconductor package, electronic device and manufacturing method thereof, and electronic apparatus
08/13/2008CN101241903A Wiring board, semiconductor device having the wiring board, and manufacturing and packaging method thereof
08/13/2008CN101241902A Multi-chip semiconductor encapsulation part and its making method
08/13/2008CN101241901A Buried chip encapsulation structure and its making method
08/13/2008CN101241899A Semiconductor device having thermally formed air gap in wiring layer and method of fabricating same
08/13/2008CN101241898A 半导体器件及其制造方法 Semiconductor device and manufacturing method thereof
08/13/2008CN101241897A IC structure and its forming method
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