| Patents for H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof (658,974) |
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| 12/07/2011 | CN101740369B 一种制备金属性金属氮化物薄膜的方法 Method metallic metal nitride thin films |
| 12/07/2011 | CN101740348B 用于定位键合工具的视觉系统 For positioning the bonding tool visual system |
| 12/07/2011 | CN101740341B 二氧化碳低温气溶胶半导体清洗设备 Carbon dioxide cryogenic aerosol semiconductor cleaning equipment |
| 12/07/2011 | CN101740330B 化学机械研磨及通孔形成方法 Chemical mechanical polishing method and the through hole is formed |
| 12/07/2011 | CN101738400B 判断晶圆表面重复缺陷的方法及装置 Repeat the wafer surface defect judgment method and apparatus |
| 12/07/2011 | CN101728266B 沟渠式功率半导体的制作方法 Trench-style production methods of power semiconductors |
| 12/07/2011 | CN101724361B 各向异性导电胶和导电膜以及电连接方法 Anisotropic conductive adhesive and electrically connected to the conductive film and a method |
| 12/07/2011 | CN101720499B 用于局部化功率传送的分布式功率装置 For distributed power devices localized power transfer |
| 12/07/2011 | CN101719496B 一种自供电集成电路芯片及其制备方法 A self-powered integrated circuit chip and its preparation method |
| 12/07/2011 | CN101719481B Amoled用tft基板的金属诱导结晶化方法 Amoled crystallization method using a metal substrate induction tft |
| 12/07/2011 | CN101710590B AlGaN/GaN绝缘栅高电子迁移率晶体管的制作方法 Production methods AlGaN / GaN high electron mobility insulated gate transistors |
| 12/07/2011 | CN101699617B 自对准的隧穿场效应晶体管的制备方法 Self-aligned tunneling field effect transistor prepared |
| 12/07/2011 | CN101681811B 在间距加倍工艺期间隔离阵列特征的方法和具有经隔离阵列特征的半导体装置结构 During the pitch process isolation doubling pattern features a method and a semiconductor device structures have been isolated from an array of features |
| 12/07/2011 | CN101677059B 基板处理装置及基板处理方法 Substrate processing apparatus and substrate processing method |
| 12/07/2011 | CN101661945B 光学器件 Optics |
| 12/07/2011 | CN101656255B Nand闪存及其制作方法 Nand Flash and production methods |
| 12/07/2011 | CN101640166B 基片传输装置及其控制系统和控制方法 Substrate transport device and its control system and control method |
| 12/07/2011 | CN101634813B 改进照明系统、曝光装置和形成线/间隔电路图形的方法 Improved illumination system, an exposure apparatus and a forming line / space pattern was the method |
| 12/07/2011 | CN101622714B 薄膜晶体管及其制造方法 A thin film transistor and manufacturing method thereof |
| 12/07/2011 | CN101621045B 电路基板及其形成方法以及半导体封装 And a circuit board and method of forming a semiconductor package |
| 12/07/2011 | CN101609819B 导线架芯片封装结构及其制造方法 Lead frame chip package structure and manufacturing method |
| 12/07/2011 | CN101604628B 形成半导体器件的栅极的方法 The method of forming the gate semiconductor device |
| 12/07/2011 | CN101599421B 一种硅片码片机 One kind of silicon chip machine |
| 12/07/2011 | CN101593673B 制造平板显示器所使用的基板处理装置和方法 Substrate processing apparatus and method for flat panel displays used |
| 12/07/2011 | CN101587902B 一种纳米绝缘体上硅结构材料及其制作方法 Silicon structure material and manufacturing method of a nano-on-insulator |
| 12/07/2011 | CN101578744B 使用经蚀刻的刻面技术生产的基于AlGaInN的激光器 Use the etched facet technology to produce laser-based AlGaInN |
| 12/07/2011 | CN101577233B 集成电路元件的封装结构及其制造方法 Package structure and method of manufacturing an integrated circuit device |
| 12/07/2011 | CN101562154B 薄膜晶体管的制造方法 The method of manufacturing a thin film transistor |
| 12/07/2011 | CN101558499B 用于在沟槽栅极fet内形成横向延伸电介质层的结构及方法 Laterally extended dielectric layer structure and a method for forming the gate electrode in the trench fet |
| 12/07/2011 | CN101552258B 半导体器件的熔丝部以及制造方法 Fuse unit and a method of manufacturing a semiconductor device |
| 12/07/2011 | CN101533845B 基于双控制栅mosfet结构的光电探测器 Photodetector based dual control gate mosfet structures |
| 12/07/2011 | CN101524829B 通过耦合涡流传感器测量薄膜厚度的方法和设备 Method and apparatus for measuring film thickness by eddy current sensor coupled |
| 12/07/2011 | CN101512712B 放电灯、光源装置、曝光装置及曝光装置的制造方法 A discharge lamp light source device, a method of manufacturing an exposure apparatus and exposure apparatus |
| 12/07/2011 | CN101495672B 对于金属薄膜的cvd/ald有用的锑及锗复合物 For the metal thin film cvd / ald useful complexes of antimony and germanium |
| 12/07/2011 | CN101473433B 功率放大器装置 Power amplifier device |
| 12/07/2011 | CN101465336B 具有含硅铜布线层的半导体器件及其制造方法 Semiconductor device and manufacturing method of a copper wiring layer having a silicon-containing |
| 12/07/2011 | CN101465311B 基片偏移的诊断及校正方法和诊断及校正装置 Diagnosis and correction method and the diagnosis and correction device substrate offset |
| 12/07/2011 | CN101452272B 制造机台的监控方法和系统 Manufacturing machine monitoring methods and systems |
| 12/07/2011 | CN101452225B 光刻胶掩模图形的显影方法 Photoresist mask pattern developing method |
| 12/07/2011 | CN101432202B 具有密封门的晶片容器 Wafer container having a door seal |
| 12/07/2011 | CN101431146B 布线基板的制造方法以及该布线基板 The method of manufacturing a wiring substrate, and the wiring substrate |
| 12/07/2011 | CN101399197B 一种腔室的衬 One kind of the chamber liner |
| 12/07/2011 | CN101382729B 光掩模的制造方法、图案复制方法、光掩模以及数据库 The method of manufacturing a photomask, pattern replication method, a photomask and a database |
| 12/07/2011 | CN101361165B 用于附加芯片的方法和旋转设备 A method for the chip and the additional rotating equipment |
| 12/07/2011 | CN101359618B 通孔填充方法、通孔填充结构及通孔制作方法 The method of filling the through hole, the through hole filling structure and method of making the through hole |
| 12/07/2011 | CN101356516B 半导体集成电路、包括半导体集成电路的系统设备及半导体集成电路控制方法 The semiconductor integrated circuit comprising a semiconductor integrated circuit system equipment and control method of the semiconductor integrated circuit |
| 12/07/2011 | CN101352108B 台装置和等离子体处理装置 Station apparatus and a plasma processing apparatus |
| 12/07/2011 | CN101331074B 垂直搬运装置 Vertical transportation equipment |
| 12/07/2011 | CN101324404B 热处理装置 Heat treatment device |
| 12/07/2011 | CN101317248B 在蚀刻层中提供特征的方法和装置 Methods and apparatus for providing features in an etch layer |
| 12/07/2011 | CN101308811B 减少镀膜的缺陷数的制造半导体器件的方法 Reducing coating defects in the semiconductor device manufacturing method of the number of |
| 12/07/2011 | CN101308161B 具有模制树脂壳体的电子设备及其制造方法和模制工具 Electronic device and method of manufacturing a molded resin case having a molding tool and |
| 12/07/2011 | CN101300665B 基于隐藏式沟道负微分电阻的存储器单元 Based hidden channel negative differential resistance memory cell |
| 12/07/2011 | CN101290912B 半导体装置及其制造方法 Semiconductor device and manufacturing method |
| 12/07/2011 | CN101256899B 可移动微器件 Removable Micro Devices |
| 12/07/2011 | CN101238555B 层间绝缘膜、布线结构以及它们的制造方法 An interlayer insulating film, a wiring structure and manufacturing method thereof |
| 12/07/2011 | CN101236946B 布线板和半导体器件 Wiring boards and semiconductor devices |
| 12/07/2011 | CN101223479B 正型抗蚀剂组合物的制备方法、正型抗蚀剂组合物和抗蚀图案形成方法 Prepared positive resist composition, a positive resist composition and a resist pattern forming method |
| 12/07/2011 | CN101218859B 具备复合天线线圈组的等离子体反应装置 Composite antenna coil groups with a plasma reaction apparatus |
| 12/07/2011 | CN101217151B 像素结构、显示面板、光电装置及其制造方法 Pixel structure, a display panel, a photovoltaic device and its manufacturing method |
| 12/07/2011 | CN101211897B 多芯片半导体封装结构及封装方法 Multi-chip semiconductor package structure and encapsulation method |
| 12/07/2011 | CN101191200B 用于半导体工艺腔室的烟气挡板及分布器 Flue baffle and distributor for semiconductor process chamber |
| 12/07/2011 | CN101180737B 功率半导体器件及制造方法 Power semiconductor device and manufacturing method |
| 12/07/2011 | CN101174595B 单晶硅太阳能电池的制造方法及单晶硅太阳能电池 Method for manufacturing monocrystalline silicon solar cells and solar cells |
| 12/07/2011 | CN101174047B 显示装置及其制造方法 Display device and manufacturing method |
| 12/07/2011 | CN101165879B 非易失性存储器件及其形成方法 Non-volatile memory device and method of forming |
| 12/07/2011 | CN101150102B 半导体器件及其制造方法 Semiconductor device and manufacturing method thereof |
| 12/07/2011 | CN101131893B 电感耦合线圈及电感耦合等离子体装置 Inductive coupling coil and inductively coupled plasma device |
| 12/07/2011 | CN101126905B 具有对焦机构的直写光刻装置 Focus mechanism has direct-write lithography system |
| 12/07/2011 | CN101095222B 用于用晶片制造半导体芯片的方法 The method of manufacturing a semiconductor wafer chips used |
| 12/07/2011 | CN101090084B 具有内圆角半径接头的设备 Fillet radius with a device connector |
| 12/07/2011 | CN101086630B 具有用于感测其姿态的设备的烘烤单元及其使用方法 Baking unit and method of use for sensing its posture having a device |
| 12/07/2011 | CN101064270B 半导体器件的制造方法 The method of manufacturing a semiconductor device |
| 12/07/2011 | CN101042991B 等离子体处理装置 Plasma processing apparatus |
| 12/07/2011 | CN101034254B 用于增强的光刻图案化的方法和系统 For enhancing lithographic patterning method and system |
| 12/06/2011 | US8074188 Method for designing mask including forming a mesh dummy pattern |
| 12/06/2011 | US8073667 System and method for using first-principles simulation to control a semiconductor manufacturing process |
| 12/06/2011 | US8073646 Plasma processing apparatus, radio frequency generator and correction method therefor |
| 12/06/2011 | US8073241 Defect source analysis method, defect source analysis apparatus, and method of manufacturing semiconductor device |
| 12/06/2011 | US8072809 Nonvolatile semiconductor memory |
| 12/06/2011 | US8072801 Method for creating nonequilibrium photodetectors with single carrier species barriers |
| 12/06/2011 | US8072615 Alignment method, alignment system, and product with alignment mark |
| 12/06/2011 | US8072601 Pattern monitor mark and monitoring method suitable for micropattern |
| 12/06/2011 | US8072592 Reticle defect inspection apparatus and reticle defect inspection method |
| 12/06/2011 | US8072081 Microelectromechanical system package |
| 12/06/2011 | US8072077 Semiconductor memory device |
| 12/06/2011 | US8072075 CuSiN/SiN diffusion barrier for copper in integrated-circuit devices |
| 12/06/2011 | US8072074 Semiconductor device and method of manufacturing same |
| 12/06/2011 | US8072073 Semiconductor device and method of manufacturing same |
| 12/06/2011 | US8072070 Low fabrication cost, fine pitch and high reliability solder bump |
| 12/06/2011 | US8072068 Semiconductor device and a method for manufacturing the same |
| 12/06/2011 | US8072064 Semiconductor package and method for making the same |
| 12/06/2011 | US8072062 Circuit device with at least partial packaging and method for forming |
| 12/06/2011 | US8072053 Leadless integrated circuit package having electrically routed contacts |
| 12/06/2011 | US8072050 Semiconductor device with increased I/O leadframe including passive device |
| 12/06/2011 | US8072047 Integrated circuit package system with shield and tie bar |
| 12/06/2011 | US8072042 Integrated inductor and method for manufacturing an integrated inductor |
| 12/06/2011 | US8072041 Passivated optical detectors with full protection layer |
| 12/06/2011 | US8072035 Semiconductor device and method of manufacturing the same |
| 12/06/2011 | US8072034 Array substrate and method of manufacturing the same |