H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof

Patents for H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof (658,974)
12/2011
12/08/2011	WO2011152959A2 Methods of forming patterns on substrates
12/08/2011	WO2011152958A2 Tuning of polishing process in multi-carrier head per platen polishing station
12/08/2011	WO2011152938A1 Memory device comprising a junctionless thin- film transistor
12/08/2011	WO2011152935A2 Control of overpolishing of multiple substrates on the same platen in chemical mechanical polishing
12/08/2011	WO2011152858A2 Oxide based memory
12/08/2011	WO2011152625A2 Wafer polishing apparatus
12/08/2011	WO2011152620A2 Electrostatic chuck and a substrate-processing device comprising the same
12/08/2011	WO2011152587A1 Non-contact conveying device using vacuum pad
12/08/2011	WO2011152573A1 Ultrasonic precision cleaning apparatus
12/08/2011	WO2011152510A1 Heat-treatment furnace
12/08/2011	WO2011152492A1 Wafer dicing method, connecting method, and connected structure
12/08/2011	WO2011152491A1 Wafer dicing method, connection method, and connecting structure
12/08/2011	WO2011152479A1 Electronic packaging device and method
12/08/2011	WO2011152423A1 Method for bonding metals
12/08/2011	WO2011152400A1 Magnetoresistance effect element and magnetic memory
12/08/2011	WO2011152396A1 Data acquisition method of substrate processing device, and sensor substrate
12/08/2011	WO2011152356A1 Polishing agent and polishing method
12/08/2011	WO2011152352A1 Method for manufacturing semiconductor device and substrate processing apparatus
12/08/2011	WO2011152305A1 Sheet product
12/08/2011	WO2011152292A1 Process for producing fine pattern
12/08/2011	WO2011152286A1 Semiconductor device
12/08/2011	WO2011152281A1 Magnetoresistance effect element and magnetic memory
12/08/2011	WO2011152261A1 Defect inspection method and device therefor
12/08/2011	WO2011152255A1 Esd protection device
12/08/2011	WO2011152254A1 Semiconductor device
12/08/2011	WO2011152253A1 Semiconductor device and driving circuit
12/08/2011	WO2011152233A1 Semiconductor device
12/08/2011	WO2011152230A1 Laser processing method
12/08/2011	WO2011152207A1 Developing apparatus
12/08/2011	WO2011152106A1 Pattern measurement device, pattern measurement method, and program
12/08/2011	WO2011152089A1 Process for producing silicon carbide substrate, process for producing semiconductor device, silicon carbide substrate, and semiconductor device
12/08/2011	WO2011152051A1 Wafer contamination prevention method, inspection method and production method
12/08/2011	WO2011152048A1 Sputtering target
12/08/2011	WO2011152045A1 Sheet for protecting surface of semiconductor wafer, semiconductor device manufacturing method and semiconductor wafer protection method using sheet
12/08/2011	WO2011152018A1 Method for manufacturing a thin-film transistor substrate
12/08/2011	WO2011152013A1 Method for manufacturing integrated circuit, and semiconductor integrated circuit
12/08/2011	WO2011151996A1 Plasma processing device and plasma processing method
12/08/2011	WO2011151990A1 Thin film transistor and manufacturing method thereof
12/08/2011	WO2011151987A1 Method for designing semiconductor integrated circuit
12/08/2011	WO2011151970A1 Thin film transistor, contact structure, substrate, display device, and processes for producing same
12/08/2011	WO2011151968A1 Method for manufacturing bonded wafer
12/08/2011	WO2011151961A1 Semiconductor device and process for production thereof
12/08/2011	WO2011151955A1 Semiconductor element, thin film transistor substrate, and display device
12/08/2011	WO2011151945A1 Semiconductor device and process for production thereof
12/08/2011	WO2011151457A1 Processing substrates using a temporary carrier
12/08/2011	WO2011151456A1 Organic electronic devices
12/08/2011	WO2011151451A1 Laser ablation with extraction of the ablated material
12/08/2011	WO2011151430A2 Production device and method
12/08/2011	WO2011151409A1 Method for removing residual extrinsic impurities in an n type zno or znmgo substrate, and for accomplishing p type doping of said substrate
12/08/2011	WO2011151244A1 Lithography method for making networks of conductors connected by vias
12/08/2011	WO2011151183A1 High-k metal gate stack
12/08/2011	WO2011151004A1 Handling system for handling articles
12/08/2011	WO2011150879A2 Method for encapsulating semiconductor and structure thereof
12/08/2011	WO2011150670A1 Gate stack structure for semiconductor flash memory device and preparation method thereof
12/08/2011	WO2011150552A1 Multi-spectral optical sensor and manufacturing method thereof
12/08/2011	WO2011150539A1 Semiconductor device and method of manufacturing gate stack
12/08/2011	WO2011127122A3 Titanium-containing precursors for vapor deposition
12/08/2011	WO2011107364A3 Service device and service method
12/08/2011	WO2011102884A3 Flush mounted fastener for plasma processing apparatus
12/08/2011	WO2011094038A3 Method and apparatus for pattern collapse free wet processing of semiconductor devices
12/08/2011	WO2011093960A3 Variable pressure brush/pad
12/08/2011	WO2011093617A3 Vacuum deposition apparatus
12/08/2011	WO2011088340A3 A carbon nanotube crossbar based nano-architecture
12/08/2011	WO2011087337A3 Substrate-inspecting device
12/08/2011	WO2011056529A3 Apparatus and methods of forming memory lines and structures using double sidewall patterning for four times half pitch relief patterning
12/08/2011	WO2011056527A3 Methods and apparatus for layout of three dimensional matrix array memory for reduced cost patterning
12/08/2011	WO2011013836A3 Process for producing semiconductor device and semiconductor device
12/08/2011	US20110300722 Substrate processing apparatus
12/08/2011	US20110300721 Methods of Making Crystalline Tantalum Pentoxide
12/08/2011	US20110300720 Plasma treatment of substrates prior to deposition
12/08/2011	US20110300719 Film formation method and film formation apparatus
12/08/2011	US20110300718 On-wafer crystallization for pure-silica-zeolite ultra low-k films
12/08/2011	US20110300717 Method for controlling dangling bonds in fluorocarbon films
12/08/2011	US20110300716 Method of improving film non-uniformity and throughput
12/08/2011	US20110300715 Integrated method and system for manufacturing monolithic panels of crystalline solar cells
12/08/2011	US20110300714 Plasma processing chamber component having adaptive thermal conductor
12/08/2011	US20110300713 Overlay vernier key and method for fabricating the same
12/08/2011	US20110300712 Methods of Forming a Photoresist Pattern Using Plasma Treatment of Photoresist Patterns
12/08/2011	US20110300711 Method and system for patterning a substrate
12/08/2011	US20110300710 Method for Forming Through-Base Wafer Vias for Fabrication of Stacked Devices
12/08/2011	US20110300709 Method of semiconductor wafer back processing, method of substrate back processing, and radiation-curable pressure-sensitive adhesive sheet
12/08/2011	US20110300708 Through-silicon via structure and method for making the same
12/08/2011	US20110300707 Metallization and Its Use In, In Particular, an IGBT or a Diode
12/08/2011	US20110300706 Method for fabricating interconnection structure
12/08/2011	US20110300705 Manufacturing method of bump structure with annular support
12/08/2011	US20110300704 Semiconductor devices having contact plugs with stress buffer spacers and methods of fabricating the same
12/08/2011	US20110300703 Semiconductor memory device and manufacturing method thereof
12/08/2011	US20110300702 Method for fabricating semiconductor device
12/08/2011	US20110300701 Apparatus having a dielectric containing scandium and gadolinium
12/08/2011	US20110300700 Semiconductor device having a high aspect ratio isolation trench and method for manufacturing the same
12/08/2011	US20110300699 Fabrication of a memory with two self-aligned independent gates
12/08/2011	US20110300698 Methods for forming a gate and a shallow trench isolation region and for planarizing an etched surface of silicon substrate
12/08/2011	US20110300697 Method of fabricating semiconductor device
12/08/2011	US20110300696 Method for damage-free junction formation
12/08/2011	US20110300695 Method of manufacturing semiconductor device and substrate processing apparatus
12/08/2011	US20110300694 Electrode circuit, film formation device, electrode unit, and film formation method
12/08/2011	US20110300693 Semiconductor Devices
12/08/2011	US20110300692 Method for dividing a semiconductor film formed on a substrate into plural regions by multiple laser beam irradiation
12/08/2011	US20110300691 Workpiece cutting method
12/08/2011	US20110300690 Method of manufacturing semiconductor device

1 ... 1183 1184 1185 1186 1187 1188 1189 1190 1191 1192 1193 1194 1195 1196 1197 1198 1199 1200 1201 1202 1203 ... 6590