H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof

Patents for H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof (658,974)
11/2011
11/29/2011	US8068213 Photomask, method of lithography, and method for manufacturing the photomask
11/29/2011	US8068188 Thin film transistor array panel and manufacturing method thereof
11/29/2011	US8068077 Contact structure of conductive films and thin film transistor array panel including the same
11/29/2011	US8067838 Semiconductor device having pad structure for preventing and buffering stress of silicon nitride film
11/29/2011	US8067836 Semiconductor device with reduced increase in copper film resistance
11/29/2011	US8067835 Method and apparatus for manufacturing semiconductor module
11/29/2011	US8067822 Integrated circuit package for semiconductor devices with improved electric resistance and inductance
11/29/2011	US8067817 Semiconductor device and method of manufacturing the same
11/29/2011	US8067811 MEMS device, MEMS device module and acoustic transducer
11/29/2011	US8067809 Semiconductor storage device including a gate insulating film with a favorable nitrogen concentration profile and method for manufacturing the same
11/29/2011	US8067806 Gate structures of CMOS device and method for manufacturing the same
11/29/2011	US8067805 Ultra shallow junction formation by epitaxial interface limited diffusion
11/29/2011	US8067802 Flexible device and method of manufacturing the same
11/29/2011	US8067791 Semiconductor device and method for fabricating the same
11/29/2011	US8067787 Semiconductor electronic device
11/29/2011	US8067776 Method of manufacturing semiconductor device and semiconductor device manufactured thereof
11/29/2011	US8067771 Semiconductor device and method for manufacturing the same
11/29/2011	US8067770 Thin film transistor and flat panel display device including the same
11/29/2011	US8067769 Wafer level package structure, and sensor device obtained from the same package structure
11/29/2011	US8067753 Electron beam writing apparatus and method
11/29/2011	US8067699 Semiconductor element, method of manufacturing semiconductor element, multi-layer printed circuit board, and method of manufacturing multi-layer printed circuit board
11/29/2011	US8067687 High-efficiency, monolithic, multi-bandgap, tandem photovoltaic energy converters
11/29/2011	US8067316 Method for manufacturing memory element
11/29/2011	US8067315 Microstructure device including a compressively stressed low-k material layer
11/29/2011	US8067314 Gate trim process using either wet etch or dry etch approach to target CD for selected transistors
11/29/2011	US8067313 Semiconductor device, method of manufacturing the same, and electronic apparatus
11/29/2011	US8067312 Coaxial through chip connection
11/29/2011	US8067311 Mask and method for fabricating semiconductor device using the same
11/29/2011	US8067310 Semiconductor device and method for manufacturing of same
11/29/2011	US8067309 Semiconductor device using metal nitride as insulating film and its manufacture method
11/29/2011	US8067308 Semiconductor device and method of forming an interconnect structure with TSV using encapsulant for structural support
11/29/2011	US8067307 Integrated circuit package system for stackable devices
11/29/2011	US8067306 Integrated circuit packaging system with exposed conductor and method of manufacture thereof
11/29/2011	US8067305 Electrically conductive structure on a semiconductor substrate formed from printing
11/29/2011	US8067304 Method for forming a patterned thick metallization atop a power semiconductor chip
11/29/2011	US8067303 Solid state energy conversion device
11/29/2011	US8067302 Defect-free junction formation using laser melt annealing of octadecaborane self-amorphizing implants
11/29/2011	US8067301 Image sensor and method for forming the same
11/29/2011	US8067300 AlxInyGa1-x-yN mixture crystal substrate, method of growing same and method of producing same
11/29/2011	US8067299 Nanoelectronic structure and method of producing such
11/29/2011	US8067298 Relaxation of a strained material layer with application of a stiffener
11/29/2011	US8067297 Process for deposition of semiconductor films
11/29/2011	US8067296 Method of manufacturing semiconductor device
11/29/2011	US8067295 Manufacturing method of solar cell module, and solar cell and solar cell module
11/29/2011	US8067294 Method of manufacturing semiconductor device including protective film
11/29/2011	US8067292 Isolation structure, non-volatile memory having the same, and method of fabricating the same
11/29/2011	US8067291 MOS field-effect transistor and manufacturing method thereof
11/29/2011	US8067290 Bipolar transistor with base-collector-isolation without dielectric
11/29/2011	US8067289 Semiconductor device and manufacturing method thereof
11/29/2011	US8067287 Asymmetric segmented channel transistors
11/29/2011	US8067286 Methods of forming recessed access devices associated with semiconductor constructions
11/29/2011	US8067285 Methods of forming a conductive layer structure and methods of manufacturing a recessed channel transistor including the same
11/29/2011	US8067284 Oxynitride bilayer formed using a precursor inducing a high charge trap density in a top layer of the bilayer
11/29/2011	US8067283 Semiconductor device fabricating method
11/29/2011	US8067282 Method for selective formation of trench
11/29/2011	US8067281 Method of fabricating complementary metal-oxide-semiconductor (CMOS) Device
11/29/2011	US8067280 High performance CMOS devices and methods for making same
11/29/2011	US8067279 Application of different isolation schemes for logic and embedded memory
11/29/2011	US8067278 Semiconductor device and method for manufacturing the same
11/29/2011	US8067277 Active matrix device with photo sensor
11/29/2011	US8067276 Semiconductor device and manufacturing method thereof
11/29/2011	US8067275 Integrated circuit package system with package integration
11/29/2011	US8067274 Method of forming wiring on a plurality of semiconductor devices from a single metal plate, and a semiconductor construction assembly formed by the method
11/29/2011	US8067273 Self locking and aligning clip structure for semiconductor die package
11/29/2011	US8067272 Integrated circuit package system for package stacking and manufacturing method thereof
11/29/2011	US8067270 Method of making a semiconductor chip assembly with a post/base heat spreader and a substrate
11/29/2011	US8067269 Method for fabricating at least one transistor
11/29/2011	US8067268 Stacked integrated circuit package system and method for manufacturing thereof
11/29/2011	US8067267 Microelectronic assemblies having very fine pitch stacking
11/29/2011	US8067266 Methods for the fabrication of microelectronic device substrates by attaching two cores together during fabrication
11/29/2011	US8067263 Thermal management and method for large scale processing of CIS and/or CIGS based thin films overlying glass substrates
11/29/2011	US8067262 Polymeric precursors for CAIGS silver-containing photovoltaics
11/29/2011	US8067261 Solid-state imaging device and manufacturing method thereof
11/29/2011	US8067259 Method of producing high performance photovoltaic and thermoelectric nanostructured bulk and thin films
11/29/2011	US8067258 Protective thin films for use during fabrication of semiconductors, MEMS, and microstructures
11/29/2011	US8067257 Nitride based semiconductor optical device, epitaxial wafer for nitride based semiconductor optical device, and method of fabricating semiconductor light-emitting device
11/29/2011	US8067256 Method of making microelectronic package using integrated heat spreader stiffener panel and microelectronic package formed according to the method
11/29/2011	US8067255 Nitride semiconductor light emitting device, method of manufacturing nitride semiconductor light emitting device, and nitride semiconductor transistor device
11/29/2011	US8067254 Common optical element for an array of phosphor converted light emitting devices
11/29/2011	US8067253 Electrical device and method of manufacturing electrical devices using film embossing techniques to embed integrated circuits into film
11/29/2011	US8067252 Method for determining low-noise power spectral density for characterizing line edge roughness in semiconductor wafer processing
11/29/2011	US8067251 Semiconductor device and a method of manufacturing the same
11/29/2011	US8067250 Ferroelectric memory device and method of manufacturing the same
11/29/2011	US8067249 Method for functionalizing biosensor chips
11/29/2011	US8067132 Photomask and exposure method
11/29/2011	US8067067 Clean, dense yttrium oxide coating protecting semiconductor processing apparatus
11/29/2011	US8066908 Production of light from sol-gel derived thin films made with lanthanide doped nanoparticles, and preparation thereof
11/29/2011	US8066891 Wet etchable laminated body, insulation film, and electronic circuit part using the laminated body and the film
11/29/2011	US8066819 using water-free, gaseous sulfur trioxide as an agent to remove various organic coatings, films, layers and residues from the surface of a substrate such as semiconductor and non-semiconductor devices and displays so that it is completely removed by subsequent chemical or physical treatment
11/29/2011	US8066815 Multi-workpiece processing chamber
11/29/2011	US8066550 Wafer polishing method and apparatus
11/29/2011	US8066470 Waffle pack
11/29/2011	US8066466 Substrate processing sequence in a Cartesian robot cluster tool
11/29/2011	US8066430 Semiconductor substrate temperature determination
11/29/2011	US8066102 Lifting apparatus and safety inspection system
11/29/2011	US8065919 MEMS device and method for fabricating the same
11/29/2011	US8065792 Method for packaging circuits
11/29/2011	CA2462252C Electronic circuit comprising conductive bridges and method for making such bridges
11/24/2011	WO2011146846A2 Micromechanical membranes and related structures and methods
11/24/2011	WO2011146751A1 Process for improving package warpage and connection reliability through use of a backside mold configuration (bsmc)

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