H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof

Patents for H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof (658,974)
12/2011
12/06/2011	US8071167 Surface pre-treatment for enhancement of nucleation of high dielectric constant materials
12/06/2011	US8071157 Improved thickness uniformity in spin coating; lithography; using an optical analyzer to control the coating thickness during processing
12/06/2011	US8071019 Methods for introduction of a reactive material into a vacuum chamber
12/06/2011	US8070992 Mold cleaning sheet and method of producing semiconductor devices using the same
12/06/2011	US8070975 Azeotrope-like composition of 2-chloro-1,1,1,2-tetrafluoropropane (HCFC-244bb) and hydrogen fluoride (HF)
12/06/2011	US8070971 Etch method
12/06/2011	US8070966 Group III-nitride layers with patterned surfaces
12/06/2011	US8070911 Capacitive coupling plasma processing apparatus
12/06/2011	US8070910 Shower head structure and treating device
12/06/2011	US8070909 Feedback control of chemical mechanical polishing device providing manipulation of removal rate profiles
12/06/2011	US8070880 Substrate processing apparatus
12/06/2011	US8070879 Apparatus and method for hybrid chemical processing
12/06/2011	US8070873 Medium temperature coating material for high speed turbomachinery and method of coating same
12/06/2011	US8070560 Polishing apparatus and method
12/06/2011	US8070408 Load lock chamber for large area substrate processing system
12/06/2011	US8070265 Heater stack in a micro-fluid ejection device and method for forming floating electrical heater element in the heater stack
12/06/2011	US8069817 Showerhead electrodes and showerhead electrode assemblies having low-particle performance for semiconductor material processing apparatuses
12/01/2011	WO2011150311A1 Substrate supports for semiconductor applications
12/01/2011	WO2011150154A2 Apparatus and method for detaping an adhesive layer from the surface of ultra thin wafers
12/01/2011	WO2011149989A1 Circuit elements comprising ferroic materials
12/01/2011	WO2011149918A2 High surface resistivity electrostatic chuck
12/01/2011	WO2011149906A1 Smoothing method for semiconductor material and wafers produced by same
12/01/2011	WO2011149790A2 Component temperature control by coolant flow control and heater duty cycle control
12/01/2011	WO2011149770A2 Engineering boron-rich films lithographic mask applications
12/01/2011	WO2011149768A2 Self-aligned semiconductor devices with reduced gate-source leakage under reverse bias and methods of making
12/01/2011	WO2011149686A2 Ultrasonic acoustic emissions to detect substrate fracture
12/01/2011	WO2011149638A2 Selective etch for silicon films
12/01/2011	WO2011149616A2 Planarizing etch hardmask to increase pattern density and aspect ratio
12/01/2011	WO2011149587A1 Integrated circuit with finfets and mim fin capacitor
12/01/2011	WO2011149561A1 Through-silicon vias with low parasitic capacitance
12/01/2011	WO2011149541A1 Matched coefficient of thermal expansion for an electrostatic chuck
12/01/2011	WO2011149508A2 Apparatus and method for temperature control of a semiconductor substrate support
12/01/2011	WO2011149505A2 Resistance variable memory cell structures and methods
12/01/2011	WO2011149422A1 Method of packaging a wire-bonded integrated circuit
12/01/2011	WO2011149278A2 Large-area deposition device for gas-mixing prevention
12/01/2011	WO2011149215A2 Method for preparing polycrystalline silicon thin film
12/01/2011	WO2011149118A1 Forming method and crystallization method for an oxide semiconductor thin film using a liquid-phase process, and a method for forming semiconductor elements by using the same
12/01/2011	WO2011149029A1 Insulation pattern forming method and insulation pattern forming material for damascene process
12/01/2011	WO2011148985A1 Plasma etching method
12/01/2011	WO2011148973A1 Pressure sensor and method for manufacturing pressure sensor
12/01/2011	WO2011148944A1 Thin film magnetic device and method for manufacturing same
12/01/2011	WO2011148924A1 Film forming device
12/01/2011	WO2011148898A1 Method for regulating voltage characteristics of semiconductor storage cell, method for regulating voltage characteristics of semiconductor storage device, charge pump, and method for regulating voltage of charge pump
12/01/2011	WO2011148890A1 Organotantalum complex compound and method for producing same
12/01/2011	WO2011148843A1 Silicon carbide substrate and method for producing same
12/01/2011	WO2011148831A1 Method and apparatus for producing silicon nitride film
12/01/2011	WO2011148830A1 Silicon nitride film of semiconductor element, and method and apparatus for producing silicon nitride film
12/01/2011	WO2011148788A1 Laser annealing method and device
12/01/2011	WO2011148782A1 Substrate processing apparatus and temporary storage shelf
12/01/2011	WO2011148728A1 Display device and method for manufacturing same
12/01/2011	WO2011148716A1 Bake device
12/01/2011	WO2011148707A1 Process for production of organic semiconductor device
12/01/2011	WO2011148633A1 Traverse device and substrate processing device
12/01/2011	WO2011148629A1 Plasma processing device
12/01/2011	WO2011148614A1 Sintered oxide material, target comprising same, and oxide semiconductor thin film
12/01/2011	WO2011148583A1 Bus control device and control device for outputting instructions to the bus control device
12/01/2011	WO2011148560A1 Conveying method
12/01/2011	WO2011148559A1 Apparatus for separating semiconductor wafers
12/01/2011	WO2011148555A1 Method for measuring film thickness distribution of wafer having thin film
12/01/2011	WO2011148551A1 Method for driving non-volatile switching device
12/01/2011	WO2011148548A1 Apparatus for transferring flat board
12/01/2011	WO2011148547A1 Flat-plate conveying device
12/01/2011	WO2011148540A1 Probe structure, probe device, method for producing probe structure, and testing device
12/01/2011	WO2011148445A1 Semiconductor device and process for production thereof
12/01/2011	WO2011148444A1 Semiconductor device and method for manufacturing same
12/01/2011	WO2011148443A1 Field effect transistor
12/01/2011	WO2011148441A1 Method for manufacturing semiconductor device, and semiconductor device
12/01/2011	WO2011148435A1 Semiconductor device and process for production thereof
12/01/2011	WO2011148434A1 Semiconductor substrate, and process for production of solid-state imaging device using same
12/01/2011	WO2011148427A1 Mos-driven semiconductor device and method for manufacturing mos-driven semiconductor device
12/01/2011	WO2011148281A2 Closed chamber with fluid separation feature
12/01/2011	WO2011148273A1 Iii-nitride light-emitting device grown on a relaxed layer
12/01/2011	WO2011147820A1 Apparatus and method for loading and unloading, more particularly of a coating device
12/01/2011	WO2011147775A1 Apparatus and method for electrostatic discharge (esd) reduction
12/01/2011	WO2011147695A1 Stacked package structure for integrated circuits
12/01/2011	WO2011147670A1 Interconnect structure
12/01/2011	WO2011147256A1 Low schottky barrier semiconductor structure and method for forming the same
12/01/2011	WO2011147212A1 Semiconductor device and method for forming the same
12/01/2011	WO2011147063A1 Light-emitting device using ac
12/01/2011	WO2011147062A1 Semiconductor structure and method for manufacturing the same
12/01/2011	WO2011147061A1 Three dimension integrated circuit and manufacturing method thereof
12/01/2011	WO2011126748A3 Depositing conformal boron nitride films
12/01/2011	WO2011123792A3 Metal nitride containing film deposition using combination of amino-metal and halogenated metal precursors
12/01/2011	WO2011119113A8 Photoelectric transducer using iron silicide and aluminum and method for preparing the same
12/01/2011	WO2011097238A3 Fine droplet atomizer for liquid precursor vaporization
12/01/2011	WO2011096695A3 Process for creating an inspection program
12/01/2011	WO2011084575A3 Methods for forming nmos epi layers
12/01/2011	WO2011083162A3 Micro-electromechanical semiconductor component sensor
12/01/2011	WO2011080629A3 Improved ultrasonic cleaning fluid, method and apparatus
12/01/2011	WO2011073840A3 Device and process for liquid treatment of a wafer shaped article
12/01/2011	WO2010106533A4 A method and apparatus for accurate determination of parameters of a stack of thin films
12/01/2011	US20110294402 Eddy Current System for In-Situ Profile Measurement
12/01/2011	US20110294306 Controlled process and resulting device
12/01/2011	US20110294305 Antireflective Coating
12/01/2011	US20110294304 Method of manufacturing semiconductor device
12/01/2011	US20110294303 Confined process volume pecvd chamber
12/01/2011	US20110294302 Method for Fast Macropore Etching in n-Type Silicon
12/01/2011	US20110294301 Method of Preventing Premature Drying
12/01/2011	US20110294300 Selective etch for silicon films
12/01/2011	US20110294299 Method and apparatus for silicon oxide residue removal

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