H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof

Patents for H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof (658,974)
12/2011
12/15/2011	WO2011155482A1 Die-bonding material for optical semiconductor devices and optical semiconductor device using same
12/15/2011	WO2011155480A1 Method for producing article having fine surface irregularities
12/15/2011	WO2011155479A1 Etching apparatus
12/15/2011	WO2011155443A1 Transfer device for plate-like member, and suction pad
12/15/2011	WO2011155408A1 Plasma processing apparatus
12/15/2011	WO2011155407A1 Chemical solution for formation of protective film
12/15/2011	WO2011155406A1 Heat-curable die-bonding film
12/15/2011	WO2011155398A1 Firing furnace for firing electrode of solar cell element, method for manufacturing solar cell element, and solar cell element
12/15/2011	WO2011155365A1 Molded article having fine surface irregularities and method for producing same
12/15/2011	WO2011155356A1 Connected conveyance system
12/15/2011	WO2011155355A1 Connecting system
12/15/2011	WO2011155353A1 Hydrosilane derivative, method for producing same, and method for producing silicon-containing thin film
12/15/2011	WO2011155348A1 Light-reflective anisotropic electrically conductive paste, and light-emitting device
12/15/2011	WO2011155347A1 Resist pattern formation method and pattern miniaturisation agent
12/15/2011	WO2011155345A1 Method and apparatus for inspecting defect
12/15/2011	WO2011155341A1 Freestanding gan crystal substrate and manufacturing method for same
12/15/2011	WO2011155336A1 Washing system and washing method
12/15/2011	WO2011155335A1 Washing system and washing method
12/15/2011	WO2011155333A1 Semiconductor integrated circuit device
12/15/2011	WO2011155320A1 Robot arm
12/15/2011	WO2011155295A1 Dc/dc converter, power supply circuit, and semiconductor device
12/15/2011	WO2011155293A1 Wire cassette and substrate transfer apparatus using same
12/15/2011	WO2011155250A1 Method for manufacturing crystalline semiconductor film, semiconductor device, and display device
12/15/2011	WO2011155234A1 Silicon carbide substrate, substrate having epitaxial layer attached thereto, semiconductor device, and process for production of silicon carbide substrate
12/15/2011	WO2011155199A1 Apparatus for manufacturing solar cell and method for manufacturing solar cell
12/15/2011	WO2011155174A1 Thin film transistor substrate and production method for same
12/15/2011	WO2011155127A1 Method for manufacturing semiconductor device
12/15/2011	WO2011155125A1 Thin film transistor substrate, liquid crystal display device provided with same, and thin film transistor substrate production method
12/15/2011	WO2011155123A1 Observation image classification reference optimization method and image classification device
12/15/2011	WO2011155122A1 Circuit pattern inspection device, and inspection method therefor
12/15/2011	WO2011155114A1 Protection circuit, semiconductor device and electronic equipment
12/15/2011	WO2011155105A1 Semiconductor device and method for manufacturing same
12/15/2011	WO2011155055A1 Low-temperature-sintering bonding material and bonding method using the bonding material
12/15/2011	WO2011155040A1 Conveyance system and method of communication in conveyance system
12/15/2011	WO2011155035A1 Transfer device
12/15/2011	WO2011155010A1 Method of producing template for epitaxial growth and nitride semiconductor device
12/15/2011	WO2011154910A2 System and method for monitoring pv device
12/15/2011	WO2011154875A1 Aqueous alkaline etching and cleaning composition and method for treating the surface of silicon substrates
12/15/2011	WO2011154862A1 Three-dimensional microbattery having a porous silicon anode
12/15/2011	WO2011154493A1 Copper-electroplating composition and process for filling a cavity in a semiconductor substrate using this composition
12/15/2011	WO2011154455A1 Method for manufacturing a flexible intraocular retinal implant having doped diamond electrodes
12/15/2011	WO2011154360A2 Integrated circuit having a junctionless depletion-mode fet device
12/15/2011	WO2011153845A1 Integration method for dual metal gate and dual high dielectric of cmos device
12/15/2011	WO2011153843A1 Method for making metal gate stack structure in gate first process
12/15/2011	WO2011153816A1 Field effect transistor and manufacturing method thereof
12/15/2011	WO2011153800A1 Mems device and manufacturing method thereof
12/15/2011	WO2011153654A1 Heat-conducting element, assembly and use of the same
12/15/2011	WO2011130326A3 Plasma activated conformal film deposition
12/15/2011	WO2011126618A3 4-transistor non-volatile memory cell with pmos-nmos-pmos-nmos structure
12/15/2011	WO2011126471A3 System and method for providing symmetric, efficient bi-directional power flow and power conditioning
12/15/2011	WO2011122354A3 Exposure apparatus, exchange method of object, exposure method, and device manufacturing method
12/15/2011	WO2011109146A3 Semiconductor-metal-on-insulator structures, methods of forming such structures, and semiconductor devices including such structures
12/15/2011	WO2011102622A3 Ingot inspection device and method
12/15/2011	WO2011100293A3 Process chamber gas flow improvements
12/15/2011	WO2011083953A3 Wafer polishing apparatus
12/15/2011	WO2011056534A3 Methods of forming pillars for memory cells using sequential sidewall patterning
12/15/2011	US20110307089 Method and system for performing a chemical oxide removal process
12/15/2011	US20110306274 Polishing apparatus and polishing method
12/15/2011	US20110306217 Thin film forming apparatus and method
12/15/2011	US20110306216 Mask holding device
12/15/2011	US20110306215 Methods of processing substrates having metal materials
12/15/2011	US20110306214 Method of selectively etching an insulation stack for a metal interconnect
12/15/2011	US20110306213 Ozone plenum as uv shutter or tunable uv filter for cleaning semiconductor substrates
12/15/2011	US20110306212 Substrate processing apparatus, semiconductor device manufacturing method and substrate manufacturing method
12/15/2011	US20110306211 Stabilized Chemical Mechanical Polishing Composition And Method Of Polishing A Substrate
12/15/2011	US20110306210 Method for cleaning substrates utilizing surface passivation and/or oxide layer growth to protect from pitting
12/15/2011	US20110306209 Group iii nitride substrate, semiconductor device comprising the same, and method for producing surface-treated group iii nitride substrate
12/15/2011	US20110306208 Method for Fabricating Semiconductor Device
12/15/2011	US20110306207 Method of fabricating metal-bearing integrated circuit structures having low defect density
12/15/2011	US20110306206 Methods Of Forming Contact Openings And Methods Of Increasing Contact Area In Only One Of X and Y Axes In The Fabrication Of Integrated Circuitry
12/15/2011	US20110306205 Semiconductor Device and Method of Fabricating the Same
12/15/2011	US20110306204 Fabricating method of semiconductor device
12/15/2011	US20110306203 Interconnect structure and method of manufacturing a damascene structure
12/15/2011	US20110306202 Method for fabricating semiconductor device
12/15/2011	US20110306201 Semiconductor device and method of fabricating the same
12/15/2011	US20110306200 Methods for forming interconnect structures
12/15/2011	US20110306199 Method for manufacturing nonvolatile memory device
12/15/2011	US20110306198 Method of fabricating semiconductor integrated circuit device
12/15/2011	US20110306197 Methods of Manufacturing Semiconductor Devices
12/15/2011	US20110306196 Method to form a semiconductor device having gate dielectric layers of varying thickness
12/15/2011	US20110306195 Method of manufacturing vertical semiconductor devices
12/15/2011	US20110306194 Fabrication method of self-aligned trenched power semiconductor structure
12/15/2011	US20110306193 System and method for the manufacture of semiconductor devices by the implantation of carbon clusters
12/15/2011	US20110306192 Method for forming impurity region of vertical transistor and method for fabricating vertical transistor using the same
12/15/2011	US20110306191 Method of manufacturing super-junction semiconductor device
12/15/2011	US20110306190 Method for producing n-type Group III nitride semicondutor
12/15/2011	US20110306189 Method for etching and filling deep trenches
12/15/2011	US20110306188 Manufacturing method of silicon carbide semiconductor device
12/15/2011	US20110306187 Method and apparatus for silicon refinement
12/15/2011	US20110306186 Methods for low temperature conditioning of process chambers
12/15/2011	US20110306185 Method for forming laminated resin film and method for producing semiconductor device
12/15/2011	US20110306184 Method of fabricating semiconductor device
12/15/2011	US20110306183 Apparatus and method for manufacturing polycrystalline silicon thin film
12/15/2011	US20110306182 Method of cutting semiconductor substrate
12/15/2011	US20110306181 Method of manufacturing silicon carbide substrate
12/15/2011	US20110306180 Systems, Methods and Products Involving Aspects of Laser Irradiation, Cleaving, and/or Bonding Silicon-Containing Material to Substrates
12/15/2011	US20110306179 MOCVD for Growing III-V Compound Semiconductors on Silicon Substrates
12/15/2011	US20110306178 Semiconductor device having a saddle fin shaped gate and method for manufacturing the same
12/15/2011	US20110306177 Method for reducing dielectric overetch using a dielectric etch stop at a planar surface
12/15/2011	US20110306176 Alignment mark for opaque layer

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