Patents
Sitemap › H01 - Basic electric elements › H01L - Semiconductor devices; Electric solid state devices not otherwise provided for › H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
Patents for H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof (658,974)
12/2011
12/27/2011US8084326 Method for manufacturing semiconductor device
12/27/2011US8084325 Semiconductor device and method for fabricating the same
12/27/2011US8084324 Nonvolatile semiconductor memory and fabrication method for the same
12/27/2011US8084323 Stack capacitor of memory device and fabrication method thereof
12/27/2011US8084322 Method of manufacturing devices having vertical junction edge
12/27/2011US8084321 DRAM cell with enhanced capacitor area and the method of manufacturing the same
12/27/2011US8084320 Non-volatile memory and method for fabricating the same
12/27/2011US8084319 Precisely tuning feature sizes on hard masks via plasma treatment
12/27/2011US8084318 Methods of fabricating integrated circuit devices including strained channel regions and related devices
12/27/2011US8084317 Semiconductor device and method of manufacturing the same
12/27/2011US8084316 Method of fabricating single transistor floating-body DRAM devices having vertical channel transistor structures
12/27/2011US8084315 Method of fabricating non-volatile semiconductor memory device by using plasma film-forming method and plasma nitridation
12/27/2011US8084314 Semiconductor device and manufacturing method thereof
12/27/2011US8084313 Method for forming a bipolar junction transistor and a metal oxide semiconductor field effect transistor
12/27/2011US8084312 Nitrogen based implants for defect reduction in strained silicon
12/27/2011US8084311 Method of forming replacement metal gate with borderless contact and structure thereof
12/27/2011US8084310 Self-aligned multi-patterning for advanced critical dimension contacts
12/27/2011US8084309 Extremely thin silicon on insulator (ETSOI) complementary metal oxide semiconductor (CMOS) with in-situ doped source and drain regions formed by a single mask
12/27/2011US8084308 Single gate inverter nanowire mesh
12/27/2011US8084307 Method for manufacturing thin film transistor
12/27/2011US8084306 Methods of forming semiconductor devices having self-aligned bodies
12/27/2011US8084305 Isolation spacer for thin SOI devices
12/27/2011US8084304 Method for preventing gate oxide damage of a trench MOSFET during wafer processing while adding an ESD protection module atop
12/27/2011US8084303 Semiconductor device and a method of manufacturing the same
12/27/2011US8084301 Resin sheet, circuit device and method of manufacturing the same
12/27/2011US8084300 RF shielding for a singulated laminate semiconductor device package
12/27/2011US8084299 Semiconductor device package and method of making a semiconductor device package
12/27/2011US8084298 Method for exchanging semiconductor chip of flip-chip module and flip-chip module suitable therefor
12/27/2011US8084297 Method of implementing a capacitor in an integrated circuit
12/27/2011US8084296 Methods for reducing stress in microelectronic devices and microelectronic devices formed using such methods
12/27/2011US8084295 Thin film transistor having n-type and p-type CIS thin films and method of manufacturing the same
12/27/2011US8084293 Continuously optimized solar cell metallization design through feed-forward process
12/27/2011US8084292 Thermal management and method for large scale processing of CIS and/or CIGS based thin films overlying glass substrates
12/27/2011US8084291 Thermal management and method for large scale processing of CIS and/or CIGS based thin films overlying glass substrates
12/27/2011US8084290 Method for fabricating CMOS image sensor
12/27/2011US8084289 Method of fabricating image sensor and reworking method thereof
12/27/2011US8084288 Method of construction of CTE matching structure with wafer processing and resulting structure
12/27/2011US8084287 Photoelectric conversion apparatus, producing method therefor, image pickup module and image pickup system
12/27/2011US8084286 Solid-state imaging device, camera and method of producing the solid-state imaging device
12/27/2011US8084285 Forming a micro electro mechanical system
12/27/2011US8084284 Complementary metal oxide semiconductor image sensor and method for fabricating the same
12/27/2011US8084282 Wafer-level In-P Si bonding for silicon photonic apparatus
12/27/2011US8084281 Semiconductor substrate, electronic device, optical device, and production methods therefor
12/27/2011US8084280 Method of manufacturing a solar cell using a pre-cleaning step that contributes to homogeneous texture morphology
12/27/2011US8084279 Method of manufacturing semiconductor device that uses both a normal photomask and a phase shift mask for defining interconnect patterns
12/27/2011US8084278 Method of manufacturing silicon carbide semiconductor device
12/27/2011US8084277 Semiconductor device and manufacturing method thereof
12/27/2011US8084190 Process for producing sublithographic structures
12/27/2011US8084142 Methods of forming conductive contacts to source/drain regions and methods of forming local interconnects
12/27/2011US8084088 Method of improving the wafer-to-wafer thickness uniformity of silicon nitride layers
12/27/2011US8084007 Methods of synthesis of isotropically enriched borohydride and methods of synthesis of isotropically enriched boranes
12/27/2011US8083964 Using amino acid derivative and surfactant as polishing mixture
12/27/2011US8083963 Removal of process residues on the backside of a substrate
12/27/2011US8083960 Etching endpoint determination method
12/27/2011US8083958 Patterning method using a combination of photolithography and copolymer self-assemblying lithography techniques
12/27/2011US8083956 Display device and method for manufacturing display device
12/27/2011US8083953 Registered structure formation via the application of directed thermal energy to diblock copolymer films
12/27/2011US8083892 Apparatus for generating gas plasma, gas composition for generating plasma and method for manufacturing semiconductor device using the same
12/27/2011US8083891 Plasma processing apparatus and the upper electrode unit
12/27/2011US8083890 Gas modulation to control edge exclusion in a bevel edge etching plasma chamber
12/27/2011US8083889 Apparatus and method for plasma etching
12/27/2011US8083888 Plasma processing apparatus
12/27/2011US8083855 Temperature control module using gas pressure to control thermal conductance between liquid coolant and component body
12/27/2011US8083853 Plasma uniformity control by gas diffuser hole design
12/27/2011US8083463 Mini clean room for preventing wafer pollution and using method thereof
12/27/2011US8083456 Contained object transfer system
12/27/2011US8083123 Method for manufacturing a printed wiring board
12/27/2011US8083115 Substrate cutting device and method
12/27/2011US8082977 Ceramic mounting for wafer apparatus with thermal expansion feature
12/27/2011US8082932 Single side workpiece processing
12/27/2011US8082878 Thermal evaporation apparatus, use and method of depositing a material
12/27/2011US8082858 Display substrate accommodating tray and apparatus and method for removing the display substrate
12/27/2011US8082672 Mechanical patterning of thin film photovoltaic materials and structure
12/22/2011WO2011160105A2 Endpoint determination for capillary-assisted flow control
12/22/2011WO2011160041A2 High voltage transistor using diluted drain
12/22/2011WO2011160011A1 Isolation between nonvolatile memory cells by means of low- dielectric- constant dielectrics and air gaps and corresponding manufacturing method
12/22/2011WO2011160001A1 Non-volatile memory comprising bit line air gaps and word line air gaps and corresponding manufacturing method
12/22/2011WO2011159929A1 Systems and methods for reducing overhang on electroplated surfaces of printed circuit boards
12/22/2011WO2011159905A2 Loadlock batch ozone cure
12/22/2011WO2011159749A1 Etching composition and its use in a method of making a photovoltaic cell
12/22/2011WO2011159737A2 Systems, methods and products involving aspects of laser irradiation, cleaving, and/or bonding silicon-containing material to substrates
12/22/2011WO2011159725A2 Discrete polarization scatterometry
12/22/2011WO2011159691A2 Chemical vapor deposition of ruthenium films containing oxygen or carbon
12/22/2011WO2011159690A2 Multiple precursor showerhead with by-pass ports
12/22/2011WO2011159625A2 Advanced process control optimization
12/22/2011WO2011159615A2 Method and apparatus for inducing turbulent flow of a processing chamber cleaning gas
12/22/2011WO2011159536A2 A splicing technique for fixed abrasives used in chemical mechanical planarization
12/22/2011WO2011159524A2 Apparatus and method for testing multiple integrated circuit devices on a film frame handler
12/22/2011WO2011159456A2 Optically tuned metalized light to heat conversion layer for wafer support system
12/22/2011WO2011159419A1 Bipolar transistor structure and method of forming the structure
12/22/2011WO2011159351A2 Electrodes to improve reliability of nanoelectromechanical systems
12/22/2011WO2011159081A2 Method for forming pattern, and pattern structure
12/22/2011WO2011159060A2 Led-inspecting device and led-inspecting method using same
12/22/2011WO2011159035A2 Bond head of die bonding device
12/22/2011WO2011159021A2 Horizontal adjusting part and substrate joining apparatus including same
12/22/2011WO2011159001A1 Non-volatile memory device including a charge trapping layer in a nano pattern, and a method for fabricating the same
12/22/2011WO2011158983A1 Method for bonding lead frames for a semiconductor device
12/22/2011WO2011158976A1 Device for supplying an epoxy moulding compound
12/22/2011WO2011158953A1 Leaving substituent-containing compound, organic semiconductor material formed therefrom, organic electronic device, organic thin-film transistor and display device using the organic semiconductor material, method for producing film-like product, pi-electron conjugated compound and method for producing the pi-electron conjugated compound
12/22/2011WO2011158929A1 Optical energy-crosslinkable insulating layer material for organic thin film transistor, overcoat insulating layer, and organic thin film transistor
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