H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof

Patents for H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof (658,974)
12/2011
12/22/2011	WO2011158912A1 Illuminating optical system, expose device, and device production method
12/22/2011	WO2011158887A1 Semiconductor device and operation method for same
12/22/2011	WO2011158865A1 Pitch change device and pitch change method
12/22/2011	WO2011158835A1 Adhesive sheet
12/22/2011	WO2011158828A1 Sputtering film forming device, and adhesion preventing member
12/22/2011	WO2011158821A1 Semiconductor device and manufacturing method for semiconductor device
12/22/2011	WO2011158817A1 Resist composition, resist pattern formation method, polymeric compound, and compound
12/22/2011	WO2011158803A1 Semiconductor integrated circuit device inspection method and semiconductor integrated circuit device
12/22/2011	WO2011158797A1 Detection method for semiconductor integrated circuit device, and semiconductor integrated circuit device
12/22/2011	WO2011158781A1 Film formation device
12/22/2011	WO2011158780A1 Semiconductor device and method for manufacturing same
12/22/2011	WO2011158760A1 Exposure apparatus
12/22/2011	WO2011158753A1 Resin paste composition
12/22/2011	WO2011158743A1 Silicon ribbon, spherical silicon, solar cell, solar cell module, method for producing silicon ribbon, and method for producing spherical silicon
12/22/2011	WO2011158731A1 Substrate for mounting semiconductor element and method for manufacturing the substrate
12/22/2011	WO2011158718A1 Polishing liquid for semiconductor substrate and method for producing semiconductor wafer
12/22/2011	WO2011158704A1 Method for manufacturing semiconductor device
12/22/2011	WO2011158703A1 Semiconductor device
12/22/2011	WO2011158698A1 Process for production of semiconductor device, and semiconductor device
12/22/2011	WO2011158691A1 Variable resistance element and method for manufacturing the same
12/22/2011	WO2011158687A1 Pattern formation method, and radiation-sensitive resin composition
12/22/2011	WO2011158672A1 Laser processing method
12/22/2011	WO2011158666A1 Process for production of connected structure
12/22/2011	WO2011158647A1 Semiconductor device and method for manufacturing same
12/22/2011	WO2011158646A1 Laser generating device and laser generation method
12/22/2011	WO2011158630A1 Photomask, and laser annealing device and exposure device which use same
12/22/2011	WO2011158612A1 Device and method for forming low-temperature polysilicon film
12/22/2011	WO2011158558A1 Method for cleaning silicon carbide semiconductor and apparatus for cleaning silicon carbide semiconductor
12/22/2011	WO2011158557A1 Method for cleaning silicon carbide semiconductor and apparatus for cleaning silicon carbide semiconductor
12/22/2011	WO2011158535A1 Method for producing composite substrate and composite substrate
12/22/2011	WO2011158534A1 Silicon carbide semiconductor device manufacturing method
12/22/2011	WO2011158533A1 Method for manufacturing silicon carbide semiconductor device and apparatus for manufacturing silicon carbide semiconductor device
12/22/2011	WO2011158532A1 Process for production of silicon carbide single crystal, and silicon carbide substrate
12/22/2011	WO2011158529A1 Method for cleaning silicon carbide semiconductor
12/22/2011	WO2011158528A1 Method for manufacturing silicon carbide semiconductor device and apparatus for manufacturing silicon carbide semiconductor device
12/22/2011	WO2011158486A1 Semiconductor device
12/22/2011	WO2011158476A1 Tape adhesion device and tape adhesion method
12/22/2011	WO2011158469A1 Substrate etching method and method for manufacturing sapphire substrate
12/22/2011	WO2011158468A1 Semiconductor device and manufacturing method therefor
12/22/2011	WO2011158449A1 Connection material, semiconductor device, and method for manufacturing same
12/22/2011	WO2011158444A1 Transfer apparatus and processing apparatus
12/22/2011	WO2011158438A1 Process for production of semiconductor device, and process for production of display device
12/22/2011	WO2011158427A1 Active matrix substrate
12/22/2011	WO2011158424A1 Thin film transistor substrate and liquid crystal display device
12/22/2011	WO2011158412A1 Package structure, method for manufacturing same, and method for repairing package structure
12/22/2011	WO2011158400A1 Semiconductor device and method for manufacturing same
12/22/2011	WO2011158397A1 Method for producing high concentration ozonated water and device for producing high concentration ozonated water
12/22/2011	WO2011158345A1 Pitch change device and substrate conveyance robot using pitch change device
12/22/2011	WO2011158319A1 Semiconductor device and method for manufacturing same
12/22/2011	WO2011158119A2 Formation method for silicon oxynitride film, and substrate having silicon oxynitride film manufactured using same
12/22/2011	WO2011157571A1 Strained thin body cmos device having vertically raised source/drain stressors with single spacer
12/22/2011	WO2011157429A1 Method for producing diamond layers and diamonds produced by the method
12/22/2011	WO2011157376A1 Method for bonding a strip-like conductor to a solar cell
12/22/2011	WO2011157363A1 Air-bearing device
12/22/2011	WO2011157267A1 Semiconductor device with integrated chamber for a coolant and method for producing a semiconductor device with integrated chamber for a coolant and receptacle device for receiving such a semiconductor device
12/22/2011	WO2011156961A1 Two-step impurity gettering process for polysilicon
12/22/2011	WO2011137298A3 Improved biocompatible bonding method
12/22/2011	WO2011128001A3 Method for producing a photovoltaic module comprising semiconductor cells contact-connected on the rear side, and photovoltaic module
12/22/2011	WO2011126612A3 Nitrogen doped amorphous carbon hardmask
12/22/2011	WO2011119895A3 Method for forming phase change memory device
12/22/2011	WO2011119373A3 Integrated circuit guard rings
12/22/2011	WO2011119293A3 Formation of liner and barrier for tungsten as gate electrode and as contact plug to reduce resistance and enhance device performance
12/22/2011	WO2011115761A3 Invertable pattern loading with dry etch
12/22/2011	WO2011115697A3 A method for imaging workpiece surfaces at high robot transfer speeds with correction of motion-induced distortion
12/22/2011	WO2011115696A3 Metrology system for imaging workpiece surfaces at high robot transfer speeds
12/22/2011	WO2011112518A3 Methods for forming low moisture dielectric films
12/22/2011	WO2011112402A3 Improving conformality of oxide layers along sidewalls of deep vias
12/22/2011	WO2011112303A3 Methods of forming an array of memory cells, methods of forming a plurality of field effect transistors, methods of forming source/drain regions and isolation trenches, and methods of forming a series of spaced trenches into a substrate
12/22/2011	WO2011109559A3 Structures and methods of fabricating dual gate devices
12/22/2011	WO2011109339A3 Aligning successive implants with a soft mask
12/22/2011	WO2011106235A3 Methods and apparatus for deposition processes
12/22/2011	WO2011103187A3 Semiconductor that has a functionalized surface
12/22/2011	WO2011090842A3 Electrode array and method of fabrication
12/22/2011	WO2011060444A3 Gas delivery for beam processing systems
12/22/2011	WO2009002644A8 Methods of making hierarchical articles
12/22/2011	US20110313122 Borazine-based resin, process for its production, borazine-based resin composition, insulating film and method for its formation
12/22/2011	US20110312982 Cancer Treatment Method
12/22/2011	US20110312251 Abrasive, Method of Polishing Target Member and Process for Producing Semiconductor Device
12/22/2011	US20110312193 Laser processing method
12/22/2011	US20110312192 Film formation method and film formation apparatus
12/22/2011	US20110312191 Semiconductor device manufacturing method
12/22/2011	US20110312190 Coating method and coating apparatus
12/22/2011	US20110312189 Substrate treating apparatus and substrate treating method
12/22/2011	US20110312188 Processing apparatus and film forming method
12/22/2011	US20110312187 Manufacturing apparatus and method for semiconductor device and cleaning method of manufacturing apparatus for semiconductor
12/22/2011	US20110312186 Semiconductor device manufacturing method
12/22/2011	US20110312185 Pattern formation method and pattern formation device
12/22/2011	US20110312184 Method for forming pattern of semiconductor device
12/22/2011	US20110312183 Method of Fine Patterning Semiconductor Device
12/22/2011	US20110312182 Method and apparatus for chemical-mechanical planarization
12/22/2011	US20110312181 Method for chemical mechanical planarization of a copper-containing substrate
12/22/2011	US20110312180 Post cmp planarization by cluster ion beam etch
12/22/2011	US20110312179 Substrate processing method and substrate processing apparatus
12/22/2011	US20110312178 Method for manufacturing semiconductor memory element and sputtering apparatus
12/22/2011	US20110312177 Patternable dielectric film structure with improved lithography and method of fabricating same
12/22/2011	US20110312176 Forming an electrode having reduced corrosion and water decomposition on surface using an organic protective layer
12/22/2011	US20110312175 Methods for forming antifuses with curved breakdown regions
12/22/2011	US20110312174 Methods Of Manufacturing Three-Dimensional Semiconductor Devices
12/22/2011	US20110312173 Method of Fabricating a Semiconductor Device
12/22/2011	US20110312172 Methods of Forming Patterns and Methods of Manufacturing Semiconductor Devices Using the Same

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