H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof

Patents for H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof (658,974)
12/2011
12/28/2011	CN101385129B 微波等离子体源和等离子体处理装置 A microwave plasma source and a plasma processing apparatus
12/28/2011	CN101383329B 嵌埋有芯片的封装结构及其制作方法 There embedded chip package structure and method of making
12/28/2011	CN101375398B 纳米线隧穿晶体管 Nanowire tunneling transistor
12/28/2011	CN101364591B 挤出失效监视器结构及其方法 Failure Monitor extrusion structure and method
12/28/2011	CN101364530B 电子部件安装方法及装置 Method and apparatus for mounting electronic components
12/28/2011	CN101363127B 电解镀铜方法 Electrolytic copper plating method
12/28/2011	CN101345247B 光电动势装置及其制造方法 A photovoltaic device and its manufacturing method
12/28/2011	CN101322073B 正型感光性树脂组合物及使用该组合物的半导体器件和显示器 The positive-type photosensitive resin composition and use of the composition of a semiconductor device and a display
12/28/2011	CN101315932B 半导体器件及其制造方法 Semiconductor device and manufacturing method thereof
12/28/2011	CN101312169B 半导体模块、半导体模块的制造方法以及便携式设备 Semiconductor module, method for manufacturing the semiconductor module and a portable device
12/28/2011	CN101309863B 半导体薄膜及其制造方法以及薄膜晶体管、有源矩阵驱动显示面板 A semiconductor thin film and the thin film transistor and its manufacturing method, an active matrix display panel is driven
12/28/2011	CN101263429B 使用膜形成组合物的图案形成方法 Film-forming composition using a pattern forming method
12/28/2011	CN101255233B 含硅高分子化合物及其制造方法、耐热性树脂组合物及耐热性薄膜 Silicon-containing polymer compound and its manufacturing method, heat-resistant resin composition and a heat-resistant film
12/28/2011	CN101232778B 印刷布线板 A printed circuit board
12/28/2011	CN101218191B 基材处理腔室的构件的局部表面退火 Localized surface annealing substrate processing chamber member
12/28/2011	CN101211891B 连接结构、电光装置及其制造方法 Connection structure, an electro-optical device and manufacturing method thereof
12/28/2011	CN101206394B 曝光掩模及使用该曝光掩模制造半导体器件的方法 Exposure mask and method of using the exposure mask manufacturing a semiconductor device
12/28/2011	CN101160014B 等离子体处理装置和可变阻抗装置的校正方法 Correction method and apparatus of the variable impedance of plasma processing apparatus
12/28/2011	CN101140856B 粘贴带切断方法及采用该方法的粘贴带粘贴装置 Paste adhesive tape cutting method and the use of this method with paste device
12/28/2011	CN101097331B 液晶显示器件及其制造方法 The liquid crystal display device and manufacturing method thereof
12/28/2011	CN101092049B 晶片的加工结果管理方法 Wafer processing results management
12/28/2011	CN101088147B 测量自偏压来监控等离子体处理系统中处理的方法和装置 Measured self-bias voltage to monitor the plasma processing system, processing method and apparatus
12/28/2011	CN101051619B 基板检查装置及使用其的基板检查方法 Substrate inspection device and substrate inspection method for use thereof
12/28/2011	CN101042988B 基板处理方法 Substrate processing method
12/28/2011	CN101032001B Cmp抛光剂以及衬底的抛光方法 Cmp polish polishing method and substrate
12/27/2011	USRE43045 Multi-chamber MOCVD growth apparatus for high performance/high throughput
12/27/2011	US8086973 Pattern management method and pattern management program
12/27/2011	US8086422 Method for analyzing defect data and inspection apparatus and review system
12/27/2011	US8085566 Semiconductor circuit device and data processing system
12/27/2011	US8085458 Diffusion barrier layer for MEMS devices
12/27/2011	US8084866 Microelectronic devices and methods for filling vias in microelectronic devices
12/27/2011	US8084865 Anchoring structure and intermeshing structure
12/27/2011	US8084855 Integrated circuit tampering protection and reverse engineering prevention coatings and methods
12/27/2011	US8084844 Semiconductor device
12/27/2011	US8084841 Systems and methods for providing high-density capacitors
12/27/2011	US8084834 Semiconductor device and method for manufacturing same
12/27/2011	US8084833 Semiconductor device
12/27/2011	US8084826 Semiconductor device and manufacturing method thereof
12/27/2011	US8084819 Semiconductor memory device having insulation patterns and cell gate patterns
12/27/2011	US8084818 High mobility tri-gate devices and methods of fabrication
12/27/2011	US8084817 Semiconductor device and method for fabricating the same
12/27/2011	US8084812 Bidirectional semiconductor device, method of fabricating the same, and semiconductor device incorporating the same
12/27/2011	US8084810 Fabrication method and structure of semiconductor non-volatile memory device
12/27/2011	US8084806 Isolation structure for a memory cell using A12O3 dielectric
12/27/2011	US8084802 Nonvolatile semiconductor memory
12/27/2011	US8084801 Cell structure for a semiconductor memory device and method of fabricating the same
12/27/2011	US8084800 Semiconductor device and a method of manufacturing the same
12/27/2011	US8084787 PMD liner nitride films and fabrication methods for improved NMOS performance
12/27/2011	US8084784 Semiconductor heterostructure and method for forming same
12/27/2011	US8084769 Testkey design pattern for gate oxide
12/27/2011	US8084706 System and method for laser processing at non-constant velocities
12/27/2011	US8084683 Low-cost multi-junction solar cells and methods for their production
12/27/2011	US8084375 Hot edge ring with sloped upper surface
12/27/2011	US8084374 Tuning of photo-absorption materials through use of magnetic fields
12/27/2011	US8084373 Manufacturing method of semiconductor device for enhancing the current drive capability
12/27/2011	US8084372 Substrate processing method and computer storage medium
12/27/2011	US8084371 Field effect transistors, methods of fabricating a carbon-insulating layer using molecular beam epitaxy and methods of fabricating a field effect transistor
12/27/2011	US8084370 Hafnium tantalum oxynitride dielectric
12/27/2011	US8084369 Producing method of semiconductor device and substrate processing apparatus
12/27/2011	US8084368 Method of forming barrier film
12/27/2011	US8084367 Etching, cleaning and drying methods using supercritical fluid and chamber systems using these methods
12/27/2011	US8084366 Modified DARC stack for resist patterning
12/27/2011	US8084365 Method of manufacturing a nano structure by etching, using a substrate containing silicon
12/27/2011	US8084364 Method of fabricating semiconductor device
12/27/2011	US8084363 Polishing slurry and polishing method
12/27/2011	US8084362 Polishing slurry and polishing method
12/27/2011	US8084361 Semiconductor fabrication method suitable for MEMS
12/27/2011	US8084360 Method of manufacturing semiconductor device
12/27/2011	US8084359 Semiconductor package and methods of manufacturing the same
12/27/2011	US8084358 Semiconductor device and manufacturing method thereof
12/27/2011	US8084357 Method for manufacturing a dual damascene opening comprising a trench opening and a via opening
12/27/2011	US8084356 Methods of low-K dielectric and metal process integration
12/27/2011	US8084355 Methods of forming copper-comprising conductive lines in the fabrication of integrated circuitry
12/27/2011	US8084354 Method of fabricating a metal cap layer with enhanced etch resistivity for copper-based metal regions in semiconductor devices
12/27/2011	US8084353 Methods for pitch reduction formation
12/27/2011	US8084352 Method of manufacturing semiconductor device
12/27/2011	US8084351 Contact structure of a semiconductor device
12/27/2011	US8084350 Method for manufacturing semiconductor device
12/27/2011	US8084349 Method for forming post bump
12/27/2011	US8084348 Contact pads for silicon chip packages
12/27/2011	US8084347 Resist feature and removable spacer pitch doubling patterning method for pillar structures
12/27/2011	US8084346 Replacement metal gate method
12/27/2011	US8084345 Methods of forming dispersions of nanoparticles, and methods of forming flash memory cells
12/27/2011	US8084344 Methods of fabricating a semiconductor device
12/27/2011	US8084343 Semiconductor device
12/27/2011	US8084342 Method of manufacturing a CMOS device with zero soft error rate
12/27/2011	US8084341 Semiconductor device and method for manufacturing the same
12/27/2011	US8084340 Method of manufacturing semiconductor device and semiconductor device
12/27/2011	US8084339 Remote plasma processing of interface surfaces
12/27/2011	US8084338 Semiconductor device and manufacturing method thereof
12/27/2011	US8084337 Growth of III-V compound semiconductor nanowires on silicon substrates
12/27/2011	US8084336 Oscillator apparatus
12/27/2011	US8084335 Method of thinning a semiconductor wafer using a film frame
12/27/2011	US8084334 Semiconductor device manufacturing method comprising a metal pattern and laser modified regions in a cutting region
12/27/2011	US8084333 Object cutting method
12/27/2011	US8084332 Method of fabrication of AI/GE bonding in a wafer packaging environment and a product produced therefrom
12/27/2011	US8084331 Method of treating semiconductor element
12/27/2011	US8084330 Thin body semiconductor devices having improved contact resistance and methods for the fabrication thereof
12/27/2011	US8084329 Transistor devices and methods of making
12/27/2011	US8084327 Method for forming trench gate field effect transistor with recessed mesas using spacers

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