Patents for H01J 27 - Ion beam tubes (3,716)
10/2010
10/20/2010EP2242087A2 Ion source for generating a particle beam, electrodes for an ion source and method for introducing a gas to be ionised into an ion source
10/20/2010CN101868113A Gas injection system and method for operating the same
10/20/2010CN101866802A Ion source loading and unloading device
10/13/2010CN101167154B Ion source for use in an ion implanter
10/12/2010US7812321 Techniques for providing a multimode ion source
10/12/2010US7812320 Ion source element, ion implanter having the same and method of modifying the same
10/12/2010US7812307 Microplasma-based sample ionizing device and methods of use thereof
09/2010
09/30/2010US20100244657 Hall effect ion ejection device
09/30/2010US20100243920 Method for enhancing a substrate using gas cluster ion beam processing
09/30/2010US20100243913 Pre-aligned nozzle/skimmer
09/30/2010US20100243912 Isolation circuit for transmitting ac power to a high-voltage region
09/29/2010CN101192497B 离子源 Ion source
09/28/2010US7804073 Liquid metal ion gun
09/21/2010US7800312 Dual mode ion source for ion implantation
09/15/2010CN1961403B Carbon nanotube electron ionization sources
09/14/2010CA2444731C High throughput ion source with multiple ion sprayers and ion lenses
09/10/2010WO2010007368A3 Ion source with device for oxidising or halogenating a sample
09/07/2010US7791042 Method and apparatus for selectively performing chemical ionization or electron ionization
09/07/2010US7791041 Ion source, ion implantation apparatus, and ion implantation method
09/02/2010US20100219740 Apparatus
08/2010
08/31/2010US7786452 Ion sources, systems and methods
08/31/2010US7786451 Ion sources, systems and methods
08/31/2010US7786442 Method and apparatus for ion source positioning and adjustment
08/19/2010WO2010093943A1 Ionization probe assemblies
08/19/2010US20100207529 Closed drift ion source
08/17/2010US7777196 Cold electron emitter device for display
08/12/2010US20100200768 Techniques for improving extracted ion beam quality using high-transparency electrodes
08/12/2010US20100200767 Optical apparatus for plasma
08/10/2010US7772564 Particle-optical apparatus equipped with a gas ion source
08/10/2010CA2585176C Ion source with substantially planar design
08/05/2010US20100193702 Tandem ionizer ion source for mass spectrometer and method of use
08/05/2010US20100193701 Multiple nozzle gas cluster ion beam system
08/05/2010US20100193679 Guiding charged droplets and ions in an electrospray ion source
08/03/2010US7767986 Method and apparatus for controlling beam current uniformity in an ion implanter
07/2010
07/29/2010WO2009137583A3 Method and apparatus for a porous metal electrospray emitter
07/29/2010US20100188000 Closed electron drift thruster
07/29/2010US20100187970 Apparatus
07/29/2010US20100187436 High resolution gas field ion column
07/22/2010WO2010082466A1 Ion beam device
07/22/2010WO2010081465A2 Molding compound-enclosed power semiconductor element
07/22/2010US20100181499 Enhanced low energy ion beam transport in ion implantation
07/22/2010US20100181493 Ionic emission micronic source
07/21/2010CN1953129B Method of operating ion source and ion implanting apparatus
07/20/2010US7759643 Single electrode corona discharge electrochemical/electrospray ionization
07/15/2010WO2010025211A4 Ion beam stabilization
07/15/2010US20100176306 Implantation quality improvement by xenon/hydrogen dilution gas
07/15/2010US20100176296 Composite focused ion beam device, and processing observation method and processing method using the same
07/15/2010US20100176290 Ionizer for vapor analysis decoupling the ionization region from the analyzer
07/14/2010CN101777481A hybrid magnetic/electrostatic deflector for ion implantation systems
07/13/2010US7755062 Ion source and ion implantation apparatus
07/06/2010US7750314 Elevated temperature RF ion source
07/06/2010US7750313 Ion source
07/06/2010US7750312 Method and apparatus for generating ions for mass analysis
06/2010
06/30/2010CN101764021A Ion pipe and ion beam extraction method
06/30/2010CN101764020A Ion pipe
06/24/2010WO2010069213A1 Surface ionization detector
06/24/2010WO2010008924A4 Increasing current in charged particle sources and systems
06/24/2010US20100155619 Directional gas injection for an ion source cathode assembly
06/22/2010US7741616 EUV light source, EUV exposure equipment, and semiconductor device manufacturing method
06/22/2010US7741615 High energy crystal generators and their applications
06/17/2010US20100148089 Ion implantation ion source, system and method
06/17/2010US20100148088 Techniques for providing a multimode ion source
06/16/2010CN201508820U Electron bombardment ion source discharge chamber
06/15/2010US7737414 Atomically sharp iridium tip
06/10/2010WO2010065170A1 Multibeam doubly convergent electron gun
06/10/2010US20100140495 Cathode having electron production and focusing groves, ion source and related method
06/08/2010US7732787 Ion implantation ion source, system and method
06/03/2010US20100135850 Air disinfection device
06/03/2010US20100133445 Ion beam control apparatus and method
05/2010
05/27/2010WO2010057463A1 Ion drive for a spacecraft
05/26/2010CN1996546B The real-time control system and control method for the ion source in gas
05/26/2010CN1983504B Ion source and mould polisher therewith
05/26/2010CN101303955B Ion source component
05/20/2010WO2010025211A3 Ion beam stabilization
05/20/2010US20100123073 Electron capture dissociation in a mass spectrometer
05/19/2010CN201478252U Heating type cathode for metal steam vacuum arc ion source
05/19/2010CN101371326B Ion sources, systems and methods
05/13/2010US20100116985 Laser atom probe methods
05/13/2010US20100116464 Reversible flow electrohydrodynamic fluid accelerator
05/12/2010CN1896315B Ion beam etching method and ion beam etching apparatus
05/12/2010CN1764028B Emitter electrodes formed of or coated with a carbide material for gas ionizers
05/06/2010US20100108915 Conductive Contamination Resistant Insulator
05/06/2010US20100108905 Plasma sources
05/06/2010US20100108902 Dual mode gas field ion source
05/05/2010EP2182542A1 Dual mode gas field ion source
05/05/2010CN1681579B Multimode ionization source
04/2010
04/28/2010EP2179435A1 Hall effect ion ejection device
04/28/2010CN101699612A Ceramic filled type neutron tube
04/22/2010WO2010043831A1 Low-power gaseous plasma source
04/22/2010WO2010008924A3 Increasing current in charged particle sources and systems
04/15/2010WO2010040805A1 Ion beam extraction by discrete ion focusing
04/14/2010EP2175469A1 Ion beam extraction by discrete ion focusing
04/14/2010EP1683180B1 Carbon nanotube electron ionization sources
04/13/2010US7696489 Emitter for an ion source and method of producing same
04/13/2010CA2411532C Atmospheric pressure photoionizer for mass spectrometry
04/08/2010WO2010039675A1 Method and apparatus for embedded heater for desorption and ionization of analytes
04/08/2010US20100084569 Ion deposition apparatus
03/2010
03/31/2010EP2168136A2 Ionic emission micronic source
03/31/2010CN101689467A Charge transport materials for luminescent applications
03/30/2010US7687784 Method and device of ion source generation
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