| Patents for G21K 5 - Irradiation devices (9,144) |
|---|
| 06/29/2004 | US6756706 Method and apparatus for cooling power supply wires used to drive stages in electron beam lithography machines |
| 06/29/2004 | US6756597 Fluid sterilization apparatus |
| 06/24/2004 | WO2004053892A2 Device and method for producing radioisotopes |
| 06/24/2004 | WO2004053592A1 Reticle manipulations |
| 06/24/2004 | WO2004040589A3 Transportable manufacturing facility for radioactive materials |
| 06/24/2004 | US20040121243 Damage-resistant coatings for EUV lithography components |
| 06/24/2004 | US20040120466 Radiation window and method of manufacture |
| 06/24/2004 | US20040120464 Cast collimators for CT detectors and methods of making same |
| 06/24/2004 | US20040120462 Method and apparatus for generating x-ray beams |
| 06/24/2004 | US20040119961 Illumination system with variable adjustment of the illumination |
| 06/24/2004 | US20040119028 Laser patterning of encapsulated organic light emitting diodes |
| 06/24/2004 | US20040118816 Plasma catalyst |
| 06/24/2004 | US20040118081 Ion beam facility |
| 06/23/2004 | EP1430932A1 Ion beam facility |
| 06/23/2004 | CN1507361A Device for X-ray therapy |
| 06/23/2004 | CN1506763A Photoetching projector with multi-suppressing silk screen |
| 06/22/2004 | US6754307 Method and device for X-ray exposure control |
| 06/22/2004 | US6754304 Method for obtaining a picture of the internal structure of an object using x-ray radiation and device for the implementation thereof |
| 06/22/2004 | US6754302 X-ray exposure apparatus |
| 06/22/2004 | US6753941 Lithographic apparatus and device manufacturing method |
| 06/22/2004 | US6753535 Article irradiation system with multiple beam paths |
| 06/17/2004 | WO2004015735A3 Ion source and coaxial inductive coupler for ion implantation system |
| 06/17/2004 | US20040114724 X-ray tube window cooling apparatus |
| 06/17/2004 | US20040114122 Lithographic apparatus and method to determine beam characteristics |
| 06/17/2004 | US20040114120 Lithographic apparatus, device manufacturing method, and device manufactured thereby |
| 06/17/2004 | US20040113099 Gantry system for transport and delivery of a high energy ion beam in a heavy ion cancer therapy facility |
| 06/17/2004 | US20040113094 Bulk material irradiation system and method |
| 06/16/2004 | EP1429368A2 Fabrication of three dimensional structures |
| 06/16/2004 | EP1429345A1 Device and method of radioisotope production |
| 06/16/2004 | EP1428554A1 Device for x-ray therapy |
| 06/16/2004 | EP1428416A1 Discharge source with gas curtain for protecting optics from particles |
| 06/16/2004 | EP1428226A1 Method of and apparatus for transmuting radioactive waste |
| 06/16/2004 | EP1428006A2 Method and apparatus for scanned instrument calibration |
| 06/16/2004 | EP1016092B1 Method and apparatus for producing extreme ultra-violet light for use in photolithography |
| 06/16/2004 | CN1504831A Lithographic apparatus, device manufacturing method, and device manufactured thereby |
| 06/16/2004 | CN1154402C X-ray generator of open type |
| 06/16/2004 | CN1154150C Beam generation apparatus |
| 06/15/2004 | US6751294 Prevention of parametic or functional changes to silicon semiconductor device properties during x-ray inspection |
| 06/15/2004 | US6750949 Lithographic apparatus and device manufacturing method |
| 06/15/2004 | US6750451 Observation apparatus and observation method using an electron beam |
| 06/15/2004 | US6749903 Low loss electron beam path to irradiate an electron beam modifiable material coated on an electron beam degradable substrate |
| 06/15/2004 | US6749337 X-ray tube and method of manufacture |
| 06/10/2004 | US20040111134 Medical particle irradiation apparatus |
| 06/10/2004 | US20040109537 X -ray generator |
| 06/10/2004 | US20040109151 Lithographic projection apparatus and reflector assembly for use therein |
| 06/10/2004 | US20040108473 Extreme ultraviolet light source |
| 06/10/2004 | US20040108470 Neutral particle beam processing apparatus |
| 06/10/2004 | US20040107896 Plasma-assisted decrystallization |
| 06/09/2004 | EP1426824A1 Lithographic apparatus, device manufacturing method, and device manufactured thereby |
| 06/09/2004 | EP1425697A1 Method and apparatus for simulating a radiation dose delivered to an object |
| 06/08/2004 | US6745512 Process and device for treating seeds |
| 06/03/2004 | WO2003020196A8 Antiprotons for imaging and termination of undesirable cells |
| 06/03/2004 | US20040106068 Lithographic apparatus and device manufacturing method |
| 06/03/2004 | US20040105083 Lithographic apparatus and device manufacturing method |
| 06/03/2004 | US20040105082 Radiation source, lithographic apparatus and device manufacturing method |
| 06/03/2004 | US20040104357 Electron beam exposure apparatus, electron beam exposing method, semiconductor element manufacturing method, and pattern error detection method |
| 06/03/2004 | US20040104354 Device and method for adapting the size of an ion beam spot in the domain of tumor irradiation |
| 06/03/2004 | DE19954662B4 Vorrichtung und Verfahren zum Detektieren von unzulässigen Reisegepäckgegenständen Apparatus and method for detecting improper luggage articles |
| 06/02/2004 | CN1500911A Lithographic apparatus and method to determine beam size and divergence |
| 06/01/2004 | US6745072 Method for checking beam generation and beam acceleration means of an ion beam therapy system |
| 06/01/2004 | US6744851 Linear filament array sheet for EUV production |
| 06/01/2004 | US6744845 Computed tomography apparatus for determining the pulse momentum transfer spectrum |
| 06/01/2004 | US6744054 Evacuation use sample chamber and circuit pattern forming apparatus using the same |
| 05/27/2004 | WO2004043614A1 Chemical functionalization of material surfaces using optical energy and chemicals |
| 05/27/2004 | US20040099636 Fabrication of three dimensional structures |
| 05/27/2004 | DE10251435B3 Radiation source for extreme UV radiation for photolithographic exposure applications for semiconductor chip manufacture |
| 05/26/2004 | EP1421833A2 Antiproton production and delivery for imaging and termination of undesirable cells |
| 05/26/2004 | CN1500369A Metod and device for generation of far ultraviolet or soft X-ray radiation |
| 05/26/2004 | CN1500368A X-ray generator |
| 05/26/2004 | CN1499297A Lightscribing device and mfg. method of such device |
| 05/25/2004 | US6741329 Lithographic apparatus and device manufacturing method |
| 05/21/2004 | WO2003107037A3 Scatter spectra method for x-ray fluorescent analysis with optical components |
| 05/20/2004 | US20040096038 Radiotherapeutic apparatus |
| 05/20/2004 | US20040094724 Lithographic projection apparatus and reflector assembly for use therein |
| 05/19/2004 | EP1419676A2 Ultraviolet radiation generation with flame and electrical discharge |
| 05/19/2004 | EP1419515A1 Method and apparatus for ion bunching in an ion implantation system |
| 05/19/2004 | EP1419514A1 Split double gap buncher and method for ion bunching in an ion implantation system |
| 05/19/2004 | DE10251448A1 CT method for imaging of a periodically moving examination area, especially the heart, whereby image segments are combined to form image planes, which are subsequently joined together to form a complete image |
| 05/19/2004 | CN1498056A Radiation source, photoetching equipment and device manufacturing method |
| 05/19/2004 | CN1497349A Radiation source, photoetching device and manufacturing method of device |
| 05/19/2004 | CN1150568C Electron beam irradiation equipment |
| 05/18/2004 | US6738452 Gasdynamically-controlled droplets as the target in a laser-plasma extreme ultraviolet light source |
| 05/18/2004 | US6738451 X-ray irradiation apparatus |
| 05/18/2004 | US6738446 Destroying fuel from nuclear reactor; fission; using plutonium isotope driver |
| 05/18/2004 | US6737660 Electron beam irradiation apparatus and electron beam irradiating method |
| 05/18/2004 | US6737657 Ion implanting apparatus for manufacturing semiconductor devices |
| 05/18/2004 | US6737643 Detector and method for cluster ion beam diagnostics |
| 05/18/2004 | US6736831 Method for operating an ion beam therapy system by monitoring the distribution of the radiation dose |
| 05/13/2004 | WO2004040589A2 Transportable manufacturing facility for radioactive materials |
| 05/13/2004 | WO2004040588A2 System and method for radioactive waste destruction |
| 05/13/2004 | US20040091789 Subtractive attenuation and phase shifting; accurate opening depth; simplified manufacturing |
| 05/13/2004 | US20040089820 Particle beam processing apparatus and materials treatable using the apparatus |
| 05/13/2004 | US20040089819 Radiation source, lithographic apparatus, device manufacturing method, and device manufactured thereby |
| 05/13/2004 | US20040089818 Multi-foil optic |
| 05/13/2004 | DE10333073A1 Kondensiertes Wolfram-Verbundmaterial und Verfahren zum Herstellen und Abdichten einer Strahlungsabschirmungsumhüllung Fused tungsten composite material and method for producing and sealing a radiation shielding enclosure |
| 05/13/2004 | DE10249710A1 Component radiation hardening unit, comprises a radiation apparatus, an inert gas supply line and nozzle, and an integral heat exchanger |
| 05/13/2004 | DE10249709A1 Component radiation hardening unit, comprises a radiation apparatus, an inert gas supply line and nozzle, and an integral heat exchanger |
| 05/12/2004 | EP1418796A2 Erosion reduction for EUV laser produced plasma target sources |
| 05/12/2004 | EP1417543A1 Stable energy detector for extreme ultraviolet radiation detection |
| 05/12/2004 | CN1495532A Photoetching projector and reflector assembly for the same |