| Patents for G21K 5 - Irradiation devices (9,144) |
|---|
| 05/12/2004 | CN1495530A Photoetching equipment and device mfg. method |
| 05/12/2004 | CN1495528A Photoetching projector and reflector assembly for said device |
| 05/12/2004 | CN1495283A Matching box, vacuum device using the same and vacuum processing method |
| 05/11/2004 | US6735277 Inverse planning for intensity-modulated radiotherapy |
| 05/11/2004 | US6734444 Substrate treatment device using a dielectric barrier discharge lamp |
| 05/11/2004 | US6734437 System and method for electron beam irradiation |
| 05/11/2004 | US6734428 Multi-beam multi-column electron beam inspection system |
| 05/06/2004 | WO2004039133A1 Electron accelerator and radiotherapy apparatus using same |
| 05/06/2004 | WO2004038508A1 Electron beam exposure method and electron beam exposure system |
| 05/06/2004 | WO2004038504A2 Nanometer-scale engineered structures, methods and apparatus for fabrication thereof, and applications to mask repair, enhancement, and fabrication |
| 05/06/2004 | WO2004021403A3 Charging and capture of particles in coronas irradiated by in-situ x-rays |
| 05/06/2004 | WO2004017686A3 Apparatus and method providing substantially two-dimensionally uniform irradiation |
| 05/06/2004 | WO2002093588B1 Shielded structure for radiation treatment equipment and method of assembly |
| 05/06/2004 | US20040086437 Transportable manufacturing facility for radioactive materials |
| 05/06/2004 | US20040086433 Conveyor and guide system which does not require operator adjustments to accommodate various sizes and shapes of objects |
| 05/06/2004 | US20040086421 Method and unit for sterilizing packaging sheet material for manufacturing sealed pagages of pourable food products |
| 05/06/2004 | US20040086080 Erosion reduction for EUV laser produced plasma target sources |
| 05/06/2004 | US20040084634 Apparatus for pre-acceleration of ion beams used in a heavy ion beam applications system |
| 05/06/2004 | CA2503160A1 Electron accelerator and radiotherapy apparatus using same |
| 05/05/2004 | CN1494819A Extreme ultraviolet generating device, exposure device using the same and semiconductor mfg. method |
| 05/04/2004 | US6730924 Collimator for limiting a bundle of high-energy rays |
| 04/29/2004 | WO2004036619A1 Ultraviolet irradiation device |
| 04/29/2004 | WO2004036312A2 Irradiation device for testing objects coated with light-sensitive paint |
| 04/29/2004 | WO2004036282A1 Optical imaging device designs for solar-powered flight and powergeneration |
| 04/29/2004 | WO2003095058A3 Plasma-assisted multi-part processing |
| 04/29/2004 | WO2003043026A8 Article irradiation system shielding |
| 04/29/2004 | US20040081341 Method and arrangement for positioning a patient in a medical diagnosis or therapy device |
| 04/29/2004 | US20040079904 Condensed tungsten composite material and method for manufacturing and sealing a radiation shielding enclosure |
| 04/29/2004 | US20040079900 System for measurement of absorbed doses of electron beams in an irradiated object |
| 04/28/2004 | EP1413416A2 Radiation hardening installation |
| 04/28/2004 | EP1412951A2 Apparatus and method for generating ?18 f-fluoride by ion beams |
| 04/28/2004 | EP1412683A1 Irradiation device comprising an air evacuation nozzle |
| 04/28/2004 | EP1123138B1 Method and system for physiological gating of radiation therapy |
| 04/28/2004 | CN1147876C Multiple-channel total-reflection lens with controllable divergence |
| 04/27/2004 | US6728337 Star pinch plasma source of photons or neutrons |
| 04/27/2004 | US6728332 X-ray mask, and exposure method and apparatus using the same |
| 04/27/2004 | US6727509 Wafer pedestal tilt mechanism |
| 04/22/2004 | WO2004010162A3 Radiation sources and compact radiation scanning systems |
| 04/22/2004 | US20040076260 X-ray source and method for more efficiently producing selectable x-ray frequencies |
| 04/22/2004 | US20040076252 Fissile interrogation using gamma rays from oxygen |
| 04/22/2004 | US20040075063 Differential pumping system and exposure apparatus |
| 04/21/2004 | EP1409078A1 Optically driven therapeutic radiation source |
| 04/21/2004 | CN1491119A Method and unit for sterilizing packaging sheet material for manufacturing sealed packages of pourable food products |
| 04/21/2004 | CN1147210C Acoustic delay line with movable partition plates |
| 04/21/2004 | CN1146357C Roentgenoscope with adjustable primary ray blocking plate |
| 04/20/2004 | US6724852 Low energy proton accelerator directed to sulfur hexafluoride target; neutron detector array |
| 04/20/2004 | US6724465 Lithography device which uses a source of radiation in the extreme ultraviolet range and multi-layered mirrors with a broad spectral band in this range |
| 04/20/2004 | US6724004 Method and apparatus for elimination of high energy ion from EUV radiating device |
| 04/20/2004 | US6724003 Electron beam-irradiating reaction apparatus |
| 04/20/2004 | US6723984 Environmental sampler for mass spectrometer |
| 04/15/2004 | WO2004032211A1 X-ray generator and exposure device |
| 04/15/2004 | WO2003104846A3 A sample enclosure for a scanning electron microscope and methods of use thereof |
| 04/15/2004 | WO2003049138A3 Method and device for cooling and electrically insulating a high-voltage, heat-generating component such as an x-ray tube |
| 04/15/2004 | WO2002080213A9 Irradiation system and method |
| 04/15/2004 | WO2002065209A8 Collimator arrangement |
| 04/15/2004 | US20040071268 Jet cooled x-ray tube window |
| 04/15/2004 | US20040071260 X-ray projection exposure apparatus and a device manufacturing method |
| 04/15/2004 | US20040071259 Thermoelectrically controlled X-ray detector array statement regarding federally sponsored research |
| 04/15/2004 | US20040069959 Charged particle beam irradiation equipment and control method thereof |
| 04/15/2004 | US20040069958 Apparatus for generating and selecting ions used in a heavy ion cancer therapy facility |
| 04/13/2004 | US6721390 Soft X-ray reduction projection exposure system, soft X-ray reduction projection exposure method and pattern formation method |
| 04/13/2004 | US6721389 Lithographic apparatus, device manufacturing method, and device manufactured thereby |
| 04/13/2004 | US6719849 Single-substrate-processing apparatus for semiconductor process |
| 04/08/2004 | WO2004030424A2 Particle accelerator having wide energy control range |
| 04/08/2004 | WO2004029601A1 Labelled neutron generator |
| 04/08/2004 | US20040066901 X-ray tube method of manufacture |
| 04/08/2004 | US20040066889 Collimator aperture scheduling for enhanced pencil-beam resolution |
| 04/08/2004 | US20040066886 Scatter spectra method for x-ray fluorescent analysis with optical components |
| 04/08/2004 | US20040066498 Exposure apparatus, maintenance method therefor, semiconductor device manufacturing method, and semiconductor manufacturing factory |
| 04/08/2004 | US20040065817 Collector having unused region for illumination systems using a wavelength less than or equal to 193 nm |
| 04/07/2004 | EP1404224A1 Medical x-ray device and power module therefor |
| 04/06/2004 | US6717165 Device and method for detecting the drive state of a turbo pump in a tandetron accelerator of an ion implantation device |
| 04/06/2004 | US6717162 Method for treating a target volume with a particle beam and device implementing same |
| 04/06/2004 | US6717155 Electron impact ion source |
| 04/01/2004 | WO2004027842A1 X-ray generator, e-ray exposure apparatus, and x-ray filter |
| 04/01/2004 | WO2004027771A1 Electron beam irradiator, electron beam irradiating method, system for producing disc-like body and process for producing disc-like body |
| 04/01/2004 | WO2004027520A1 Electron beam irradiation device, electron beam irradiation method, disc-like body manufacturing apparatus, and disc-like body manufacturing method |
| 04/01/2004 | WO2003100814A9 Particle beam processing apparatus and materials treatable using the apparatus |
| 04/01/2004 | WO2003081220A3 Computer tomograph with a detector following the movement of a pivotable x-ray source |
| 04/01/2004 | US20040062714 Synthesis of 17F labeled fluoroalkanes |
| 04/01/2004 | US20040062352 Laser plasma X-ray generating apparatus |
| 04/01/2004 | US20040061078 Medical particle irradiation apparatus |
| 04/01/2004 | US20040061077 Medical particle irradiation apparatus |
| 03/31/2004 | EP1403906A1 Discharge lamp and ultraviolet irradiation system and operation method therefor |
| 03/31/2004 | EP1402923A1 Medical particle irradiation apparatus |
| 03/31/2004 | EP1402124A2 Shielded structure for radiation treatment equipment and method of assembly |
| 03/31/2004 | EP1127030B1 Device for purifying fluid with photonic pulses |
| 03/31/2004 | CN1144237C Integral lens for high energy particle flow, method for producing such lenses and use thereof |
| 03/30/2004 | US6714626 Jet cooled x-ray tube window |
| 03/30/2004 | US6714624 Discharge source with gas curtain for protecting optics from particles |
| 03/30/2004 | US6713327 Stress controlled dielectric integrated circuit fabrication |
| 03/30/2004 | CA2159906C Fluorescent materials for illumination purpose |
| 03/25/2004 | WO2004025682A1 Radiation window and method of manufacture |
| 03/25/2004 | WO2004025175A1 Uv-ray irradiator |
| 03/25/2004 | US20040057554 Radiation sources and compact radiation scanning systems |
| 03/25/2004 | US20040056214 Ion implanting apparatus for manufacturing semiconductor devices |
| 03/25/2004 | US20040056212 Partcle beam irradiation system and method of adjusting irradiation apparatus |
| 03/25/2004 | DE10241178A1 Isokinetische Gantry-Anordnung zur isozentrischen Führung eines Teilchenstrahls und Verfahren zu deren Auslegung Isokinetic gantry arrangement for the isocentric guidance of a particle and methods of interpretation |
| 03/24/2004 | EP1400983A2 Collimation system for dual slice electron beam tomography scanner |
| 03/24/2004 | EP1399943A1 X-ray tube with graphite window |