| Patents for G21K 5 - Irradiation devices (9,144) |
|---|
| 09/29/2004 | EP1461812A1 Compact self-shielded irradiation system and method |
| 09/29/2004 | EP1044457B1 X-ray irradiation apparatus including an x-ray source provided with a capillary optical system |
| 09/29/2004 | CN1532848A Energy ray radiator |
| 09/29/2004 | CN1532634A Method and device for recovering gas used in lighographic plate printing tool |
| 09/29/2004 | CN1169408C X-ray meter with rotation limiting device |
| 09/28/2004 | US6798863 Combined x-ray analysis apparatus |
| 09/23/2004 | US20040184014 Contamination barrier with expandable lamellas |
| 09/23/2004 | US20040183481 Microwave powered lamphead having external shutter |
| 09/23/2004 | US20040183461 Methods and systems for providing emission of incoherent radiation and uses therefor |
| 09/23/2004 | US20040183038 Extreme UV radiation source and semiconductor exposure device |
| 09/23/2004 | US20040183037 Method and device for producing extreme ultraviolet radiation and soft x-ray radiation |
| 09/23/2004 | US20040183035 Medical charged particle irradiation apparatus |
| 09/23/2004 | US20040183034 Medical charged particle irradiation apparatus |
| 09/23/2004 | US20040183033 Particle beam therapy system |
| 09/23/2004 | US20040183030 Method and apparatus for recycling gases used in a lithography tool |
| 09/22/2004 | EP1460886A2 Extreme UV radiation source and semiconductor exposure device |
| 09/22/2004 | EP1460479A2 Method and apparatus for recycling gases in a lithography tool |
| 09/22/2004 | EP1459770A1 Process and apparatus for irradiating product pallets |
| 09/22/2004 | EP1459350A1 Device for generating x-rays having an integrated anode and bearing member |
| 09/22/2004 | EP1459102A1 Method to measure the entrance dose of a radiology apparatus |
| 09/22/2004 | EP1459100A1 X-ray examination apparatus and method |
| 09/22/2004 | EP1307766B1 Apparatus for imaging objects on the remote side of a barrier using radiation |
| 09/22/2004 | EP1294445B1 Device for irradiating a tumor tissue |
| 09/22/2004 | EP0746869B1 Method and apparatus for electron beam focusing adjustment in a scanning electron beam computed tomography scanner |
| 09/22/2004 | CN1531840A Method and device for producing extreme ultraviolet radiation and soft X-radiation |
| 09/22/2004 | CN1531019A Producing method for X-ray mask and semiconductor device |
| 09/21/2004 | US6795523 Method and apparatus for controlling a rotatable multi-element beam shaping device |
| 09/21/2004 | US6794664 Umbilical cord facilities connection for an ion beam implanter |
| 09/16/2004 | WO2004080130A2 Scanning-based detection of ionizing radiation |
| 09/16/2004 | WO2004079780A2 A method of patterning photoresist on a wafer using a reflective mask with a multi-layer arc |
| 09/16/2004 | WO2004079779A2 A method of patterning photoresist on a wafer using an attenuated phase shift mask |
| 09/16/2004 | US20040179182 Lithographic apparatus with debris suppression, and device manufacturing method |
| 09/16/2004 | US20040178354 Particle-optical device for irradiating an object |
| 09/16/2004 | CA2511097A1 Scanning-based detection of ionizing radiation |
| 09/15/2004 | EP1458005A2 Particle-optical device for irradiating an object |
| 09/15/2004 | EP1456613A2 Dose radiometer |
| 09/15/2004 | EP1455898A2 Radiotherapy system |
| 09/15/2004 | EP1189537B1 Digital x-ray scanning apparatus |
| 09/15/2004 | EP1152799B1 Method for checking beam generation and beam acceleration means of an ion beam therapy system |
| 09/15/2004 | EP1152793B1 Method for monitoring an isocentre and a positioning device for patients, said positioning device and isocentre pertaining to an ion-beam therapy system |
| 09/15/2004 | CN1167079C Electron beam illuminating device |
| 09/15/2004 | CN1166987C Contacting-type photo etching device |
| 09/14/2004 | US6792077 Collimation system for dual slice EBT scanner |
| 09/14/2004 | US6792076 Target steering system for EUV droplet generators |
| 09/10/2004 | WO2004077453A2 Encapsulated nanoparticles for the absorption of electromagnetic energy |
| 09/10/2004 | CA2557348A1 Encapsulated nanoparticles for the absorption of electromagnetic energy |
| 09/09/2004 | US20040175633 Reflective mask blank having a programmed defect and method of producing the same, reflective mask having a programmed defect and method of producing the same, and substrate for use in producing the reflective mask blank or the reflective mask having a programmed defect |
| 09/09/2004 | US20040175631 Nanometer-scale engineered structures, methods and apparatus for fabrication thereof, and applications to mask repair, enhancement, and fabrications |
| 09/09/2004 | US20040175630 overlying an absorber stack that overlies a reflective substrate; the multilayer antireflective coating has layers of nitrogen, oxygen and nitrogen combined with the predetermined metal of the upper layer of the absorber stack; making semiconductors at lower wavelengths |
| 09/09/2004 | US20040175629 Stack overcoating semiconductor substrate; ruthenium or chromium layer; patterning using optical radiation |
| 09/09/2004 | US20040174959 X-ray diffraction-based scanning system |
| 09/09/2004 | US20040174958 Particle beam therapy system |
| 09/09/2004 | US20040174955 Apparatus and method for generating high-order harmonic X-ray, and point-diffraction interferometer using high-order harmonic X-ray |
| 09/09/2004 | US20040174954 Medical x-ray device and power module therefor |
| 09/09/2004 | US20040174947 Scanning-based detection of ionizing radiation |
| 09/09/2004 | US20040173763 Particle beam therapy system |
| 09/09/2004 | US20040173755 Electron-beam focusing apparatus and electron-beam projection lithography system employing the same |
| 09/09/2004 | US20040173745 Defect evaluation apparatus utilizing positrons |
| 09/08/2004 | EP1454657A2 Particle beam therapy system |
| 09/08/2004 | EP1454656A2 Particle beam therapy system |
| 09/08/2004 | EP1454655A2 Particle beam therapy system |
| 09/08/2004 | EP1454654A2 Particle beam therapy system |
| 09/08/2004 | EP1454513A2 X-ray source assembly having enhanced output stability, and fluid stream analysis applications thereof |
| 09/08/2004 | EP1454165A2 System and method for irradiating a sample |
| 09/08/2004 | CN1527358A Electronic beam focusing equipment and electronic beam projection micro shadow system using the same equipment |
| 09/07/2004 | US6787979 Rare-gas low-pressure discharge lamp, method of manufacturing a rare-gas low-pressure discharge lamp, and application of a gas discharge lamp |
| 09/07/2004 | US6787787 Ultraviolet radiation producing apparatus |
| 09/07/2004 | US6787784 Charged-particle beam drawing data creation method, and charged-particle beam drawing apparatus using the same |
| 09/02/2004 | WO2004075269A1 Neutral particle beam lithography |
| 09/02/2004 | WO2004075209A1 A sample enclosure for a scanning electron microscope and methods of use thereof |
| 09/02/2004 | WO2004061995A8 Laser patterning of encapsulated organic light emitting diodes |
| 09/02/2004 | WO2004053892A3 Device and method for producing radioisotopes |
| 09/02/2004 | WO2003098349A3 Illumination system for microlithography |
| 09/02/2004 | US20040169140 Charged particle beam device for inspecting or structuring a specimen |
| 09/01/2004 | CN1525160A Method and device for measuring contamination of a surface of a component of a lithographic apparatus |
| 08/26/2004 | US20040166420 Substrate for the micro-lithography and process of manufacturing thereof |
| 08/26/2004 | US20040165701 Light system |
| 08/26/2004 | US20040165695 Helical interpolation for an asymmetric multi-slice scanner |
| 08/26/2004 | US20040165255 Catoptic projection optical system |
| 08/26/2004 | US20040165161 Cooling mechanism |
| 08/26/2004 | US20040164831 Constant power and temperature coil |
| 08/26/2004 | DE10392145T5 Extremultraviolett-Lichtquellenvorrichtung Extreme ultraviolet light source device |
| 08/26/2004 | DE10306668A1 Anordnung zur Erzeugung von intensiver kurzwelliger Strahlung auf Basis eines Plasmas Arrangement for the generation of intense short-wave radiation based on a plasma |
| 08/25/2004 | EP1450209A1 Catoptric projection optical system |
| 08/25/2004 | EP1450182A2 Substrate for UV-lithography and fabrication process therefor |
| 08/25/2004 | CN1524272A Differential photochemical & photomechamical processing |
| 08/24/2004 | US6781060 Electrical connector, a cable sleeve, and a method for fabricating an electrical connection |
| 08/24/2004 | US6780551 Charged particle processing for forming pattern boundaries at a uniform thickness |
| 08/24/2004 | US6779920 X-ray localizer light system |
| 08/24/2004 | CA2368764C Megavoltage computed tomography during radiotherapy |
| 08/19/2004 | WO2004070421A2 Radiation scanning of cargo conveyances at seaports and the like |
| 08/19/2004 | US20040162457 Antiproton production and delivery for imaging and termination of undersirable cells |
| 08/19/2004 | US20040159802 Arrangement for the generation of intensive short-wave radiation based on a plasma |
| 08/19/2004 | US20040159795 Isokinetic gantry arrangement for the isocentric guidance of a particle beam and a method for constructing same |
| 08/19/2004 | DE202004008982U1 Bestrahlungsgerät für Finger- oder Fußnägel Irradiation device for the fingernails or toenails |
| 08/18/2004 | EP1447717A2 Exposure apparatus, cooling method and device manufacturing method |
| 08/18/2004 | EP1446812A2 Article irradiation system with multiple beam paths |
| 08/18/2004 | EP1446811A1 Process for manufacturing multilayer systems |
| 08/18/2004 | EP1446809A2 Article irradiation system shielding |
| 08/18/2004 | EP1446702A2 Maskless printer using photoelectric conversion of a light beam array |