G21K 5 - Irradiation devices

Patents for G21K 5 - Irradiation devices (9,144)
11/2004
11/18/2004	US20040227103 Collector with fastening devices for fastening mirror shells
11/18/2004	US20040227102 Method and device for measuring contamination of a surface of a component of a lithographic apparatus
11/18/2004	US20040227078 Defect inspection instrument and positron beam apparatus
11/18/2004	US20040227063 Method and device for lateral adjustment of image
11/18/2004	US20040226814 Electron beam processing for mask repair
11/18/2004	DE4012019B4 Drehanode für eine Röntgenröhre Rotating anode X-ray tube
11/17/2004	EP1477206A1 Particle beam irradiation apparatus and treatment planning unit
11/17/2004	EP1476889A1 Large-area individually addressable multi-beam x-ray system
11/17/2004	EP1144983B1 Article irradiation system in which article transporting conveyor is closely encompassed by shielding material
11/16/2004	US6818912 Radiation source, lithographic apparatus, device manufacturing method, and device manufactured thereby
11/16/2004	US6818910 Writing methodology to reduce write time, and system for performing same
11/16/2004	US6818907 Surface plasmon enhanced illumination system
11/11/2004	WO2004097845A2 Improvements in shielded irradiation zone of production line
11/11/2004	WO2004080130A3 Scanning-based detection of ionizing radiation
11/11/2004	US20040224237 photomasks/photoresists; scanning electron microscopy; microelectronics
11/11/2004	US20040223870 Apparatus and process for irradiating product pallets
11/11/2004	US20040223588 X-ray tube window and surrounding enclosure cooling apparatuses
11/11/2004	US20040223531 High efficiency collector for laser plasma EUV source
11/11/2004	US20040222388 Surface processing apparatus
11/11/2004	US20040222387 Compact self-shielded irradiation system and method
11/11/2004	DE19934987B4 Röntgenanode und ihre Verwendung X-ray anode and their use
11/11/2004	DE10317792A1 Maskenrohling zur Verwendung in der EUV-Lithographie und Verfahren zu dessen Herstellung Mask blank for use in the EUV lithography and a process for its preparation
11/11/2004	DE102004009881A1 Mikrowellenbetriebener Leuchtkopf mit einem externen Verschluss Microwave-powered lamp head with an external shutter
11/10/2004	EP1475807A2 High efficiency collector for laser plasma EUV source
11/10/2004	EP1475663A2 Mask blank for use in EUV-lithography and its process of manufacture
11/10/2004	EP1474810A2 Method and device for controlling a beam extraction raster scan irradiation device for heavy ions or protons
11/10/2004	CN1545721A Method and apparatus for improved ion bunching in an ion implantation system
11/10/2004	CN1545720A Slit double gap buncher and method for improved ion bunching in an ion implantation system
11/10/2004	CN1175713C Light source using dielectric barrier discharge lamp, and power supply thereof
11/09/2004	US6815880 Method and apparatus for simultaneously depositing and observing materials on a target
11/09/2004	US6815691 Compact self-shielded irradiation system and method
11/09/2004	US6814488 Oil expansion compensation method for integrated X-ray generator
11/04/2004	WO2004095895A1 Debris collector for euv light generator
11/04/2004	WO2004095473A1 High-speed particle generator
11/04/2004	WO2004038504A3 Nanometer-scale engineered structures, methods and apparatus for fabrication thereof, and applications to mask repair, enhancement, and fabrication
11/04/2004	WO2004036312A3 Irradiation device for testing objects coated with light-sensitive paint
11/04/2004	US20040219728 Extreme ultraviolet light generating device, exposure apparatus using the same and semiconductor manufacturing method
11/04/2004	US20040219437 EUV (extreme ultraviolet lithography) is transmitted onto reflection mask at grazing incident angle to develop a pattern image to a photoresist layer on surface of wafer; shape is dependent on plurality of reflective regions; controlling surface roughness and defects
11/04/2004	US20040218725 Method and device for cooling and electrically insulating a high-voltage, heat-generating component such as an x-ray tube for analyzing fluid streams
11/04/2004	US20040218723 X-ray generator
11/04/2004	US20040217301 System for, and method of, irradiating articles
11/04/2004	US20040217300 Compensating for variations in article speeds and characteristics at different article positions during article irradiation
11/04/2004	CA2523424A1 Devices and methods for determining the amount of energy absorbed during irradiation
11/03/2004	EP1472711A1 X-ray tube envelope with integral corona shield
11/03/2004	EP1472703A1 Beam delivery system
11/03/2004	EP1320854B1 Illumination system particularly for microlithography
11/03/2004	EP1230828B1 Method for obtaining an extreme ultraviolet radiation source and its use in lithography
11/03/2004	EP1152798B1 Method for monitoring the irradiation control unit of an ion-beam therapy system
11/02/2004	US6813574 Determines location of metrology mark and compensates for any horizontal shift
11/02/2004	US6812129 Reticle for creating resist-filled vias in a dual damascene process
10/2004
10/28/2004	US20040214139 Surface modification process on metal dentures, products produced thereby, and the incorporated system thereof
10/28/2004	US20040213381 Irradiation apparatus and irradiation method
10/28/2004	US20040212792 Exposure apparatus and device fabrication method
10/28/2004	US20040212388 High activity, spatially distributed radiation source for accurately simulating semiconductor device radiation environments
10/27/2004	EP1470447A1 Photolithographic critical dimension control using reticle measurements
10/27/2004	CN2651896Y Radiative case turn-over mechanism of nuclear running producing line
10/27/2004	CN1540676A Radiographic exposuring appts. and its method
10/26/2004	US6810107 System and method for measuring beam quality and dosimetry using electronic portal imaging
10/26/2004	US6810104 X-ray mask and method for making
10/26/2004	US6809331 X-ray image reader
10/26/2004	US6809325 Apparatus for generating and selecting ions used in a heavy ion cancer therapy facility
10/21/2004	WO2004090947A2 Ion beam incident angle detector for ion implant systems
10/21/2004	US20040209171 inspected by disposing dummy inspection patterns having the same pattern as at least a part of the mask pattern portion, inside and/or outside an area of the mask pattern portion and comparing the portion of the mask pattern portion with the dummy inspection pattern portion
10/21/2004	US20040208285 Miniature X-ray source and catheter system
10/21/2004	US20040208282 Deployable fast-response apparatus to recover bio-contaminated materials
10/21/2004	US20040208280 X-ray microscopic inspection apparatus
10/21/2004	US20040207308 Method and apparatus for simultaneously depositing and observing materials on a target
10/21/2004	DE10024634B4 Elektronenstrahl-Belichtungsvorrichtung und -verfahren Electron beam exposure apparatus and method
10/20/2004	CN1539254A Star pinch x-ray and extreme ultraviolet photon source
10/20/2004	CN1538238A Mask for EUV photoetching and manufacturing method thereof
10/20/2004	CN1172319C Electron beam projection reaction device
10/19/2004	US6806476 Irradiation facility control system
10/19/2004	US6805807 Adaptive GCIB for smoothing surfaces
10/14/2004	US20040200983 Particle beam irradiation equipment and particle beam irradiation method
10/14/2004	US20040200982 Particle beam therapy system
10/14/2004	US20040200981 Equipment and method for inline infrared and ultraviolet irradiation of recording media
10/13/2004	EP1466347A2 Amalgam-doped mercury low-pressure uv irradiator
10/13/2004	EP1347461A4 Device for x-ray lithography
10/12/2004	US6804548 Irradiation system and its irradiation target movement monitoring method, and irradiation target position recognizing method
10/12/2004	US6803591 Medical particle irradiation apparatus
10/07/2004	WO2004086439A2 Method and apparatus for controlling electron beam current
10/07/2004	WO2004086017A1 X-ray imaging device
10/07/2004	US20040197951 Membrane IC fabrication
10/07/2004	US20040197675 Stencil mask with charge-up prevention and method of manufacturing the same
10/07/2004	US20040195529 Arrangement for the stabilization of the radiation emission of a plasma
10/07/2004	US20040195528 Ion beam incident angle detector for ion implant systems
10/07/2004	US20040195526 Energy beam irradiating apparatus
10/06/2004	EP1464343A1 Apparatus and process for irradiating product pallets
10/06/2004	EP1152797B1 Method of operating an ion beam therapy system with monitoring of beam position
10/06/2004	EP1152794B1 Method for operating an ion beam therapy system by monitoring the distribution of the radiation dose
10/06/2004	EP1076906B1 Lighting system, especially for extreme ultraviolet lithography
10/06/2004	CN1535379A Apparatus and method for transmitting appreciable information
10/06/2004	CN1170149C Radiation source assembly and connector pressing bed for manufacturing the same
10/05/2004	US6800866 Accelerator system and medical accelerator facility
09/2004
09/30/2004	WO2004084262A2 Method and device for lateral adjustment of image
09/30/2004	US20040190677 Lithographic apparatus, device manufacturing method, and device manufactured thereby
09/30/2004	US20040190675 X-ray inspection system and method of operating
09/30/2004	DE4042695B4 Emulsion mask defect repair
09/30/2004	DE10358866A1 Gegossene Kollimatoren für CT Detektoren und Verfahren zu ihre Herstellung Cast collimators for CT detectors and methods for their preparation
09/29/2004	EP1463085A2 X-ray inspection system and method of operating

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