| Patents for G21K 5 - Irradiation devices (9,144) |
|---|
| 08/18/2004 | EP1152796B1 Method for monitoring an emergency switch-off of an ion-beam therapy system |
| 08/18/2004 | EP1152795B1 Method for checking beam steering in an ion beam therapy system |
| 08/18/2004 | EP1082729B1 Fluid-jet deposition of radioactive material for brachytherapy devices |
| 08/18/2004 | CN1522127A Medical x-ray device and power module therefor |
| 08/17/2004 | US6778634 X-ray generating apparatus |
| 08/17/2004 | US6778633 Method and apparatus for prolonging the life of an X-ray target |
| 08/17/2004 | US6777700 Particle beam irradiation system and method of adjusting irradiation apparatus |
| 08/17/2004 | US6777698 Electron beam exposure apparatus exposing method using an electron beam |
| 08/17/2004 | US6777689 Article irradiation system shielding |
| 08/17/2004 | US6777688 Rotational stage for high speed, large area scanning in focused beam systems |
| 08/17/2004 | US6777687 Substrate positioning system |
| 08/17/2004 | US6777140 Lithographic apparatus, device manufacturing methods, devices manufactured thereby, method of manufacturing a reflector, reflector manufactured thereby and phase shift mask |
| 08/12/2004 | WO2004053592A8 Reticle manipulations |
| 08/12/2004 | US20040156477 Radiation scanning of cargo conveyances at seaports and the like |
| 08/12/2004 | US20040156475 Method and apparatus for generating x-ray |
| 08/11/2004 | EP1445993A2 Extreme uv light source and semiconductor exposure device |
| 08/11/2004 | CN1161603C Nondestructive inspection apparatus |
| 08/10/2004 | US6775353 X-ray generating apparatus |
| 08/10/2004 | US6774383 Particle therapy system |
| 08/10/2004 | US6774381 Electron beam system for treating filamentary workpiece, and method of fabricating optical fibers |
| 08/10/2004 | US6774377 Electrostatic parallelizing lens for ion beams |
| 08/10/2004 | US6774362 Analytical method for electron microscopy |
| 08/05/2004 | WO2004066027A2 Electron beam processing for mask repair |
| 08/05/2004 | WO2004064873A2 Static inventor for 360 degree disinfection of workpieces |
| 08/05/2004 | US20040151988 EUV mask blank defect mitigation |
| 08/05/2004 | US20040150068 Membrane 3D IC fabrication |
| 08/05/2004 | US20040149937 Extreme UV light source and semiconductor exposure device |
| 08/05/2004 | US20040149936 Radiation device |
| 08/05/2004 | US20040149934 Partcle beam irradiation system and method of adjusting irradiation apparatus |
| 08/05/2004 | DE10302342A1 Production of substrate used in the production of mask or optical component comprises preparing a base layer, applying a first covering layer on the base layer, and post-treating the covering layer |
| 08/04/2004 | EP1443541A2 Method for the manufacture and transmissive irradiation of a sample, and particle-optical system |
| 08/04/2004 | CN1518139A Light source of light-field uniform and boundary contour clear based on light-emitting diode |
| 08/03/2004 | US6770896 Method for generating extreme ultraviolet radiation based on a radiation-emitting plasma |
| 08/03/2004 | US6770893 Method and apparatus for emission computed tomography using temporal signatures |
| 08/03/2004 | US6770891 Article irradiation system with multiple beam paths |
| 08/03/2004 | US6770278 To treat exercise induced pulmonary hemorrhage in horses |
| 07/29/2004 | WO2004064097A2 Charged particle beam device for inspecting or structuring a specimen |
| 07/29/2004 | WO2004012207A3 Optical device for high energy radiation |
| 07/29/2004 | WO2004011258A3 Method of forming and repairing a lithographic template having a gap defect |
| 07/29/2004 | WO2004010224A3 Projection objective for a projection exposure apparatus |
| 07/29/2004 | US20040147831 Apparatus and method for transmitting appreciable information |
| 07/29/2004 | US20040146139 X-ray mask and method for making |
| 07/29/2004 | US20040144931 Cooling of a device for influencing an electron beam |
| 07/29/2004 | US20040144924 Method for the manufacture and transmissive irradiation of a sample, and particle-optical system |
| 07/29/2004 | DE4018135B4 Verfahren und Vorrichtung zur Reparatur von Fehlern in Emulsionsmasken Method and apparatus for repairing errors in emulsion masks |
| 07/29/2004 | DE10346791A1 Strahlgekühltes Röntgenröhrenfenster Chilled beam x-ray tube window |
| 07/28/2004 | EP1441381A2 Cooling of a device for influencing an electron beam |
| 07/28/2004 | EP1440566A2 3d stereoscopic x-ray system with two different object trajectories |
| 07/22/2004 | WO2004061995A1 Laser patterning of encapsulated organic light emitting diodes |
| 07/22/2004 | WO2004061865A1 Target for generating deuteron and target apparatus for generating deuteron comprising the same |
| 07/22/2004 | WO2003096383A3 Cavity shapes for plasma-assisted processing |
| 07/22/2004 | US20040141588 Exposure control in scanning-based detection of ionizing radiation |
| 07/22/2004 | US20040141165 Radiation source, lithographic apparatus, and device manufacturing method |
| 07/22/2004 | US20040140440 Illumination system, particularly for EUV lithography |
| 07/22/2004 | US20040140438 Angular aperture shaped beam system and method |
| 07/22/2004 | US20040139916 Applying the particles to be separated on a substrate supported membrane, such that the particles are mobile across the surface of the substrate supported membrane; providing an electrical field; temporarily modifying the electrical field and/or adding a substrate supported membrane |
| 07/22/2004 | DE10341538A1 Laser-plasma X-ray source, for producing radiation in veins and arteries, has small housing containing plasma forming target and laser control optics |
| 07/22/2004 | DE102004001185A1 Verfahren zur Einstellung der Strahlungsemissionsrate einer Strahlungsquelle A method of adjusting the radiation emission rate of a radiation source |
| 07/22/2004 | DE102004001183A1 Light emitting diode light device for x-ray collimator, has LED generating light beam and diaphragm concentrating light beam, where diaphragm is in shape of compound parabolic contractor and is placed over LED |
| 07/21/2004 | EP1439564A1 Charged particle beam device for inspecting or structuring a specimen |
| 07/21/2004 | EP1438725A1 Optical element and method for its manufacture as well as lightography apparatus and method for manufacturing a semiconductor device |
| 07/21/2004 | EP1438637A2 Lithographic apparatus and device manufacturing method |
| 07/21/2004 | CN1514305A Manufacturing method of photoctching equipment having residue inhibiting device and device |
| 07/21/2004 | CN1158673C Method of reducing electromagnetic radiation background of electron beam irradiation unit |
| 07/20/2004 | US6765279 Membrane 3D IC fabrication |
| 07/15/2004 | WO2003096382A3 Methods and apparatus for plasma processing control |
| 07/15/2004 | US20040136495 Radiation therapy device |
| 07/15/2004 | US20040136102 Apparatus for generating parallel beam with high flux |
| 07/15/2004 | US20040135985 Lithographic projection apparatus with multiple suppression meshes |
| 07/15/2004 | US20040135517 Radiation source for generating extreme ultraviolet radiation |
| 07/15/2004 | US20040134986 X-ray system comprising an x-ray source, a detector assembly, and an aperture |
| 07/15/2004 | DE10261099A1 Ionenstrahlanlge Ionenstrahlanlge |
| 07/14/2004 | CN1512545A Templet mask for charging-proof and its producing method |
| 07/14/2004 | CN1512517A Scatter screen type electronic beam radiator |
| 07/14/2004 | CN1512516A Built-in ionic pump type scanner |
| 07/08/2004 | WO2004030424A3 Particle accelerator having wide energy control range |
| 07/08/2004 | WO2003096381A3 Plasma-assisted processing in a manufacturing line |
| 07/08/2004 | WO2003096380A3 Plasma-assisted nitrogen surface-treatment |
| 07/08/2004 | US20040132303 Membrane 3D IC fabrication |
| 07/08/2004 | US20040131157 LED based light source with uniform light field & well defined edges |
| 07/08/2004 | US20040131148 Apparatus for measurement of the thickness of thin layers |
| 07/08/2004 | US20040131140 Method for computed tomography of a periodically moving object to be examined, and a CT unit for carrying out this method |
| 07/08/2004 | US20040130809 Focusing-device for the radiation from a light source |
| 07/08/2004 | US20040130693 Lithographic apparatus, optical element and device manufacturing method |
| 07/08/2004 | DE10259696A1 Vorrichtung zum Messen der Dicke dünner Schichten Apparatus for measuring the thickness of thin layers |
| 07/07/2004 | EP1434605A1 Process and apparatus for irradiating product pallets |
| 07/07/2004 | CN1511324A Radiation device |
| 07/07/2004 | CN1510523A Impurity shielding with extendable slice |
| 07/07/2004 | CN1510515A Photoetching device and method for manufacturing the apparatus |
| 07/07/2004 | CN1156857C Manufacture of radiative element by fluid jet printing head, and apparatus and products thereof |
| 07/06/2004 | US6760400 Exposing method and semiconductor device fabricated by the exposing method |
| 07/06/2004 | US6759665 Method and system for ion beam containment in an ion beam guide |
| 07/01/2004 | US20040126670 High performance EUV mask |
| 07/01/2004 | US20040125919 X-ray tube with graphite window |
| 07/01/2004 | US20040125911 Reflection type mask |
| 07/01/2004 | US20040124372 System and method for maskless lithography using an array of sources and an array of focusing elements |
| 07/01/2004 | US20040124371 Ion beam irradiation device |
| 06/30/2004 | EP1434240A1 Illumination system, particularly for deep ultraviolet lithography |
| 06/30/2004 | CN1508513A Apparatus for measuring thickness of thin layer |
| 06/29/2004 | US6757356 Electric discharge detection circuit |