Patents
Patents for G03F 7 - Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printed surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor (127,176)
06/1986
06/03/1986US4592650 Apparatus for projecting a pattern on a semiconductor substrate
06/03/1986US4592625 Double-conjugate maintaining optical system
05/1986
05/28/1986EP0182745A2 Polyimides, process for their fabrication, and their use
05/28/1986EP0182744A2 Radiation curable filled epoxy resin compositions and their use
05/28/1986EP0182665A2 Method of projecting a photoelectron image
05/28/1986EP0182587A2 A photo resist and a process for manufacturing an integrated circuit
05/28/1986EP0182585A2 Optical disc base plate
05/28/1986EP0182443A2 X-ray lithographic system, in particular gas control for the same, and method for fabricating a semiconductor substrate
05/28/1986EP0182332A2 Method of processing integrated circuits by photolithography
05/28/1986EP0182195A2 Process and apparatus for the production of printing screens
05/28/1986EP0182031A2 Process for preparing multicolour images
05/28/1986EP0181968A1 Process for the production of photographic relief images by tanning development and wash-off processing of silver halide emulsion materials
05/27/1986US4592081 Adaptive X-ray lithography mask
05/27/1986US4591608 Ultraviolet-curable organopolysiloxane composition
05/27/1986US4591547 Plasma etching, semiconductors
05/27/1986US4591546 Spin castable resist composition and use
05/27/1986US4591545 Photosensitive image-forming material having a layer of photosensitive polyester modified with chain extender
05/27/1986US4591540 Superimposing in predetermined alignment
05/27/1986US4591522 Liquid photopolymers curable to fire-retardant, hydrolysis resistant compositions
05/27/1986US4591406 Automatic laminator with integrated printer buffer/interface
05/27/1986US4591265 System for contact printing with liquid photopolymers
05/27/1986US4591169 Seal arrangement for retaining a liquid level above a strip passing through a chamber
05/22/1986WO1986003033A1 Fabrication of microminiature devices
05/21/1986EP0181837A2 Process for the manufacture of films and relief pictures from polyimides
05/21/1986EP0181343A1 Method of applying a protective layer on a surface to be subjected to etching.
05/20/1986US4590287 Photoinitiators
05/20/1986US4590149 Irradiation, heating negative photoresist containing polymer and aromatic azide
05/20/1986US4590148 Process for producing light sensitive lithographic plate requiring no dampening solution
05/20/1986US4590147 Dry film resists containing unsaturated oligomer
05/20/1986US4590146 Stabilization of photopolymerizable mixtures
05/20/1986US4590145 Photopolymerization initiator comprised of thioxanthones and oxime esters
05/20/1986US4590144 Polyurethane binder having acryloyl groups
05/20/1986US4590138 Positive-working photoresist composition and method for forming a light-absorbing matrix in a color CRT structure
05/20/1986US4590094 Inverted apply using bubble dispense
05/20/1986US4589952 Three level mask
05/20/1986US4589769 Exposure apparatus
05/20/1986CA1204882A1 Submicron circuit structures and methods of formation
05/20/1986CA1204793A1 Transport system for an automatic repetitive registration and imagewise exposure apparatus
05/14/1986EP0181194A2 X-ray generating system
05/14/1986EP0181193A2 X-ray irradiation system
05/13/1986US4588801 Polysilane positive photoresist materials and methods for their use
05/13/1986US4588676 Photoexposing a photoresist-coated sheet in a vacuum printing frame
05/13/1986US4588675 Vapor deposition of metal film onto substrate, impregnation with polymerizable material, and polymerization
05/13/1986US4588671 Quione diazide, iodine
05/13/1986US4588670 Light-sensitive trisester of O-quinone diazide containing composition for the preparation of a positive-acting photoresist
05/13/1986US4588669 Photosensitive lithographic plate with diazo resin underlayer and polyvinyl acetal resin with azide in side chain overlayer
05/13/1986US4588664 Photopolymerizable compositions used in holograms
05/13/1986US4588379 Configuration for temperature treatment of substrates, in particular semi-conductor crystal wafers
05/13/1986US4588277 Waterless lithographic plate processor
05/10/1986CN85107827A Method and apparatus for controlling continuously operation of automatic photo-composer
05/09/1986WO1986002744A1 Method of producing devices using nonplanar lithography
05/09/1986WO1986002743A1 Photosensitive polymers, preparation thereof and film-forming compositions containing them for photoengraving
05/07/1986EP0180466A2 Photopolymerizable composition for use as an etching-resist ink
05/07/1986EP0180122A2 Developer for exposed negatively operating registration layers, process for producing printing plates and use of the developer
05/07/1986EP0180078A2 Apparatus and method for applying coating material
05/07/1986EP0179921A1 Base material having a dyed surface film and dyeing method
05/07/1986EP0179823A1 Process for the sensitization of an oxidoreduction photocalatyst, and photocatalyst thus obtained.
05/06/1986US4587346 Alkylation with alkene and acid catalyst
05/06/1986US4587205 Method of using polysilane positive photoresist materials
05/06/1986US4587204 Photopatternable dielectric compositions, method for making and use
05/06/1986US4587203 Wet process for developing styrene polymer resists for submicron lithography
05/06/1986US4587202 Photoresist-coated metal sheet
05/06/1986US4587201 Photo-curable urethane-acrylate resin composition for permanent resist
05/06/1986US4587200 Photopolymerizable composition comprising an acridine and a heterocyclic thiol compound as a photopolymerization initiator and a photographic process using said photopolymerizable composition
05/06/1986US4587199 Flexible support, removable cover sheet; printed circuits
05/06/1986US4587198 Vaporization of color layer under an exposed and developed photoresist to deposit on receptor
05/06/1986US4587197 Flexible photosensitive polymer composition with azide and/or amine compound, poly(amic acid) and highly polar compound with boiling point above 150° C.
05/06/1986US4587196 Positive photoresist with cresol-formaldehyde novolak resin and photosensitive naphthoquinone diazide
05/06/1986US4587194 Multicolor
05/06/1986US4587186 Mask element for selective sandblasting and a method
05/06/1986US4587165 Films of a copolymer of an ester derived from a fluorine-containing alcohol
05/06/1986US4586996 Surface hardner for nylon lens
05/06/1986US4586980 Thin films, lift-off, multilayer
05/06/1986US4586799 Exposure apparatus
05/06/1986CA1204016A1 Actinic light polymerizable coating compositions and method of using the same
04/1986
04/30/1986EP0179508A2 System for contact printing with liquid photopolymers
04/30/1986EP0179448A2 Photosensitive planographic printing plate
04/30/1986EP0179274A2 Process for the preparation of multicolour images
04/30/1986EP0179146A1 Focal plane adjusted photomask and methods of projecting images onto photosensitized workpiece surfaces.
04/29/1986US4585876 Novel xanthones and thioxanthones
04/29/1986US4585727 Fixed point method and apparatus for probing semiconductor devices
04/29/1986US4585726 Photopolymerizable water-soluble or water-dispersible mixture containing a salt of nitrous acid
04/29/1986US4585342 System for real-time monitoring the characteristics, variations and alignment errors of lithography structures
04/29/1986CA1203769A1 Treating character fonts of print wheel with monomer and irradiating
04/23/1986EP0178660A2 X-ray exposure apparatus
04/23/1986EP0178654A2 Method of manufacturing a semiconductor device comprising a method of patterning an organic material
04/23/1986EP0178606A2 Molecular controlled structure and method of manufacturing the same
04/23/1986EP0178594A2 Process for the preparation of negative copies with a quinodiazide material
04/23/1986EP0178496A2 High contrast photoresist developer
04/23/1986EP0178495A2 Method of high contrast positive photoresist developing
04/22/1986US4584261 Chemically soluble coloidal silver pigment;dotetched lithographic film
04/22/1986US4584260 Photopolymerizable compositions with combined photoinitiators
04/22/1986US4583840 Exposure apparatus
04/22/1986US4583838 Printing apparatus
04/22/1986CA1203644A1 Automatically adjustable chip design method
04/22/1986CA1203541A1 Nonlinear optical materials and processes employing diacetylenes
04/22/1986CA1203442A1 Surface treating agent
04/16/1986EP0178208A1 Photosensitive film of a silicon-containing polymer and its use as a mask in photolithographic processes
04/16/1986EP0178181A2 Methods for producing an aperture in a surface
04/16/1986EP0178156A2 Method of drawing a desired pattern on a target through exposure thereof with an electron beam