| Patents for G03F 1 - Originals for photomechanical production of textured or patterned surfaces, e.g. masks, photo-masks or reticles; Mask blanks or pellicles therefor; Containers specially adapted therefor; Preparation thereof (24,849) |
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| 06/12/1984 | US4453828 Apparatus and methods for measuring the optical thickness and index of refraction of thin, optical membranes |
| 06/05/1984 | US4453086 Electron beam system with reduced charge buildup |
| 06/05/1984 | US4452665 Polymeric halocarbons as plasma etch barriers |
| 05/29/1984 | US4451552 Impervious thin film covering the image surface; antisticking agents |
| 05/29/1984 | US4451544 Mask structure for X-ray lithography and method for manufacturing the same |
| 05/16/1984 | EP0108160A1 Method to adjust and monitor a light spot |
| 05/15/1984 | US4448873 Negative working diazo contact film |
| 05/15/1984 | US4448865 Shadow projection mask for ion implantation and ion beam lithography |
| 05/15/1984 | US4448532 Automatic photomask inspection method and system |
| 05/08/1984 | US4447830 Image scanning apparatus and method |
| 05/02/1984 | EP0107331A2 Photomask |
| 05/01/1984 | US4446184 Flexible non-extensible hinge for photomask assembly |
| 05/01/1984 | CA1166507A1 Photoresist developer including an alkali metal hydroxide and a chelating agent for aluminium ion |
| 04/24/1984 | US4444853 Storage battery construction |
| 04/24/1984 | US4444801 Metallization |
| 04/24/1984 | CA1166057A1 Method of forming photoresist patterns |
| 04/18/1984 | EP0105661A1 Apparatus for inspecting a circuit pattern drawn on a photomask used in manufacturing large scale integrated circuits |
| 04/17/1984 | US4443096 On machine reticle inspection device |
| 04/10/1984 | US4442188 System for specifying critical dimensions, sequence numbers and revision levels on integrated circuit photomasks |
| 04/10/1984 | US4441791 Deformable mirror light modulator |
| 04/04/1984 | EP0104685A2 Method of manufacturing a mask for obtaining texturised patterns in resist layers using X-ray lithography |
| 04/04/1984 | EP0104684A2 Mask for obtaining textured patterns in resist layers using X-ray lithography and method of manufacturing the same |
| 04/04/1984 | EP0104633A2 Method and apparatus for cleaning work pieces, in particular circuit boards |
| 04/03/1984 | US4441020 Method for tracing an object |
| 04/03/1984 | US4440841 Chemical resistance |
| 04/03/1984 | US4440491 Photographic transparency supporting device |
| 04/03/1984 | CA1164707A1 Dye imbibition imaging material including cationic mordant layer and photosensitive polyesterionomer layer |
| 03/28/1984 | EP0103844A2 X-ray mask |
| 03/28/1984 | EP0103671A2 Method and apparatus for forming a subsequent metallization pattern on a ceramic substrate |
| 03/27/1984 | US4439022 Arrangement for the point- and line-wise recording of image information |
| 03/21/1984 | EP0103280A2 Fabrication method of membrane structure |
| 03/13/1984 | US4436797 Foil of amorphous, hydrogenated carbon |
| 03/07/1984 | EP0101752A1 Reversal process for the production of chromium masks |
| 03/06/1984 | US4435491 Electroconductive support with hydrophilic surface with light sensitive layer and photoconductive insulation |
| 03/06/1984 | US4435489 Cationic hydrazone derivatives, processes for their preparation and their use |
| 02/28/1984 | US4434223 Photopolymerizable, printing plates |
| 02/28/1984 | US4434217 Chalcogenide product |
| 02/28/1984 | US4433911 Method of evaluating measure precision of patterns and photomask therefor |
| 02/21/1984 | US4433130 Cycloalkylsulfonates, polymers and processes relating to same |
| 02/21/1984 | CA1162591A1 Apparatus for point to point and line by line recording of image information |
| 02/14/1984 | US4431695 High resolution recording medium |
| 01/31/1984 | US4429027 In situ photomasking |
| 01/24/1984 | US4427758 Sodium bisulfite-aldehyde adduct gelatin hardener |
| 01/18/1984 | EP0098318A1 Process for the formation of grooves having essentially vertical lateral silicium walls by reactive ion etching |
| 01/17/1984 | US4426437 Imageable material with radiation absorbing microstructured layers overcoated with photoresist layer |
| 01/17/1984 | US4426152 Method and machine for positioning films on base sheets |
| 01/11/1984 | EP0097831A2 Optical projection systems and methods of producing optical images |
| 01/11/1984 | EP0097764A1 X-ray lithographic mask |
| 01/11/1984 | EP0097724A1 Scanning method and arrangement |
| 01/03/1984 | US4423959 Positioning apparatus |
| 12/27/1983 | US4422898 Iron pentacarbonyl decomposition, patterns, etching |
| 12/21/1983 | EP0096564A2 Forms manufacturing system |
| 12/21/1983 | EP0096224A1 Positioning method for mask set used in IC fabrication |
| 12/20/1983 | US4422153 Oblique projection original and oblique projection original forming apparatus and method |
| 12/20/1983 | US4421836 Method for repairing silver image glass photomasks with Ni |
| 12/20/1983 | US4421593 Reverse etching of chromium |
| 12/06/1983 | US4419675 Imaging system and method for printed circuit artwork and the like |
| 12/06/1983 | US4419438 Photochromic compound, free radicals, unsaturated monomer, actinic radiation absorber |
| 11/30/1983 | EP0095094A2 Photomask with corrected white defects |
| 11/30/1983 | EP0095058A2 Device for positioning and registering print control bars on a lay-out film |
| 11/29/1983 | US4417946 Method of making mask for structuring surface areas |
| 11/29/1983 | CA1157700A1 Production of reverse reading positive images of a straight reading original |
| 11/15/1983 | US4415262 Photomask |
| 11/08/1983 | US4414317 Transparency, a method for forming it and a photographic mask whose optical densities are correlated with the contour of a surface |
| 11/08/1983 | CA1156505A1 Method of directly manufacturing reticles on chrome-coated plates by means of a pattern generator |
| 11/01/1983 | US4412739 Hinged glass photomask assembly |
| 10/25/1983 | US4411972 Tin or tin-indium dopes, transparent, dielectrics, electroconductivity, patterns, opacity |
| 10/18/1983 | US4411013 System for transferring a fine pattern onto a target |
| 10/18/1983 | US4410611 Ion bombardment, carbonization, integrated circuits |
| 10/12/1983 | EP0090924A2 Method of increasing the image resolution of a transmitting mask and improved masks for performing the method |
| 10/11/1983 | US4409686 Method of serialization of dice |
| 10/11/1983 | US4409305 Development |
| 10/05/1983 | EP0090673A2 Image-forming elements |
| 10/04/1983 | US4407891 Low temperature reduction process for large photomasks |
| 09/27/1983 | CA1154290A1 Method for producing a photomechanical color image using a strippable photostencil and water-permeable, water-insoluble color media |
| 09/20/1983 | US4405701 Methods of fabricating a photomask |
| 09/06/1983 | US4403043 Glass for photoetching mask |
| 09/06/1983 | US4402600 Photomask for producing semiconductor devices |
| 09/06/1983 | CA1153227A1 Method and apparatus for making grating |
| 08/31/1983 | EP0087309A1 Protected vapor-deposited metal layers |
| 08/30/1983 | US4401750 Coating substrate with photoresists, projecting light, and etching |
| 08/30/1983 | US4401738 X-Ray lithography mask |
| 08/09/1983 | US4397543 Mask for imaging a pattern of a photoresist layer, method of making said mask, and use thereof in a photolithographic process |
| 08/09/1983 | US4397078 Method and apparatus for measuring a gap distance between a mask and a wafer to be used in fabrication of semiconductor integrated circuits |
| 08/02/1983 | US4396683 Metal coated with metal oxide |
| 07/19/1983 | US4393593 Register-pin-locating device |
| 07/13/1983 | EP0083408A2 Methods and apparatus for testing lithographic masks using electron beam scanning |
| 07/13/1983 | EP0020455B1 Arrangement with radiation window or mask structure |
| 07/12/1983 | US4393127 Structure with a silicon body having through openings |
| 07/06/1983 | EP0082977A1 Integrated circuit photomask |
| 07/05/1983 | US4391916 Alkali-free glass for photoetching mask |
| 07/05/1983 | US4391899 Method of making a half-tone gravure printing plate |
| 07/05/1983 | US4391683 Mask structures for photoetching procedures |
| 07/05/1983 | US4391034 Thermally compensated shadow mask |
| 06/29/1983 | EP0082588A2 Photolithographic elements for the production of metal images |
| 06/29/1983 | EP0082479A1 Laser pattern generating system |
| 06/28/1983 | US4390592 Low temperature reduction process for photomasks |
| 06/28/1983 | US4390273 Projection mask as well as a method and apparatus for the embedding thereof and projection printing system |
| 06/28/1983 | CA1149080A1 System and method for producing artwork for printed circuit boards |
| 06/22/1983 | EP0081925A1 Cycloalkylsulfonates, cycloalkylsulfonate-containing polymers and processes for preparing them |