| Patents for C30B 31 - Diffusion or doping processes for single crystals or homogeneous polycrystalline material with defined structure; Apparatus therefor (2,201) |
|---|
| 10/06/1998 | US5817179 GaAs anneal boat design and method for use |
| 09/30/1998 | EP0867538A1 Heating apparatus |
| 09/29/1998 | US5813851 Heat treatment method |
| 09/24/1998 | WO1998041806A1 Method for cooling a furnace, and furnace provided with a cooling device |
| 09/22/1998 | US5811916 Field emission devices employing enhanced diamond field emitters |
| 09/11/1998 | WO1998039610A1 Semiconductor processing furnace heating subassembly |
| 09/11/1998 | WO1998039609A1 Semiconductor processing furnace |
| 09/08/1998 | US5804042 Reduces or eliminates secondary plasma around backplane |
| 09/02/1998 | CN1192265A Passive gas substrate thermal conditioning apparatus and method |
| 08/27/1998 | WO1998037258A1 A rapid thermal processing barrel reactor for processing substrates |
| 08/18/1998 | US5796079 Rapid thermal processing method for ferroelectric, high dielectric, electrostrictive, semiconductive, or conductive ceramic thin film using microwaves |
| 08/11/1998 | US5792701 Used for mixing gases in the deposition/oxidations processes in furnaces to achieve uniform film growth and thickness |
| 08/11/1998 | US5792256 Method for producing N-type semiconducting diamond |
| 08/11/1998 | US5791895 Apparatus for thermal treatment of thin film wafer |
| 08/05/1998 | EP0856880A2 A method for the heat treatment of group II-VI semiconductors |
| 08/04/1998 | US5790751 Rapid thermal heating apparatus including a plurality of light pipes and a pyrometer for measuring substrate temperature |
| 08/04/1998 | US5790750 Profiled substrate heating utilizing a support temperature and a substrate temperature |
| 08/04/1998 | US5789308 Manufacturing method for wafer slice starting material to optimize extrinsic gettering during semiconductor fabrication |
| 07/30/1998 | WO1998032893A2 Wafer support system |
| 07/28/1998 | US5786605 Semiconductor device produced by a single furnace cycle diffusion and oxidation process |
| 07/23/1998 | CA2227686A1 A method for the heat treatment of ii-vi semiconductors |
| 07/16/1998 | WO1998030854A1 Thermal processing apparatus and process |
| 07/14/1998 | US5781693 Gas introduction showerhead for an RTP chamber with upper and lower transparent plates and gas flow therebetween |
| 07/14/1998 | US5778968 For stabilizing the temperature of semiconductor wafers |
| 07/07/1998 | US5776391 Silicon carbide carrier for wafer processing and method for making same |
| 07/07/1998 | US5775889 Heat treatment process for preventing slips in semiconductor wafers |
| 07/07/1998 | US5775416 Temperature controlled chuck for vacuum processing |
| 07/01/1998 | EP0851465A1 Method of separation of at least two elements joined by ion implantation |
| 07/01/1998 | CN1186128A Dual vertical thermal processing furance |
| 06/18/1998 | DE19652471A1 Damage-free compound semiconductor passivation |
| 06/17/1998 | EP0848575A1 Heating device, assembly and method |
| 06/17/1998 | EP0848223A1 Vertical heat treatment device |
| 06/16/1998 | US5767486 Rapid thermal heating apparatus including a plurality of radiant energy sources and a source of processing gas |
| 06/09/1998 | US5762713 RTP lamp design for oxidation and annealing |
| 06/02/1998 | US5759909 Method for manufacturing a silicon wafer by using a dopant foil |
| 05/26/1998 | US5756964 Thermal processing apparatus |
| 05/19/1998 | US5753046 Vertical diffusion furnace and cap therefor |
| 05/19/1998 | US5752819 Exhaust system for high temperature furnace |
| 05/13/1998 | EP0840811A2 System and method for thermal processing of a semiconductor substrate |
| 05/12/1998 | US5749723 Heat treatment apparatus |
| 05/07/1998 | WO1998019334A1 Heat treatment apparatus |
| 04/28/1998 | US5744195 Growing diamond islands emitting electrons at a specified current density on a substrate |
| 04/28/1998 | US5743643 Rapid thermal heating apparatus and method |
| 04/09/1998 | WO1998014645A1 A METHOD FOR PRODUCING A REGION DOPED WITH BORON IN A SiC-LAYER |
| 04/01/1998 | EP0832407A1 Passive gas substrate thermal conditioning apparatus and method |
| 03/12/1998 | WO1998010463A1 Germanes and doping with germanes |
| 03/04/1998 | EP0826800A1 A method for the heat-treatment of ZnSe crystal |
| 03/04/1998 | EP0826799A2 Thermal shock resistant sapphire for ir windows and domes, and method of making same |
| 02/17/1998 | US5718574 Heat treatment apparatus |
| 02/04/1998 | EP0822274A2 Method for manufacturing epitaxial wafer |
| 02/03/1998 | US5714395 Doping surface of wafer, creating cleavage layer, heat treating to cause separation of surface layer |
| 01/28/1998 | EP0821085A1 Apparatus for introducing gas into a rapid thermal processing chamber |
| 01/28/1998 | EP0821084A1 Multi-zone gas flow control in a process chamber |
| 01/28/1998 | EP0820637A1 A METHOD FOR INTRODUCTION OF AN IMPURITY DOPANT IN SiC, A SEMICONDUCTOR DEVICE FORMED BY THE METHOD AND A USE OF A HIGHLY DOPED AMORPHOUS LAYER AS A SOURCE FOR DOPANT DIFFUSION INTO SiC |
| 01/20/1998 | US5710407 Rapid thermal processing apparatus for processing semiconductor wafers |
| 01/20/1998 | US5709543 Vertical heat treatment apparatus |
| 01/14/1998 | EP0818807A2 Dual vertical thermal processing furnace |
| 01/13/1998 | US5708755 Rapid thermal heating apparatus and method |
| 12/30/1997 | US5702654 Method of making thermal shock resistant sapphire for IR windows and domes |
| 12/23/1997 | US5700992 Zigzag heating device with downward directed connecting portions |
| 12/11/1997 | WO1997046842A1 Vertical heat treatment device |
| 12/10/1997 | EP0811709A2 Method and apparatus for enhancing the efficiency of radiant energy sources used in rapid thermal processing of substrates by energy reflection |
| 12/10/1997 | EP0645072A4 High performance horizontal diffusion furnace system. |
| 12/09/1997 | US5695567 Susceptor for a device for epitaxially growing objects and such a device |
| 11/18/1997 | US5689614 Rapid thermal heating apparatus and control therefor |
| 11/18/1997 | US5688116 Heat treatment process |
| 11/06/1997 | DE19712556A1 Semiconductor wafer heat treatment appliance |
| 11/04/1997 | US5683518 Rapid thermal processing apparatus for processing semiconductor wafers |
| 11/04/1997 | US5683173 Cooling chamber for a rapid thermal heating apparatus |
| 10/23/1997 | WO1997039477A1 P-type silicon carbide formation by ion implantation and p-type silicon carbide |
| 10/21/1997 | US5680502 Thin film heat treatment apparatus with conductively heated table and surrounding radiation shield |
| 10/21/1997 | US5679405 Method for preventing substrate backside deposition during a chemical vapor deposition operation |
| 10/21/1997 | US5678989 Heat treatment method using a vertical processing tube |
| 10/14/1997 | US5676869 Vertical heat treatment apparatus |
| 10/08/1997 | CN1036101C Open tube aluminum-gallium diffusion process |
| 10/01/1997 | CN1160929A Compound semicondudctor N-doping method, and electronic and optical devices produced using the same method |
| 09/23/1997 | US5671323 Zigzag heating device with downward directed connecting portions |
| 09/23/1997 | US5669768 Apparatus for adjusting a gas injector of furnace |
| 09/18/1997 | WO1997034318A1 Heat-treating method and radiant heating device |
| 09/18/1997 | WO1997034022A1 Process for preparing endohedral fullerenes or fullerene derivatives |
| 09/17/1997 | CN1159490A Compound semi-conductors and controlled doping thereof |
| 09/03/1997 | EP0792956A2 Radiant heating apparatus and method |
| 09/02/1997 | US5662469 Method of thermal processing |
| 08/28/1997 | WO1997031133A1 A susceptor for a device for epitaxially growing objects and such a device |
| 08/20/1997 | EP0597053B1 Device for heat-treating a magazine for lead frames with electronic components |
| 08/12/1997 | US5656541 Low temperature P2 O5 oxide diffusion source |
| 08/05/1997 | US5654230 Heating substrates in process tube, introducing doping and film forming gases, decomposing gases |
| 08/05/1997 | US5653802 Method for forming crystal |
| 08/05/1997 | US5653800 Method for producing N-type semiconducting diamond |
| 07/29/1997 | US5651827 Single-wafer heat-treatment apparatus and method of manufacturing reactor vessel used for same |
| 07/29/1997 | US5651670 Heat treatment method and apparatus thereof |
| 07/23/1997 | EP0603391B1 Vertical heat treatment apparatus and heat insulating material |
| 07/22/1997 | US5650082 Profiled substrate heating |
| 07/15/1997 | US5648114 Chemical vapor deposition process for fabricating layered superlattice materials |
| 07/09/1997 | CN1153834A Boat for loading wafers in vertical diffusion furnace |
| 07/08/1997 | US5645417 Dimpled thermal processing furnace tube |
| 06/25/1997 | CN1152626A Equipment for making semiconductor device using vacuum system |
| 06/10/1997 | US5637950 Field emission devices employing enhanced diamond field emitters |
| 06/03/1997 | US5636320 Sealed chamber with heating lamps provided within transparent tubes |
| 06/03/1997 | US5635422 Diffusing dopants into a semiconductor wafer |