| Patents for C30B 31 - Diffusion or doping processes for single crystals or homogeneous polycrystalline material with defined structure; Apparatus therefor (2,201) |
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| 07/29/1992 | CN1063128A Method of treating metals by deposition of materials and furnace for implementing said method |
| 07/28/1992 | US5133284 Gas-based backside protection during substrate processing |
| 07/21/1992 | US5131842 Corrosion resistant thermal treating apparatus |
| 07/07/1992 | US5128954 Impregnation of a solid from the gas phase |
| 07/01/1992 | EP0492632A1 Process chamber purge module for semiconductor processing equipment |
| 06/30/1992 | US5126281 Diffusion using a solid state source |
| 06/17/1992 | EP0490692A1 Impregnation of a solid from the gas phase |
| 06/17/1992 | EP0490691A1 Gas doping of solids by crystal growth |
| 06/17/1992 | DE4039828A1 Device for holding a semiconductor substrate base - is formed as three or multi point arrangement from a multi jaw chuck with adjustable clamping jaws etc. |
| 06/10/1992 | EP0489659A1 Process for treatment of metals by deposition of material and furnace for carrying out the process |
| 06/07/1992 | CA2056910A1 Process for treatment of metals by material deposition and furnace using said process |
| 06/02/1992 | US5118286 Closed loop method and apparatus for preventing exhausted reactant gas from mixing with ambient air and enhancing repeatability of reaction gas results on wafers |
| 05/27/1992 | EP0486938A1 Heat treating apparatuses for semiconductors and high purity silicon carbide parts for the apparatuses and a method of making thereof |
| 05/19/1992 | US5115118 Heat-treatment furnace |
| 05/13/1992 | EP0485122A1 Cerium pentaphosphate planar diffusion source for doping at low temperatures |
| 04/28/1992 | US5109264 Semiconductor wafers having a shape suitable for thermal treatment |
| 04/22/1992 | EP0480931A1 Device on an oxidation or diffusion oven |
| 04/21/1992 | CA1299069C Method of making an article comprising a buried sio _layer, and article produced thereby |
| 03/25/1992 | EP0476774A1 Chamber with a warm and a cold area and at least one gas inlet tube |
| 03/24/1992 | US5097890 Heat treating apparatus with cooling fluid nozzles |
| 03/19/1992 | WO1991009996A3 Transport system, in particular for transporting silicon monocrystals through the tank of a research reactor |
| 03/18/1992 | EP0475051A2 Diffusion in semiconductor materials using a solid state source |
| 03/18/1992 | EP0474740A1 Reaction chamber with controlled radiant energy heating and distributed reactant flow |
| 03/03/1992 | US5093557 Substrate heater and heating element |
| 02/19/1992 | EP0471365A1 Semiconductor wafer processing apparatus |
| 02/18/1992 | US5088922 Heat-treatment apparatus having exhaust system |
| 01/28/1992 | US5084909 Method of processing gemstones to enhance their color |
| 01/28/1992 | US5084206 Metal titanium phosphates and arsenates |
| 01/22/1992 | EP0467624A1 Apparatus for and method of backside protection during substrate processing |
| 12/25/1991 | CN1057364A Open tube aluminium-gallium diffusion process |
| 12/17/1991 | CA1293315C Solid-state image pick-up device with uniform distribution of dopant therein and production method therefor |
| 12/12/1991 | CA2042267A1 Single-crystal diamond of very high thermal conductivity |
| 12/03/1991 | US5069591 Semiconductor wafer-processing apparatus |
| 11/26/1991 | US5067218 Vacuum wafer transport and processing system and method using a plurality of wafer transport arms |
| 11/13/1991 | EP0456426A1 Vacuum type wafer holder |
| 11/12/1991 | US5064367 Conical gas inlet for thermal processing furnace |
| 11/06/1991 | EP0455284A1 Method for applying metal silicides to silicon |
| 11/06/1991 | CN1056017A Doping technology of semiconductor |
| 11/05/1991 | US5063181 Synthetic silica glass article for dopant-diffusion process in semiconductors |
| 10/29/1991 | US5060354 Heated plate rapid thermal processor |
| 10/23/1991 | EP0453187A2 Distributed source assembly |
| 10/15/1991 | US5057668 Device for the implementation of a curing process at a semiconductor wafer and method for curing a semiconductor wafer |
| 10/01/1991 | CA1290080C Method and apparatus for plasma source ion implantation |
| 09/24/1991 | US5051054 Elevating table and transporting method |
| 09/17/1991 | US5048800 Furnaces; insulated multilayer tubes |
| 09/04/1991 | EP0444356A2 Diffusion apparatus for semiconductors |
| 09/03/1991 | US5044943 Spoked susceptor support for enhanced thermal uniformity of susceptor in semiconductor wafer processing apparatus |
| 08/27/1991 | US5043301 Method of thermally treating semiconductor wafers in furnace and wafer hanger useful therein |
| 08/08/1991 | WO1991011546A1 Doped crystalline compositions and a method for preparation thereof |
| 07/31/1991 | EP0438677A2 Impurity doping apparatus |
| 07/25/1991 | WO1991010873A1 Heating apparatus for semiconductor wafers or substrates |
| 07/23/1991 | US5034199 Zone melt recrystallization apparatus |
| 07/23/1991 | US5033538 Workpiece carrier for a disk-shaped workpiece as well as a vacuum process space |
| 07/23/1991 | CA1286494C Bubbler cylinder device |
| 07/11/1991 | WO1991009996A2 Transport system, in particular for transporting silicon monocrystals through the tank of a research reactor |
| 06/27/1991 | DE3942387A1 Transportsystem, insbesondere zum transportieren von siliziumeinkristallen durch das becken eines forschungsreaktors Transport system, particularly for transport of silicon single crystals by the pool of a research reactor |
| 06/19/1991 | EP0432781A2 Method and device for manufacturing a diffusion type semiconductor element |
| 06/18/1991 | US5024599 Semiconductor processing apparatus for creating back pressure within a quartz furnace tube |
| 06/18/1991 | US5024423 Silicon carbide, with alumina, silica, zirconia, or zircon insulating layer |
| 06/11/1991 | US5022853 Semiconductor processing furnace tube and alignment jig |
| 06/07/1991 | CA2031418A1 Impurity doping apparatus |
| 06/04/1991 | US5020476 Distributed source assembly |
| 05/07/1991 | US5012935 Support frame for supporting a semiconductor wafer carrier |
| 04/18/1991 | WO1991005028A1 Doping method |
| 04/11/1991 | DE3933423A1 Hot gas-type hot plate - useful for heat treating semiconductor wafers and LCD substrates |
| 03/12/1991 | US4999228 Silicon carbide diffusion tube for semi-conductor |
| 03/12/1991 | US4998879 High purity diffusion furnace components |
| 03/05/1991 | US4997636 Diamond growth |
| 02/12/1991 | US4992044 Reactant exhaust system for a thermal processing furnace |
| 02/06/1991 | EP0412002A1 Process for heteroepitaxy |
| 01/22/1991 | US4987016 Component for producing semiconductor devices and process of producing it |
| 01/10/1991 | DE3922833A1 Semiconductor disc heat treatment oven - has inlet apertures in row(s) in inner processing tube |
| 01/01/1991 | US4981222 Wafer boat |
| 12/25/1990 | US4979897 Atmospheric door closure |
| 12/25/1990 | US4979643 Chemical refill system |
| 12/19/1990 | CN2067711U Gas seperating device for continuous processing equipment with multi-chamber |
| 12/13/1990 | WO1990013687A3 Apparatus and method for treating flat substrates under reduced pressure |
| 12/11/1990 | US4976612 Purge tube with floating end cap for loading silicon wafers into a furnace |
| 11/29/1990 | WO1990014158A1 Reaction chamber with controlled radiant energy heating and distributed reactant flow |
| 11/15/1990 | WO1990013687A2 Apparatus and method for treating flat substrates under reduced pressure |
| 11/15/1990 | DE3943482A1 Workpiece table for handling semiconductor wafers |
| 11/15/1990 | DE3943478A1 Workpiece table for handling semiconductor wafers |
| 11/14/1990 | EP0397029A2 Carrier for disc shaped workpieces, and vacuum process chamber |
| 11/14/1990 | EP0396923A1 Elevating platform and conveyance method |
| 10/30/1990 | US4966663 Method for forming a silicon membrane with controlled stress |
| 10/30/1990 | US4966549 Wafer hanger useful for thermally treating semiconductor wafers |
| 10/17/1990 | CN1010038B Annealing process of vertically pulled silicon doped by neutron transmutation |
| 09/25/1990 | US4959345 Method of adding oxygen into oxide superconducting materials by ion injection |
| 09/25/1990 | US4959201 Green diamond and method of producing the same |
| 09/11/1990 | US4955775 Semiconductor wafer treating apparatus |
| 09/07/1990 | WO1990010305A1 Device on an oxidation or diffusion oven |
| 09/05/1990 | EP0385382A2 Process and apparatus for the thermal treatment of semiconducting materials |
| 09/04/1990 | US4954685 Heating furnace for semiconductor wafers |
| 09/04/1990 | US4954079 Heat-treating apparatus and a method for the same |
| 08/30/1990 | DE4005542A1 Carrier frame for semiconductor wafer holder - has stop cooperating with bottom edge of semiconductor wafer |
| 08/29/1990 | EP0384667A1 Diamond growth |
| 08/28/1990 | US4952780 Computerized multi-zone crystal growth furnace |
| 08/21/1990 | US4951104 Solid-state image pick-up device with uniform distribution of dopant therein and production method therefor |
| 08/21/1990 | US4950870 Heat-treating apparatus |
| 08/21/1990 | US4950156 Inert gas curtain for a thermal processing furnace |