| Patents for C30B 31 - Diffusion or doping processes for single crystals or homogeneous polycrystalline material with defined structure; Apparatus therefor (2,201) |
|---|
| 02/14/2008 | US20080038524 Selective Doping of a Material |
| 02/13/2008 | EP1138060B1 Gas driven rotating susceptor for rapid thermal processing (rtp) system |
| 02/12/2008 | US7329947 Heat treatment jig for semiconductor substrate |
| 02/06/2008 | CN101118940A Built crystal substrate and liquid built crystal growing method |
| 02/05/2008 | US7327947 Heat treating apparatus and method |
| 01/10/2008 | US20080008460 System and process for heating semiconductor wafers by optimizing absorption of electromagnetic energy |
| 01/08/2008 | US7317870 Pulsed processing semiconductor heating methods using combinations of heating sources |
| 01/08/2008 | US7316969 Method and apparatus for thermally treating substrates |
| 12/27/2007 | US20070297775 Heating Configuration for Use in Thermal Processing Chambers |
| 12/20/2007 | DE19649508B4 Halter für Halbleiterplatten Holders for semiconductor wafers |
| 12/12/2007 | CN101086945A Ion beam tuning in an ion implanter |
| 12/12/2007 | CN100354205C Method and apparatus for increasing bulk conductivity of a ferroelectric material |
| 12/05/2007 | EP1581667B1 Support system for a treatment apparatus |
| 11/29/2007 | US20070275333 Method for Controlling the Treatment of a Crystal with a Liquid |
| 11/28/2007 | CN101079375A Ion injection simulation method |
| 11/28/2007 | CN100351435C Process for preparing gas phase doped float-zone silicon monocrystal for solar cell |
| 11/22/2007 | WO2007131547A1 Semiconductor control device for a cvd or rtp process |
| 11/21/2007 | CN100350561C Method for fabricating SIGE substrate materials on metastable insulator and substrate materials |
| 11/15/2007 | DE19652471B4 Verfahren zur Wasserstoffpassivierung von Verbindungshalbleitern Process for hydrogen passivation of compound semiconductors |
| 10/31/2007 | CN101064234A Apparatus and method for ion implanatation leading to partial ion implant energy |
| 10/25/2007 | WO2007053016A3 Surface and method for the manufacture of photovolataic cells using a diffusion process |
| 10/24/2007 | CN200964448Y Crystalline silicon chip diffusion furnace |
| 10/17/2007 | EP1493214B1 Solid-state laser devices with radial dopant valence profile |
| 10/17/2007 | CN101054730A Controllable doping method for Si3N4 single-crystal low-dimension nano material |
| 10/17/2007 | CN101054721A Silicon single crystal wafer for IGBT and method for manufacturing silicon single crystal wafer for IGBT |
| 10/10/2007 | CN101051609A High voltage protective interlock for ion injector |
| 09/26/2007 | CN200953336Y Indirect heating cathode fixing device in long-life ion source |
| 09/19/2007 | CN101038869A Water-cooling plasma shower |
| 09/11/2007 | US7269343 Heating configuration for use in thermal processing chambers |
| 08/29/2007 | CN101026078A Ion injection device |
| 08/23/2007 | WO2007094231A1 Method for manufacturing semiconductor substrate |
| 08/16/2007 | US20070190761 Material and method of fabrication therefor |
| 08/16/2007 | US20070186858 Susceptor |
| 08/15/2007 | EP1817445A1 Method for making a dismountable substrate |
| 08/01/2007 | CN101009191A Ion implantation system having variable screen apertures and method of implanting ions using the same |
| 07/25/2007 | EP1811065A1 Single crystal silicon wafer for insulated gate bipolar transistors and process for producing the same |
| 07/11/2007 | CN1326219C Method for reducing 4H-silicon carbide resistivity of oriented phosphorus ion filling (0001) |
| 07/03/2007 | US7237606 Wafer supporter |
| 06/26/2007 | US7235139 Wafer carrier for growing GaN wafers |
| 06/26/2007 | US7235137 Conductor treating single-wafer type treating device and method for semi-conductor treating |
| 06/20/2007 | CN2914323Y Air-feeding system of cold plasma shower |
| 06/20/2007 | CN1983517A 半导体处理 Semiconductor processing |
| 06/14/2007 | US20070131173 Wafer support system |
| 06/06/2007 | EP1793021A2 Method for semiconductor processing using silicon carbide article |
| 05/30/2007 | EP1790757A1 Susceptor |
| 05/30/2007 | CN1972879A Selective doping of a material |
| 05/16/2007 | EP1784369A1 Selective doping of a material |
| 05/08/2007 | US7214271 Silicon single crystal wafer process apparatus, silicon single crystal wafer, and manufacturing method of silicon epitaxial wafer |
| 05/01/2007 | US7211769 Heating chamber and method of heating a wafer |
| 04/25/2007 | CN1312329C Method for reducing oxygen component and carbon component in fluoride |
| 04/19/2007 | US20070084848 Heat treating apparatus and method |
| 04/18/2007 | CN2891270Y Heat-insulating and gas-supply apparatus in long-life ion source |
| 04/05/2007 | WO2007035983A1 Ion detector |
| 04/05/2007 | US20070075086 Processing apparatus |
| 04/04/2007 | CN1308503C Crucible in use for equilibrium method of gas phase transmission under lithium atmosphere |
| 03/28/2007 | EP1590510B1 Device for producing electroconductive passages in a semiconductor wafer by means of thermomigration |
| 03/28/2007 | CN1938822A Susceptor |
| 03/06/2007 | US7186298 Wafer support system |
| 03/01/2007 | WO2007023362A1 Doping of particulate semiconductor materials |
| 03/01/2007 | DE102005041643A1 Semiconductor method for producing an isolated semiconductor substrate uses a masking layer with holes and an output layer |
| 02/28/2007 | EP1559133B1 Forced convection assisted rapid thermal furnace |
| 02/07/2007 | CN1908254A Device for doping metal catalyst for use in low-temperature crystallization of polysilicon and doping method therefor |
| 02/01/2007 | WO2007014032A1 s SEPARATION OF GROWN DIAMOND FROM DIAMOND SEEDS MOSAIC |
| 01/30/2007 | US7169233 Reactor chamber |
| 01/24/2007 | CN1902130A New material and method of fabrication therefor |
| 01/18/2007 | US20070012241 Methods of assessing the temperature of semiconductor wafer substrates within deposition apparatuses |
| 01/17/2007 | EP1203108B1 Cooled window |
| 01/17/2007 | CN1896344A Method for doping oxygen to gallium nitride crystal and oxygen-doped n-type gallium nitride single crystal substrate |
| 01/17/2007 | CN1295745C Method and device for thermally treating substrates |
| 01/10/2007 | CN1892987A Systems and methods for implant dosage control, and wafer implantation method by using ion beam |
| 01/04/2007 | WO2007000704A1 Apparatus and method for maintaining a near-atmospheric pressure inside a process chamber |
| 01/04/2007 | CA2840566A1 Lithium manganese compounds and methods of making the same |
| 12/28/2006 | WO2006085798A3 Method for manufacturing of article comprising silicon substrate with silicon carbide film on its surface |
| 12/28/2006 | US20060291834 Method and apparatus for thermally treating substrates |
| 12/26/2006 | US7155102 Method and structure of electric field poling of Ti indiffused LiNbO3 substrates without the use of grinding process |
| 12/19/2006 | US7151007 Doped organic semiconductor materials and process for their preparation |
| 12/14/2006 | WO2006131251A1 Mixture for doping semiconductors |
| 12/13/2006 | EP1732111A1 Susceptor |
| 12/06/2006 | CN1873919A Air supply system of shower in water cold plasma |
| 12/06/2006 | CN1288713C Heating system and method of reactor for heating atmosphere |
| 11/30/2006 | DE102005024073A1 Halbleiter-Schichtstruktur und Verfahren zur Herstellung einer Halbleiter-Schichtstruktur Semiconductor layer structure and process for producing a semiconductor layer structure |
| 11/22/2006 | CN1868066A Methods of forming power semiconductor devices using boule-grown silicon carbide drift layers and power semiconductor devices formed thereby |
| 11/22/2006 | CN1866461A Ion beam transmission control optimizing method |
| 11/15/2006 | EP1116261B1 Method and apparatus for cooling substrates |
| 11/02/2006 | US20060243385 Device for producing electroconductive passages in a semiconductor wafer by means of thermomigration |
| 11/01/2006 | CN1282769C Artificial hair crystal and preparation method thereof |
| 10/31/2006 | US7129123 SOI wafer and a method for producing an SOI wafer |
| 10/26/2006 | DE102005018162A1 Semiconductor treatment device for chemical vapor deposition, comprises reactor chamber with circular holder for a circular disk-shaped substrate formed on substrate holding zone adjacent to ring opening |
| 10/19/2006 | US20060231016 Deposition apparatuses |
| 10/11/2006 | CN1845292A Magnetic field assistant self glow plasma ion implantation device |
| 10/11/2006 | CN1279577C Method for carrying out thermally processing for substrate |
| 10/04/2006 | EP1479267B1 System and method for lamp split zone control |
| 09/27/2006 | EP1704118A1 New material and method of fabrication therefor |
| 09/19/2006 | US7108753 Staggered ribs on process chamber to reduce thermal effects |
| 09/19/2006 | US7108748 Low temperature load and bake |
| 09/14/2006 | WO2006081104A3 Semiconductor wafer boat for a vertical furnace |
| 09/14/2006 | US20060201414 Low temperature load and bake |
| 09/13/2006 | CN1832100A One-dimensional mechanical scaning device of ion implantation apparatus |
| 09/13/2006 | CN1275290C Method and device for doping diffusion and oxidation of silicon wafers under reduced pressure |
| 08/31/2006 | WO2006090034A1 Method for making a dismountable substrate |