| Patents for C30B 31 - Diffusion or doping processes for single crystals or homogeneous polycrystalline material with defined structure; Apparatus therefor (2,201) |
|---|
| 07/24/1990 | US4943235 Heat-treating apparatus |
| 07/24/1990 | US4943234 Procedure and equipment for the thermal treatment of semiconductor materials |
| 07/03/1990 | US4939103 Method of diffusing plurality of dopants simultaneously from vapor phase into semiconductor substrate |
| 07/03/1990 | US4938992 Methods for thermal transfer with a semiconductor |
| 07/03/1990 | US4938836 Process for locally increasing the refractive indexes of an electrooptical material usable in guided optics and material obtained by this process |
| 07/03/1990 | US4938691 Heat-treating apparatus |
| 06/20/1990 | CN1008452B New technique for prepn of monocrystal silicon chip with perfact layer on the surface |
| 05/15/1990 | US4925388 Apparatus for heat treating substrates capable of quick cooling |
| 05/09/1990 | EP0367750A2 Process for producing a silicon membrane with controlled mechanical stress |
| 05/09/1990 | EP0367127A1 Synthetic silica glass article for dopant-diffusion process in semiconductors |
| 05/08/1990 | US4924073 Method of controlling heat treatment apparatus for substrate |
| 04/24/1990 | US4919614 Apparatus for heat treatment of a substrate |
| 04/24/1990 | US4919304 Bubbler cylinder device |
| 04/03/1990 | US4914276 Efficient high temperature radiant furnace |
| 03/27/1990 | US4911638 Controlled diffusion environment capsule and system |
| 03/27/1990 | US4911103 Wafers |
| 03/20/1990 | US4910156 Doping phosphor into crystal |
| 03/20/1990 | US4909185 Cantilever and cold zone assembly for loading and unloading an oven |
| 03/07/1990 | EP0229050B1 Chemical refill system |
| 02/28/1990 | EP0356059A2 Process for doping crystals of wide band gap semiconductors |
| 02/28/1990 | EP0355658A2 Semiconductor diffusion furnace inner tube |
| 02/27/1990 | US4904616 Method of depositing arsine, antimony and phosphine substitutes |
| 02/21/1990 | CN1039893A Component for use in diffusion furnace |
| 01/31/1990 | EP0352607A2 Arsine, antimony and phosphine substitutes |
| 01/17/1990 | CN1006508B Solid-state image pick-up device with uniform distribution of dopant therein and production method therefor |
| 12/26/1989 | US4888994 Method of carrying objects into and from a furnace, and apparatus for carrying objects into and from a furnace |
| 12/12/1989 | US4886954 Hot wall diffusion furnace and method for operating the furnace |
| 11/28/1989 | US4883424 Apparatus for heat treating substrates |
| 11/08/1989 | EP0340802A2 Silicon carbide diffusion tube for semi-conductor |
| 11/08/1989 | CN1037051A Indium mixed mischcrystal zinc diffusion source |
| 11/02/1989 | EP0339793A1 Method for forming crystal layer on a substrate |
| 11/02/1989 | EP0339573A2 Component for use in a diffusion furnace |
| 10/25/1989 | EP0338252A1 Method for doping zinc selenide single crystal |
| 10/24/1989 | US4876225 Cantilevered diffusion chamber atmospheric loading system and method |
| 10/19/1989 | DE3810832A1 Treatment device made of quartz glass |
| 10/11/1989 | EP0221895B1 Container for corrosive liquids |
| 10/11/1989 | CN1036296A Method and apparatus for temp. treatment of semiconductor materials |
| 10/10/1989 | US4872554 Reinforced carrier with embedded rigid insert |
| 10/10/1989 | CA1262294A1 Method of manufacturing a semiconductor device by vapour phase deposition using multiple inlet flow control |
| 10/04/1989 | CN1036049A Annealing process of vertically pulled silicon doped by neutron transmutation |
| 09/21/1989 | DE3807710A1 Support trestle |
| 09/13/1989 | EP0201600B1 Solid state laser employing diamond having color centers as a laser active material |
| 09/05/1989 | US4863657 Method of making semi-conductor diffusion furnace components |
| 08/22/1989 | US4859908 Plasma processing apparatus for large area ion irradiation |
| 08/22/1989 | US4859385 Mixing fine and coarse silicon powders with binder; shaping, impregnating with silicon, sintering |
| 08/22/1989 | US4859375 Chemical refill system |
| 08/16/1989 | EP0327718A2 Method and device for the temperature treatment of semiconductor materials |
| 08/15/1989 | US4857689 Rapid thermal furnace for semiconductor processing |
| 07/19/1989 | EP0324179A1 Green diamond and method of producing the same |
| 07/18/1989 | US4849608 Apparatus for heat-treating wafers |
| 07/12/1989 | EP0323902A2 Apparatus for thermal transfer with a semiconductor wafer in vacuum |
| 07/11/1989 | US4846902 Gadolium oxide, phosphorous oxide for release of phosphorous oxide |
| 07/05/1989 | EP0322443A1 Reinforced carrier with embedded rigid insert |
| 06/20/1989 | US4840816 Method of fabricating optical waveguides by ion implantation doping |
| 06/13/1989 | US4839523 Ion implantation apparatus for semiconductor manufacture |
| 06/06/1989 | US4836788 Production of solid-state image pick-up device with uniform distribution of dopants |
| 05/30/1989 | US4835006 Process for the passivation of crystal defects |
| 05/23/1989 | US4832781 Methods and apparatus for thermal transfer with a semiconductor wafer in vacuum |
| 05/18/1989 | WO1989004386A1 Improved zone melt recrystallization apparatus |
| 05/10/1989 | CN2037369U Alkali bittern crystal assigning colour instrument |
| 04/11/1989 | US4819579 Coating of semiconductor wafers and apparatus therefor |
| 04/04/1989 | US4819058 Semiconductor device having a pn junction |
| 03/29/1989 | EP0309272A2 Apparatus and method for sample holders and wafer cages fabricated from silicon carbide for processing semiconductor materials |
| 03/29/1989 | EP0308695A2 A component for producing semi-conductor devices and process of producing it |
| 03/29/1989 | EP0067165B1 Improved partial vacuum boron diffusion process |
| 03/22/1989 | EP0307608A1 Apparatus and process for annealing semiconductor wafers |
| 02/21/1989 | US4806497 Neutron irradiation, ion implantation electron or proton irradiation doping |
| 02/21/1989 | CA1250209A1 Method of producing ii-v compound semiconductors |
| 02/09/1989 | DE3725169A1 Method for the patterned incorporation in semiconductor surfaces of dopants which determine conductivity |
| 01/12/1989 | WO1989000333A1 Reinforced carrier with embedded rigid insert |
| 12/28/1988 | CA1247504A Modular v-cvd diffusion furnace |
| 11/29/1988 | CA1245424A1 Porous silicon nitride semiconductor dopant carriers |
| 10/18/1988 | US4778202 Tubular component made out of quartz glass with a flange |
| 10/05/1988 | EP0285499A1 Method for increasing locally the refractive indices of an electro-optic material for use in optical guide and material obtained by this method |
| 10/05/1988 | EP0284885A1 Silicon carbide diffusion furnace components with an impervious coating thereon |
| 10/04/1988 | US4775317 Oven for the heat treatment of semiconductor substrates |
| 09/28/1988 | EP0284107A2 Method of strengthening silicon wafer |
| 09/27/1988 | US4774195 Process for the manufacture of semiconductor layers on semiconductor bodies or for the diffusion of impurities from compounds into semiconductor bodies utilizing an additional generation of activated hydrogen |
| 09/13/1988 | US4771021 Consisting of a sintered silicon carbide matrix |
| 08/30/1988 | US4767251 Cantilever apparatus and method for loading wafer boats into cantilever diffusion tubes |
| 08/16/1988 | US4764394 Method and apparatus for plasma source ion implantation |
| 08/16/1988 | CA1240480A1 OPTICAL MATERIALS FROM INTERCALATION OF POLYVALENT CATIONS IN .beta. DOUBLE PRIME ALUMINA |
| 08/11/1988 | WO1988005836A1 Method of improving the sag resistance of a component constructed from fused quartz |
| 08/04/1988 | DE3701610A1 Tubular furnace, especially for semiconductor technology |
| 08/02/1988 | US4761134 Refractory coating of silicon nitride, silicon carbide or silicon oxide |
| 07/27/1988 | EP0191023B1 Tubular quartz-glass element with a flange |
| 07/26/1988 | US4760244 Apparatus for the treatment of semiconductor materials |
| 06/28/1988 | US4753763 Method of manufacturing heating furnace parts |
| 06/28/1988 | US4753192 Movable core fast cool-down furnace |
| 05/31/1988 | US4748135 Method of manufacturing a semiconductor device by vapor phase deposition using multiple inlet flow control |
| 04/27/1988 | EP0264762A1 Method to passivate crystal defects in a hydrogen plasma |
| 03/31/1988 | DE3633078A1 Method of homogenising indium-doped silicon single-crystal ingots |
| 03/01/1988 | US4728371 Method for manufacturing regions having adjustable uniform doping in silicon crystal wafers by neutron irradiation |
| 02/24/1988 | CN87105811A Gas phase nitrogen-doping method for straight-pulling monocrystalline silicon |
| 02/16/1988 | US4725330 Equilibration of lithium niobate crystals |
| 02/02/1988 | US4722911 Vapor phase epitaxy using complex premixing system |
| 01/27/1988 | CN86104713A Method and apparatus for eliminating fractionation |
| 01/27/1988 | CN86104706A Carrier gas method and apparatus for formulating a dilute solution of liquid blending agent |
| 01/27/1988 | CN86104689A Two-source method and apparatus for multilayer epitaxial gaas |
| 01/19/1988 | US4720407 Double-walled quartz-glass tube for semiconductor-technology processes |