| Patents for C30B 31 - Diffusion or doping processes for single crystals or homogeneous polycrystalline material with defined structure; Apparatus therefor (2,201) |
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| 01/13/1981 | US4244753 Method for purification of II-VI crystals |
| 01/06/1981 | US4243427 High concentration phosphoro-silica spin-on dopant |
| 12/16/1980 | US4239560 Open tube aluminum oxide disc diffusion |
| 11/27/1980 | WO1980002622A1 Boat for conveying semiconductor substrates |
| 11/26/1980 | EP0019272A1 Method for diffusing p-type dopants into silicon wafers |
| 11/11/1980 | US4232439 Masking technique usable in manufacturing semiconductor devices |
| 08/19/1980 | US4218214 Guide wing for a furnace paddle |
| 08/12/1980 | US4217154 Method for control of an open gallium diffusion |
| 07/29/1980 | CA1082574A1 Method of producing n-doped silicon crystals having a particular radial resistivity profile |
| 07/08/1980 | US4211182 Diffusion apparatus |
| 06/03/1980 | US4206251 Method for diffusing metals into substrates |
| 06/03/1980 | US4206026 Phosphorus diffusion process for semiconductors |
| 05/20/1980 | US4203940 Crystal wafer rack structures and the method of producing the same |
| 05/14/1980 | EP0010952A1 Method and apparatus for heating semiconductor wafers |
| 05/06/1980 | US4201623 Method for making epitaxial silicon crystals with uniform doping levels |
| 04/15/1980 | CA1075435A2 Aluminum metaphosphate source body for doping silicon |
| 04/08/1980 | CA1075374A1 Semiconductor isolation method |
| 03/19/1980 | EP0008642A1 Method of diffusing boron in silicon bodies |
| 03/11/1980 | US4193003 Method for controlling the migration of a chemical species within a solid substrate |
| 02/26/1980 | US4190458 Metal-silica solution for forming films on semiconductor surfaces |
| 02/26/1980 | CA1072423A2 Method of producing homogeneously doped semiconductor material of p-conductivity |
| 02/26/1980 | CA1072422A2 Method of producing homogeneously doped semiconductor material of p-conductivity |
| 02/05/1980 | US4187124 Process for doping semiconductors |
| 01/22/1980 | US4184897 Droplet migration doping using carrier droplets |
| 01/01/1980 | US4181627 Dopes, heat treatment, zinc, zinc sulfide |
| 12/25/1979 | CA1068583A Method of producing homogeneously doped semiconductor material of p-conductivity |
| 11/27/1979 | US4175988 Melt-formed polycrystalline ceramics and dopant hosts containing phosphorus |
| 10/30/1979 | CA1065498A1 Open tube gallium diffusion process for semiconductor devices |
| 09/04/1979 | CA1061686A1 Apparatus for doping a semiconductor crystalline rod |
| 08/28/1979 | CA1061225A1 Method of diffusing impurities in semiconductor bodies |
| 08/28/1979 | CA1061100A1 Boron doping of semiconductors |
| 07/24/1979 | CA1059158A1 Solid diffusion sources for phosphorus doping |
| 07/10/1979 | US4160672 Glass-ceramics for semiconductor doping |
| 06/26/1979 | US4159215 Aluminum carrier, antimony dope, temperature gradient zone melting |
| 05/29/1979 | CA1055620A1 Semiconductor diffusions from ion implanted films |
| 04/24/1979 | CA1053130A1 Method and apparatus for doping semiconductors in centrifuge |
| 04/03/1979 | US4147432 Apparatus for thermal diffusion by high frequency induction heating of semiconductor substrates |
| 02/20/1979 | US4140735 Process and apparatus for bubbling gas through a high purity liquid |
| 01/30/1979 | US4137457 Method of producing implanted areas in a substrate |
| 01/09/1979 | CA1045784A1 Preparation of pyrophosphates |
| 01/02/1979 | CA1045523A1 N-conductivity silicon mono-crystals produced by neutron irradiation |
| 12/12/1978 | US4129090 Apparatus for diffusion into semiconductor wafers |
| 11/21/1978 | US4126713 Crosslinking tetraethyl ortho-silicate |
| 11/07/1978 | US4124417 Method of diffusing impurities in semiconductor bodies |
| 10/10/1978 | US4119441 Method for the production of n-doped silicon with a dish-shaped profile of specific resistance in a radial direction |
| 09/12/1978 | US4113513 Method of manufacturing a semiconductor device by non-selectively implanting a zone of pre-determined low resistivity |
| 09/05/1978 | CA1037840A1 Method for diffusing impurities into nitride semiconductor crystals |
| 08/22/1978 | US4108106 Cross-flow reactor |
| 08/08/1978 | US4105477 Doping of (hg,cd)te with a group va element |
| 07/25/1978 | US4102666 Method of surface crystallizing quartz |
| 07/11/1978 | US4100310 Carrier gas, semiconductor |
| 07/04/1978 | US4098223 Apparatus for heat treating semiconductor wafers |
| 06/27/1978 | US4096822 Gaseous atmosphere control apparatus for a semiconductor manufacturing system |
| 06/06/1978 | US4093201 Disc support structure |
| 04/25/1978 | US4086108 Radiation |
| 02/28/1978 | US4075972 Apparatus for thermal diffusion of semiconductor devices |
| 12/20/1977 | US4063967 Method of producing a doped zone of one conductivity type in a semiconductor body utilizing an ion-implanted polycrystalline dopant source |
| 12/13/1977 | US4062714 Process for making hollow silicon bodies and bodies utilizing board-shaped members to form the basic geometric shape so made |
| 10/11/1977 | US4053294 Quartz, dimensional stability |
| 09/13/1977 | US4048508 Apparatus for doping a semiconductor crystalline rod |
| 08/16/1977 | US4042454 Method of producing homogeneously doped n-type Si monocrystals by thermal neutron radiation |
| 08/02/1977 | US4039726 Altering the appearance of corundum crystals |
| 07/05/1977 | US4033790 Yttrium oxide, lanthanum oxide, cerium oxide, phosphorous oxide |
| 06/28/1977 | US4032418 Method of introducing impurities into a semiconductor |
| 06/07/1977 | US4027622 Apparatus for doping semiconductors in centrifuge |
| 05/31/1977 | US4027051 Method of producing homogeneously doped n-type Si monocrystals and adjusting dopant concentration therein by thermal neutron radiation |
| 05/24/1977 | US4025464 Hot pressed compact of phosphorus nitride and silicon oxide |
| 05/24/1977 | US4025365 Method of producing homogeneously doped p-conductive semiconductor materials |
| 05/03/1977 | US4020791 Apparatus for indiffusing dopants into semiconductor material |
| 04/19/1977 | US4018184 Apparatus for treatment of semiconductor wafer |
| 04/19/1977 | US4018183 Apparatus for treating a plurality of semiconductor slices to a reacting gas current |
| 04/05/1977 | US4016006 Method of heat treatment of wafers |
| 12/21/1976 | US3998668 Aluminum metaphosphate dopant sources |
| 12/21/1976 | US3998667 Barium aluminoborosilicate glass-ceramics for semiconductor doping |
| 12/21/1976 | US3998333 Carrier for processing semiconductor materials |
| 12/14/1976 | US3997379 Diffusion of conductivity modifiers into a semiconductor body |
| 12/14/1976 | US3997351 Boron oxide |
| 10/05/1976 | US3984267 Process and apparatus for diffusion of semiconductor materials |
| 09/28/1976 | US3982967 Method of proton-enhanced diffusion for simultaneously forming integrated circuit regions of varying depths |
| 09/07/1976 | US3979235 Depositing doped material on a substrate |
| 08/17/1976 | US3975308 Preparation of pyrophosphates |
| 08/17/1976 | US3974561 Method of producing directly heatable hollow semiconductor bodies |
| 08/03/1976 | US3972838 Phosphorus nitride-silicon dioxide wafer |
| 06/22/1976 | US3964984 Method of producing photochromic sodalite crystals |
| 06/08/1976 | US3962670 Heatable hollow semiconductor |
| 06/08/1976 | US3962391 Disc support structure and method of producing the same |
| 06/08/1976 | US3962000 Barium aluminoborosilicate glass-ceramics for semiconductor doping |
| 06/08/1976 | US3961969 Glass-ceramics for semiconductor doping |
| 05/18/1976 | US3957547 Method for doping semiconductors in centrifuge |
| 05/11/1976 | US3956037 Method of forming semiconductor layers by vapor growth |
| 05/11/1976 | US3956036 Method of diffusing silicon slices with dopant at high temperatures |
| 05/04/1976 | US3954525 Hot-pressed solid diffusion sources for phosphorus |
| 04/20/1976 | US3951587 Silicon carbide diffusion furnace components |
| 04/13/1976 | US3950596 Altering the appearance of corundum crystals |
| 04/06/1976 | US3948696 Method of diffusion into semiconductor wafers |
| 04/06/1976 | US3948695 Method of diffusing an impurity into semiconductor wafers |
| 03/09/1976 | US3943015 Monocrystalline silicon |
| 02/17/1976 | US3939017 Process for depositing the deposition agent on the surface of a number of semiconductor substrates |
| 01/13/1976 | US3932239 Semiconductor diffusion process |
| 01/06/1976 | US3931056 Solid diffusion sources for phosphorus doping containing silicon and zirconium pyrophosphates |